10/22/2011	12:25:43 AM	Helium valve closed
10/22/2011	12:25:43 AM	BCl3 valve closed
10/22/2011	12:25:43 AM	PH3 valve closed
10/22/2011	12:25:43 AM	Main Vac valve closed
10/22/2011	12:25:43 AM	Bypass valve closed
10/22/2011	12:25:43 AM	H2 valve opened
10/22/2011	12:25:43 AM	SiCl4 pre valve opened
10/22/2011	12:25:43 AM	SiCl4 post valve opened
10/22/2011	12:25:43 AM	Bubbler valve opened
10/22/2011	12:25:43 AM	Helium MFC set to  0.000000
10/22/2011	12:25:43 AM	H2 MFC set to  500.000000
10/22/2011	12:25:43 AM	BCl3 MFC set to  0.000000
10/22/2011	12:25:43 AM	PHl3 MFC set to  0.000000
10/22/2011	12:25:43 AM	SiCl4 MFC set to  50.000000
10/22/2011	12:25:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:25:44 AM	Tube furnace set to 1040
10/22/2011	12:35:43 AM	Helium valve closed
10/22/2011	12:35:44 AM	BCl3 valve closed
10/22/2011	12:35:44 AM	PH3 valve closed
10/22/2011	12:35:44 AM	SiCl4 pre valve closed
10/22/2011	12:35:44 AM	SiCl4 post valve closed
10/22/2011	12:35:44 AM	Main Vac valve closed
10/22/2011	12:35:44 AM	Bypass valve closed
10/22/2011	12:35:44 AM	H2 valve opened
10/22/2011	12:35:44 AM	Bubbler valve opened
10/22/2011	12:35:44 AM	Helium MFC set to  0.000000
10/22/2011	12:35:44 AM	H2 MFC set to  500.000000
10/22/2011	12:35:44 AM	BCl3 MFC set to  0.000000
10/22/2011	12:35:44 AM	PHl3 MFC set to  0.000000
10/22/2011	12:35:44 AM	SiCl4 MFC set to  0.000000
10/22/2011	12:35:44 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:35:44 AM	Tube furnace set to 750
10/22/2011	12:45:44 AM	H2 valve closed
10/22/2011	12:45:44 AM	BCl3 valve closed
10/22/2011	12:45:44 AM	PH3 valve closed
10/22/2011	12:45:44 AM	SiCl4 pre valve closed
10/22/2011	12:45:44 AM	SiCl4 post valve closed
10/22/2011	12:45:44 AM	Main Vac valve closed
10/22/2011	12:45:44 AM	Bypass valve closed
10/22/2011	12:45:44 AM	Helium valve opened
10/22/2011	12:45:44 AM	Bubbler valve opened
10/22/2011	12:45:44 AM	Helium MFC set to  500.000000
10/22/2011	12:45:44 AM	H2 MFC set to  0.000000
10/22/2011	12:45:44 AM	BCl3 MFC set to  0.000000
10/22/2011	12:45:44 AM	PHl3 MFC set to  0.000000
10/22/2011	12:45:44 AM	SiCl4 MFC set to  0.000000
10/22/2011	12:45:44 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:45:44 AM	Tube furnace set to 0
10/22/2011	12:52:34 AM	Helium valve closed
10/22/2011	12:52:34 AM	H2 valve closed
10/22/2011	12:52:34 AM	BCl3 valve closed
10/22/2011	12:52:34 AM	PH3 valve closed
10/22/2011	12:52:34 AM	SiCl4 pre valve closed
10/22/2011	12:52:34 AM	SiCl4 post valve closed
10/22/2011	12:52:34 AM	Main Vac valve closed
10/22/2011	12:52:34 AM	Bypass valve closed
10/22/2011	12:52:34 AM	Bubbler valve closed
10/22/2011	12:52:34 AM	Helium MFC set to  0.000000
10/22/2011	12:52:34 AM	H2 MFC set to  0.000000
10/22/2011	12:52:34 AM	BCl3 MFC set to  0.000000
10/22/2011	12:52:34 AM	PHl3 MFC set to  0.000000
10/22/2011	12:52:34 AM	SiCl4 MFC set to  0.000000
10/22/2011	12:52:34 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:52:34 AM	Tube furnace set to 0
10/22/2011	12:52:35 AM	Run finished at 12:52 AM
10/22/2011	12:52:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	12:52:39 AM	Recipe started at 12:52 AM
10/22/2011	12:52:39 AM	Helium valve closed
10/22/2011	12:52:39 AM	H2 valve closed
10/22/2011	12:52:39 AM	BCl3 valve closed
10/22/2011	12:52:39 AM	PH3 valve closed
10/22/2011	12:52:39 AM	SiCl4 pre valve closed
10/22/2011	12:52:39 AM	SiCl4 post valve closed
10/22/2011	12:52:39 AM	Main Vac valve closed
10/22/2011	12:52:39 AM	Bypass valve closed
10/22/2011	12:52:39 AM	Bubbler valve closed
10/22/2011	12:52:39 AM	Helium MFC set to  0.000000
10/22/2011	12:52:39 AM	H2 MFC set to  0.000000
10/22/2011	12:52:39 AM	BCl3 MFC set to  0.000000
10/22/2011	12:52:39 AM	PHl3 MFC set to  0.000000
10/22/2011	12:52:39 AM	SiCl4 MFC set to  0.000000
10/22/2011	12:52:39 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:52:39 AM	Tube furnace set to 0
10/22/2011	12:52:42 AM	H2 valve closed
10/22/2011	12:52:42 AM	BCl3 valve closed
10/22/2011	12:52:42 AM	PH3 valve closed
10/22/2011	12:52:42 AM	SiCl4 pre valve closed
10/22/2011	12:52:42 AM	SiCl4 post valve closed
10/22/2011	12:52:42 AM	Main Vac valve closed
10/22/2011	12:52:42 AM	Bypass valve closed
10/22/2011	12:52:42 AM	Bubbler valve closed
10/22/2011	12:52:42 AM	Helium valve opened
10/22/2011	12:52:42 AM	Helium MFC set to  500.000000
10/22/2011	12:52:42 AM	H2 MFC set to  0.000000
10/22/2011	12:52:42 AM	BCl3 MFC set to  0.000000
10/22/2011	12:52:42 AM	PHl3 MFC set to  0.000000
10/22/2011	12:52:42 AM	SiCl4 MFC set to  0.000000
10/22/2011	12:52:42 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:52:42 AM	Tube furnace set to 0
10/22/2011	12:52:43 AM	Helium valve closed
10/22/2011	12:52:43 AM	H2 valve closed
10/22/2011	12:52:43 AM	BCl3 valve closed
10/22/2011	12:52:43 AM	PH3 valve closed
10/22/2011	12:52:43 AM	SiCl4 pre valve closed
10/22/2011	12:52:43 AM	SiCl4 post valve closed
10/22/2011	12:52:43 AM	Main Vac valve closed
10/22/2011	12:52:43 AM	Bypass valve closed
10/22/2011	12:52:43 AM	Bubbler valve closed
10/22/2011	12:52:43 AM	Helium MFC set to  0.000000
10/22/2011	12:52:43 AM	H2 MFC set to  0.000000
10/22/2011	12:52:43 AM	BCl3 MFC set to  0.000000
10/22/2011	12:52:43 AM	PHl3 MFC set to  0.000000
10/22/2011	12:52:43 AM	SiCl4 MFC set to  0.000000
10/22/2011	12:52:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:52:43 AM	Tube furnace set to 0
10/22/2011	12:52:44 AM	Run finished at 12:52 AM
10/22/2011	12:52:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	1:09:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	1:09:24 AM	Recipe started at 1:09 AM
10/22/2011	1:09:24 AM	Helium valve closed
10/22/2011	1:09:24 AM	H2 valve closed
10/22/2011	1:09:24 AM	BCl3 valve closed
10/22/2011	1:09:24 AM	PH3 valve closed
10/22/2011	1:09:24 AM	SiCl4 pre valve closed
10/22/2011	1:09:24 AM	SiCl4 post valve closed
10/22/2011	1:09:24 AM	Main Vac valve closed
10/22/2011	1:09:24 AM	Bubbler valve closed
10/22/2011	1:09:24 AM	Bypass valve opened
10/22/2011	1:09:24 AM	Helium MFC set to  0.000000
10/22/2011	1:09:24 AM	H2 MFC set to  0.000000
10/22/2011	1:09:24 AM	BCl3 MFC set to  0.000000
10/22/2011	1:09:24 AM	PHl3 MFC set to  0.000000
10/22/2011	1:09:24 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:09:24 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:09:25 AM	Tube furnace set to 0
10/22/2011	1:10:35 AM	Helium valve closed
10/22/2011	1:10:35 AM	H2 valve closed
10/22/2011	1:10:35 AM	BCl3 valve closed
10/22/2011	1:10:35 AM	PH3 valve closed
10/22/2011	1:10:35 AM	SiCl4 pre valve closed
10/22/2011	1:10:35 AM	SiCl4 post valve closed
10/22/2011	1:10:35 AM	Main Vac valve closed
10/22/2011	1:10:35 AM	Bubbler valve closed
10/22/2011	1:10:35 AM	Bypass valve opened
10/22/2011	1:10:35 AM	Helium MFC set to  0.000000
10/22/2011	1:10:35 AM	H2 MFC set to  0.000000
10/22/2011	1:10:35 AM	BCl3 MFC set to  0.000000
10/22/2011	1:10:35 AM	PHl3 MFC set to  0.000000
10/22/2011	1:10:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:10:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:10:36 AM	Tube furnace set to 0
10/22/2011	1:11:36 AM	Helium valve closed
10/22/2011	1:11:36 AM	H2 valve closed
10/22/2011	1:11:36 AM	BCl3 valve closed
10/22/2011	1:11:36 AM	PH3 valve closed
10/22/2011	1:11:36 AM	SiCl4 pre valve closed
10/22/2011	1:11:36 AM	SiCl4 post valve closed
10/22/2011	1:11:36 AM	Bypass valve closed
10/22/2011	1:11:36 AM	Bubbler valve closed
10/22/2011	1:11:36 AM	Main Vac valve opened
10/22/2011	1:11:36 AM	Helium MFC set to  0.000000
10/22/2011	1:11:36 AM	H2 MFC set to  0.000000
10/22/2011	1:11:36 AM	BCl3 MFC set to  0.000000
10/22/2011	1:11:36 AM	PHl3 MFC set to  0.000000
10/22/2011	1:11:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:11:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:11:36 AM	Tube furnace set to 0
10/22/2011	1:11:37 AM	Run finished at 1:11 AM
10/22/2011	1:11:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	1:32:54 AM	Recipe started at 1:32 AM
10/22/2011	1:32:54 AM	Helium valve closed
10/22/2011	1:32:54 AM	H2 valve closed
10/22/2011	1:32:54 AM	BCl3 valve closed
10/22/2011	1:32:54 AM	PH3 valve closed
10/22/2011	1:32:54 AM	SiCl4 pre valve closed
10/22/2011	1:32:54 AM	SiCl4 post valve closed
10/22/2011	1:32:54 AM	Bypass valve closed
10/22/2011	1:32:54 AM	Bubbler valve closed
10/22/2011	1:32:54 AM	Main Vac valve opened
10/22/2011	1:32:54 AM	Helium MFC set to  0.000000
10/22/2011	1:32:54 AM	H2 MFC set to  0.000000
10/22/2011	1:32:54 AM	BCl3 MFC set to  0.000000
10/22/2011	1:32:54 AM	PHl3 MFC set to  0.000000
10/22/2011	1:32:54 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:32:54 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:32:54 AM	Tube furnace set to 150
10/22/2011	1:33:24 AM	H2 valve closed
10/22/2011	1:33:24 AM	BCl3 valve closed
10/22/2011	1:33:24 AM	PH3 valve closed
10/22/2011	1:33:24 AM	SiCl4 pre valve closed
10/22/2011	1:33:24 AM	SiCl4 post valve closed
10/22/2011	1:33:24 AM	Bypass valve closed
10/22/2011	1:33:24 AM	Bubbler valve closed
10/22/2011	1:33:24 AM	Helium valve opened
10/22/2011	1:33:24 AM	Main Vac valve opened
10/22/2011	1:33:24 AM	Helium MFC set to  20.000000
10/22/2011	1:33:24 AM	H2 MFC set to  0.000000
10/22/2011	1:33:24 AM	BCl3 MFC set to  0.000000
10/22/2011	1:33:24 AM	PHl3 MFC set to  0.000000
10/22/2011	1:33:24 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:33:24 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:33:24 AM	Tube furnace set to 150
10/22/2011	1:33:54 AM	Helium valve closed
10/22/2011	1:33:54 AM	H2 valve closed
10/22/2011	1:33:54 AM	BCl3 valve closed
10/22/2011	1:33:54 AM	PH3 valve closed
10/22/2011	1:33:54 AM	SiCl4 pre valve closed
10/22/2011	1:33:54 AM	SiCl4 post valve closed
10/22/2011	1:33:54 AM	Bypass valve closed
10/22/2011	1:33:54 AM	Bubbler valve closed
10/22/2011	1:33:54 AM	Main Vac valve opened
10/22/2011	1:33:54 AM	Helium MFC set to  0.000000
10/22/2011	1:33:54 AM	H2 MFC set to  0.000000
10/22/2011	1:33:54 AM	BCl3 MFC set to  0.000000
10/22/2011	1:33:54 AM	PHl3 MFC set to  0.000000
10/22/2011	1:33:54 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:33:54 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:33:54 AM	Tube furnace set to 150
10/22/2011	1:34:24 AM	H2 valve closed
10/22/2011	1:34:24 AM	BCl3 valve closed
10/22/2011	1:34:24 AM	PH3 valve closed
10/22/2011	1:34:24 AM	SiCl4 pre valve closed
10/22/2011	1:34:24 AM	SiCl4 post valve closed
10/22/2011	1:34:24 AM	Bypass valve closed
10/22/2011	1:34:24 AM	Bubbler valve closed
10/22/2011	1:34:24 AM	Helium valve opened
10/22/2011	1:34:24 AM	Main Vac valve opened
10/22/2011	1:34:24 AM	Helium MFC set to  20.000000
10/22/2011	1:34:24 AM	H2 MFC set to  0.000000
10/22/2011	1:34:24 AM	BCl3 MFC set to  0.000000
10/22/2011	1:34:24 AM	PHl3 MFC set to  0.000000
10/22/2011	1:34:24 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:34:24 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:34:25 AM	Tube furnace set to 150
10/22/2011	1:34:55 AM	Helium valve closed
10/22/2011	1:34:55 AM	H2 valve closed
10/22/2011	1:34:55 AM	BCl3 valve closed
10/22/2011	1:34:55 AM	PH3 valve closed
10/22/2011	1:34:55 AM	SiCl4 pre valve closed
10/22/2011	1:34:55 AM	SiCl4 post valve closed
10/22/2011	1:34:55 AM	Bypass valve closed
10/22/2011	1:34:55 AM	Bubbler valve closed
10/22/2011	1:34:55 AM	Main Vac valve opened
10/22/2011	1:34:55 AM	Helium MFC set to  0.000000
10/22/2011	1:34:55 AM	H2 MFC set to  0.000000
10/22/2011	1:34:55 AM	BCl3 MFC set to  0.000000
10/22/2011	1:34:55 AM	PHl3 MFC set to  0.000000
10/22/2011	1:34:55 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:34:55 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:34:55 AM	Tube furnace set to 150
10/22/2011	1:35:25 AM	H2 valve closed
10/22/2011	1:35:25 AM	BCl3 valve closed
10/22/2011	1:35:25 AM	PH3 valve closed
10/22/2011	1:35:25 AM	SiCl4 pre valve closed
10/22/2011	1:35:25 AM	SiCl4 post valve closed
10/22/2011	1:35:25 AM	Bypass valve closed
10/22/2011	1:35:25 AM	Bubbler valve closed
10/22/2011	1:35:25 AM	Helium valve opened
10/22/2011	1:35:25 AM	Main Vac valve opened
10/22/2011	1:35:25 AM	Helium MFC set to  20.000000
10/22/2011	1:35:25 AM	H2 MFC set to  0.000000
10/22/2011	1:35:25 AM	BCl3 MFC set to  0.000000
10/22/2011	1:35:25 AM	PHl3 MFC set to  0.000000
10/22/2011	1:35:25 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:35:25 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:35:25 AM	Tube furnace set to 150
10/22/2011	1:35:55 AM	Helium valve closed
10/22/2011	1:35:55 AM	H2 valve closed
10/22/2011	1:35:55 AM	BCl3 valve closed
10/22/2011	1:35:55 AM	PH3 valve closed
10/22/2011	1:35:55 AM	SiCl4 pre valve closed
10/22/2011	1:35:55 AM	SiCl4 post valve closed
10/22/2011	1:35:55 AM	Bypass valve closed
10/22/2011	1:35:55 AM	Bubbler valve closed
10/22/2011	1:35:55 AM	Main Vac valve opened
10/22/2011	1:35:55 AM	Helium MFC set to  0.000000
10/22/2011	1:35:55 AM	H2 MFC set to  0.000000
10/22/2011	1:35:55 AM	BCl3 MFC set to  0.000000
10/22/2011	1:35:55 AM	PHl3 MFC set to  0.000000
10/22/2011	1:35:55 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:35:55 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:35:55 AM	Tube furnace set to 150
10/22/2011	1:36:25 AM	H2 valve closed
10/22/2011	1:36:25 AM	BCl3 valve closed
10/22/2011	1:36:25 AM	PH3 valve closed
10/22/2011	1:36:25 AM	SiCl4 pre valve closed
10/22/2011	1:36:25 AM	SiCl4 post valve closed
10/22/2011	1:36:25 AM	Bypass valve closed
10/22/2011	1:36:25 AM	Bubbler valve closed
10/22/2011	1:36:25 AM	Helium valve opened
10/22/2011	1:36:25 AM	Main Vac valve opened
10/22/2011	1:36:25 AM	Helium MFC set to  20.000000
10/22/2011	1:36:25 AM	H2 MFC set to  0.000000
10/22/2011	1:36:25 AM	BCl3 MFC set to  0.000000
10/22/2011	1:36:25 AM	PHl3 MFC set to  0.000000
10/22/2011	1:36:25 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:36:25 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:36:25 AM	Tube furnace set to 150
10/22/2011	1:36:55 AM	Helium valve closed
10/22/2011	1:36:55 AM	H2 valve closed
10/22/2011	1:36:55 AM	BCl3 valve closed
10/22/2011	1:36:55 AM	PH3 valve closed
10/22/2011	1:36:55 AM	SiCl4 pre valve closed
10/22/2011	1:36:55 AM	SiCl4 post valve closed
10/22/2011	1:36:55 AM	Bypass valve closed
10/22/2011	1:36:55 AM	Bubbler valve closed
10/22/2011	1:36:55 AM	Main Vac valve opened
10/22/2011	1:36:55 AM	Helium MFC set to  0.000000
10/22/2011	1:36:55 AM	H2 MFC set to  0.000000
10/22/2011	1:36:55 AM	BCl3 MFC set to  0.000000
10/22/2011	1:36:55 AM	PHl3 MFC set to  0.000000
10/22/2011	1:36:55 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:36:55 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:36:56 AM	Tube furnace set to 150
10/22/2011	1:37:26 AM	H2 valve closed
10/22/2011	1:37:26 AM	BCl3 valve closed
10/22/2011	1:37:26 AM	PH3 valve closed
10/22/2011	1:37:26 AM	SiCl4 pre valve closed
10/22/2011	1:37:26 AM	SiCl4 post valve closed
10/22/2011	1:37:26 AM	Bypass valve closed
10/22/2011	1:37:26 AM	Bubbler valve closed
10/22/2011	1:37:26 AM	Helium valve opened
10/22/2011	1:37:26 AM	Main Vac valve opened
10/22/2011	1:37:26 AM	Helium MFC set to  20.000000
10/22/2011	1:37:26 AM	H2 MFC set to  0.000000
10/22/2011	1:37:26 AM	BCl3 MFC set to  0.000000
10/22/2011	1:37:26 AM	PHl3 MFC set to  0.000000
10/22/2011	1:37:26 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:37:26 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:37:26 AM	Tube furnace set to 150
10/22/2011	1:37:56 AM	Helium valve closed
10/22/2011	1:37:56 AM	H2 valve closed
10/22/2011	1:37:56 AM	BCl3 valve closed
10/22/2011	1:37:56 AM	PH3 valve closed
10/22/2011	1:37:56 AM	SiCl4 pre valve closed
10/22/2011	1:37:56 AM	SiCl4 post valve closed
10/22/2011	1:37:56 AM	Bypass valve closed
10/22/2011	1:37:56 AM	Bubbler valve closed
10/22/2011	1:37:56 AM	Main Vac valve opened
10/22/2011	1:37:56 AM	Helium MFC set to  0.000000
10/22/2011	1:37:56 AM	H2 MFC set to  0.000000
10/22/2011	1:37:56 AM	BCl3 MFC set to  0.000000
10/22/2011	1:37:56 AM	PHl3 MFC set to  0.000000
10/22/2011	1:37:56 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:37:56 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:37:56 AM	Tube furnace set to 150
10/22/2011	1:38:26 AM	H2 valve closed
10/22/2011	1:38:26 AM	BCl3 valve closed
10/22/2011	1:38:26 AM	PH3 valve closed
10/22/2011	1:38:26 AM	SiCl4 pre valve closed
10/22/2011	1:38:26 AM	SiCl4 post valve closed
10/22/2011	1:38:26 AM	Bypass valve closed
10/22/2011	1:38:26 AM	Bubbler valve closed
10/22/2011	1:38:26 AM	Helium valve opened
10/22/2011	1:38:26 AM	Main Vac valve opened
10/22/2011	1:38:26 AM	Helium MFC set to  20.000000
10/22/2011	1:38:26 AM	H2 MFC set to  0.000000
10/22/2011	1:38:26 AM	BCl3 MFC set to  0.000000
10/22/2011	1:38:26 AM	PHl3 MFC set to  0.000000
10/22/2011	1:38:26 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:38:26 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:38:26 AM	Tube furnace set to 150
10/22/2011	1:38:56 AM	Helium valve closed
10/22/2011	1:38:56 AM	H2 valve closed
10/22/2011	1:38:56 AM	BCl3 valve closed
10/22/2011	1:38:56 AM	PH3 valve closed
10/22/2011	1:38:56 AM	SiCl4 pre valve closed
10/22/2011	1:38:56 AM	SiCl4 post valve closed
10/22/2011	1:38:56 AM	Bypass valve closed
10/22/2011	1:38:56 AM	Bubbler valve closed
10/22/2011	1:38:56 AM	Main Vac valve opened
10/22/2011	1:38:56 AM	Helium MFC set to  0.000000
10/22/2011	1:38:56 AM	H2 MFC set to  0.000000
10/22/2011	1:38:56 AM	BCl3 MFC set to  0.000000
10/22/2011	1:38:56 AM	PHl3 MFC set to  0.000000
10/22/2011	1:38:56 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:38:56 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:38:56 AM	Tube furnace set to 150
10/22/2011	1:39:26 AM	H2 valve closed
10/22/2011	1:39:26 AM	BCl3 valve closed
10/22/2011	1:39:26 AM	PH3 valve closed
10/22/2011	1:39:26 AM	SiCl4 pre valve closed
10/22/2011	1:39:26 AM	SiCl4 post valve closed
10/22/2011	1:39:26 AM	Bypass valve closed
10/22/2011	1:39:26 AM	Bubbler valve closed
10/22/2011	1:39:26 AM	Helium valve opened
10/22/2011	1:39:26 AM	Main Vac valve opened
10/22/2011	1:39:26 AM	Helium MFC set to  20.000000
10/22/2011	1:39:26 AM	H2 MFC set to  0.000000
10/22/2011	1:39:26 AM	BCl3 MFC set to  0.000000
10/22/2011	1:39:26 AM	PHl3 MFC set to  0.000000
10/22/2011	1:39:26 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:39:26 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:39:27 AM	Tube furnace set to 150
10/22/2011	1:39:57 AM	Helium valve closed
10/22/2011	1:39:57 AM	H2 valve closed
10/22/2011	1:39:57 AM	BCl3 valve closed
10/22/2011	1:39:57 AM	PH3 valve closed
10/22/2011	1:39:57 AM	SiCl4 pre valve closed
10/22/2011	1:39:57 AM	SiCl4 post valve closed
10/22/2011	1:39:57 AM	Bypass valve closed
10/22/2011	1:39:57 AM	Bubbler valve closed
10/22/2011	1:39:57 AM	Main Vac valve opened
10/22/2011	1:39:57 AM	Helium MFC set to  0.000000
10/22/2011	1:39:57 AM	H2 MFC set to  0.000000
10/22/2011	1:39:57 AM	BCl3 MFC set to  0.000000
10/22/2011	1:39:57 AM	PHl3 MFC set to  0.000000
10/22/2011	1:39:57 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:39:57 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:39:57 AM	Tube furnace set to 150
10/22/2011	1:40:27 AM	H2 valve closed
10/22/2011	1:40:27 AM	BCl3 valve closed
10/22/2011	1:40:27 AM	PH3 valve closed
10/22/2011	1:40:27 AM	SiCl4 pre valve closed
10/22/2011	1:40:27 AM	SiCl4 post valve closed
10/22/2011	1:40:27 AM	Bypass valve closed
10/22/2011	1:40:27 AM	Bubbler valve closed
10/22/2011	1:40:27 AM	Helium valve opened
10/22/2011	1:40:27 AM	Main Vac valve opened
10/22/2011	1:40:27 AM	Helium MFC set to  20.000000
10/22/2011	1:40:27 AM	H2 MFC set to  0.000000
10/22/2011	1:40:27 AM	BCl3 MFC set to  0.000000
10/22/2011	1:40:27 AM	PHl3 MFC set to  0.000000
10/22/2011	1:40:27 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:40:27 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:40:27 AM	Tube furnace set to 150
10/22/2011	1:40:57 AM	Helium valve closed
10/22/2011	1:40:57 AM	H2 valve closed
10/22/2011	1:40:57 AM	BCl3 valve closed
10/22/2011	1:40:57 AM	PH3 valve closed
10/22/2011	1:40:57 AM	SiCl4 pre valve closed
10/22/2011	1:40:57 AM	SiCl4 post valve closed
10/22/2011	1:40:57 AM	Bypass valve closed
10/22/2011	1:40:57 AM	Bubbler valve closed
10/22/2011	1:40:57 AM	Main Vac valve opened
10/22/2011	1:40:57 AM	Helium MFC set to  0.000000
10/22/2011	1:40:57 AM	H2 MFC set to  0.000000
10/22/2011	1:40:57 AM	BCl3 MFC set to  0.000000
10/22/2011	1:40:57 AM	PHl3 MFC set to  0.000000
10/22/2011	1:40:57 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:40:57 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:40:57 AM	Tube furnace set to 150
10/22/2011	1:41:27 AM	H2 valve closed
10/22/2011	1:41:27 AM	BCl3 valve closed
10/22/2011	1:41:27 AM	PH3 valve closed
10/22/2011	1:41:27 AM	SiCl4 pre valve closed
10/22/2011	1:41:27 AM	SiCl4 post valve closed
10/22/2011	1:41:27 AM	Bypass valve closed
10/22/2011	1:41:27 AM	Bubbler valve closed
10/22/2011	1:41:27 AM	Helium valve opened
10/22/2011	1:41:27 AM	Main Vac valve opened
10/22/2011	1:41:27 AM	Helium MFC set to  20.000000
10/22/2011	1:41:27 AM	H2 MFC set to  0.000000
10/22/2011	1:41:27 AM	BCl3 MFC set to  0.000000
10/22/2011	1:41:27 AM	PHl3 MFC set to  0.000000
10/22/2011	1:41:27 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:41:27 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:41:28 AM	Tube furnace set to 150
10/22/2011	1:41:58 AM	Helium valve closed
10/22/2011	1:41:58 AM	H2 valve closed
10/22/2011	1:41:58 AM	BCl3 valve closed
10/22/2011	1:41:58 AM	PH3 valve closed
10/22/2011	1:41:58 AM	SiCl4 pre valve closed
10/22/2011	1:41:58 AM	SiCl4 post valve closed
10/22/2011	1:41:58 AM	Bypass valve closed
10/22/2011	1:41:58 AM	Bubbler valve closed
10/22/2011	1:41:58 AM	Main Vac valve opened
10/22/2011	1:41:58 AM	Helium MFC set to  0.000000
10/22/2011	1:41:58 AM	H2 MFC set to  0.000000
10/22/2011	1:41:58 AM	BCl3 MFC set to  0.000000
10/22/2011	1:41:58 AM	PHl3 MFC set to  0.000000
10/22/2011	1:41:58 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:41:58 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:41:58 AM	Tube furnace set to 150
10/22/2011	1:42:28 AM	H2 valve closed
10/22/2011	1:42:28 AM	BCl3 valve closed
10/22/2011	1:42:28 AM	PH3 valve closed
10/22/2011	1:42:28 AM	SiCl4 pre valve closed
10/22/2011	1:42:28 AM	SiCl4 post valve closed
10/22/2011	1:42:28 AM	Bypass valve closed
10/22/2011	1:42:28 AM	Bubbler valve closed
10/22/2011	1:42:28 AM	Helium valve opened
10/22/2011	1:42:28 AM	Main Vac valve opened
10/22/2011	1:42:28 AM	Helium MFC set to  20.000000
10/22/2011	1:42:28 AM	H2 MFC set to  0.000000
10/22/2011	1:42:28 AM	BCl3 MFC set to  0.000000
10/22/2011	1:42:28 AM	PHl3 MFC set to  0.000000
10/22/2011	1:42:28 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:42:28 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:42:28 AM	Tube furnace set to 150
10/22/2011	1:42:58 AM	Helium valve closed
10/22/2011	1:42:58 AM	H2 valve closed
10/22/2011	1:42:58 AM	BCl3 valve closed
10/22/2011	1:42:58 AM	PH3 valve closed
10/22/2011	1:42:58 AM	SiCl4 pre valve closed
10/22/2011	1:42:58 AM	SiCl4 post valve closed
10/22/2011	1:42:58 AM	Bypass valve closed
10/22/2011	1:42:58 AM	Bubbler valve closed
10/22/2011	1:42:58 AM	Main Vac valve opened
10/22/2011	1:42:58 AM	Helium MFC set to  0.000000
10/22/2011	1:42:58 AM	H2 MFC set to  0.000000
10/22/2011	1:42:58 AM	BCl3 MFC set to  0.000000
10/22/2011	1:42:58 AM	PHl3 MFC set to  0.000000
10/22/2011	1:42:58 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:42:58 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:42:58 AM	Tube furnace set to 150
10/22/2011	1:42:59 AM	Run finished at 1:42 AM
10/22/2011	1:47:47 AM	Recipe started at 1:47 AM
10/22/2011	1:47:47 AM	Helium valve closed
10/22/2011	1:47:47 AM	H2 valve closed
10/22/2011	1:47:47 AM	BCl3 valve closed
10/22/2011	1:47:47 AM	PH3 valve closed
10/22/2011	1:47:47 AM	SiCl4 pre valve closed
10/22/2011	1:47:47 AM	SiCl4 post valve closed
10/22/2011	1:47:47 AM	Bypass valve closed
10/22/2011	1:47:47 AM	Bubbler valve closed
10/22/2011	1:47:47 AM	Main Vac valve opened
10/22/2011	1:47:47 AM	Helium MFC set to  0.000000
10/22/2011	1:47:47 AM	H2 MFC set to  0.000000
10/22/2011	1:47:47 AM	BCl3 MFC set to  0.000000
10/22/2011	1:47:47 AM	PHl3 MFC set to  0.000000
10/22/2011	1:47:47 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:47:47 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:47:47 AM	Tube furnace set to 150
10/22/2011	1:48:17 AM	H2 valve closed
10/22/2011	1:48:17 AM	BCl3 valve closed
10/22/2011	1:48:17 AM	PH3 valve closed
10/22/2011	1:48:17 AM	SiCl4 pre valve closed
10/22/2011	1:48:17 AM	SiCl4 post valve closed
10/22/2011	1:48:17 AM	Bypass valve closed
10/22/2011	1:48:17 AM	Bubbler valve closed
10/22/2011	1:48:17 AM	Helium valve opened
10/22/2011	1:48:17 AM	Main Vac valve opened
10/22/2011	1:48:17 AM	Helium MFC set to  20.000000
10/22/2011	1:48:17 AM	H2 MFC set to  0.000000
10/22/2011	1:48:17 AM	BCl3 MFC set to  0.000000
10/22/2011	1:48:17 AM	PHl3 MFC set to  0.000000
10/22/2011	1:48:17 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:48:17 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:48:17 AM	Tube furnace set to 150
10/22/2011	1:48:47 AM	Helium valve closed
10/22/2011	1:48:47 AM	H2 valve closed
10/22/2011	1:48:47 AM	BCl3 valve closed
10/22/2011	1:48:47 AM	PH3 valve closed
10/22/2011	1:48:47 AM	SiCl4 pre valve closed
10/22/2011	1:48:47 AM	SiCl4 post valve closed
10/22/2011	1:48:47 AM	Bypass valve closed
10/22/2011	1:48:47 AM	Bubbler valve closed
10/22/2011	1:48:47 AM	Main Vac valve opened
10/22/2011	1:48:47 AM	Helium MFC set to  0.000000
10/22/2011	1:48:47 AM	H2 MFC set to  0.000000
10/22/2011	1:48:47 AM	BCl3 MFC set to  0.000000
10/22/2011	1:48:47 AM	PHl3 MFC set to  0.000000
10/22/2011	1:48:47 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:48:47 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:48:47 AM	Tube furnace set to 150
10/22/2011	1:49:17 AM	H2 valve closed
10/22/2011	1:49:17 AM	BCl3 valve closed
10/22/2011	1:49:17 AM	PH3 valve closed
10/22/2011	1:49:17 AM	SiCl4 pre valve closed
10/22/2011	1:49:17 AM	SiCl4 post valve closed
10/22/2011	1:49:17 AM	Bypass valve closed
10/22/2011	1:49:17 AM	Bubbler valve closed
10/22/2011	1:49:17 AM	Helium valve opened
10/22/2011	1:49:17 AM	Main Vac valve opened
10/22/2011	1:49:17 AM	Helium MFC set to  20.000000
10/22/2011	1:49:17 AM	H2 MFC set to  0.000000
10/22/2011	1:49:17 AM	BCl3 MFC set to  0.000000
10/22/2011	1:49:17 AM	PHl3 MFC set to  0.000000
10/22/2011	1:49:17 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:49:17 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:49:17 AM	Tube furnace set to 150
10/22/2011	1:49:47 AM	Helium valve closed
10/22/2011	1:49:47 AM	H2 valve closed
10/22/2011	1:49:47 AM	BCl3 valve closed
10/22/2011	1:49:47 AM	PH3 valve closed
10/22/2011	1:49:47 AM	SiCl4 pre valve closed
10/22/2011	1:49:47 AM	SiCl4 post valve closed
10/22/2011	1:49:47 AM	Bypass valve closed
10/22/2011	1:49:47 AM	Bubbler valve closed
10/22/2011	1:49:47 AM	Main Vac valve opened
10/22/2011	1:49:47 AM	Helium MFC set to  0.000000
10/22/2011	1:49:47 AM	H2 MFC set to  0.000000
10/22/2011	1:49:47 AM	BCl3 MFC set to  0.000000
10/22/2011	1:49:47 AM	PHl3 MFC set to  0.000000
10/22/2011	1:49:47 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:49:47 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:49:48 AM	Tube furnace set to 150
10/22/2011	1:50:18 AM	H2 valve closed
10/22/2011	1:50:18 AM	BCl3 valve closed
10/22/2011	1:50:18 AM	PH3 valve closed
10/22/2011	1:50:18 AM	SiCl4 pre valve closed
10/22/2011	1:50:18 AM	SiCl4 post valve closed
10/22/2011	1:50:18 AM	Bypass valve closed
10/22/2011	1:50:18 AM	Bubbler valve closed
10/22/2011	1:50:18 AM	Helium valve opened
10/22/2011	1:50:18 AM	Main Vac valve opened
10/22/2011	1:50:18 AM	Helium MFC set to  20.000000
10/22/2011	1:50:18 AM	H2 MFC set to  0.000000
10/22/2011	1:50:18 AM	BCl3 MFC set to  0.000000
10/22/2011	1:50:18 AM	PHl3 MFC set to  0.000000
10/22/2011	1:50:18 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:50:18 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:50:18 AM	Tube furnace set to 150
10/22/2011	1:50:48 AM	Helium valve closed
10/22/2011	1:50:48 AM	H2 valve closed
10/22/2011	1:50:48 AM	BCl3 valve closed
10/22/2011	1:50:48 AM	PH3 valve closed
10/22/2011	1:50:48 AM	SiCl4 pre valve closed
10/22/2011	1:50:48 AM	SiCl4 post valve closed
10/22/2011	1:50:48 AM	Bypass valve closed
10/22/2011	1:50:48 AM	Bubbler valve closed
10/22/2011	1:50:48 AM	Main Vac valve opened
10/22/2011	1:50:48 AM	Helium MFC set to  0.000000
10/22/2011	1:50:48 AM	H2 MFC set to  0.000000
10/22/2011	1:50:48 AM	BCl3 MFC set to  0.000000
10/22/2011	1:50:48 AM	PHl3 MFC set to  0.000000
10/22/2011	1:50:48 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:50:48 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:50:48 AM	Tube furnace set to 150
10/22/2011	1:51:18 AM	H2 valve closed
10/22/2011	1:51:18 AM	BCl3 valve closed
10/22/2011	1:51:18 AM	PH3 valve closed
10/22/2011	1:51:18 AM	SiCl4 pre valve closed
10/22/2011	1:51:18 AM	SiCl4 post valve closed
10/22/2011	1:51:18 AM	Bypass valve closed
10/22/2011	1:51:18 AM	Bubbler valve closed
10/22/2011	1:51:18 AM	Helium valve opened
10/22/2011	1:51:18 AM	Main Vac valve opened
10/22/2011	1:51:18 AM	Helium MFC set to  20.000000
10/22/2011	1:51:18 AM	H2 MFC set to  0.000000
10/22/2011	1:51:18 AM	BCl3 MFC set to  0.000000
10/22/2011	1:51:18 AM	PHl3 MFC set to  0.000000
10/22/2011	1:51:18 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:51:18 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:51:18 AM	Tube furnace set to 150
10/22/2011	1:51:48 AM	Helium valve closed
10/22/2011	1:51:48 AM	H2 valve closed
10/22/2011	1:51:48 AM	BCl3 valve closed
10/22/2011	1:51:48 AM	PH3 valve closed
10/22/2011	1:51:48 AM	SiCl4 pre valve closed
10/22/2011	1:51:48 AM	SiCl4 post valve closed
10/22/2011	1:51:48 AM	Bypass valve closed
10/22/2011	1:51:48 AM	Bubbler valve closed
10/22/2011	1:51:48 AM	Main Vac valve opened
10/22/2011	1:51:48 AM	Helium MFC set to  0.000000
10/22/2011	1:51:48 AM	H2 MFC set to  0.000000
10/22/2011	1:51:48 AM	BCl3 MFC set to  0.000000
10/22/2011	1:51:48 AM	PHl3 MFC set to  0.000000
10/22/2011	1:51:48 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:51:48 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:51:48 AM	Tube furnace set to 150
10/22/2011	1:52:18 AM	H2 valve closed
10/22/2011	1:52:18 AM	BCl3 valve closed
10/22/2011	1:52:18 AM	PH3 valve closed
10/22/2011	1:52:18 AM	SiCl4 pre valve closed
10/22/2011	1:52:18 AM	SiCl4 post valve closed
10/22/2011	1:52:18 AM	Bypass valve closed
10/22/2011	1:52:18 AM	Bubbler valve closed
10/22/2011	1:52:18 AM	Helium valve opened
10/22/2011	1:52:18 AM	Main Vac valve opened
10/22/2011	1:52:18 AM	Helium MFC set to  20.000000
10/22/2011	1:52:18 AM	H2 MFC set to  0.000000
10/22/2011	1:52:18 AM	BCl3 MFC set to  0.000000
10/22/2011	1:52:18 AM	PHl3 MFC set to  0.000000
10/22/2011	1:52:18 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:52:18 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:52:19 AM	Tube furnace set to 150
10/22/2011	1:52:49 AM	Helium valve closed
10/22/2011	1:52:49 AM	H2 valve closed
10/22/2011	1:52:49 AM	BCl3 valve closed
10/22/2011	1:52:49 AM	PH3 valve closed
10/22/2011	1:52:49 AM	SiCl4 pre valve closed
10/22/2011	1:52:49 AM	SiCl4 post valve closed
10/22/2011	1:52:49 AM	Bypass valve closed
10/22/2011	1:52:49 AM	Bubbler valve closed
10/22/2011	1:52:49 AM	Main Vac valve opened
10/22/2011	1:52:49 AM	Helium MFC set to  0.000000
10/22/2011	1:52:49 AM	H2 MFC set to  0.000000
10/22/2011	1:52:49 AM	BCl3 MFC set to  0.000000
10/22/2011	1:52:49 AM	PHl3 MFC set to  0.000000
10/22/2011	1:52:49 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:52:49 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:52:49 AM	Tube furnace set to 150
10/22/2011	1:53:19 AM	H2 valve closed
10/22/2011	1:53:19 AM	BCl3 valve closed
10/22/2011	1:53:19 AM	PH3 valve closed
10/22/2011	1:53:19 AM	SiCl4 pre valve closed
10/22/2011	1:53:19 AM	SiCl4 post valve closed
10/22/2011	1:53:19 AM	Bypass valve closed
10/22/2011	1:53:19 AM	Bubbler valve closed
10/22/2011	1:53:19 AM	Helium valve opened
10/22/2011	1:53:19 AM	Main Vac valve opened
10/22/2011	1:53:19 AM	Helium MFC set to  20.000000
10/22/2011	1:53:19 AM	H2 MFC set to  0.000000
10/22/2011	1:53:19 AM	BCl3 MFC set to  0.000000
10/22/2011	1:53:19 AM	PHl3 MFC set to  0.000000
10/22/2011	1:53:19 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:53:19 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:53:19 AM	Tube furnace set to 150
10/22/2011	1:53:49 AM	Helium valve closed
10/22/2011	1:53:49 AM	H2 valve closed
10/22/2011	1:53:49 AM	BCl3 valve closed
10/22/2011	1:53:49 AM	PH3 valve closed
10/22/2011	1:53:49 AM	SiCl4 pre valve closed
10/22/2011	1:53:49 AM	SiCl4 post valve closed
10/22/2011	1:53:49 AM	Bypass valve closed
10/22/2011	1:53:49 AM	Bubbler valve closed
10/22/2011	1:53:49 AM	Main Vac valve opened
10/22/2011	1:53:49 AM	Helium MFC set to  0.000000
10/22/2011	1:53:49 AM	H2 MFC set to  0.000000
10/22/2011	1:53:49 AM	BCl3 MFC set to  0.000000
10/22/2011	1:53:49 AM	PHl3 MFC set to  0.000000
10/22/2011	1:53:49 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:53:49 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:53:49 AM	Tube furnace set to 150
10/22/2011	1:54:19 AM	H2 valve closed
10/22/2011	1:54:19 AM	BCl3 valve closed
10/22/2011	1:54:19 AM	PH3 valve closed
10/22/2011	1:54:19 AM	SiCl4 pre valve closed
10/22/2011	1:54:19 AM	SiCl4 post valve closed
10/22/2011	1:54:19 AM	Bypass valve closed
10/22/2011	1:54:19 AM	Bubbler valve closed
10/22/2011	1:54:19 AM	Helium valve opened
10/22/2011	1:54:19 AM	Main Vac valve opened
10/22/2011	1:54:19 AM	Helium MFC set to  20.000000
10/22/2011	1:54:19 AM	H2 MFC set to  0.000000
10/22/2011	1:54:19 AM	BCl3 MFC set to  0.000000
10/22/2011	1:54:19 AM	PHl3 MFC set to  0.000000
10/22/2011	1:54:19 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:54:19 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:54:19 AM	Tube furnace set to 150
10/22/2011	1:54:49 AM	Helium valve closed
10/22/2011	1:54:49 AM	H2 valve closed
10/22/2011	1:54:49 AM	BCl3 valve closed
10/22/2011	1:54:49 AM	PH3 valve closed
10/22/2011	1:54:49 AM	SiCl4 pre valve closed
10/22/2011	1:54:49 AM	SiCl4 post valve closed
10/22/2011	1:54:49 AM	Bypass valve closed
10/22/2011	1:54:49 AM	Bubbler valve closed
10/22/2011	1:54:49 AM	Main Vac valve opened
10/22/2011	1:54:49 AM	Helium MFC set to  0.000000
10/22/2011	1:54:49 AM	H2 MFC set to  0.000000
10/22/2011	1:54:49 AM	BCl3 MFC set to  0.000000
10/22/2011	1:54:49 AM	PHl3 MFC set to  0.000000
10/22/2011	1:54:49 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:54:49 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:54:50 AM	Tube furnace set to 150
10/22/2011	1:55:20 AM	H2 valve closed
10/22/2011	1:55:20 AM	BCl3 valve closed
10/22/2011	1:55:20 AM	PH3 valve closed
10/22/2011	1:55:20 AM	SiCl4 pre valve closed
10/22/2011	1:55:20 AM	SiCl4 post valve closed
10/22/2011	1:55:20 AM	Bypass valve closed
10/22/2011	1:55:20 AM	Bubbler valve closed
10/22/2011	1:55:20 AM	Helium valve opened
10/22/2011	1:55:20 AM	Main Vac valve opened
10/22/2011	1:55:20 AM	Helium MFC set to  20.000000
10/22/2011	1:55:20 AM	H2 MFC set to  0.000000
10/22/2011	1:55:20 AM	BCl3 MFC set to  0.000000
10/22/2011	1:55:20 AM	PHl3 MFC set to  0.000000
10/22/2011	1:55:20 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:55:20 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:55:20 AM	Tube furnace set to 150
10/22/2011	1:55:50 AM	Helium valve closed
10/22/2011	1:55:50 AM	H2 valve closed
10/22/2011	1:55:50 AM	BCl3 valve closed
10/22/2011	1:55:50 AM	PH3 valve closed
10/22/2011	1:55:50 AM	SiCl4 pre valve closed
10/22/2011	1:55:50 AM	SiCl4 post valve closed
10/22/2011	1:55:50 AM	Bypass valve closed
10/22/2011	1:55:50 AM	Bubbler valve closed
10/22/2011	1:55:50 AM	Main Vac valve opened
10/22/2011	1:55:50 AM	Helium MFC set to  0.000000
10/22/2011	1:55:50 AM	H2 MFC set to  0.000000
10/22/2011	1:55:50 AM	BCl3 MFC set to  0.000000
10/22/2011	1:55:50 AM	PHl3 MFC set to  0.000000
10/22/2011	1:55:50 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:55:50 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:55:50 AM	Tube furnace set to 150
10/22/2011	1:56:20 AM	H2 valve closed
10/22/2011	1:56:20 AM	BCl3 valve closed
10/22/2011	1:56:20 AM	PH3 valve closed
10/22/2011	1:56:20 AM	SiCl4 pre valve closed
10/22/2011	1:56:20 AM	SiCl4 post valve closed
10/22/2011	1:56:20 AM	Bypass valve closed
10/22/2011	1:56:20 AM	Bubbler valve closed
10/22/2011	1:56:20 AM	Helium valve opened
10/22/2011	1:56:20 AM	Main Vac valve opened
10/22/2011	1:56:20 AM	Helium MFC set to  20.000000
10/22/2011	1:56:20 AM	H2 MFC set to  0.000000
10/22/2011	1:56:20 AM	BCl3 MFC set to  0.000000
10/22/2011	1:56:20 AM	PHl3 MFC set to  0.000000
10/22/2011	1:56:20 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:56:20 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:56:20 AM	Tube furnace set to 150
10/22/2011	1:56:50 AM	Helium valve closed
10/22/2011	1:56:50 AM	H2 valve closed
10/22/2011	1:56:50 AM	BCl3 valve closed
10/22/2011	1:56:50 AM	PH3 valve closed
10/22/2011	1:56:50 AM	SiCl4 pre valve closed
10/22/2011	1:56:50 AM	SiCl4 post valve closed
10/22/2011	1:56:50 AM	Bypass valve closed
10/22/2011	1:56:50 AM	Bubbler valve closed
10/22/2011	1:56:50 AM	Main Vac valve opened
10/22/2011	1:56:50 AM	Helium MFC set to  0.000000
10/22/2011	1:56:50 AM	H2 MFC set to  0.000000
10/22/2011	1:56:50 AM	BCl3 MFC set to  0.000000
10/22/2011	1:56:50 AM	PHl3 MFC set to  0.000000
10/22/2011	1:56:50 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:56:50 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:56:50 AM	Tube furnace set to 150
10/22/2011	1:57:20 AM	H2 valve closed
10/22/2011	1:57:20 AM	BCl3 valve closed
10/22/2011	1:57:20 AM	PH3 valve closed
10/22/2011	1:57:20 AM	SiCl4 pre valve closed
10/22/2011	1:57:20 AM	SiCl4 post valve closed
10/22/2011	1:57:20 AM	Bypass valve closed
10/22/2011	1:57:20 AM	Bubbler valve closed
10/22/2011	1:57:20 AM	Helium valve opened
10/22/2011	1:57:20 AM	Main Vac valve opened
10/22/2011	1:57:20 AM	Helium MFC set to  20.000000
10/22/2011	1:57:20 AM	H2 MFC set to  0.000000
10/22/2011	1:57:20 AM	BCl3 MFC set to  0.000000
10/22/2011	1:57:20 AM	PHl3 MFC set to  0.000000
10/22/2011	1:57:20 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:57:20 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:57:21 AM	Tube furnace set to 150
10/22/2011	1:57:51 AM	Helium valve closed
10/22/2011	1:57:51 AM	H2 valve closed
10/22/2011	1:57:51 AM	BCl3 valve closed
10/22/2011	1:57:51 AM	PH3 valve closed
10/22/2011	1:57:51 AM	SiCl4 pre valve closed
10/22/2011	1:57:51 AM	SiCl4 post valve closed
10/22/2011	1:57:51 AM	Bypass valve closed
10/22/2011	1:57:51 AM	Bubbler valve closed
10/22/2011	1:57:51 AM	Main Vac valve opened
10/22/2011	1:57:51 AM	Helium MFC set to  0.000000
10/22/2011	1:57:51 AM	H2 MFC set to  0.000000
10/22/2011	1:57:51 AM	BCl3 MFC set to  0.000000
10/22/2011	1:57:51 AM	PHl3 MFC set to  0.000000
10/22/2011	1:57:51 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:57:51 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:57:51 AM	Tube furnace set to 150
10/22/2011	1:57:52 AM	Run finished at 1:57 AM
10/22/2011	1:59:54 AM	Recipe started at 1:59 AM
10/22/2011	1:59:54 AM	Helium valve closed
10/22/2011	1:59:54 AM	H2 valve closed
10/22/2011	1:59:54 AM	BCl3 valve closed
10/22/2011	1:59:54 AM	PH3 valve closed
10/22/2011	1:59:54 AM	SiCl4 pre valve closed
10/22/2011	1:59:54 AM	SiCl4 post valve closed
10/22/2011	1:59:54 AM	Bypass valve closed
10/22/2011	1:59:54 AM	Bubbler valve closed
10/22/2011	1:59:54 AM	Main Vac valve opened
10/22/2011	1:59:54 AM	Helium MFC set to  0.000000
10/22/2011	1:59:54 AM	H2 MFC set to  0.000000
10/22/2011	1:59:54 AM	BCl3 MFC set to  0.000000
10/22/2011	1:59:54 AM	PHl3 MFC set to  0.000000
10/22/2011	1:59:54 AM	SiCl4 MFC set to  0.000000
10/22/2011	1:59:54 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:59:54 AM	Tube furnace set to 150
10/22/2011	2:00:24 AM	H2 valve closed
10/22/2011	2:00:24 AM	BCl3 valve closed
10/22/2011	2:00:24 AM	PH3 valve closed
10/22/2011	2:00:24 AM	SiCl4 pre valve closed
10/22/2011	2:00:24 AM	SiCl4 post valve closed
10/22/2011	2:00:24 AM	Bypass valve closed
10/22/2011	2:00:24 AM	Bubbler valve closed
10/22/2011	2:00:24 AM	Helium valve opened
10/22/2011	2:00:24 AM	Main Vac valve opened
10/22/2011	2:00:24 AM	Helium MFC set to  20.000000
10/22/2011	2:00:24 AM	H2 MFC set to  0.000000
10/22/2011	2:00:24 AM	BCl3 MFC set to  0.000000
10/22/2011	2:00:24 AM	PHl3 MFC set to  0.000000
10/22/2011	2:00:24 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:00:24 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:00:25 AM	Tube furnace set to 150
10/22/2011	2:00:55 AM	Helium valve closed
10/22/2011	2:00:55 AM	H2 valve closed
10/22/2011	2:00:55 AM	BCl3 valve closed
10/22/2011	2:00:55 AM	PH3 valve closed
10/22/2011	2:00:55 AM	SiCl4 pre valve closed
10/22/2011	2:00:55 AM	SiCl4 post valve closed
10/22/2011	2:00:55 AM	Bypass valve closed
10/22/2011	2:00:55 AM	Bubbler valve closed
10/22/2011	2:00:55 AM	Main Vac valve opened
10/22/2011	2:00:55 AM	Helium MFC set to  0.000000
10/22/2011	2:00:55 AM	H2 MFC set to  0.000000
10/22/2011	2:00:55 AM	BCl3 MFC set to  0.000000
10/22/2011	2:00:55 AM	PHl3 MFC set to  0.000000
10/22/2011	2:00:55 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:00:55 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:00:55 AM	Tube furnace set to 150
10/22/2011	2:01:25 AM	H2 valve closed
10/22/2011	2:01:25 AM	BCl3 valve closed
10/22/2011	2:01:25 AM	PH3 valve closed
10/22/2011	2:01:25 AM	SiCl4 pre valve closed
10/22/2011	2:01:25 AM	SiCl4 post valve closed
10/22/2011	2:01:25 AM	Bypass valve closed
10/22/2011	2:01:25 AM	Bubbler valve closed
10/22/2011	2:01:25 AM	Helium valve opened
10/22/2011	2:01:25 AM	Main Vac valve opened
10/22/2011	2:01:25 AM	Helium MFC set to  20.000000
10/22/2011	2:01:25 AM	H2 MFC set to  0.000000
10/22/2011	2:01:25 AM	BCl3 MFC set to  0.000000
10/22/2011	2:01:25 AM	PHl3 MFC set to  0.000000
10/22/2011	2:01:25 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:01:25 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:01:25 AM	Tube furnace set to 150
10/22/2011	2:01:55 AM	Helium valve closed
10/22/2011	2:01:55 AM	H2 valve closed
10/22/2011	2:01:55 AM	BCl3 valve closed
10/22/2011	2:01:55 AM	PH3 valve closed
10/22/2011	2:01:55 AM	SiCl4 pre valve closed
10/22/2011	2:01:55 AM	SiCl4 post valve closed
10/22/2011	2:01:55 AM	Bypass valve closed
10/22/2011	2:01:55 AM	Bubbler valve closed
10/22/2011	2:01:55 AM	Main Vac valve opened
10/22/2011	2:01:55 AM	Helium MFC set to  0.000000
10/22/2011	2:01:55 AM	H2 MFC set to  0.000000
10/22/2011	2:01:55 AM	BCl3 MFC set to  0.000000
10/22/2011	2:01:55 AM	PHl3 MFC set to  0.000000
10/22/2011	2:01:55 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:01:55 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:01:55 AM	Tube furnace set to 150
10/22/2011	2:02:25 AM	H2 valve closed
10/22/2011	2:02:25 AM	BCl3 valve closed
10/22/2011	2:02:25 AM	PH3 valve closed
10/22/2011	2:02:25 AM	SiCl4 pre valve closed
10/22/2011	2:02:25 AM	SiCl4 post valve closed
10/22/2011	2:02:25 AM	Bypass valve closed
10/22/2011	2:02:25 AM	Bubbler valve closed
10/22/2011	2:02:25 AM	Helium valve opened
10/22/2011	2:02:25 AM	Main Vac valve opened
10/22/2011	2:02:25 AM	Helium MFC set to  20.000000
10/22/2011	2:02:25 AM	H2 MFC set to  0.000000
10/22/2011	2:02:25 AM	BCl3 MFC set to  0.000000
10/22/2011	2:02:25 AM	PHl3 MFC set to  0.000000
10/22/2011	2:02:25 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:02:25 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:02:25 AM	Tube furnace set to 150
10/22/2011	2:02:55 AM	Helium valve closed
10/22/2011	2:02:55 AM	H2 valve closed
10/22/2011	2:02:55 AM	BCl3 valve closed
10/22/2011	2:02:55 AM	PH3 valve closed
10/22/2011	2:02:55 AM	SiCl4 pre valve closed
10/22/2011	2:02:55 AM	SiCl4 post valve closed
10/22/2011	2:02:55 AM	Bypass valve closed
10/22/2011	2:02:55 AM	Bubbler valve closed
10/22/2011	2:02:55 AM	Main Vac valve opened
10/22/2011	2:02:55 AM	Helium MFC set to  0.000000
10/22/2011	2:02:55 AM	H2 MFC set to  0.000000
10/22/2011	2:02:55 AM	BCl3 MFC set to  0.000000
10/22/2011	2:02:55 AM	PHl3 MFC set to  0.000000
10/22/2011	2:02:55 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:02:55 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:02:56 AM	Tube furnace set to 150
10/22/2011	2:03:26 AM	H2 valve closed
10/22/2011	2:03:26 AM	BCl3 valve closed
10/22/2011	2:03:26 AM	PH3 valve closed
10/22/2011	2:03:26 AM	SiCl4 pre valve closed
10/22/2011	2:03:26 AM	SiCl4 post valve closed
10/22/2011	2:03:26 AM	Bypass valve closed
10/22/2011	2:03:26 AM	Bubbler valve closed
10/22/2011	2:03:26 AM	Helium valve opened
10/22/2011	2:03:26 AM	Main Vac valve opened
10/22/2011	2:03:26 AM	Helium MFC set to  20.000000
10/22/2011	2:03:26 AM	H2 MFC set to  0.000000
10/22/2011	2:03:26 AM	BCl3 MFC set to  0.000000
10/22/2011	2:03:26 AM	PHl3 MFC set to  0.000000
10/22/2011	2:03:26 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:03:26 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:03:26 AM	Tube furnace set to 150
10/22/2011	2:03:56 AM	Helium valve closed
10/22/2011	2:03:56 AM	H2 valve closed
10/22/2011	2:03:56 AM	BCl3 valve closed
10/22/2011	2:03:56 AM	PH3 valve closed
10/22/2011	2:03:56 AM	SiCl4 pre valve closed
10/22/2011	2:03:56 AM	SiCl4 post valve closed
10/22/2011	2:03:56 AM	Bypass valve closed
10/22/2011	2:03:56 AM	Bubbler valve closed
10/22/2011	2:03:56 AM	Main Vac valve opened
10/22/2011	2:03:56 AM	Helium MFC set to  0.000000
10/22/2011	2:03:56 AM	H2 MFC set to  0.000000
10/22/2011	2:03:56 AM	BCl3 MFC set to  0.000000
10/22/2011	2:03:56 AM	PHl3 MFC set to  0.000000
10/22/2011	2:03:56 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:03:56 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:03:56 AM	Tube furnace set to 150
10/22/2011	2:04:26 AM	H2 valve closed
10/22/2011	2:04:26 AM	BCl3 valve closed
10/22/2011	2:04:26 AM	PH3 valve closed
10/22/2011	2:04:26 AM	SiCl4 pre valve closed
10/22/2011	2:04:26 AM	SiCl4 post valve closed
10/22/2011	2:04:26 AM	Bypass valve closed
10/22/2011	2:04:26 AM	Bubbler valve closed
10/22/2011	2:04:26 AM	Helium valve opened
10/22/2011	2:04:26 AM	Main Vac valve opened
10/22/2011	2:04:26 AM	Helium MFC set to  20.000000
10/22/2011	2:04:26 AM	H2 MFC set to  0.000000
10/22/2011	2:04:26 AM	BCl3 MFC set to  0.000000
10/22/2011	2:04:26 AM	PHl3 MFC set to  0.000000
10/22/2011	2:04:26 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:04:26 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:04:26 AM	Tube furnace set to 150
10/22/2011	2:04:56 AM	Helium valve closed
10/22/2011	2:04:56 AM	H2 valve closed
10/22/2011	2:04:56 AM	BCl3 valve closed
10/22/2011	2:04:56 AM	PH3 valve closed
10/22/2011	2:04:56 AM	SiCl4 pre valve closed
10/22/2011	2:04:56 AM	SiCl4 post valve closed
10/22/2011	2:04:56 AM	Bypass valve closed
10/22/2011	2:04:56 AM	Bubbler valve closed
10/22/2011	2:04:56 AM	Main Vac valve opened
10/22/2011	2:04:56 AM	Helium MFC set to  0.000000
10/22/2011	2:04:56 AM	H2 MFC set to  0.000000
10/22/2011	2:04:56 AM	BCl3 MFC set to  0.000000
10/22/2011	2:04:56 AM	PHl3 MFC set to  0.000000
10/22/2011	2:04:56 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:04:56 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:04:56 AM	Tube furnace set to 150
10/22/2011	2:05:26 AM	H2 valve closed
10/22/2011	2:05:26 AM	BCl3 valve closed
10/22/2011	2:05:26 AM	PH3 valve closed
10/22/2011	2:05:26 AM	SiCl4 pre valve closed
10/22/2011	2:05:26 AM	SiCl4 post valve closed
10/22/2011	2:05:26 AM	Bypass valve closed
10/22/2011	2:05:26 AM	Bubbler valve closed
10/22/2011	2:05:26 AM	Helium valve opened
10/22/2011	2:05:26 AM	Main Vac valve opened
10/22/2011	2:05:26 AM	Helium MFC set to  20.000000
10/22/2011	2:05:26 AM	H2 MFC set to  0.000000
10/22/2011	2:05:26 AM	BCl3 MFC set to  0.000000
10/22/2011	2:05:26 AM	PHl3 MFC set to  0.000000
10/22/2011	2:05:26 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:05:26 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:05:27 AM	Tube furnace set to 150
10/22/2011	2:05:57 AM	Helium valve closed
10/22/2011	2:05:57 AM	H2 valve closed
10/22/2011	2:05:57 AM	BCl3 valve closed
10/22/2011	2:05:57 AM	PH3 valve closed
10/22/2011	2:05:57 AM	SiCl4 pre valve closed
10/22/2011	2:05:57 AM	SiCl4 post valve closed
10/22/2011	2:05:57 AM	Bypass valve closed
10/22/2011	2:05:57 AM	Bubbler valve closed
10/22/2011	2:05:57 AM	Main Vac valve opened
10/22/2011	2:05:57 AM	Helium MFC set to  0.000000
10/22/2011	2:05:57 AM	H2 MFC set to  0.000000
10/22/2011	2:05:57 AM	BCl3 MFC set to  0.000000
10/22/2011	2:05:57 AM	PHl3 MFC set to  0.000000
10/22/2011	2:05:57 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:05:57 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:05:57 AM	Tube furnace set to 150
10/22/2011	2:06:27 AM	H2 valve closed
10/22/2011	2:06:27 AM	BCl3 valve closed
10/22/2011	2:06:27 AM	PH3 valve closed
10/22/2011	2:06:27 AM	SiCl4 pre valve closed
10/22/2011	2:06:27 AM	SiCl4 post valve closed
10/22/2011	2:06:27 AM	Bypass valve closed
10/22/2011	2:06:27 AM	Bubbler valve closed
10/22/2011	2:06:27 AM	Helium valve opened
10/22/2011	2:06:27 AM	Main Vac valve opened
10/22/2011	2:06:27 AM	Helium MFC set to  20.000000
10/22/2011	2:06:27 AM	H2 MFC set to  0.000000
10/22/2011	2:06:27 AM	BCl3 MFC set to  0.000000
10/22/2011	2:06:27 AM	PHl3 MFC set to  0.000000
10/22/2011	2:06:27 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:06:27 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:06:27 AM	Tube furnace set to 150
10/22/2011	2:06:57 AM	Helium valve closed
10/22/2011	2:06:57 AM	H2 valve closed
10/22/2011	2:06:57 AM	BCl3 valve closed
10/22/2011	2:06:57 AM	PH3 valve closed
10/22/2011	2:06:57 AM	SiCl4 pre valve closed
10/22/2011	2:06:57 AM	SiCl4 post valve closed
10/22/2011	2:06:57 AM	Bypass valve closed
10/22/2011	2:06:57 AM	Bubbler valve closed
10/22/2011	2:06:57 AM	Main Vac valve opened
10/22/2011	2:06:57 AM	Helium MFC set to  0.000000
10/22/2011	2:06:57 AM	H2 MFC set to  0.000000
10/22/2011	2:06:57 AM	BCl3 MFC set to  0.000000
10/22/2011	2:06:57 AM	PHl3 MFC set to  0.000000
10/22/2011	2:06:57 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:06:57 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:06:57 AM	Tube furnace set to 150
10/22/2011	2:07:27 AM	H2 valve closed
10/22/2011	2:07:27 AM	BCl3 valve closed
10/22/2011	2:07:27 AM	PH3 valve closed
10/22/2011	2:07:27 AM	SiCl4 pre valve closed
10/22/2011	2:07:27 AM	SiCl4 post valve closed
10/22/2011	2:07:27 AM	Bypass valve closed
10/22/2011	2:07:27 AM	Bubbler valve closed
10/22/2011	2:07:27 AM	Helium valve opened
10/22/2011	2:07:27 AM	Main Vac valve opened
10/22/2011	2:07:27 AM	Helium MFC set to  20.000000
10/22/2011	2:07:27 AM	H2 MFC set to  0.000000
10/22/2011	2:07:27 AM	BCl3 MFC set to  0.000000
10/22/2011	2:07:27 AM	PHl3 MFC set to  0.000000
10/22/2011	2:07:27 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:07:27 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:07:27 AM	Tube furnace set to 150
10/22/2011	2:07:57 AM	Helium valve closed
10/22/2011	2:07:57 AM	H2 valve closed
10/22/2011	2:07:57 AM	BCl3 valve closed
10/22/2011	2:07:57 AM	PH3 valve closed
10/22/2011	2:07:57 AM	SiCl4 pre valve closed
10/22/2011	2:07:57 AM	SiCl4 post valve closed
10/22/2011	2:07:57 AM	Bypass valve closed
10/22/2011	2:07:57 AM	Bubbler valve closed
10/22/2011	2:07:57 AM	Main Vac valve opened
10/22/2011	2:07:57 AM	Helium MFC set to  0.000000
10/22/2011	2:07:57 AM	H2 MFC set to  0.000000
10/22/2011	2:07:57 AM	BCl3 MFC set to  0.000000
10/22/2011	2:07:57 AM	PHl3 MFC set to  0.000000
10/22/2011	2:07:57 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:07:57 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:07:58 AM	Tube furnace set to 150
10/22/2011	2:08:28 AM	H2 valve closed
10/22/2011	2:08:28 AM	BCl3 valve closed
10/22/2011	2:08:28 AM	PH3 valve closed
10/22/2011	2:08:28 AM	SiCl4 pre valve closed
10/22/2011	2:08:28 AM	SiCl4 post valve closed
10/22/2011	2:08:28 AM	Bypass valve closed
10/22/2011	2:08:28 AM	Bubbler valve closed
10/22/2011	2:08:28 AM	Helium valve opened
10/22/2011	2:08:28 AM	Main Vac valve opened
10/22/2011	2:08:28 AM	Helium MFC set to  20.000000
10/22/2011	2:08:28 AM	H2 MFC set to  0.000000
10/22/2011	2:08:28 AM	BCl3 MFC set to  0.000000
10/22/2011	2:08:28 AM	PHl3 MFC set to  0.000000
10/22/2011	2:08:28 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:08:28 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:08:28 AM	Tube furnace set to 150
10/22/2011	2:08:58 AM	Helium valve closed
10/22/2011	2:08:58 AM	H2 valve closed
10/22/2011	2:08:58 AM	BCl3 valve closed
10/22/2011	2:08:58 AM	PH3 valve closed
10/22/2011	2:08:58 AM	SiCl4 pre valve closed
10/22/2011	2:08:58 AM	SiCl4 post valve closed
10/22/2011	2:08:58 AM	Bypass valve closed
10/22/2011	2:08:58 AM	Bubbler valve closed
10/22/2011	2:08:58 AM	Main Vac valve opened
10/22/2011	2:08:58 AM	Helium MFC set to  0.000000
10/22/2011	2:08:58 AM	H2 MFC set to  0.000000
10/22/2011	2:08:58 AM	BCl3 MFC set to  0.000000
10/22/2011	2:08:58 AM	PHl3 MFC set to  0.000000
10/22/2011	2:08:58 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:08:58 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:08:58 AM	Tube furnace set to 150
10/22/2011	2:09:28 AM	H2 valve closed
10/22/2011	2:09:28 AM	BCl3 valve closed
10/22/2011	2:09:28 AM	PH3 valve closed
10/22/2011	2:09:28 AM	SiCl4 pre valve closed
10/22/2011	2:09:28 AM	SiCl4 post valve closed
10/22/2011	2:09:28 AM	Bypass valve closed
10/22/2011	2:09:28 AM	Bubbler valve closed
10/22/2011	2:09:28 AM	Helium valve opened
10/22/2011	2:09:28 AM	Main Vac valve opened
10/22/2011	2:09:28 AM	Helium MFC set to  20.000000
10/22/2011	2:09:28 AM	H2 MFC set to  0.000000
10/22/2011	2:09:28 AM	BCl3 MFC set to  0.000000
10/22/2011	2:09:28 AM	PHl3 MFC set to  0.000000
10/22/2011	2:09:28 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:09:28 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:09:28 AM	Tube furnace set to 150
10/22/2011	2:09:58 AM	Helium valve closed
10/22/2011	2:09:58 AM	H2 valve closed
10/22/2011	2:09:58 AM	BCl3 valve closed
10/22/2011	2:09:58 AM	PH3 valve closed
10/22/2011	2:09:58 AM	SiCl4 pre valve closed
10/22/2011	2:09:58 AM	SiCl4 post valve closed
10/22/2011	2:09:58 AM	Bypass valve closed
10/22/2011	2:09:58 AM	Bubbler valve closed
10/22/2011	2:09:58 AM	Main Vac valve opened
10/22/2011	2:09:58 AM	Helium MFC set to  0.000000
10/22/2011	2:09:58 AM	H2 MFC set to  0.000000
10/22/2011	2:09:58 AM	BCl3 MFC set to  0.000000
10/22/2011	2:09:58 AM	PHl3 MFC set to  0.000000
10/22/2011	2:09:58 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:09:58 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:09:58 AM	Tube furnace set to 150
10/22/2011	2:09:59 AM	Run finished at 2:09 AM
10/22/2011	2:10:51 AM	Recipe started at 2:10 AM
10/22/2011	2:10:51 AM	Helium valve closed
10/22/2011	2:10:51 AM	H2 valve closed
10/22/2011	2:10:51 AM	BCl3 valve closed
10/22/2011	2:10:51 AM	PH3 valve closed
10/22/2011	2:10:51 AM	SiCl4 pre valve closed
10/22/2011	2:10:51 AM	SiCl4 post valve closed
10/22/2011	2:10:51 AM	Bypass valve closed
10/22/2011	2:10:51 AM	Bubbler valve closed
10/22/2011	2:10:51 AM	Main Vac valve opened
10/22/2011	2:10:51 AM	Helium MFC set to  0.000000
10/22/2011	2:10:51 AM	H2 MFC set to  0.000000
10/22/2011	2:10:51 AM	BCl3 MFC set to  0.000000
10/22/2011	2:10:51 AM	PHl3 MFC set to  0.000000
10/22/2011	2:10:51 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:10:51 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:10:51 AM	Tube furnace set to 150
10/22/2011	2:11:21 AM	H2 valve closed
10/22/2011	2:11:21 AM	BCl3 valve closed
10/22/2011	2:11:21 AM	PH3 valve closed
10/22/2011	2:11:21 AM	SiCl4 pre valve closed
10/22/2011	2:11:21 AM	SiCl4 post valve closed
10/22/2011	2:11:21 AM	Bypass valve closed
10/22/2011	2:11:21 AM	Bubbler valve closed
10/22/2011	2:11:21 AM	Helium valve opened
10/22/2011	2:11:21 AM	Main Vac valve opened
10/22/2011	2:11:21 AM	Helium MFC set to  20.000000
10/22/2011	2:11:21 AM	H2 MFC set to  0.000000
10/22/2011	2:11:21 AM	BCl3 MFC set to  0.000000
10/22/2011	2:11:21 AM	PHl3 MFC set to  0.000000
10/22/2011	2:11:21 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:11:21 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:11:21 AM	Tube furnace set to 150
10/22/2011	2:11:51 AM	Helium valve closed
10/22/2011	2:11:51 AM	H2 valve closed
10/22/2011	2:11:51 AM	BCl3 valve closed
10/22/2011	2:11:51 AM	PH3 valve closed
10/22/2011	2:11:51 AM	SiCl4 pre valve closed
10/22/2011	2:11:51 AM	SiCl4 post valve closed
10/22/2011	2:11:51 AM	Bypass valve closed
10/22/2011	2:11:51 AM	Bubbler valve closed
10/22/2011	2:11:51 AM	Main Vac valve opened
10/22/2011	2:11:51 AM	Helium MFC set to  0.000000
10/22/2011	2:11:51 AM	H2 MFC set to  0.000000
10/22/2011	2:11:51 AM	BCl3 MFC set to  0.000000
10/22/2011	2:11:51 AM	PHl3 MFC set to  0.000000
10/22/2011	2:11:51 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:11:51 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:11:52 AM	Tube furnace set to 150
10/22/2011	2:12:22 AM	H2 valve closed
10/22/2011	2:12:22 AM	BCl3 valve closed
10/22/2011	2:12:22 AM	PH3 valve closed
10/22/2011	2:12:22 AM	SiCl4 pre valve closed
10/22/2011	2:12:22 AM	SiCl4 post valve closed
10/22/2011	2:12:22 AM	Bypass valve closed
10/22/2011	2:12:22 AM	Bubbler valve closed
10/22/2011	2:12:22 AM	Helium valve opened
10/22/2011	2:12:22 AM	Main Vac valve opened
10/22/2011	2:12:22 AM	Helium MFC set to  20.000000
10/22/2011	2:12:22 AM	H2 MFC set to  0.000000
10/22/2011	2:12:22 AM	BCl3 MFC set to  0.000000
10/22/2011	2:12:22 AM	PHl3 MFC set to  0.000000
10/22/2011	2:12:22 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:12:22 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:12:22 AM	Tube furnace set to 150
10/22/2011	2:12:52 AM	Helium valve closed
10/22/2011	2:12:52 AM	H2 valve closed
10/22/2011	2:12:52 AM	BCl3 valve closed
10/22/2011	2:12:52 AM	PH3 valve closed
10/22/2011	2:12:52 AM	SiCl4 pre valve closed
10/22/2011	2:12:52 AM	SiCl4 post valve closed
10/22/2011	2:12:52 AM	Bypass valve closed
10/22/2011	2:12:52 AM	Bubbler valve closed
10/22/2011	2:12:52 AM	Main Vac valve opened
10/22/2011	2:12:52 AM	Helium MFC set to  0.000000
10/22/2011	2:12:52 AM	H2 MFC set to  0.000000
10/22/2011	2:12:52 AM	BCl3 MFC set to  0.000000
10/22/2011	2:12:52 AM	PHl3 MFC set to  0.000000
10/22/2011	2:12:52 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:12:52 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:12:52 AM	Tube furnace set to 150
10/22/2011	2:13:22 AM	H2 valve closed
10/22/2011	2:13:22 AM	BCl3 valve closed
10/22/2011	2:13:22 AM	PH3 valve closed
10/22/2011	2:13:22 AM	SiCl4 pre valve closed
10/22/2011	2:13:22 AM	SiCl4 post valve closed
10/22/2011	2:13:22 AM	Bypass valve closed
10/22/2011	2:13:22 AM	Bubbler valve closed
10/22/2011	2:13:22 AM	Helium valve opened
10/22/2011	2:13:22 AM	Main Vac valve opened
10/22/2011	2:13:22 AM	Helium MFC set to  20.000000
10/22/2011	2:13:22 AM	H2 MFC set to  0.000000
10/22/2011	2:13:22 AM	BCl3 MFC set to  0.000000
10/22/2011	2:13:22 AM	PHl3 MFC set to  0.000000
10/22/2011	2:13:22 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:13:22 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:13:22 AM	Tube furnace set to 150
10/22/2011	2:13:52 AM	Helium valve closed
10/22/2011	2:13:52 AM	H2 valve closed
10/22/2011	2:13:52 AM	BCl3 valve closed
10/22/2011	2:13:52 AM	PH3 valve closed
10/22/2011	2:13:52 AM	SiCl4 pre valve closed
10/22/2011	2:13:52 AM	SiCl4 post valve closed
10/22/2011	2:13:52 AM	Bypass valve closed
10/22/2011	2:13:52 AM	Bubbler valve closed
10/22/2011	2:13:52 AM	Main Vac valve opened
10/22/2011	2:13:52 AM	Helium MFC set to  0.000000
10/22/2011	2:13:52 AM	H2 MFC set to  0.000000
10/22/2011	2:13:52 AM	BCl3 MFC set to  0.000000
10/22/2011	2:13:52 AM	PHl3 MFC set to  0.000000
10/22/2011	2:13:52 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:13:52 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:13:52 AM	Tube furnace set to 150
10/22/2011	2:14:22 AM	H2 valve closed
10/22/2011	2:14:22 AM	BCl3 valve closed
10/22/2011	2:14:22 AM	PH3 valve closed
10/22/2011	2:14:22 AM	SiCl4 pre valve closed
10/22/2011	2:14:22 AM	SiCl4 post valve closed
10/22/2011	2:14:22 AM	Bypass valve closed
10/22/2011	2:14:22 AM	Bubbler valve closed
10/22/2011	2:14:22 AM	Helium valve opened
10/22/2011	2:14:22 AM	Main Vac valve opened
10/22/2011	2:14:22 AM	Helium MFC set to  20.000000
10/22/2011	2:14:22 AM	H2 MFC set to  0.000000
10/22/2011	2:14:22 AM	BCl3 MFC set to  0.000000
10/22/2011	2:14:22 AM	PHl3 MFC set to  0.000000
10/22/2011	2:14:22 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:14:22 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:14:23 AM	Tube furnace set to 150
10/22/2011	2:14:53 AM	Helium valve closed
10/22/2011	2:14:53 AM	H2 valve closed
10/22/2011	2:14:53 AM	BCl3 valve closed
10/22/2011	2:14:53 AM	PH3 valve closed
10/22/2011	2:14:53 AM	SiCl4 pre valve closed
10/22/2011	2:14:53 AM	SiCl4 post valve closed
10/22/2011	2:14:53 AM	Bypass valve closed
10/22/2011	2:14:53 AM	Bubbler valve closed
10/22/2011	2:14:53 AM	Main Vac valve opened
10/22/2011	2:14:53 AM	Helium MFC set to  0.000000
10/22/2011	2:14:53 AM	H2 MFC set to  0.000000
10/22/2011	2:14:53 AM	BCl3 MFC set to  0.000000
10/22/2011	2:14:53 AM	PHl3 MFC set to  0.000000
10/22/2011	2:14:53 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:14:53 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:14:53 AM	Tube furnace set to 150
10/22/2011	2:15:23 AM	H2 valve closed
10/22/2011	2:15:23 AM	BCl3 valve closed
10/22/2011	2:15:23 AM	PH3 valve closed
10/22/2011	2:15:23 AM	SiCl4 pre valve closed
10/22/2011	2:15:23 AM	SiCl4 post valve closed
10/22/2011	2:15:23 AM	Bypass valve closed
10/22/2011	2:15:23 AM	Bubbler valve closed
10/22/2011	2:15:23 AM	Helium valve opened
10/22/2011	2:15:23 AM	Main Vac valve opened
10/22/2011	2:15:23 AM	Helium MFC set to  20.000000
10/22/2011	2:15:23 AM	H2 MFC set to  0.000000
10/22/2011	2:15:23 AM	BCl3 MFC set to  0.000000
10/22/2011	2:15:23 AM	PHl3 MFC set to  0.000000
10/22/2011	2:15:23 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:15:23 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:15:23 AM	Tube furnace set to 150
10/22/2011	2:15:53 AM	Helium valve closed
10/22/2011	2:15:53 AM	H2 valve closed
10/22/2011	2:15:53 AM	BCl3 valve closed
10/22/2011	2:15:53 AM	PH3 valve closed
10/22/2011	2:15:53 AM	SiCl4 pre valve closed
10/22/2011	2:15:53 AM	SiCl4 post valve closed
10/22/2011	2:15:53 AM	Bypass valve closed
10/22/2011	2:15:53 AM	Bubbler valve closed
10/22/2011	2:15:53 AM	Main Vac valve opened
10/22/2011	2:15:53 AM	Helium MFC set to  0.000000
10/22/2011	2:15:53 AM	H2 MFC set to  0.000000
10/22/2011	2:15:53 AM	BCl3 MFC set to  0.000000
10/22/2011	2:15:53 AM	PHl3 MFC set to  0.000000
10/22/2011	2:15:53 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:15:53 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:15:53 AM	Tube furnace set to 150
10/22/2011	2:16:23 AM	H2 valve closed
10/22/2011	2:16:23 AM	BCl3 valve closed
10/22/2011	2:16:23 AM	PH3 valve closed
10/22/2011	2:16:23 AM	SiCl4 pre valve closed
10/22/2011	2:16:23 AM	SiCl4 post valve closed
10/22/2011	2:16:23 AM	Bypass valve closed
10/22/2011	2:16:23 AM	Bubbler valve closed
10/22/2011	2:16:23 AM	Helium valve opened
10/22/2011	2:16:23 AM	Main Vac valve opened
10/22/2011	2:16:23 AM	Helium MFC set to  20.000000
10/22/2011	2:16:23 AM	H2 MFC set to  0.000000
10/22/2011	2:16:23 AM	BCl3 MFC set to  0.000000
10/22/2011	2:16:23 AM	PHl3 MFC set to  0.000000
10/22/2011	2:16:23 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:16:23 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:16:23 AM	Tube furnace set to 150
10/22/2011	2:16:53 AM	Helium valve closed
10/22/2011	2:16:53 AM	H2 valve closed
10/22/2011	2:16:53 AM	BCl3 valve closed
10/22/2011	2:16:53 AM	PH3 valve closed
10/22/2011	2:16:53 AM	SiCl4 pre valve closed
10/22/2011	2:16:53 AM	SiCl4 post valve closed
10/22/2011	2:16:53 AM	Bypass valve closed
10/22/2011	2:16:53 AM	Bubbler valve closed
10/22/2011	2:16:53 AM	Main Vac valve opened
10/22/2011	2:16:53 AM	Helium MFC set to  0.000000
10/22/2011	2:16:53 AM	H2 MFC set to  0.000000
10/22/2011	2:16:53 AM	BCl3 MFC set to  0.000000
10/22/2011	2:16:53 AM	PHl3 MFC set to  0.000000
10/22/2011	2:16:53 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:16:53 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:16:54 AM	Tube furnace set to 150
10/22/2011	2:17:24 AM	H2 valve closed
10/22/2011	2:17:24 AM	BCl3 valve closed
10/22/2011	2:17:24 AM	PH3 valve closed
10/22/2011	2:17:24 AM	SiCl4 pre valve closed
10/22/2011	2:17:24 AM	SiCl4 post valve closed
10/22/2011	2:17:24 AM	Bypass valve closed
10/22/2011	2:17:24 AM	Bubbler valve closed
10/22/2011	2:17:24 AM	Helium valve opened
10/22/2011	2:17:24 AM	Main Vac valve opened
10/22/2011	2:17:24 AM	Helium MFC set to  20.000000
10/22/2011	2:17:24 AM	H2 MFC set to  0.000000
10/22/2011	2:17:24 AM	BCl3 MFC set to  0.000000
10/22/2011	2:17:24 AM	PHl3 MFC set to  0.000000
10/22/2011	2:17:24 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:17:24 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:17:24 AM	Tube furnace set to 150
10/22/2011	2:17:54 AM	Helium valve closed
10/22/2011	2:17:54 AM	H2 valve closed
10/22/2011	2:17:54 AM	BCl3 valve closed
10/22/2011	2:17:54 AM	PH3 valve closed
10/22/2011	2:17:54 AM	SiCl4 pre valve closed
10/22/2011	2:17:54 AM	SiCl4 post valve closed
10/22/2011	2:17:54 AM	Bypass valve closed
10/22/2011	2:17:54 AM	Bubbler valve closed
10/22/2011	2:17:54 AM	Main Vac valve opened
10/22/2011	2:17:54 AM	Helium MFC set to  0.000000
10/22/2011	2:17:54 AM	H2 MFC set to  0.000000
10/22/2011	2:17:54 AM	BCl3 MFC set to  0.000000
10/22/2011	2:17:54 AM	PHl3 MFC set to  0.000000
10/22/2011	2:17:54 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:17:54 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:17:54 AM	Tube furnace set to 150
10/22/2011	2:18:24 AM	H2 valve closed
10/22/2011	2:18:24 AM	BCl3 valve closed
10/22/2011	2:18:24 AM	PH3 valve closed
10/22/2011	2:18:24 AM	SiCl4 pre valve closed
10/22/2011	2:18:24 AM	SiCl4 post valve closed
10/22/2011	2:18:24 AM	Bypass valve closed
10/22/2011	2:18:24 AM	Bubbler valve closed
10/22/2011	2:18:24 AM	Helium valve opened
10/22/2011	2:18:24 AM	Main Vac valve opened
10/22/2011	2:18:24 AM	Helium MFC set to  20.000000
10/22/2011	2:18:24 AM	H2 MFC set to  0.000000
10/22/2011	2:18:24 AM	BCl3 MFC set to  0.000000
10/22/2011	2:18:24 AM	PHl3 MFC set to  0.000000
10/22/2011	2:18:24 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:18:24 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:18:24 AM	Tube furnace set to 150
10/22/2011	2:18:54 AM	Helium valve closed
10/22/2011	2:18:54 AM	H2 valve closed
10/22/2011	2:18:54 AM	BCl3 valve closed
10/22/2011	2:18:54 AM	PH3 valve closed
10/22/2011	2:18:54 AM	SiCl4 pre valve closed
10/22/2011	2:18:54 AM	SiCl4 post valve closed
10/22/2011	2:18:54 AM	Bypass valve closed
10/22/2011	2:18:54 AM	Bubbler valve closed
10/22/2011	2:18:54 AM	Main Vac valve opened
10/22/2011	2:18:54 AM	Helium MFC set to  0.000000
10/22/2011	2:18:54 AM	H2 MFC set to  0.000000
10/22/2011	2:18:54 AM	BCl3 MFC set to  0.000000
10/22/2011	2:18:54 AM	PHl3 MFC set to  0.000000
10/22/2011	2:18:54 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:18:54 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:18:54 AM	Tube furnace set to 150
10/22/2011	2:19:24 AM	H2 valve closed
10/22/2011	2:19:24 AM	BCl3 valve closed
10/22/2011	2:19:24 AM	PH3 valve closed
10/22/2011	2:19:24 AM	SiCl4 pre valve closed
10/22/2011	2:19:24 AM	SiCl4 post valve closed
10/22/2011	2:19:24 AM	Bypass valve closed
10/22/2011	2:19:24 AM	Bubbler valve closed
10/22/2011	2:19:24 AM	Helium valve opened
10/22/2011	2:19:24 AM	Main Vac valve opened
10/22/2011	2:19:24 AM	Helium MFC set to  20.000000
10/22/2011	2:19:24 AM	H2 MFC set to  0.000000
10/22/2011	2:19:24 AM	BCl3 MFC set to  0.000000
10/22/2011	2:19:24 AM	PHl3 MFC set to  0.000000
10/22/2011	2:19:24 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:19:24 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:19:25 AM	Tube furnace set to 150
10/22/2011	2:19:55 AM	Helium valve closed
10/22/2011	2:19:55 AM	H2 valve closed
10/22/2011	2:19:55 AM	BCl3 valve closed
10/22/2011	2:19:55 AM	PH3 valve closed
10/22/2011	2:19:55 AM	SiCl4 pre valve closed
10/22/2011	2:19:55 AM	SiCl4 post valve closed
10/22/2011	2:19:55 AM	Bypass valve closed
10/22/2011	2:19:55 AM	Bubbler valve closed
10/22/2011	2:19:55 AM	Main Vac valve opened
10/22/2011	2:19:55 AM	Helium MFC set to  0.000000
10/22/2011	2:19:55 AM	H2 MFC set to  0.000000
10/22/2011	2:19:55 AM	BCl3 MFC set to  0.000000
10/22/2011	2:19:55 AM	PHl3 MFC set to  0.000000
10/22/2011	2:19:55 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:19:55 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:19:55 AM	Tube furnace set to 150
10/22/2011	2:20:25 AM	H2 valve closed
10/22/2011	2:20:25 AM	BCl3 valve closed
10/22/2011	2:20:25 AM	PH3 valve closed
10/22/2011	2:20:25 AM	SiCl4 pre valve closed
10/22/2011	2:20:25 AM	SiCl4 post valve closed
10/22/2011	2:20:25 AM	Bypass valve closed
10/22/2011	2:20:25 AM	Bubbler valve closed
10/22/2011	2:20:25 AM	Helium valve opened
10/22/2011	2:20:25 AM	Main Vac valve opened
10/22/2011	2:20:25 AM	Helium MFC set to  20.000000
10/22/2011	2:20:25 AM	H2 MFC set to  0.000000
10/22/2011	2:20:25 AM	BCl3 MFC set to  0.000000
10/22/2011	2:20:25 AM	PHl3 MFC set to  0.000000
10/22/2011	2:20:25 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:20:25 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:20:25 AM	Tube furnace set to 150
10/22/2011	2:20:55 AM	Helium valve closed
10/22/2011	2:20:55 AM	H2 valve closed
10/22/2011	2:20:55 AM	BCl3 valve closed
10/22/2011	2:20:55 AM	PH3 valve closed
10/22/2011	2:20:55 AM	SiCl4 pre valve closed
10/22/2011	2:20:55 AM	SiCl4 post valve closed
10/22/2011	2:20:55 AM	Bypass valve closed
10/22/2011	2:20:55 AM	Bubbler valve closed
10/22/2011	2:20:55 AM	Main Vac valve opened
10/22/2011	2:20:55 AM	Helium MFC set to  0.000000
10/22/2011	2:20:55 AM	H2 MFC set to  0.000000
10/22/2011	2:20:55 AM	BCl3 MFC set to  0.000000
10/22/2011	2:20:55 AM	PHl3 MFC set to  0.000000
10/22/2011	2:20:55 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:20:55 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:20:55 AM	Tube furnace set to 150
10/22/2011	2:20:56 AM	Run finished at 2:20 AM
10/22/2011	2:23:04 AM	Recipe started at 2:23 AM
10/22/2011	2:23:04 AM	Helium valve closed
10/22/2011	2:23:04 AM	H2 valve closed
10/22/2011	2:23:04 AM	BCl3 valve closed
10/22/2011	2:23:04 AM	PH3 valve closed
10/22/2011	2:23:04 AM	SiCl4 pre valve closed
10/22/2011	2:23:04 AM	SiCl4 post valve closed
10/22/2011	2:23:04 AM	Main Vac valve closed
10/22/2011	2:23:04 AM	Bypass valve closed
10/22/2011	2:23:04 AM	Bubbler valve closed
10/22/2011	2:23:04 AM	Helium MFC set to  0.000000
10/22/2011	2:23:04 AM	H2 MFC set to  0.000000
10/22/2011	2:23:04 AM	BCl3 MFC set to  0.000000
10/22/2011	2:23:04 AM	PHl3 MFC set to  0.000000
10/22/2011	2:23:04 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:23:04 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:23:04 AM	Tube furnace set to 0
10/22/2011	2:23:07 AM	Helium valve closed
10/22/2011	2:23:07 AM	BCl3 valve closed
10/22/2011	2:23:07 AM	PH3 valve closed
10/22/2011	2:23:07 AM	SiCl4 pre valve closed
10/22/2011	2:23:07 AM	SiCl4 post valve closed
10/22/2011	2:23:07 AM	Main Vac valve closed
10/22/2011	2:23:07 AM	Bypass valve closed
10/22/2011	2:23:07 AM	Bubbler valve closed
10/22/2011	2:23:07 AM	H2 valve opened
10/22/2011	2:23:07 AM	Helium MFC set to  0.000000
10/22/2011	2:23:07 AM	H2 MFC set to  500.000000
10/22/2011	2:23:07 AM	BCl3 MFC set to  0.000000
10/22/2011	2:23:07 AM	PHl3 MFC set to  0.000000
10/22/2011	2:23:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:23:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:23:07 AM	Tube furnace set to 0
10/22/2011	2:24:11 AM	Helium valve closed
10/22/2011	2:24:11 AM	BCl3 valve closed
10/22/2011	2:24:11 AM	PH3 valve closed
10/22/2011	2:24:11 AM	SiCl4 pre valve closed
10/22/2011	2:24:11 AM	SiCl4 post valve closed
10/22/2011	2:24:11 AM	Main Vac valve closed
10/22/2011	2:24:11 AM	Bypass valve closed
10/22/2011	2:24:11 AM	H2 valve opened
10/22/2011	2:24:11 AM	Bubbler valve opened
10/22/2011	2:24:11 AM	Helium MFC set to  0.000000
10/22/2011	2:24:11 AM	H2 MFC set to  500.000000
10/22/2011	2:24:11 AM	BCl3 MFC set to  0.000000
10/22/2011	2:24:11 AM	PHl3 MFC set to  0.000000
10/22/2011	2:24:11 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:24:11 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:24:11 AM	Tube furnace set to 0
10/22/2011	2:24:12 AM	Helium valve closed
10/22/2011	2:24:12 AM	BCl3 valve closed
10/22/2011	2:24:12 AM	PH3 valve closed
10/22/2011	2:24:12 AM	SiCl4 pre valve closed
10/22/2011	2:24:12 AM	SiCl4 post valve closed
10/22/2011	2:24:12 AM	Main Vac valve closed
10/22/2011	2:24:12 AM	Bypass valve closed
10/22/2011	2:24:12 AM	H2 valve opened
10/22/2011	2:24:12 AM	Bubbler valve opened
10/22/2011	2:24:12 AM	Helium MFC set to  0.000000
10/22/2011	2:24:12 AM	H2 MFC set to  500.000000
10/22/2011	2:24:12 AM	BCl3 MFC set to  0.000000
10/22/2011	2:24:12 AM	PHl3 MFC set to  0.000000
10/22/2011	2:24:12 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:24:12 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:24:13 AM	Tube furnace set to 1050
10/22/2011	2:28:16 AM	Run aborted at 2:28 AM
10/22/2011	2:28:16 AM	Helium valve closed
10/22/2011	2:28:16 AM	H2 valve closed
10/22/2011	2:28:16 AM	BCl3 valve closed
10/22/2011	2:28:16 AM	PH3 valve closed
10/22/2011	2:28:16 AM	SiCl4 pre valve closed
10/22/2011	2:28:16 AM	SiCl4 post valve closed
10/22/2011	2:28:16 AM	Bypass valve closed
10/22/2011	2:28:16 AM	Main Vac valve closed
10/22/2011	2:28:16 AM	Bubbler valve closed
10/22/2011	2:28:16 AM	Helium MFC set to  0.000000
10/22/2011	2:28:16 AM	H2 MFC set to  0.000000
10/22/2011	2:28:16 AM	BCl3 MFC set to  0.000000
10/22/2011	2:28:16 AM	PHl3 MFC set to  0.000000
10/22/2011	2:28:16 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:28:16 AM	Tube furnace set to 0
10/22/2011	2:28:46 AM	Recipe started at 2:28 AM
10/22/2011	2:28:46 AM	Helium valve closed
10/22/2011	2:28:46 AM	H2 valve closed
10/22/2011	2:28:46 AM	BCl3 valve closed
10/22/2011	2:28:46 AM	PH3 valve closed
10/22/2011	2:28:46 AM	SiCl4 pre valve closed
10/22/2011	2:28:46 AM	SiCl4 post valve closed
10/22/2011	2:28:46 AM	Main Vac valve closed
10/22/2011	2:28:46 AM	Bypass valve closed
10/22/2011	2:28:46 AM	Bubbler valve closed
10/22/2011	2:28:46 AM	Helium MFC set to  0.000000
10/22/2011	2:28:46 AM	H2 MFC set to  0.000000
10/22/2011	2:28:46 AM	BCl3 MFC set to  0.000000
10/22/2011	2:28:46 AM	PHl3 MFC set to  0.000000
10/22/2011	2:28:46 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:28:46 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:28:46 AM	Tube furnace set to 0
10/22/2011	2:28:50 AM	Helium valve closed
10/22/2011	2:28:50 AM	BCl3 valve closed
10/22/2011	2:28:50 AM	PH3 valve closed
10/22/2011	2:28:50 AM	SiCl4 pre valve closed
10/22/2011	2:28:50 AM	SiCl4 post valve closed
10/22/2011	2:28:50 AM	Main Vac valve closed
10/22/2011	2:28:50 AM	Bypass valve closed
10/22/2011	2:28:50 AM	Bubbler valve closed
10/22/2011	2:28:50 AM	H2 valve opened
10/22/2011	2:28:50 AM	Helium MFC set to  0.000000
10/22/2011	2:28:50 AM	H2 MFC set to  500.000000
10/22/2011	2:28:50 AM	BCl3 MFC set to  0.000000
10/22/2011	2:28:50 AM	PHl3 MFC set to  0.000000
10/22/2011	2:28:50 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:28:50 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:28:50 AM	Tube furnace set to 0
10/22/2011	2:28:50 AM	Helium valve closed
10/22/2011	2:28:50 AM	BCl3 valve closed
10/22/2011	2:28:50 AM	PH3 valve closed
10/22/2011	2:28:50 AM	SiCl4 pre valve closed
10/22/2011	2:28:50 AM	SiCl4 post valve closed
10/22/2011	2:28:50 AM	Main Vac valve closed
10/22/2011	2:28:50 AM	Bypass valve closed
10/22/2011	2:28:50 AM	H2 valve opened
10/22/2011	2:28:50 AM	Bubbler valve opened
10/22/2011	2:28:50 AM	Helium MFC set to  0.000000
10/22/2011	2:28:50 AM	H2 MFC set to  500.000000
10/22/2011	2:28:50 AM	BCl3 MFC set to  0.000000
10/22/2011	2:28:50 AM	PHl3 MFC set to  0.000000
10/22/2011	2:28:50 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:28:50 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:28:51 AM	Tube furnace set to 0
10/22/2011	2:28:52 AM	Helium valve closed
10/22/2011	2:28:52 AM	BCl3 valve closed
10/22/2011	2:28:52 AM	PH3 valve closed
10/22/2011	2:28:52 AM	SiCl4 pre valve closed
10/22/2011	2:28:52 AM	SiCl4 post valve closed
10/22/2011	2:28:52 AM	Main Vac valve closed
10/22/2011	2:28:52 AM	Bypass valve closed
10/22/2011	2:28:52 AM	H2 valve opened
10/22/2011	2:28:52 AM	Bubbler valve opened
10/22/2011	2:28:52 AM	Helium MFC set to  0.000000
10/22/2011	2:28:52 AM	H2 MFC set to  500.000000
10/22/2011	2:28:52 AM	BCl3 MFC set to  0.000000
10/22/2011	2:28:52 AM	PHl3 MFC set to  0.000000
10/22/2011	2:28:52 AM	SiCl4 MFC set to  0.000000
10/22/2011	2:28:52 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:28:52 AM	Tube furnace set to 1050
10/22/2011	2:58:52 AM	Helium valve closed
10/22/2011	2:58:52 AM	BCl3 valve closed
10/22/2011	2:58:52 AM	PH3 valve closed
10/22/2011	2:58:52 AM	Main Vac valve closed
10/22/2011	2:58:52 AM	Bypass valve closed
10/22/2011	2:58:52 AM	H2 valve opened
10/22/2011	2:58:52 AM	SiCl4 pre valve opened
10/22/2011	2:58:52 AM	SiCl4 post valve opened
10/22/2011	2:58:52 AM	Bubbler valve opened
10/22/2011	2:58:52 AM	Helium MFC set to  0.000000
10/22/2011	2:58:52 AM	H2 MFC set to  500.000000
10/22/2011	2:58:52 AM	BCl3 MFC set to  0.000000
10/22/2011	2:58:52 AM	PHl3 MFC set to  0.000000
10/22/2011	2:58:52 AM	SiCl4 MFC set to  47.500000
10/22/2011	2:58:52 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:58:52 AM	Tube furnace set to 1050
10/22/2011	3:08:52 AM	Helium valve closed
10/22/2011	3:08:52 AM	BCl3 valve closed
10/22/2011	3:08:52 AM	PH3 valve closed
10/22/2011	3:08:52 AM	SiCl4 pre valve closed
10/22/2011	3:08:52 AM	SiCl4 post valve closed
10/22/2011	3:08:52 AM	Main Vac valve closed
10/22/2011	3:08:52 AM	Bypass valve closed
10/22/2011	3:08:52 AM	H2 valve opened
10/22/2011	3:08:52 AM	Bubbler valve opened
10/22/2011	3:08:52 AM	Helium MFC set to  0.000000
10/22/2011	3:08:52 AM	H2 MFC set to  500.000000
10/22/2011	3:08:52 AM	BCl3 MFC set to  0.000000
10/22/2011	3:08:52 AM	PHl3 MFC set to  0.000000
10/22/2011	3:08:52 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:08:52 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:08:52 AM	Tube furnace set to 750
10/22/2011	3:18:52 AM	H2 valve closed
10/22/2011	3:18:52 AM	BCl3 valve closed
10/22/2011	3:18:52 AM	PH3 valve closed
10/22/2011	3:18:52 AM	SiCl4 pre valve closed
10/22/2011	3:18:52 AM	SiCl4 post valve closed
10/22/2011	3:18:52 AM	Main Vac valve closed
10/22/2011	3:18:52 AM	Bypass valve closed
10/22/2011	3:18:52 AM	Helium valve opened
10/22/2011	3:18:52 AM	Bubbler valve opened
10/22/2011	3:18:52 AM	Helium MFC set to  500.000000
10/22/2011	3:18:52 AM	H2 MFC set to  0.000000
10/22/2011	3:18:52 AM	BCl3 MFC set to  0.000000
10/22/2011	3:18:52 AM	PHl3 MFC set to  0.000000
10/22/2011	3:18:52 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:18:52 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:18:52 AM	Tube furnace set to 0
10/22/2011	3:27:10 AM	Helium valve closed
10/22/2011	3:27:10 AM	H2 valve closed
10/22/2011	3:27:10 AM	BCl3 valve closed
10/22/2011	3:27:10 AM	PH3 valve closed
10/22/2011	3:27:10 AM	SiCl4 pre valve closed
10/22/2011	3:27:10 AM	SiCl4 post valve closed
10/22/2011	3:27:10 AM	Main Vac valve closed
10/22/2011	3:27:10 AM	Bubbler valve closed
10/22/2011	3:27:10 AM	Bypass valve closed
10/22/2011	3:27:10 AM	Helium MFC set to  0.000000
10/22/2011	3:27:10 AM	H2 MFC set to  0.000000
10/22/2011	3:27:10 AM	BCl3 MFC set to  0.000000
10/22/2011	3:27:10 AM	PHl3 MFC set to  0.000000
10/22/2011	3:27:10 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:27:10 AM	Bypass solenoid MFC set to  760.000000
10/22/2011	3:27:10 AM	Tube furnace set to 0
10/22/2011	3:27:10 AM	Baratron reads 741.318321 Torr and NaOH valve is open.  Emergency exit.
10/22/2011	3:27:20 AM	Run aborted at 3:27 AM
10/22/2011	3:27:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	3:27:26 AM	Recipe started at 3:27 AM
10/22/2011	3:27:26 AM	Helium valve closed
10/22/2011	3:27:26 AM	H2 valve closed
10/22/2011	3:27:26 AM	BCl3 valve closed
10/22/2011	3:27:26 AM	PH3 valve closed
10/22/2011	3:27:26 AM	SiCl4 pre valve closed
10/22/2011	3:27:26 AM	SiCl4 post valve closed
10/22/2011	3:27:26 AM	Main Vac valve closed
10/22/2011	3:27:26 AM	Bypass valve closed
10/22/2011	3:27:26 AM	Bubbler valve closed
10/22/2011	3:27:26 AM	Helium MFC set to  0.000000
10/22/2011	3:27:26 AM	H2 MFC set to  0.000000
10/22/2011	3:27:26 AM	BCl3 MFC set to  0.000000
10/22/2011	3:27:26 AM	PHl3 MFC set to  0.000000
10/22/2011	3:27:26 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:27:26 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:27:26 AM	Tube furnace set to 0
10/22/2011	3:27:29 AM	H2 valve closed
10/22/2011	3:27:29 AM	BCl3 valve closed
10/22/2011	3:27:29 AM	PH3 valve closed
10/22/2011	3:27:29 AM	SiCl4 pre valve closed
10/22/2011	3:27:29 AM	SiCl4 post valve closed
10/22/2011	3:27:29 AM	Main Vac valve closed
10/22/2011	3:27:29 AM	Bypass valve closed
10/22/2011	3:27:29 AM	Bubbler valve closed
10/22/2011	3:27:29 AM	Helium valve opened
10/22/2011	3:27:29 AM	Helium MFC set to  500.000000
10/22/2011	3:27:29 AM	H2 MFC set to  0.000000
10/22/2011	3:27:29 AM	BCl3 MFC set to  0.000000
10/22/2011	3:27:29 AM	PHl3 MFC set to  0.000000
10/22/2011	3:27:29 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:27:29 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:27:29 AM	Tube furnace set to 0
10/22/2011	3:27:30 AM	Helium valve closed
10/22/2011	3:27:30 AM	H2 valve closed
10/22/2011	3:27:30 AM	BCl3 valve closed
10/22/2011	3:27:30 AM	PH3 valve closed
10/22/2011	3:27:30 AM	SiCl4 pre valve closed
10/22/2011	3:27:30 AM	SiCl4 post valve closed
10/22/2011	3:27:30 AM	Main Vac valve closed
10/22/2011	3:27:30 AM	Bypass valve closed
10/22/2011	3:27:30 AM	Bubbler valve closed
10/22/2011	3:27:30 AM	Helium MFC set to  0.000000
10/22/2011	3:27:30 AM	H2 MFC set to  0.000000
10/22/2011	3:27:30 AM	BCl3 MFC set to  0.000000
10/22/2011	3:27:30 AM	PHl3 MFC set to  0.000000
10/22/2011	3:27:30 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:27:30 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:27:30 AM	Tube furnace set to 0
10/22/2011	3:27:31 AM	Run finished at 3:27 AM
10/22/2011	3:27:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	3:45:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	3:45:26 AM	Recipe started at 3:45 AM
10/22/2011	3:45:27 AM	Helium valve closed
10/22/2011	3:45:27 AM	H2 valve closed
10/22/2011	3:45:27 AM	BCl3 valve closed
10/22/2011	3:45:27 AM	PH3 valve closed
10/22/2011	3:45:27 AM	SiCl4 pre valve closed
10/22/2011	3:45:27 AM	SiCl4 post valve closed
10/22/2011	3:45:27 AM	Main Vac valve closed
10/22/2011	3:45:27 AM	Bubbler valve closed
10/22/2011	3:45:27 AM	Bypass valve opened
10/22/2011	3:45:27 AM	Helium MFC set to  0.000000
10/22/2011	3:45:27 AM	H2 MFC set to  0.000000
10/22/2011	3:45:27 AM	BCl3 MFC set to  0.000000
10/22/2011	3:45:27 AM	PHl3 MFC set to  0.000000
10/22/2011	3:45:27 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:45:27 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:45:27 AM	Tube furnace set to 0
10/22/2011	3:46:39 AM	Helium valve closed
10/22/2011	3:46:39 AM	H2 valve closed
10/22/2011	3:46:39 AM	BCl3 valve closed
10/22/2011	3:46:39 AM	PH3 valve closed
10/22/2011	3:46:39 AM	SiCl4 pre valve closed
10/22/2011	3:46:39 AM	SiCl4 post valve closed
10/22/2011	3:46:39 AM	Main Vac valve closed
10/22/2011	3:46:39 AM	Bubbler valve closed
10/22/2011	3:46:39 AM	Bypass valve opened
10/22/2011	3:46:39 AM	Helium MFC set to  0.000000
10/22/2011	3:46:39 AM	H2 MFC set to  0.000000
10/22/2011	3:46:39 AM	BCl3 MFC set to  0.000000
10/22/2011	3:46:39 AM	PHl3 MFC set to  0.000000
10/22/2011	3:46:39 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:46:39 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:46:39 AM	Tube furnace set to 0
10/22/2011	3:47:39 AM	Helium valve closed
10/22/2011	3:47:39 AM	H2 valve closed
10/22/2011	3:47:39 AM	BCl3 valve closed
10/22/2011	3:47:39 AM	PH3 valve closed
10/22/2011	3:47:39 AM	SiCl4 pre valve closed
10/22/2011	3:47:39 AM	SiCl4 post valve closed
10/22/2011	3:47:39 AM	Bypass valve closed
10/22/2011	3:47:39 AM	Bubbler valve closed
10/22/2011	3:47:39 AM	Main Vac valve opened
10/22/2011	3:47:39 AM	Helium MFC set to  0.000000
10/22/2011	3:47:39 AM	H2 MFC set to  0.000000
10/22/2011	3:47:39 AM	BCl3 MFC set to  0.000000
10/22/2011	3:47:39 AM	PHl3 MFC set to  0.000000
10/22/2011	3:47:39 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:47:39 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:47:40 AM	Tube furnace set to 0
10/22/2011	3:47:41 AM	Run finished at 3:47 AM
10/22/2011	3:47:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	3:54:34 AM	Recipe started at 3:54 AM
10/22/2011	3:54:34 AM	Helium valve closed
10/22/2011	3:54:34 AM	H2 valve closed
10/22/2011	3:54:34 AM	BCl3 valve closed
10/22/2011	3:54:34 AM	PH3 valve closed
10/22/2011	3:54:34 AM	SiCl4 pre valve closed
10/22/2011	3:54:34 AM	SiCl4 post valve closed
10/22/2011	3:54:34 AM	Bypass valve closed
10/22/2011	3:54:34 AM	Bubbler valve closed
10/22/2011	3:54:34 AM	Main Vac valve opened
10/22/2011	3:54:34 AM	Helium MFC set to  0.000000
10/22/2011	3:54:34 AM	H2 MFC set to  0.000000
10/22/2011	3:54:34 AM	BCl3 MFC set to  0.000000
10/22/2011	3:54:34 AM	PHl3 MFC set to  0.000000
10/22/2011	3:54:34 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:54:34 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:54:34 AM	Tube furnace set to 150
10/22/2011	3:55:04 AM	H2 valve closed
10/22/2011	3:55:04 AM	BCl3 valve closed
10/22/2011	3:55:04 AM	PH3 valve closed
10/22/2011	3:55:04 AM	SiCl4 pre valve closed
10/22/2011	3:55:04 AM	SiCl4 post valve closed
10/22/2011	3:55:04 AM	Bypass valve closed
10/22/2011	3:55:04 AM	Bubbler valve closed
10/22/2011	3:55:04 AM	Helium valve opened
10/22/2011	3:55:04 AM	Main Vac valve opened
10/22/2011	3:55:04 AM	Helium MFC set to  20.000000
10/22/2011	3:55:04 AM	H2 MFC set to  0.000000
10/22/2011	3:55:04 AM	BCl3 MFC set to  0.000000
10/22/2011	3:55:04 AM	PHl3 MFC set to  0.000000
10/22/2011	3:55:04 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:55:04 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:55:04 AM	Tube furnace set to 150
10/22/2011	3:55:34 AM	Helium valve closed
10/22/2011	3:55:34 AM	H2 valve closed
10/22/2011	3:55:34 AM	BCl3 valve closed
10/22/2011	3:55:34 AM	PH3 valve closed
10/22/2011	3:55:34 AM	SiCl4 pre valve closed
10/22/2011	3:55:34 AM	SiCl4 post valve closed
10/22/2011	3:55:34 AM	Bypass valve closed
10/22/2011	3:55:34 AM	Bubbler valve closed
10/22/2011	3:55:34 AM	Main Vac valve opened
10/22/2011	3:55:34 AM	Helium MFC set to  0.000000
10/22/2011	3:55:34 AM	H2 MFC set to  0.000000
10/22/2011	3:55:34 AM	BCl3 MFC set to  0.000000
10/22/2011	3:55:34 AM	PHl3 MFC set to  0.000000
10/22/2011	3:55:34 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:55:34 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:55:34 AM	Tube furnace set to 150
10/22/2011	3:56:04 AM	H2 valve closed
10/22/2011	3:56:04 AM	BCl3 valve closed
10/22/2011	3:56:04 AM	PH3 valve closed
10/22/2011	3:56:04 AM	SiCl4 pre valve closed
10/22/2011	3:56:04 AM	SiCl4 post valve closed
10/22/2011	3:56:04 AM	Bypass valve closed
10/22/2011	3:56:04 AM	Bubbler valve closed
10/22/2011	3:56:04 AM	Helium valve opened
10/22/2011	3:56:04 AM	Main Vac valve opened
10/22/2011	3:56:04 AM	Helium MFC set to  20.000000
10/22/2011	3:56:04 AM	H2 MFC set to  0.000000
10/22/2011	3:56:04 AM	BCl3 MFC set to  0.000000
10/22/2011	3:56:04 AM	PHl3 MFC set to  0.000000
10/22/2011	3:56:04 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:56:04 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:56:05 AM	Tube furnace set to 150
10/22/2011	3:56:35 AM	Helium valve closed
10/22/2011	3:56:35 AM	H2 valve closed
10/22/2011	3:56:35 AM	BCl3 valve closed
10/22/2011	3:56:35 AM	PH3 valve closed
10/22/2011	3:56:35 AM	SiCl4 pre valve closed
10/22/2011	3:56:35 AM	SiCl4 post valve closed
10/22/2011	3:56:35 AM	Bypass valve closed
10/22/2011	3:56:35 AM	Bubbler valve closed
10/22/2011	3:56:35 AM	Main Vac valve opened
10/22/2011	3:56:35 AM	Helium MFC set to  0.000000
10/22/2011	3:56:35 AM	H2 MFC set to  0.000000
10/22/2011	3:56:35 AM	BCl3 MFC set to  0.000000
10/22/2011	3:56:35 AM	PHl3 MFC set to  0.000000
10/22/2011	3:56:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:56:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:56:35 AM	Tube furnace set to 150
10/22/2011	3:57:05 AM	H2 valve closed
10/22/2011	3:57:05 AM	BCl3 valve closed
10/22/2011	3:57:05 AM	PH3 valve closed
10/22/2011	3:57:05 AM	SiCl4 pre valve closed
10/22/2011	3:57:05 AM	SiCl4 post valve closed
10/22/2011	3:57:05 AM	Bypass valve closed
10/22/2011	3:57:05 AM	Bubbler valve closed
10/22/2011	3:57:05 AM	Helium valve opened
10/22/2011	3:57:05 AM	Main Vac valve opened
10/22/2011	3:57:05 AM	Helium MFC set to  20.000000
10/22/2011	3:57:05 AM	H2 MFC set to  0.000000
10/22/2011	3:57:05 AM	BCl3 MFC set to  0.000000
10/22/2011	3:57:05 AM	PHl3 MFC set to  0.000000
10/22/2011	3:57:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:57:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:57:05 AM	Tube furnace set to 150
10/22/2011	3:57:35 AM	Helium valve closed
10/22/2011	3:57:35 AM	H2 valve closed
10/22/2011	3:57:35 AM	BCl3 valve closed
10/22/2011	3:57:35 AM	PH3 valve closed
10/22/2011	3:57:35 AM	SiCl4 pre valve closed
10/22/2011	3:57:35 AM	SiCl4 post valve closed
10/22/2011	3:57:35 AM	Bypass valve closed
10/22/2011	3:57:35 AM	Bubbler valve closed
10/22/2011	3:57:35 AM	Main Vac valve opened
10/22/2011	3:57:35 AM	Helium MFC set to  0.000000
10/22/2011	3:57:35 AM	H2 MFC set to  0.000000
10/22/2011	3:57:35 AM	BCl3 MFC set to  0.000000
10/22/2011	3:57:35 AM	PHl3 MFC set to  0.000000
10/22/2011	3:57:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:57:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:57:35 AM	Tube furnace set to 150
10/22/2011	3:58:05 AM	H2 valve closed
10/22/2011	3:58:05 AM	BCl3 valve closed
10/22/2011	3:58:05 AM	PH3 valve closed
10/22/2011	3:58:05 AM	SiCl4 pre valve closed
10/22/2011	3:58:05 AM	SiCl4 post valve closed
10/22/2011	3:58:05 AM	Bypass valve closed
10/22/2011	3:58:05 AM	Bubbler valve closed
10/22/2011	3:58:05 AM	Helium valve opened
10/22/2011	3:58:05 AM	Main Vac valve opened
10/22/2011	3:58:05 AM	Helium MFC set to  20.000000
10/22/2011	3:58:05 AM	H2 MFC set to  0.000000
10/22/2011	3:58:05 AM	BCl3 MFC set to  0.000000
10/22/2011	3:58:05 AM	PHl3 MFC set to  0.000000
10/22/2011	3:58:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:58:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:58:05 AM	Tube furnace set to 150
10/22/2011	3:58:35 AM	Helium valve closed
10/22/2011	3:58:35 AM	H2 valve closed
10/22/2011	3:58:35 AM	BCl3 valve closed
10/22/2011	3:58:35 AM	PH3 valve closed
10/22/2011	3:58:35 AM	SiCl4 pre valve closed
10/22/2011	3:58:35 AM	SiCl4 post valve closed
10/22/2011	3:58:35 AM	Bypass valve closed
10/22/2011	3:58:35 AM	Bubbler valve closed
10/22/2011	3:58:35 AM	Main Vac valve opened
10/22/2011	3:58:35 AM	Helium MFC set to  0.000000
10/22/2011	3:58:35 AM	H2 MFC set to  0.000000
10/22/2011	3:58:35 AM	BCl3 MFC set to  0.000000
10/22/2011	3:58:35 AM	PHl3 MFC set to  0.000000
10/22/2011	3:58:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:58:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:58:36 AM	Tube furnace set to 150
10/22/2011	3:59:06 AM	H2 valve closed
10/22/2011	3:59:06 AM	BCl3 valve closed
10/22/2011	3:59:06 AM	PH3 valve closed
10/22/2011	3:59:06 AM	SiCl4 pre valve closed
10/22/2011	3:59:06 AM	SiCl4 post valve closed
10/22/2011	3:59:06 AM	Bypass valve closed
10/22/2011	3:59:06 AM	Bubbler valve closed
10/22/2011	3:59:06 AM	Helium valve opened
10/22/2011	3:59:06 AM	Main Vac valve opened
10/22/2011	3:59:06 AM	Helium MFC set to  20.000000
10/22/2011	3:59:06 AM	H2 MFC set to  0.000000
10/22/2011	3:59:06 AM	BCl3 MFC set to  0.000000
10/22/2011	3:59:06 AM	PHl3 MFC set to  0.000000
10/22/2011	3:59:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:59:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:59:06 AM	Tube furnace set to 150
10/22/2011	3:59:36 AM	Helium valve closed
10/22/2011	3:59:36 AM	H2 valve closed
10/22/2011	3:59:36 AM	BCl3 valve closed
10/22/2011	3:59:36 AM	PH3 valve closed
10/22/2011	3:59:36 AM	SiCl4 pre valve closed
10/22/2011	3:59:36 AM	SiCl4 post valve closed
10/22/2011	3:59:36 AM	Bypass valve closed
10/22/2011	3:59:36 AM	Bubbler valve closed
10/22/2011	3:59:36 AM	Main Vac valve opened
10/22/2011	3:59:36 AM	Helium MFC set to  0.000000
10/22/2011	3:59:36 AM	H2 MFC set to  0.000000
10/22/2011	3:59:36 AM	BCl3 MFC set to  0.000000
10/22/2011	3:59:36 AM	PHl3 MFC set to  0.000000
10/22/2011	3:59:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	3:59:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:59:36 AM	Tube furnace set to 150
10/22/2011	4:00:06 AM	H2 valve closed
10/22/2011	4:00:06 AM	BCl3 valve closed
10/22/2011	4:00:06 AM	PH3 valve closed
10/22/2011	4:00:06 AM	SiCl4 pre valve closed
10/22/2011	4:00:06 AM	SiCl4 post valve closed
10/22/2011	4:00:06 AM	Bypass valve closed
10/22/2011	4:00:06 AM	Bubbler valve closed
10/22/2011	4:00:06 AM	Helium valve opened
10/22/2011	4:00:06 AM	Main Vac valve opened
10/22/2011	4:00:06 AM	Helium MFC set to  20.000000
10/22/2011	4:00:06 AM	H2 MFC set to  0.000000
10/22/2011	4:00:06 AM	BCl3 MFC set to  0.000000
10/22/2011	4:00:06 AM	PHl3 MFC set to  0.000000
10/22/2011	4:00:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:00:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:00:06 AM	Tube furnace set to 150
10/22/2011	4:00:36 AM	Helium valve closed
10/22/2011	4:00:36 AM	H2 valve closed
10/22/2011	4:00:36 AM	BCl3 valve closed
10/22/2011	4:00:36 AM	PH3 valve closed
10/22/2011	4:00:36 AM	SiCl4 pre valve closed
10/22/2011	4:00:36 AM	SiCl4 post valve closed
10/22/2011	4:00:36 AM	Bypass valve closed
10/22/2011	4:00:36 AM	Bubbler valve closed
10/22/2011	4:00:36 AM	Main Vac valve opened
10/22/2011	4:00:36 AM	Helium MFC set to  0.000000
10/22/2011	4:00:36 AM	H2 MFC set to  0.000000
10/22/2011	4:00:36 AM	BCl3 MFC set to  0.000000
10/22/2011	4:00:36 AM	PHl3 MFC set to  0.000000
10/22/2011	4:00:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:00:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:00:36 AM	Tube furnace set to 150
10/22/2011	4:01:07 AM	H2 valve closed
10/22/2011	4:01:07 AM	BCl3 valve closed
10/22/2011	4:01:07 AM	PH3 valve closed
10/22/2011	4:01:07 AM	SiCl4 pre valve closed
10/22/2011	4:01:07 AM	SiCl4 post valve closed
10/22/2011	4:01:07 AM	Bypass valve closed
10/22/2011	4:01:07 AM	Bubbler valve closed
10/22/2011	4:01:07 AM	Helium valve opened
10/22/2011	4:01:07 AM	Main Vac valve opened
10/22/2011	4:01:07 AM	Helium MFC set to  20.000000
10/22/2011	4:01:07 AM	H2 MFC set to  0.000000
10/22/2011	4:01:07 AM	BCl3 MFC set to  0.000000
10/22/2011	4:01:07 AM	PHl3 MFC set to  0.000000
10/22/2011	4:01:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:01:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:01:07 AM	Tube furnace set to 150
10/22/2011	4:01:37 AM	Helium valve closed
10/22/2011	4:01:37 AM	H2 valve closed
10/22/2011	4:01:37 AM	BCl3 valve closed
10/22/2011	4:01:37 AM	PH3 valve closed
10/22/2011	4:01:37 AM	SiCl4 pre valve closed
10/22/2011	4:01:37 AM	SiCl4 post valve closed
10/22/2011	4:01:37 AM	Bypass valve closed
10/22/2011	4:01:37 AM	Bubbler valve closed
10/22/2011	4:01:37 AM	Main Vac valve opened
10/22/2011	4:01:37 AM	Helium MFC set to  0.000000
10/22/2011	4:01:37 AM	H2 MFC set to  0.000000
10/22/2011	4:01:37 AM	BCl3 MFC set to  0.000000
10/22/2011	4:01:37 AM	PHl3 MFC set to  0.000000
10/22/2011	4:01:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:01:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:01:37 AM	Tube furnace set to 150
10/22/2011	4:02:07 AM	H2 valve closed
10/22/2011	4:02:07 AM	BCl3 valve closed
10/22/2011	4:02:07 AM	PH3 valve closed
10/22/2011	4:02:07 AM	SiCl4 pre valve closed
10/22/2011	4:02:07 AM	SiCl4 post valve closed
10/22/2011	4:02:07 AM	Bypass valve closed
10/22/2011	4:02:07 AM	Bubbler valve closed
10/22/2011	4:02:07 AM	Helium valve opened
10/22/2011	4:02:07 AM	Main Vac valve opened
10/22/2011	4:02:07 AM	Helium MFC set to  20.000000
10/22/2011	4:02:07 AM	H2 MFC set to  0.000000
10/22/2011	4:02:07 AM	BCl3 MFC set to  0.000000
10/22/2011	4:02:07 AM	PHl3 MFC set to  0.000000
10/22/2011	4:02:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:02:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:02:07 AM	Tube furnace set to 150
10/22/2011	4:02:37 AM	Helium valve closed
10/22/2011	4:02:37 AM	H2 valve closed
10/22/2011	4:02:37 AM	BCl3 valve closed
10/22/2011	4:02:37 AM	PH3 valve closed
10/22/2011	4:02:37 AM	SiCl4 pre valve closed
10/22/2011	4:02:37 AM	SiCl4 post valve closed
10/22/2011	4:02:37 AM	Bypass valve closed
10/22/2011	4:02:37 AM	Bubbler valve closed
10/22/2011	4:02:37 AM	Main Vac valve opened
10/22/2011	4:02:37 AM	Helium MFC set to  0.000000
10/22/2011	4:02:37 AM	H2 MFC set to  0.000000
10/22/2011	4:02:37 AM	BCl3 MFC set to  0.000000
10/22/2011	4:02:37 AM	PHl3 MFC set to  0.000000
10/22/2011	4:02:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:02:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:02:37 AM	Tube furnace set to 150
10/22/2011	4:03:07 AM	H2 valve closed
10/22/2011	4:03:07 AM	BCl3 valve closed
10/22/2011	4:03:07 AM	PH3 valve closed
10/22/2011	4:03:07 AM	SiCl4 pre valve closed
10/22/2011	4:03:07 AM	SiCl4 post valve closed
10/22/2011	4:03:07 AM	Bypass valve closed
10/22/2011	4:03:07 AM	Bubbler valve closed
10/22/2011	4:03:07 AM	Helium valve opened
10/22/2011	4:03:07 AM	Main Vac valve opened
10/22/2011	4:03:07 AM	Helium MFC set to  20.000000
10/22/2011	4:03:07 AM	H2 MFC set to  0.000000
10/22/2011	4:03:07 AM	BCl3 MFC set to  0.000000
10/22/2011	4:03:07 AM	PHl3 MFC set to  0.000000
10/22/2011	4:03:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:03:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:03:08 AM	Tube furnace set to 150
10/22/2011	4:03:38 AM	Helium valve closed
10/22/2011	4:03:38 AM	H2 valve closed
10/22/2011	4:03:38 AM	BCl3 valve closed
10/22/2011	4:03:38 AM	PH3 valve closed
10/22/2011	4:03:38 AM	SiCl4 pre valve closed
10/22/2011	4:03:38 AM	SiCl4 post valve closed
10/22/2011	4:03:38 AM	Bypass valve closed
10/22/2011	4:03:38 AM	Bubbler valve closed
10/22/2011	4:03:38 AM	Main Vac valve opened
10/22/2011	4:03:38 AM	Helium MFC set to  0.000000
10/22/2011	4:03:38 AM	H2 MFC set to  0.000000
10/22/2011	4:03:38 AM	BCl3 MFC set to  0.000000
10/22/2011	4:03:38 AM	PHl3 MFC set to  0.000000
10/22/2011	4:03:38 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:03:38 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:03:38 AM	Tube furnace set to 150
10/22/2011	4:04:08 AM	H2 valve closed
10/22/2011	4:04:08 AM	BCl3 valve closed
10/22/2011	4:04:08 AM	PH3 valve closed
10/22/2011	4:04:08 AM	SiCl4 pre valve closed
10/22/2011	4:04:08 AM	SiCl4 post valve closed
10/22/2011	4:04:08 AM	Bypass valve closed
10/22/2011	4:04:08 AM	Bubbler valve closed
10/22/2011	4:04:08 AM	Helium valve opened
10/22/2011	4:04:08 AM	Main Vac valve opened
10/22/2011	4:04:08 AM	Helium MFC set to  20.000000
10/22/2011	4:04:08 AM	H2 MFC set to  0.000000
10/22/2011	4:04:08 AM	BCl3 MFC set to  0.000000
10/22/2011	4:04:08 AM	PHl3 MFC set to  0.000000
10/22/2011	4:04:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:04:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:04:08 AM	Tube furnace set to 150
10/22/2011	4:04:38 AM	Helium valve closed
10/22/2011	4:04:38 AM	H2 valve closed
10/22/2011	4:04:38 AM	BCl3 valve closed
10/22/2011	4:04:38 AM	PH3 valve closed
10/22/2011	4:04:38 AM	SiCl4 pre valve closed
10/22/2011	4:04:38 AM	SiCl4 post valve closed
10/22/2011	4:04:38 AM	Bypass valve closed
10/22/2011	4:04:38 AM	Bubbler valve closed
10/22/2011	4:04:38 AM	Main Vac valve opened
10/22/2011	4:04:38 AM	Helium MFC set to  0.000000
10/22/2011	4:04:38 AM	H2 MFC set to  0.000000
10/22/2011	4:04:38 AM	BCl3 MFC set to  0.000000
10/22/2011	4:04:38 AM	PHl3 MFC set to  0.000000
10/22/2011	4:04:38 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:04:38 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:04:38 AM	Tube furnace set to 150
10/22/2011	4:04:39 AM	Run finished at 4:04 AM
10/22/2011	4:05:04 AM	Recipe started at 4:04 AM
10/22/2011	4:05:05 AM	Helium valve closed
10/22/2011	4:05:05 AM	H2 valve closed
10/22/2011	4:05:05 AM	BCl3 valve closed
10/22/2011	4:05:05 AM	PH3 valve closed
10/22/2011	4:05:05 AM	SiCl4 pre valve closed
10/22/2011	4:05:05 AM	SiCl4 post valve closed
10/22/2011	4:05:05 AM	Bypass valve closed
10/22/2011	4:05:05 AM	Bubbler valve closed
10/22/2011	4:05:05 AM	Main Vac valve opened
10/22/2011	4:05:05 AM	Helium MFC set to  0.000000
10/22/2011	4:05:05 AM	H2 MFC set to  0.000000
10/22/2011	4:05:05 AM	BCl3 MFC set to  0.000000
10/22/2011	4:05:05 AM	PHl3 MFC set to  0.000000
10/22/2011	4:05:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:05:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:05:05 AM	Tube furnace set to 150
10/22/2011	4:05:35 AM	H2 valve closed
10/22/2011	4:05:35 AM	BCl3 valve closed
10/22/2011	4:05:35 AM	PH3 valve closed
10/22/2011	4:05:35 AM	SiCl4 pre valve closed
10/22/2011	4:05:35 AM	SiCl4 post valve closed
10/22/2011	4:05:35 AM	Bypass valve closed
10/22/2011	4:05:35 AM	Bubbler valve closed
10/22/2011	4:05:35 AM	Helium valve opened
10/22/2011	4:05:35 AM	Main Vac valve opened
10/22/2011	4:05:35 AM	Helium MFC set to  20.000000
10/22/2011	4:05:35 AM	H2 MFC set to  0.000000
10/22/2011	4:05:35 AM	BCl3 MFC set to  0.000000
10/22/2011	4:05:35 AM	PHl3 MFC set to  0.000000
10/22/2011	4:05:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:05:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:05:35 AM	Tube furnace set to 150
10/22/2011	4:06:05 AM	Helium valve closed
10/22/2011	4:06:05 AM	H2 valve closed
10/22/2011	4:06:05 AM	BCl3 valve closed
10/22/2011	4:06:05 AM	PH3 valve closed
10/22/2011	4:06:05 AM	SiCl4 pre valve closed
10/22/2011	4:06:05 AM	SiCl4 post valve closed
10/22/2011	4:06:05 AM	Bypass valve closed
10/22/2011	4:06:05 AM	Bubbler valve closed
10/22/2011	4:06:05 AM	Main Vac valve opened
10/22/2011	4:06:05 AM	Helium MFC set to  0.000000
10/22/2011	4:06:05 AM	H2 MFC set to  0.000000
10/22/2011	4:06:05 AM	BCl3 MFC set to  0.000000
10/22/2011	4:06:05 AM	PHl3 MFC set to  0.000000
10/22/2011	4:06:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:06:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:06:05 AM	Tube furnace set to 150
10/22/2011	4:06:35 AM	H2 valve closed
10/22/2011	4:06:35 AM	BCl3 valve closed
10/22/2011	4:06:35 AM	PH3 valve closed
10/22/2011	4:06:35 AM	SiCl4 pre valve closed
10/22/2011	4:06:35 AM	SiCl4 post valve closed
10/22/2011	4:06:35 AM	Bypass valve closed
10/22/2011	4:06:35 AM	Bubbler valve closed
10/22/2011	4:06:35 AM	Helium valve opened
10/22/2011	4:06:35 AM	Main Vac valve opened
10/22/2011	4:06:35 AM	Helium MFC set to  20.000000
10/22/2011	4:06:35 AM	H2 MFC set to  0.000000
10/22/2011	4:06:35 AM	BCl3 MFC set to  0.000000
10/22/2011	4:06:35 AM	PHl3 MFC set to  0.000000
10/22/2011	4:06:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:06:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:06:35 AM	Tube furnace set to 150
10/22/2011	4:07:05 AM	Helium valve closed
10/22/2011	4:07:05 AM	H2 valve closed
10/22/2011	4:07:05 AM	BCl3 valve closed
10/22/2011	4:07:05 AM	PH3 valve closed
10/22/2011	4:07:05 AM	SiCl4 pre valve closed
10/22/2011	4:07:05 AM	SiCl4 post valve closed
10/22/2011	4:07:05 AM	Bypass valve closed
10/22/2011	4:07:05 AM	Bubbler valve closed
10/22/2011	4:07:05 AM	Main Vac valve opened
10/22/2011	4:07:05 AM	Helium MFC set to  0.000000
10/22/2011	4:07:05 AM	H2 MFC set to  0.000000
10/22/2011	4:07:05 AM	BCl3 MFC set to  0.000000
10/22/2011	4:07:05 AM	PHl3 MFC set to  0.000000
10/22/2011	4:07:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:07:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:07:05 AM	Tube furnace set to 150
10/22/2011	4:07:35 AM	H2 valve closed
10/22/2011	4:07:35 AM	BCl3 valve closed
10/22/2011	4:07:35 AM	PH3 valve closed
10/22/2011	4:07:36 AM	SiCl4 pre valve closed
10/22/2011	4:07:36 AM	SiCl4 post valve closed
10/22/2011	4:07:36 AM	Bypass valve closed
10/22/2011	4:07:36 AM	Bubbler valve closed
10/22/2011	4:07:36 AM	Helium valve opened
10/22/2011	4:07:36 AM	Main Vac valve opened
10/22/2011	4:07:36 AM	Helium MFC set to  20.000000
10/22/2011	4:07:36 AM	H2 MFC set to  0.000000
10/22/2011	4:07:36 AM	BCl3 MFC set to  0.000000
10/22/2011	4:07:36 AM	PHl3 MFC set to  0.000000
10/22/2011	4:07:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:07:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:07:36 AM	Tube furnace set to 150
10/22/2011	4:08:06 AM	Helium valve closed
10/22/2011	4:08:06 AM	H2 valve closed
10/22/2011	4:08:06 AM	BCl3 valve closed
10/22/2011	4:08:06 AM	PH3 valve closed
10/22/2011	4:08:06 AM	SiCl4 pre valve closed
10/22/2011	4:08:06 AM	SiCl4 post valve closed
10/22/2011	4:08:06 AM	Bypass valve closed
10/22/2011	4:08:06 AM	Bubbler valve closed
10/22/2011	4:08:06 AM	Main Vac valve opened
10/22/2011	4:08:06 AM	Helium MFC set to  0.000000
10/22/2011	4:08:06 AM	H2 MFC set to  0.000000
10/22/2011	4:08:06 AM	BCl3 MFC set to  0.000000
10/22/2011	4:08:06 AM	PHl3 MFC set to  0.000000
10/22/2011	4:08:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:08:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:08:06 AM	Tube furnace set to 150
10/22/2011	4:08:36 AM	H2 valve closed
10/22/2011	4:08:36 AM	BCl3 valve closed
10/22/2011	4:08:36 AM	PH3 valve closed
10/22/2011	4:08:36 AM	SiCl4 pre valve closed
10/22/2011	4:08:36 AM	SiCl4 post valve closed
10/22/2011	4:08:36 AM	Bypass valve closed
10/22/2011	4:08:36 AM	Bubbler valve closed
10/22/2011	4:08:36 AM	Helium valve opened
10/22/2011	4:08:36 AM	Main Vac valve opened
10/22/2011	4:08:36 AM	Helium MFC set to  20.000000
10/22/2011	4:08:36 AM	H2 MFC set to  0.000000
10/22/2011	4:08:36 AM	BCl3 MFC set to  0.000000
10/22/2011	4:08:36 AM	PHl3 MFC set to  0.000000
10/22/2011	4:08:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:08:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:08:36 AM	Tube furnace set to 150
10/22/2011	4:09:06 AM	Helium valve closed
10/22/2011	4:09:06 AM	H2 valve closed
10/22/2011	4:09:06 AM	BCl3 valve closed
10/22/2011	4:09:06 AM	PH3 valve closed
10/22/2011	4:09:06 AM	SiCl4 pre valve closed
10/22/2011	4:09:06 AM	SiCl4 post valve closed
10/22/2011	4:09:06 AM	Bypass valve closed
10/22/2011	4:09:06 AM	Bubbler valve closed
10/22/2011	4:09:06 AM	Main Vac valve opened
10/22/2011	4:09:06 AM	Helium MFC set to  0.000000
10/22/2011	4:09:06 AM	H2 MFC set to  0.000000
10/22/2011	4:09:06 AM	BCl3 MFC set to  0.000000
10/22/2011	4:09:06 AM	PHl3 MFC set to  0.000000
10/22/2011	4:09:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:09:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:09:06 AM	Tube furnace set to 150
10/22/2011	4:09:36 AM	H2 valve closed
10/22/2011	4:09:36 AM	BCl3 valve closed
10/22/2011	4:09:36 AM	PH3 valve closed
10/22/2011	4:09:36 AM	SiCl4 pre valve closed
10/22/2011	4:09:36 AM	SiCl4 post valve closed
10/22/2011	4:09:36 AM	Bypass valve closed
10/22/2011	4:09:36 AM	Bubbler valve closed
10/22/2011	4:09:36 AM	Helium valve opened
10/22/2011	4:09:36 AM	Main Vac valve opened
10/22/2011	4:09:36 AM	Helium MFC set to  20.000000
10/22/2011	4:09:36 AM	H2 MFC set to  0.000000
10/22/2011	4:09:36 AM	BCl3 MFC set to  0.000000
10/22/2011	4:09:36 AM	PHl3 MFC set to  0.000000
10/22/2011	4:09:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:09:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:09:36 AM	Tube furnace set to 150
10/22/2011	4:10:06 AM	Helium valve closed
10/22/2011	4:10:06 AM	H2 valve closed
10/22/2011	4:10:06 AM	BCl3 valve closed
10/22/2011	4:10:06 AM	PH3 valve closed
10/22/2011	4:10:06 AM	SiCl4 pre valve closed
10/22/2011	4:10:06 AM	SiCl4 post valve closed
10/22/2011	4:10:06 AM	Bypass valve closed
10/22/2011	4:10:06 AM	Bubbler valve closed
10/22/2011	4:10:06 AM	Main Vac valve opened
10/22/2011	4:10:06 AM	Helium MFC set to  0.000000
10/22/2011	4:10:06 AM	H2 MFC set to  0.000000
10/22/2011	4:10:07 AM	BCl3 MFC set to  0.000000
10/22/2011	4:10:07 AM	PHl3 MFC set to  0.000000
10/22/2011	4:10:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:10:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:10:07 AM	Tube furnace set to 150
10/22/2011	4:10:37 AM	H2 valve closed
10/22/2011	4:10:37 AM	BCl3 valve closed
10/22/2011	4:10:37 AM	PH3 valve closed
10/22/2011	4:10:37 AM	SiCl4 pre valve closed
10/22/2011	4:10:37 AM	SiCl4 post valve closed
10/22/2011	4:10:37 AM	Bypass valve closed
10/22/2011	4:10:37 AM	Bubbler valve closed
10/22/2011	4:10:37 AM	Helium valve opened
10/22/2011	4:10:37 AM	Main Vac valve opened
10/22/2011	4:10:37 AM	Helium MFC set to  20.000000
10/22/2011	4:10:37 AM	H2 MFC set to  0.000000
10/22/2011	4:10:37 AM	BCl3 MFC set to  0.000000
10/22/2011	4:10:37 AM	PHl3 MFC set to  0.000000
10/22/2011	4:10:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:10:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:10:37 AM	Tube furnace set to 150
10/22/2011	4:11:07 AM	Helium valve closed
10/22/2011	4:11:07 AM	H2 valve closed
10/22/2011	4:11:07 AM	BCl3 valve closed
10/22/2011	4:11:07 AM	PH3 valve closed
10/22/2011	4:11:07 AM	SiCl4 pre valve closed
10/22/2011	4:11:07 AM	SiCl4 post valve closed
10/22/2011	4:11:07 AM	Bypass valve closed
10/22/2011	4:11:07 AM	Bubbler valve closed
10/22/2011	4:11:07 AM	Main Vac valve opened
10/22/2011	4:11:07 AM	Helium MFC set to  0.000000
10/22/2011	4:11:07 AM	H2 MFC set to  0.000000
10/22/2011	4:11:07 AM	BCl3 MFC set to  0.000000
10/22/2011	4:11:07 AM	PHl3 MFC set to  0.000000
10/22/2011	4:11:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:11:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:11:07 AM	Tube furnace set to 150
10/22/2011	4:11:37 AM	H2 valve closed
10/22/2011	4:11:37 AM	BCl3 valve closed
10/22/2011	4:11:37 AM	PH3 valve closed
10/22/2011	4:11:37 AM	SiCl4 pre valve closed
10/22/2011	4:11:37 AM	SiCl4 post valve closed
10/22/2011	4:11:37 AM	Bypass valve closed
10/22/2011	4:11:37 AM	Bubbler valve closed
10/22/2011	4:11:37 AM	Helium valve opened
10/22/2011	4:11:37 AM	Main Vac valve opened
10/22/2011	4:11:37 AM	Helium MFC set to  20.000000
10/22/2011	4:11:37 AM	H2 MFC set to  0.000000
10/22/2011	4:11:37 AM	BCl3 MFC set to  0.000000
10/22/2011	4:11:37 AM	PHl3 MFC set to  0.000000
10/22/2011	4:11:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:11:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:11:37 AM	Tube furnace set to 150
10/22/2011	4:12:07 AM	Helium valve closed
10/22/2011	4:12:07 AM	H2 valve closed
10/22/2011	4:12:07 AM	BCl3 valve closed
10/22/2011	4:12:07 AM	PH3 valve closed
10/22/2011	4:12:07 AM	SiCl4 pre valve closed
10/22/2011	4:12:07 AM	SiCl4 post valve closed
10/22/2011	4:12:07 AM	Bypass valve closed
10/22/2011	4:12:07 AM	Bubbler valve closed
10/22/2011	4:12:07 AM	Main Vac valve opened
10/22/2011	4:12:07 AM	Helium MFC set to  0.000000
10/22/2011	4:12:07 AM	H2 MFC set to  0.000000
10/22/2011	4:12:07 AM	BCl3 MFC set to  0.000000
10/22/2011	4:12:07 AM	PHl3 MFC set to  0.000000
10/22/2011	4:12:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:12:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:12:07 AM	Tube furnace set to 150
10/22/2011	4:12:38 AM	H2 valve closed
10/22/2011	4:12:38 AM	BCl3 valve closed
10/22/2011	4:12:38 AM	PH3 valve closed
10/22/2011	4:12:38 AM	SiCl4 pre valve closed
10/22/2011	4:12:38 AM	SiCl4 post valve closed
10/22/2011	4:12:38 AM	Bypass valve closed
10/22/2011	4:12:38 AM	Bubbler valve closed
10/22/2011	4:12:38 AM	Helium valve opened
10/22/2011	4:12:38 AM	Main Vac valve opened
10/22/2011	4:12:38 AM	Helium MFC set to  20.000000
10/22/2011	4:12:38 AM	H2 MFC set to  0.000000
10/22/2011	4:12:38 AM	BCl3 MFC set to  0.000000
10/22/2011	4:12:38 AM	PHl3 MFC set to  0.000000
10/22/2011	4:12:38 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:12:38 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:12:38 AM	Tube furnace set to 150
10/22/2011	4:13:08 AM	Helium valve closed
10/22/2011	4:13:08 AM	H2 valve closed
10/22/2011	4:13:08 AM	BCl3 valve closed
10/22/2011	4:13:08 AM	PH3 valve closed
10/22/2011	4:13:08 AM	SiCl4 pre valve closed
10/22/2011	4:13:08 AM	SiCl4 post valve closed
10/22/2011	4:13:08 AM	Bypass valve closed
10/22/2011	4:13:08 AM	Bubbler valve closed
10/22/2011	4:13:08 AM	Main Vac valve opened
10/22/2011	4:13:08 AM	Helium MFC set to  0.000000
10/22/2011	4:13:08 AM	H2 MFC set to  0.000000
10/22/2011	4:13:08 AM	BCl3 MFC set to  0.000000
10/22/2011	4:13:08 AM	PHl3 MFC set to  0.000000
10/22/2011	4:13:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:13:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:13:08 AM	Tube furnace set to 150
10/22/2011	4:13:38 AM	H2 valve closed
10/22/2011	4:13:38 AM	BCl3 valve closed
10/22/2011	4:13:38 AM	PH3 valve closed
10/22/2011	4:13:38 AM	SiCl4 pre valve closed
10/22/2011	4:13:38 AM	SiCl4 post valve closed
10/22/2011	4:13:38 AM	Bypass valve closed
10/22/2011	4:13:38 AM	Bubbler valve closed
10/22/2011	4:13:38 AM	Helium valve opened
10/22/2011	4:13:38 AM	Main Vac valve opened
10/22/2011	4:13:38 AM	Helium MFC set to  20.000000
10/22/2011	4:13:38 AM	H2 MFC set to  0.000000
10/22/2011	4:13:38 AM	BCl3 MFC set to  0.000000
10/22/2011	4:13:38 AM	PHl3 MFC set to  0.000000
10/22/2011	4:13:38 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:13:38 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:13:38 AM	Tube furnace set to 150
10/22/2011	4:14:08 AM	Helium valve closed
10/22/2011	4:14:08 AM	H2 valve closed
10/22/2011	4:14:08 AM	BCl3 valve closed
10/22/2011	4:14:08 AM	PH3 valve closed
10/22/2011	4:14:08 AM	SiCl4 pre valve closed
10/22/2011	4:14:08 AM	SiCl4 post valve closed
10/22/2011	4:14:08 AM	Bypass valve closed
10/22/2011	4:14:08 AM	Bubbler valve closed
10/22/2011	4:14:08 AM	Main Vac valve opened
10/22/2011	4:14:08 AM	Helium MFC set to  0.000000
10/22/2011	4:14:08 AM	H2 MFC set to  0.000000
10/22/2011	4:14:08 AM	BCl3 MFC set to  0.000000
10/22/2011	4:14:08 AM	PHl3 MFC set to  0.000000
10/22/2011	4:14:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:14:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:14:08 AM	Tube furnace set to 150
10/22/2011	4:14:38 AM	H2 valve closed
10/22/2011	4:14:38 AM	BCl3 valve closed
10/22/2011	4:14:38 AM	PH3 valve closed
10/22/2011	4:14:38 AM	SiCl4 pre valve closed
10/22/2011	4:14:38 AM	SiCl4 post valve closed
10/22/2011	4:14:38 AM	Bypass valve closed
10/22/2011	4:14:38 AM	Bubbler valve closed
10/22/2011	4:14:38 AM	Helium valve opened
10/22/2011	4:14:38 AM	Main Vac valve opened
10/22/2011	4:14:38 AM	Helium MFC set to  20.000000
10/22/2011	4:14:38 AM	H2 MFC set to  0.000000
10/22/2011	4:14:38 AM	BCl3 MFC set to  0.000000
10/22/2011	4:14:38 AM	PHl3 MFC set to  0.000000
10/22/2011	4:14:38 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:14:38 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:14:39 AM	Tube furnace set to 150
10/22/2011	4:15:09 AM	Helium valve closed
10/22/2011	4:15:09 AM	H2 valve closed
10/22/2011	4:15:09 AM	BCl3 valve closed
10/22/2011	4:15:09 AM	PH3 valve closed
10/22/2011	4:15:09 AM	SiCl4 pre valve closed
10/22/2011	4:15:09 AM	SiCl4 post valve closed
10/22/2011	4:15:09 AM	Bypass valve closed
10/22/2011	4:15:09 AM	Bubbler valve closed
10/22/2011	4:15:09 AM	Main Vac valve opened
10/22/2011	4:15:09 AM	Helium MFC set to  0.000000
10/22/2011	4:15:09 AM	H2 MFC set to  0.000000
10/22/2011	4:15:09 AM	BCl3 MFC set to  0.000000
10/22/2011	4:15:09 AM	PHl3 MFC set to  0.000000
10/22/2011	4:15:09 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:15:09 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:15:09 AM	Tube furnace set to 150
10/22/2011	4:15:10 AM	Run finished at 4:15 AM
10/22/2011	4:16:04 AM	Recipe started at 4:15 AM
10/22/2011	4:16:05 AM	Helium valve closed
10/22/2011	4:16:05 AM	H2 valve closed
10/22/2011	4:16:05 AM	BCl3 valve closed
10/22/2011	4:16:05 AM	PH3 valve closed
10/22/2011	4:16:05 AM	SiCl4 pre valve closed
10/22/2011	4:16:05 AM	SiCl4 post valve closed
10/22/2011	4:16:05 AM	Bypass valve closed
10/22/2011	4:16:05 AM	Bubbler valve closed
10/22/2011	4:16:05 AM	Main Vac valve opened
10/22/2011	4:16:05 AM	Helium MFC set to  0.000000
10/22/2011	4:16:05 AM	H2 MFC set to  0.000000
10/22/2011	4:16:05 AM	BCl3 MFC set to  0.000000
10/22/2011	4:16:05 AM	PHl3 MFC set to  0.000000
10/22/2011	4:16:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:16:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:16:05 AM	Tube furnace set to 150
10/22/2011	4:16:35 AM	H2 valve closed
10/22/2011	4:16:35 AM	BCl3 valve closed
10/22/2011	4:16:35 AM	PH3 valve closed
10/22/2011	4:16:35 AM	SiCl4 pre valve closed
10/22/2011	4:16:35 AM	SiCl4 post valve closed
10/22/2011	4:16:35 AM	Bypass valve closed
10/22/2011	4:16:35 AM	Bubbler valve closed
10/22/2011	4:16:35 AM	Helium valve opened
10/22/2011	4:16:35 AM	Main Vac valve opened
10/22/2011	4:16:35 AM	Helium MFC set to  20.000000
10/22/2011	4:16:35 AM	H2 MFC set to  0.000000
10/22/2011	4:16:35 AM	BCl3 MFC set to  0.000000
10/22/2011	4:16:35 AM	PHl3 MFC set to  0.000000
10/22/2011	4:16:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:16:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:16:35 AM	Tube furnace set to 150
10/22/2011	4:17:05 AM	Helium valve closed
10/22/2011	4:17:05 AM	H2 valve closed
10/22/2011	4:17:05 AM	BCl3 valve closed
10/22/2011	4:17:05 AM	PH3 valve closed
10/22/2011	4:17:05 AM	SiCl4 pre valve closed
10/22/2011	4:17:05 AM	SiCl4 post valve closed
10/22/2011	4:17:05 AM	Bypass valve closed
10/22/2011	4:17:05 AM	Bubbler valve closed
10/22/2011	4:17:05 AM	Main Vac valve opened
10/22/2011	4:17:05 AM	Helium MFC set to  0.000000
10/22/2011	4:17:05 AM	H2 MFC set to  0.000000
10/22/2011	4:17:05 AM	BCl3 MFC set to  0.000000
10/22/2011	4:17:05 AM	PHl3 MFC set to  0.000000
10/22/2011	4:17:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:17:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:17:05 AM	Tube furnace set to 150
10/22/2011	4:17:35 AM	H2 valve closed
10/22/2011	4:17:35 AM	BCl3 valve closed
10/22/2011	4:17:35 AM	PH3 valve closed
10/22/2011	4:17:35 AM	SiCl4 pre valve closed
10/22/2011	4:17:35 AM	SiCl4 post valve closed
10/22/2011	4:17:35 AM	Bypass valve closed
10/22/2011	4:17:35 AM	Bubbler valve closed
10/22/2011	4:17:35 AM	Helium valve opened
10/22/2011	4:17:35 AM	Main Vac valve opened
10/22/2011	4:17:35 AM	Helium MFC set to  20.000000
10/22/2011	4:17:35 AM	H2 MFC set to  0.000000
10/22/2011	4:17:35 AM	BCl3 MFC set to  0.000000
10/22/2011	4:17:35 AM	PHl3 MFC set to  0.000000
10/22/2011	4:17:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:17:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:17:35 AM	Tube furnace set to 150
10/22/2011	4:18:05 AM	Helium valve closed
10/22/2011	4:18:05 AM	H2 valve closed
10/22/2011	4:18:05 AM	BCl3 valve closed
10/22/2011	4:18:05 AM	PH3 valve closed
10/22/2011	4:18:05 AM	SiCl4 pre valve closed
10/22/2011	4:18:05 AM	SiCl4 post valve closed
10/22/2011	4:18:05 AM	Bypass valve closed
10/22/2011	4:18:05 AM	Bubbler valve closed
10/22/2011	4:18:05 AM	Main Vac valve opened
10/22/2011	4:18:05 AM	Helium MFC set to  0.000000
10/22/2011	4:18:05 AM	H2 MFC set to  0.000000
10/22/2011	4:18:05 AM	BCl3 MFC set to  0.000000
10/22/2011	4:18:05 AM	PHl3 MFC set to  0.000000
10/22/2011	4:18:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:18:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:18:05 AM	Tube furnace set to 150
10/22/2011	4:18:35 AM	H2 valve closed
10/22/2011	4:18:35 AM	BCl3 valve closed
10/22/2011	4:18:35 AM	PH3 valve closed
10/22/2011	4:18:35 AM	SiCl4 pre valve closed
10/22/2011	4:18:35 AM	SiCl4 post valve closed
10/22/2011	4:18:35 AM	Bypass valve closed
10/22/2011	4:18:36 AM	Bubbler valve closed
10/22/2011	4:18:36 AM	Helium valve opened
10/22/2011	4:18:36 AM	Main Vac valve opened
10/22/2011	4:18:36 AM	Helium MFC set to  20.000000
10/22/2011	4:18:36 AM	H2 MFC set to  0.000000
10/22/2011	4:18:36 AM	BCl3 MFC set to  0.000000
10/22/2011	4:18:36 AM	PHl3 MFC set to  0.000000
10/22/2011	4:18:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:18:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:18:36 AM	Tube furnace set to 150
10/22/2011	4:19:06 AM	Helium valve closed
10/22/2011	4:19:06 AM	H2 valve closed
10/22/2011	4:19:06 AM	BCl3 valve closed
10/22/2011	4:19:06 AM	PH3 valve closed
10/22/2011	4:19:06 AM	SiCl4 pre valve closed
10/22/2011	4:19:06 AM	SiCl4 post valve closed
10/22/2011	4:19:06 AM	Bypass valve closed
10/22/2011	4:19:06 AM	Bubbler valve closed
10/22/2011	4:19:06 AM	Main Vac valve opened
10/22/2011	4:19:06 AM	Helium MFC set to  0.000000
10/22/2011	4:19:06 AM	H2 MFC set to  0.000000
10/22/2011	4:19:06 AM	BCl3 MFC set to  0.000000
10/22/2011	4:19:06 AM	PHl3 MFC set to  0.000000
10/22/2011	4:19:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:19:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:19:06 AM	Tube furnace set to 150
10/22/2011	4:19:36 AM	H2 valve closed
10/22/2011	4:19:36 AM	BCl3 valve closed
10/22/2011	4:19:36 AM	PH3 valve closed
10/22/2011	4:19:36 AM	SiCl4 pre valve closed
10/22/2011	4:19:36 AM	SiCl4 post valve closed
10/22/2011	4:19:36 AM	Bypass valve closed
10/22/2011	4:19:36 AM	Bubbler valve closed
10/22/2011	4:19:36 AM	Helium valve opened
10/22/2011	4:19:36 AM	Main Vac valve opened
10/22/2011	4:19:36 AM	Helium MFC set to  20.000000
10/22/2011	4:19:36 AM	H2 MFC set to  0.000000
10/22/2011	4:19:36 AM	BCl3 MFC set to  0.000000
10/22/2011	4:19:36 AM	PHl3 MFC set to  0.000000
10/22/2011	4:19:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:19:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:19:36 AM	Tube furnace set to 150
10/22/2011	4:20:06 AM	Helium valve closed
10/22/2011	4:20:06 AM	H2 valve closed
10/22/2011	4:20:06 AM	BCl3 valve closed
10/22/2011	4:20:06 AM	PH3 valve closed
10/22/2011	4:20:06 AM	SiCl4 pre valve closed
10/22/2011	4:20:06 AM	SiCl4 post valve closed
10/22/2011	4:20:06 AM	Bypass valve closed
10/22/2011	4:20:06 AM	Bubbler valve closed
10/22/2011	4:20:06 AM	Main Vac valve opened
10/22/2011	4:20:06 AM	Helium MFC set to  0.000000
10/22/2011	4:20:06 AM	H2 MFC set to  0.000000
10/22/2011	4:20:06 AM	BCl3 MFC set to  0.000000
10/22/2011	4:20:06 AM	PHl3 MFC set to  0.000000
10/22/2011	4:20:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:20:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:20:06 AM	Tube furnace set to 150
10/22/2011	4:20:36 AM	H2 valve closed
10/22/2011	4:20:36 AM	BCl3 valve closed
10/22/2011	4:20:36 AM	PH3 valve closed
10/22/2011	4:20:36 AM	SiCl4 pre valve closed
10/22/2011	4:20:36 AM	SiCl4 post valve closed
10/22/2011	4:20:36 AM	Bypass valve closed
10/22/2011	4:20:36 AM	Bubbler valve closed
10/22/2011	4:20:36 AM	Helium valve opened
10/22/2011	4:20:36 AM	Main Vac valve opened
10/22/2011	4:20:36 AM	Helium MFC set to  20.000000
10/22/2011	4:20:36 AM	H2 MFC set to  0.000000
10/22/2011	4:20:36 AM	BCl3 MFC set to  0.000000
10/22/2011	4:20:36 AM	PHl3 MFC set to  0.000000
10/22/2011	4:20:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:20:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:20:36 AM	Tube furnace set to 150
10/22/2011	4:21:06 AM	Helium valve closed
10/22/2011	4:21:06 AM	H2 valve closed
10/22/2011	4:21:06 AM	BCl3 valve closed
10/22/2011	4:21:06 AM	PH3 valve closed
10/22/2011	4:21:06 AM	SiCl4 pre valve closed
10/22/2011	4:21:06 AM	SiCl4 post valve closed
10/22/2011	4:21:06 AM	Bypass valve closed
10/22/2011	4:21:06 AM	Bubbler valve closed
10/22/2011	4:21:06 AM	Main Vac valve opened
10/22/2011	4:21:06 AM	Helium MFC set to  0.000000
10/22/2011	4:21:06 AM	H2 MFC set to  0.000000
10/22/2011	4:21:06 AM	BCl3 MFC set to  0.000000
10/22/2011	4:21:06 AM	PHl3 MFC set to  0.000000
10/22/2011	4:21:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:21:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:21:07 AM	Tube furnace set to 150
10/22/2011	4:21:37 AM	H2 valve closed
10/22/2011	4:21:37 AM	BCl3 valve closed
10/22/2011	4:21:37 AM	PH3 valve closed
10/22/2011	4:21:37 AM	SiCl4 pre valve closed
10/22/2011	4:21:37 AM	SiCl4 post valve closed
10/22/2011	4:21:37 AM	Bypass valve closed
10/22/2011	4:21:37 AM	Bubbler valve closed
10/22/2011	4:21:37 AM	Helium valve opened
10/22/2011	4:21:37 AM	Main Vac valve opened
10/22/2011	4:21:37 AM	Helium MFC set to  20.000000
10/22/2011	4:21:37 AM	H2 MFC set to  0.000000
10/22/2011	4:21:37 AM	BCl3 MFC set to  0.000000
10/22/2011	4:21:37 AM	PHl3 MFC set to  0.000000
10/22/2011	4:21:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:21:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:21:37 AM	Tube furnace set to 150
10/22/2011	4:22:07 AM	Helium valve closed
10/22/2011	4:22:07 AM	H2 valve closed
10/22/2011	4:22:07 AM	BCl3 valve closed
10/22/2011	4:22:07 AM	PH3 valve closed
10/22/2011	4:22:07 AM	SiCl4 pre valve closed
10/22/2011	4:22:07 AM	SiCl4 post valve closed
10/22/2011	4:22:07 AM	Bypass valve closed
10/22/2011	4:22:07 AM	Bubbler valve closed
10/22/2011	4:22:07 AM	Main Vac valve opened
10/22/2011	4:22:07 AM	Helium MFC set to  0.000000
10/22/2011	4:22:07 AM	H2 MFC set to  0.000000
10/22/2011	4:22:07 AM	BCl3 MFC set to  0.000000
10/22/2011	4:22:07 AM	PHl3 MFC set to  0.000000
10/22/2011	4:22:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:22:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:22:07 AM	Tube furnace set to 150
10/22/2011	4:22:37 AM	H2 valve closed
10/22/2011	4:22:37 AM	BCl3 valve closed
10/22/2011	4:22:37 AM	PH3 valve closed
10/22/2011	4:22:37 AM	SiCl4 pre valve closed
10/22/2011	4:22:37 AM	SiCl4 post valve closed
10/22/2011	4:22:37 AM	Bypass valve closed
10/22/2011	4:22:37 AM	Bubbler valve closed
10/22/2011	4:22:37 AM	Helium valve opened
10/22/2011	4:22:37 AM	Main Vac valve opened
10/22/2011	4:22:37 AM	Helium MFC set to  20.000000
10/22/2011	4:22:37 AM	H2 MFC set to  0.000000
10/22/2011	4:22:37 AM	BCl3 MFC set to  0.000000
10/22/2011	4:22:37 AM	PHl3 MFC set to  0.000000
10/22/2011	4:22:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:22:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:22:37 AM	Tube furnace set to 150
10/22/2011	4:23:07 AM	Helium valve closed
10/22/2011	4:23:07 AM	H2 valve closed
10/22/2011	4:23:07 AM	BCl3 valve closed
10/22/2011	4:23:07 AM	PH3 valve closed
10/22/2011	4:23:07 AM	SiCl4 pre valve closed
10/22/2011	4:23:07 AM	SiCl4 post valve closed
10/22/2011	4:23:07 AM	Bypass valve closed
10/22/2011	4:23:07 AM	Bubbler valve closed
10/22/2011	4:23:07 AM	Main Vac valve opened
10/22/2011	4:23:07 AM	Helium MFC set to  0.000000
10/22/2011	4:23:07 AM	H2 MFC set to  0.000000
10/22/2011	4:23:07 AM	BCl3 MFC set to  0.000000
10/22/2011	4:23:07 AM	PHl3 MFC set to  0.000000
10/22/2011	4:23:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:23:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:23:07 AM	Tube furnace set to 150
10/22/2011	4:23:37 AM	H2 valve closed
10/22/2011	4:23:37 AM	BCl3 valve closed
10/22/2011	4:23:37 AM	PH3 valve closed
10/22/2011	4:23:37 AM	SiCl4 pre valve closed
10/22/2011	4:23:37 AM	SiCl4 post valve closed
10/22/2011	4:23:37 AM	Bypass valve closed
10/22/2011	4:23:37 AM	Bubbler valve closed
10/22/2011	4:23:37 AM	Helium valve opened
10/22/2011	4:23:37 AM	Main Vac valve opened
10/22/2011	4:23:37 AM	Helium MFC set to  20.000000
10/22/2011	4:23:37 AM	H2 MFC set to  0.000000
10/22/2011	4:23:37 AM	BCl3 MFC set to  0.000000
10/22/2011	4:23:37 AM	PHl3 MFC set to  0.000000
10/22/2011	4:23:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:23:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:23:38 AM	Tube furnace set to 150
10/22/2011	4:24:08 AM	Helium valve closed
10/22/2011	4:24:08 AM	H2 valve closed
10/22/2011	4:24:08 AM	BCl3 valve closed
10/22/2011	4:24:08 AM	PH3 valve closed
10/22/2011	4:24:08 AM	SiCl4 pre valve closed
10/22/2011	4:24:08 AM	SiCl4 post valve closed
10/22/2011	4:24:08 AM	Bypass valve closed
10/22/2011	4:24:08 AM	Bubbler valve closed
10/22/2011	4:24:08 AM	Main Vac valve opened
10/22/2011	4:24:08 AM	Helium MFC set to  0.000000
10/22/2011	4:24:08 AM	H2 MFC set to  0.000000
10/22/2011	4:24:08 AM	BCl3 MFC set to  0.000000
10/22/2011	4:24:08 AM	PHl3 MFC set to  0.000000
10/22/2011	4:24:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:24:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:24:08 AM	Tube furnace set to 150
10/22/2011	4:24:38 AM	H2 valve closed
10/22/2011	4:24:38 AM	BCl3 valve closed
10/22/2011	4:24:38 AM	PH3 valve closed
10/22/2011	4:24:38 AM	SiCl4 pre valve closed
10/22/2011	4:24:38 AM	SiCl4 post valve closed
10/22/2011	4:24:38 AM	Bypass valve closed
10/22/2011	4:24:38 AM	Bubbler valve closed
10/22/2011	4:24:38 AM	Helium valve opened
10/22/2011	4:24:38 AM	Main Vac valve opened
10/22/2011	4:24:38 AM	Helium MFC set to  20.000000
10/22/2011	4:24:38 AM	H2 MFC set to  0.000000
10/22/2011	4:24:38 AM	BCl3 MFC set to  0.000000
10/22/2011	4:24:38 AM	PHl3 MFC set to  0.000000
10/22/2011	4:24:38 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:24:38 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:24:38 AM	Tube furnace set to 150
10/22/2011	4:25:08 AM	Helium valve closed
10/22/2011	4:25:08 AM	H2 valve closed
10/22/2011	4:25:08 AM	BCl3 valve closed
10/22/2011	4:25:08 AM	PH3 valve closed
10/22/2011	4:25:08 AM	SiCl4 pre valve closed
10/22/2011	4:25:08 AM	SiCl4 post valve closed
10/22/2011	4:25:08 AM	Bypass valve closed
10/22/2011	4:25:08 AM	Bubbler valve closed
10/22/2011	4:25:08 AM	Main Vac valve opened
10/22/2011	4:25:08 AM	Helium MFC set to  0.000000
10/22/2011	4:25:08 AM	H2 MFC set to  0.000000
10/22/2011	4:25:08 AM	BCl3 MFC set to  0.000000
10/22/2011	4:25:08 AM	PHl3 MFC set to  0.000000
10/22/2011	4:25:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:25:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:25:08 AM	Tube furnace set to 150
10/22/2011	4:25:38 AM	H2 valve closed
10/22/2011	4:25:38 AM	BCl3 valve closed
10/22/2011	4:25:38 AM	PH3 valve closed
10/22/2011	4:25:38 AM	SiCl4 pre valve closed
10/22/2011	4:25:38 AM	SiCl4 post valve closed
10/22/2011	4:25:38 AM	Bypass valve closed
10/22/2011	4:25:38 AM	Bubbler valve closed
10/22/2011	4:25:38 AM	Helium valve opened
10/22/2011	4:25:38 AM	Main Vac valve opened
10/22/2011	4:25:38 AM	Helium MFC set to  20.000000
10/22/2011	4:25:38 AM	H2 MFC set to  0.000000
10/22/2011	4:25:38 AM	BCl3 MFC set to  0.000000
10/22/2011	4:25:38 AM	PHl3 MFC set to  0.000000
10/22/2011	4:25:38 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:25:38 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:25:38 AM	Tube furnace set to 150
10/22/2011	4:26:08 AM	Helium valve closed
10/22/2011	4:26:08 AM	H2 valve closed
10/22/2011	4:26:08 AM	BCl3 valve closed
10/22/2011	4:26:08 AM	PH3 valve closed
10/22/2011	4:26:08 AM	SiCl4 pre valve closed
10/22/2011	4:26:08 AM	SiCl4 post valve closed
10/22/2011	4:26:08 AM	Bypass valve closed
10/22/2011	4:26:08 AM	Bubbler valve closed
10/22/2011	4:26:08 AM	Main Vac valve opened
10/22/2011	4:26:08 AM	Helium MFC set to  0.000000
10/22/2011	4:26:08 AM	H2 MFC set to  0.000000
10/22/2011	4:26:08 AM	BCl3 MFC set to  0.000000
10/22/2011	4:26:08 AM	PHl3 MFC set to  0.000000
10/22/2011	4:26:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:26:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:26:09 AM	Tube furnace set to 150
10/22/2011	4:26:10 AM	Run finished at 4:26 AM
10/22/2011	4:30:08 AM	Recipe started at 4:30 AM
10/22/2011	4:30:08 AM	Helium valve closed
10/22/2011	4:30:08 AM	H2 valve closed
10/22/2011	4:30:08 AM	BCl3 valve closed
10/22/2011	4:30:08 AM	PH3 valve closed
10/22/2011	4:30:08 AM	SiCl4 pre valve closed
10/22/2011	4:30:08 AM	SiCl4 post valve closed
10/22/2011	4:30:08 AM	Bypass valve closed
10/22/2011	4:30:08 AM	Bubbler valve closed
10/22/2011	4:30:08 AM	Main Vac valve opened
10/22/2011	4:30:08 AM	Helium MFC set to  0.000000
10/22/2011	4:30:08 AM	H2 MFC set to  0.000000
10/22/2011	4:30:08 AM	BCl3 MFC set to  0.000000
10/22/2011	4:30:08 AM	PHl3 MFC set to  0.000000
10/22/2011	4:30:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:30:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:30:08 AM	Tube furnace set to 150
10/22/2011	4:30:09 AM	H2 valve closed
10/22/2011	4:30:09 AM	BCl3 valve closed
10/22/2011	4:30:09 AM	PH3 valve closed
10/22/2011	4:30:09 AM	SiCl4 pre valve closed
10/22/2011	4:30:09 AM	SiCl4 post valve closed
10/22/2011	4:30:09 AM	Bypass valve closed
10/22/2011	4:30:09 AM	Bubbler valve closed
10/22/2011	4:30:09 AM	Helium valve opened
10/22/2011	4:30:09 AM	Main Vac valve opened
10/22/2011	4:30:09 AM	Helium MFC set to  20.000000
10/22/2011	4:30:09 AM	H2 MFC set to  0.000000
10/22/2011	4:30:09 AM	BCl3 MFC set to  0.000000
10/22/2011	4:30:09 AM	PHl3 MFC set to  0.000000
10/22/2011	4:30:09 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:30:09 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:30:09 AM	Tube furnace set to 150
10/22/2011	4:30:39 AM	Helium valve closed
10/22/2011	4:30:39 AM	H2 valve closed
10/22/2011	4:30:39 AM	BCl3 valve closed
10/22/2011	4:30:39 AM	PH3 valve closed
10/22/2011	4:30:39 AM	SiCl4 pre valve closed
10/22/2011	4:30:39 AM	SiCl4 post valve closed
10/22/2011	4:30:39 AM	Bypass valve closed
10/22/2011	4:30:39 AM	Bubbler valve closed
10/22/2011	4:30:39 AM	Main Vac valve opened
10/22/2011	4:30:39 AM	Helium MFC set to  0.000000
10/22/2011	4:30:39 AM	H2 MFC set to  0.000000
10/22/2011	4:30:39 AM	BCl3 MFC set to  0.000000
10/22/2011	4:30:39 AM	PHl3 MFC set to  0.000000
10/22/2011	4:30:39 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:30:39 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:30:40 AM	Tube furnace set to 150
10/22/2011	4:31:10 AM	H2 valve closed
10/22/2011	4:31:10 AM	BCl3 valve closed
10/22/2011	4:31:10 AM	PH3 valve closed
10/22/2011	4:31:10 AM	SiCl4 pre valve closed
10/22/2011	4:31:10 AM	SiCl4 post valve closed
10/22/2011	4:31:10 AM	Bypass valve closed
10/22/2011	4:31:10 AM	Bubbler valve closed
10/22/2011	4:31:10 AM	Helium valve opened
10/22/2011	4:31:10 AM	Main Vac valve opened
10/22/2011	4:31:10 AM	Helium MFC set to  20.000000
10/22/2011	4:31:10 AM	H2 MFC set to  0.000000
10/22/2011	4:31:10 AM	BCl3 MFC set to  0.000000
10/22/2011	4:31:10 AM	PHl3 MFC set to  0.000000
10/22/2011	4:31:10 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:31:10 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:31:10 AM	Tube furnace set to 150
10/22/2011	4:31:40 AM	Helium valve closed
10/22/2011	4:31:40 AM	H2 valve closed
10/22/2011	4:31:40 AM	BCl3 valve closed
10/22/2011	4:31:40 AM	PH3 valve closed
10/22/2011	4:31:40 AM	SiCl4 pre valve closed
10/22/2011	4:31:40 AM	SiCl4 post valve closed
10/22/2011	4:31:40 AM	Bypass valve closed
10/22/2011	4:31:40 AM	Bubbler valve closed
10/22/2011	4:31:40 AM	Main Vac valve opened
10/22/2011	4:31:40 AM	Helium MFC set to  0.000000
10/22/2011	4:31:40 AM	H2 MFC set to  0.000000
10/22/2011	4:31:40 AM	BCl3 MFC set to  0.000000
10/22/2011	4:31:40 AM	PHl3 MFC set to  0.000000
10/22/2011	4:31:40 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:31:40 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:31:40 AM	Tube furnace set to 150
10/22/2011	4:32:10 AM	H2 valve closed
10/22/2011	4:32:10 AM	BCl3 valve closed
10/22/2011	4:32:10 AM	PH3 valve closed
10/22/2011	4:32:10 AM	SiCl4 pre valve closed
10/22/2011	4:32:10 AM	SiCl4 post valve closed
10/22/2011	4:32:10 AM	Bypass valve closed
10/22/2011	4:32:10 AM	Bubbler valve closed
10/22/2011	4:32:10 AM	Helium valve opened
10/22/2011	4:32:10 AM	Main Vac valve opened
10/22/2011	4:32:10 AM	Helium MFC set to  20.000000
10/22/2011	4:32:10 AM	H2 MFC set to  0.000000
10/22/2011	4:32:10 AM	BCl3 MFC set to  0.000000
10/22/2011	4:32:10 AM	PHl3 MFC set to  0.000000
10/22/2011	4:32:10 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:32:10 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:32:10 AM	Tube furnace set to 150
10/22/2011	4:32:40 AM	Helium valve closed
10/22/2011	4:32:40 AM	H2 valve closed
10/22/2011	4:32:40 AM	BCl3 valve closed
10/22/2011	4:32:40 AM	PH3 valve closed
10/22/2011	4:32:40 AM	SiCl4 pre valve closed
10/22/2011	4:32:40 AM	SiCl4 post valve closed
10/22/2011	4:32:40 AM	Bypass valve closed
10/22/2011	4:32:40 AM	Bubbler valve closed
10/22/2011	4:32:40 AM	Main Vac valve opened
10/22/2011	4:32:40 AM	Helium MFC set to  0.000000
10/22/2011	4:32:40 AM	H2 MFC set to  0.000000
10/22/2011	4:32:40 AM	BCl3 MFC set to  0.000000
10/22/2011	4:32:40 AM	PHl3 MFC set to  0.000000
10/22/2011	4:32:40 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:32:40 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:32:40 AM	Tube furnace set to 150
10/22/2011	4:33:10 AM	H2 valve closed
10/22/2011	4:33:10 AM	BCl3 valve closed
10/22/2011	4:33:10 AM	PH3 valve closed
10/22/2011	4:33:10 AM	SiCl4 pre valve closed
10/22/2011	4:33:10 AM	SiCl4 post valve closed
10/22/2011	4:33:10 AM	Bypass valve closed
10/22/2011	4:33:10 AM	Bubbler valve closed
10/22/2011	4:33:10 AM	Helium valve opened
10/22/2011	4:33:10 AM	Main Vac valve opened
10/22/2011	4:33:10 AM	Helium MFC set to  20.000000
10/22/2011	4:33:10 AM	H2 MFC set to  0.000000
10/22/2011	4:33:10 AM	BCl3 MFC set to  0.000000
10/22/2011	4:33:10 AM	PHl3 MFC set to  0.000000
10/22/2011	4:33:10 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:33:10 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:33:11 AM	Tube furnace set to 150
10/22/2011	4:33:41 AM	Helium valve closed
10/22/2011	4:33:41 AM	H2 valve closed
10/22/2011	4:33:41 AM	BCl3 valve closed
10/22/2011	4:33:41 AM	PH3 valve closed
10/22/2011	4:33:41 AM	SiCl4 pre valve closed
10/22/2011	4:33:41 AM	SiCl4 post valve closed
10/22/2011	4:33:41 AM	Bypass valve closed
10/22/2011	4:33:41 AM	Bubbler valve closed
10/22/2011	4:33:41 AM	Main Vac valve opened
10/22/2011	4:33:41 AM	Helium MFC set to  0.000000
10/22/2011	4:33:41 AM	H2 MFC set to  0.000000
10/22/2011	4:33:41 AM	BCl3 MFC set to  0.000000
10/22/2011	4:33:41 AM	PHl3 MFC set to  0.000000
10/22/2011	4:33:41 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:33:41 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:33:41 AM	Tube furnace set to 150
10/22/2011	4:34:11 AM	H2 valve closed
10/22/2011	4:34:11 AM	BCl3 valve closed
10/22/2011	4:34:11 AM	PH3 valve closed
10/22/2011	4:34:11 AM	SiCl4 pre valve closed
10/22/2011	4:34:11 AM	SiCl4 post valve closed
10/22/2011	4:34:11 AM	Bypass valve closed
10/22/2011	4:34:11 AM	Bubbler valve closed
10/22/2011	4:34:11 AM	Helium valve opened
10/22/2011	4:34:11 AM	Main Vac valve opened
10/22/2011	4:34:11 AM	Helium MFC set to  20.000000
10/22/2011	4:34:11 AM	H2 MFC set to  0.000000
10/22/2011	4:34:11 AM	BCl3 MFC set to  0.000000
10/22/2011	4:34:11 AM	PHl3 MFC set to  0.000000
10/22/2011	4:34:11 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:34:11 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:34:11 AM	Tube furnace set to 150
10/22/2011	4:34:41 AM	Helium valve closed
10/22/2011	4:34:41 AM	H2 valve closed
10/22/2011	4:34:41 AM	BCl3 valve closed
10/22/2011	4:34:41 AM	PH3 valve closed
10/22/2011	4:34:41 AM	SiCl4 pre valve closed
10/22/2011	4:34:41 AM	SiCl4 post valve closed
10/22/2011	4:34:41 AM	Bypass valve closed
10/22/2011	4:34:41 AM	Bubbler valve closed
10/22/2011	4:34:41 AM	Main Vac valve opened
10/22/2011	4:34:41 AM	Helium MFC set to  0.000000
10/22/2011	4:34:41 AM	H2 MFC set to  0.000000
10/22/2011	4:34:41 AM	BCl3 MFC set to  0.000000
10/22/2011	4:34:41 AM	PHl3 MFC set to  0.000000
10/22/2011	4:34:41 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:34:41 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:34:41 AM	Tube furnace set to 150
10/22/2011	4:35:11 AM	H2 valve closed
10/22/2011	4:35:11 AM	BCl3 valve closed
10/22/2011	4:35:11 AM	PH3 valve closed
10/22/2011	4:35:11 AM	SiCl4 pre valve closed
10/22/2011	4:35:11 AM	SiCl4 post valve closed
10/22/2011	4:35:11 AM	Bypass valve closed
10/22/2011	4:35:11 AM	Bubbler valve closed
10/22/2011	4:35:11 AM	Helium valve opened
10/22/2011	4:35:11 AM	Main Vac valve opened
10/22/2011	4:35:11 AM	Helium MFC set to  20.000000
10/22/2011	4:35:11 AM	H2 MFC set to  0.000000
10/22/2011	4:35:11 AM	BCl3 MFC set to  0.000000
10/22/2011	4:35:11 AM	PHl3 MFC set to  0.000000
10/22/2011	4:35:11 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:35:11 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:35:11 AM	Tube furnace set to 150
10/22/2011	4:35:41 AM	Helium valve closed
10/22/2011	4:35:41 AM	H2 valve closed
10/22/2011	4:35:41 AM	BCl3 valve closed
10/22/2011	4:35:41 AM	PH3 valve closed
10/22/2011	4:35:41 AM	SiCl4 pre valve closed
10/22/2011	4:35:41 AM	SiCl4 post valve closed
10/22/2011	4:35:41 AM	Bypass valve closed
10/22/2011	4:35:41 AM	Bubbler valve closed
10/22/2011	4:35:42 AM	Main Vac valve opened
10/22/2011	4:35:42 AM	Helium MFC set to  0.000000
10/22/2011	4:35:42 AM	H2 MFC set to  0.000000
10/22/2011	4:35:42 AM	BCl3 MFC set to  0.000000
10/22/2011	4:35:42 AM	PHl3 MFC set to  0.000000
10/22/2011	4:35:42 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:35:42 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:35:42 AM	Tube furnace set to 150
10/22/2011	4:36:12 AM	H2 valve closed
10/22/2011	4:36:12 AM	BCl3 valve closed
10/22/2011	4:36:12 AM	PH3 valve closed
10/22/2011	4:36:12 AM	SiCl4 pre valve closed
10/22/2011	4:36:12 AM	SiCl4 post valve closed
10/22/2011	4:36:12 AM	Bypass valve closed
10/22/2011	4:36:12 AM	Bubbler valve closed
10/22/2011	4:36:12 AM	Helium valve opened
10/22/2011	4:36:12 AM	Main Vac valve opened
10/22/2011	4:36:12 AM	Helium MFC set to  20.000000
10/22/2011	4:36:12 AM	H2 MFC set to  0.000000
10/22/2011	4:36:12 AM	BCl3 MFC set to  0.000000
10/22/2011	4:36:12 AM	PHl3 MFC set to  0.000000
10/22/2011	4:36:12 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:36:12 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:36:12 AM	Tube furnace set to 150
10/22/2011	4:36:42 AM	Helium valve closed
10/22/2011	4:36:42 AM	H2 valve closed
10/22/2011	4:36:42 AM	BCl3 valve closed
10/22/2011	4:36:42 AM	PH3 valve closed
10/22/2011	4:36:42 AM	SiCl4 pre valve closed
10/22/2011	4:36:42 AM	SiCl4 post valve closed
10/22/2011	4:36:42 AM	Bypass valve closed
10/22/2011	4:36:42 AM	Bubbler valve closed
10/22/2011	4:36:42 AM	Main Vac valve opened
10/22/2011	4:36:42 AM	Helium MFC set to  0.000000
10/22/2011	4:36:42 AM	H2 MFC set to  0.000000
10/22/2011	4:36:42 AM	BCl3 MFC set to  0.000000
10/22/2011	4:36:42 AM	PHl3 MFC set to  0.000000
10/22/2011	4:36:42 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:36:42 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:36:42 AM	Tube furnace set to 150
10/22/2011	4:37:12 AM	H2 valve closed
10/22/2011	4:37:12 AM	BCl3 valve closed
10/22/2011	4:37:12 AM	PH3 valve closed
10/22/2011	4:37:12 AM	SiCl4 pre valve closed
10/22/2011	4:37:12 AM	SiCl4 post valve closed
10/22/2011	4:37:12 AM	Bypass valve closed
10/22/2011	4:37:12 AM	Bubbler valve closed
10/22/2011	4:37:12 AM	Helium valve opened
10/22/2011	4:37:12 AM	Main Vac valve opened
10/22/2011	4:37:12 AM	Helium MFC set to  20.000000
10/22/2011	4:37:12 AM	H2 MFC set to  0.000000
10/22/2011	4:37:12 AM	BCl3 MFC set to  0.000000
10/22/2011	4:37:12 AM	PHl3 MFC set to  0.000000
10/22/2011	4:37:12 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:37:12 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:37:12 AM	Tube furnace set to 150
10/22/2011	4:37:42 AM	Helium valve closed
10/22/2011	4:37:42 AM	H2 valve closed
10/22/2011	4:37:42 AM	BCl3 valve closed
10/22/2011	4:37:42 AM	PH3 valve closed
10/22/2011	4:37:42 AM	SiCl4 pre valve closed
10/22/2011	4:37:42 AM	SiCl4 post valve closed
10/22/2011	4:37:42 AM	Bypass valve closed
10/22/2011	4:37:42 AM	Bubbler valve closed
10/22/2011	4:37:42 AM	Main Vac valve opened
10/22/2011	4:37:42 AM	Helium MFC set to  0.000000
10/22/2011	4:37:42 AM	H2 MFC set to  0.000000
10/22/2011	4:37:42 AM	BCl3 MFC set to  0.000000
10/22/2011	4:37:42 AM	PHl3 MFC set to  0.000000
10/22/2011	4:37:42 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:37:42 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:37:43 AM	Tube furnace set to 150
10/22/2011	4:38:13 AM	H2 valve closed
10/22/2011	4:38:13 AM	BCl3 valve closed
10/22/2011	4:38:13 AM	PH3 valve closed
10/22/2011	4:38:13 AM	SiCl4 pre valve closed
10/22/2011	4:38:13 AM	SiCl4 post valve closed
10/22/2011	4:38:13 AM	Bypass valve closed
10/22/2011	4:38:13 AM	Bubbler valve closed
10/22/2011	4:38:13 AM	Helium valve opened
10/22/2011	4:38:13 AM	Main Vac valve opened
10/22/2011	4:38:13 AM	Helium MFC set to  20.000000
10/22/2011	4:38:13 AM	H2 MFC set to  0.000000
10/22/2011	4:38:13 AM	BCl3 MFC set to  0.000000
10/22/2011	4:38:13 AM	PHl3 MFC set to  0.000000
10/22/2011	4:38:13 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:38:13 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:38:13 AM	Tube furnace set to 150
10/22/2011	4:38:43 AM	Helium valve closed
10/22/2011	4:38:43 AM	H2 valve closed
10/22/2011	4:38:43 AM	BCl3 valve closed
10/22/2011	4:38:43 AM	PH3 valve closed
10/22/2011	4:38:43 AM	SiCl4 pre valve closed
10/22/2011	4:38:43 AM	SiCl4 post valve closed
10/22/2011	4:38:43 AM	Bypass valve closed
10/22/2011	4:38:43 AM	Bubbler valve closed
10/22/2011	4:38:43 AM	Main Vac valve opened
10/22/2011	4:38:43 AM	Helium MFC set to  0.000000
10/22/2011	4:38:43 AM	H2 MFC set to  0.000000
10/22/2011	4:38:43 AM	BCl3 MFC set to  0.000000
10/22/2011	4:38:43 AM	PHl3 MFC set to  0.000000
10/22/2011	4:38:43 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:38:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:38:43 AM	Tube furnace set to 150
10/22/2011	4:39:13 AM	H2 valve closed
10/22/2011	4:39:13 AM	BCl3 valve closed
10/22/2011	4:39:13 AM	PH3 valve closed
10/22/2011	4:39:13 AM	SiCl4 pre valve closed
10/22/2011	4:39:13 AM	SiCl4 post valve closed
10/22/2011	4:39:13 AM	Bypass valve closed
10/22/2011	4:39:13 AM	Bubbler valve closed
10/22/2011	4:39:13 AM	Helium valve opened
10/22/2011	4:39:13 AM	Main Vac valve opened
10/22/2011	4:39:13 AM	Helium MFC set to  20.000000
10/22/2011	4:39:13 AM	H2 MFC set to  0.000000
10/22/2011	4:39:13 AM	BCl3 MFC set to  0.000000
10/22/2011	4:39:13 AM	PHl3 MFC set to  0.000000
10/22/2011	4:39:13 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:39:13 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:39:13 AM	Tube furnace set to 150
10/22/2011	4:39:43 AM	Helium valve closed
10/22/2011	4:39:43 AM	H2 valve closed
10/22/2011	4:39:43 AM	BCl3 valve closed
10/22/2011	4:39:43 AM	PH3 valve closed
10/22/2011	4:39:43 AM	SiCl4 pre valve closed
10/22/2011	4:39:43 AM	SiCl4 post valve closed
10/22/2011	4:39:43 AM	Bypass valve closed
10/22/2011	4:39:43 AM	Bubbler valve closed
10/22/2011	4:39:43 AM	Main Vac valve opened
10/22/2011	4:39:43 AM	Helium MFC set to  0.000000
10/22/2011	4:39:43 AM	H2 MFC set to  0.000000
10/22/2011	4:39:43 AM	BCl3 MFC set to  0.000000
10/22/2011	4:39:43 AM	PHl3 MFC set to  0.000000
10/22/2011	4:39:43 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:39:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:39:43 AM	Tube furnace set to 150
10/22/2011	4:39:44 AM	Run finished at 4:39 AM
10/22/2011	4:40:42 AM	Recipe started at 4:40 AM
10/22/2011	4:40:42 AM	Helium valve closed
10/22/2011	4:40:42 AM	H2 valve closed
10/22/2011	4:40:42 AM	BCl3 valve closed
10/22/2011	4:40:42 AM	PH3 valve closed
10/22/2011	4:40:42 AM	SiCl4 pre valve closed
10/22/2011	4:40:42 AM	SiCl4 post valve closed
10/22/2011	4:40:42 AM	Bypass valve closed
10/22/2011	4:40:42 AM	Bubbler valve closed
10/22/2011	4:40:42 AM	Main Vac valve opened
10/22/2011	4:40:42 AM	Helium MFC set to  0.000000
10/22/2011	4:40:42 AM	H2 MFC set to  0.000000
10/22/2011	4:40:42 AM	BCl3 MFC set to  0.000000
10/22/2011	4:40:42 AM	PHl3 MFC set to  0.000000
10/22/2011	4:40:42 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:40:42 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:40:42 AM	Tube furnace set to 150
10/22/2011	4:41:12 AM	H2 valve closed
10/22/2011	4:41:12 AM	BCl3 valve closed
10/22/2011	4:41:12 AM	PH3 valve closed
10/22/2011	4:41:12 AM	SiCl4 pre valve closed
10/22/2011	4:41:12 AM	SiCl4 post valve closed
10/22/2011	4:41:12 AM	Bypass valve closed
10/22/2011	4:41:12 AM	Bubbler valve closed
10/22/2011	4:41:12 AM	Helium valve opened
10/22/2011	4:41:12 AM	Main Vac valve opened
10/22/2011	4:41:12 AM	Helium MFC set to  20.000000
10/22/2011	4:41:12 AM	H2 MFC set to  0.000000
10/22/2011	4:41:12 AM	BCl3 MFC set to  0.000000
10/22/2011	4:41:12 AM	PHl3 MFC set to  0.000000
10/22/2011	4:41:12 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:41:12 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:41:12 AM	Tube furnace set to 150
10/22/2011	4:41:42 AM	Helium valve closed
10/22/2011	4:41:42 AM	H2 valve closed
10/22/2011	4:41:42 AM	BCl3 valve closed
10/22/2011	4:41:42 AM	PH3 valve closed
10/22/2011	4:41:42 AM	SiCl4 pre valve closed
10/22/2011	4:41:42 AM	SiCl4 post valve closed
10/22/2011	4:41:42 AM	Bypass valve closed
10/22/2011	4:41:42 AM	Bubbler valve closed
10/22/2011	4:41:42 AM	Main Vac valve opened
10/22/2011	4:41:42 AM	Helium MFC set to  0.000000
10/22/2011	4:41:42 AM	H2 MFC set to  0.000000
10/22/2011	4:41:42 AM	BCl3 MFC set to  0.000000
10/22/2011	4:41:42 AM	PHl3 MFC set to  0.000000
10/22/2011	4:41:42 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:41:42 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:41:42 AM	Tube furnace set to 150
10/22/2011	4:42:12 AM	H2 valve closed
10/22/2011	4:42:12 AM	BCl3 valve closed
10/22/2011	4:42:12 AM	PH3 valve closed
10/22/2011	4:42:12 AM	SiCl4 pre valve closed
10/22/2011	4:42:12 AM	SiCl4 post valve closed
10/22/2011	4:42:12 AM	Bypass valve closed
10/22/2011	4:42:12 AM	Bubbler valve closed
10/22/2011	4:42:12 AM	Helium valve opened
10/22/2011	4:42:12 AM	Main Vac valve opened
10/22/2011	4:42:12 AM	Helium MFC set to  20.000000
10/22/2011	4:42:12 AM	H2 MFC set to  0.000000
10/22/2011	4:42:12 AM	BCl3 MFC set to  0.000000
10/22/2011	4:42:12 AM	PHl3 MFC set to  0.000000
10/22/2011	4:42:12 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:42:12 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:42:12 AM	Tube furnace set to 150
10/22/2011	4:42:42 AM	Helium valve closed
10/22/2011	4:42:42 AM	H2 valve closed
10/22/2011	4:42:42 AM	BCl3 valve closed
10/22/2011	4:42:42 AM	PH3 valve closed
10/22/2011	4:42:42 AM	SiCl4 pre valve closed
10/22/2011	4:42:42 AM	SiCl4 post valve closed
10/22/2011	4:42:42 AM	Bypass valve closed
10/22/2011	4:42:42 AM	Bubbler valve closed
10/22/2011	4:42:42 AM	Main Vac valve opened
10/22/2011	4:42:42 AM	Helium MFC set to  0.000000
10/22/2011	4:42:42 AM	H2 MFC set to  0.000000
10/22/2011	4:42:42 AM	BCl3 MFC set to  0.000000
10/22/2011	4:42:42 AM	PHl3 MFC set to  0.000000
10/22/2011	4:42:42 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:42:42 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:42:43 AM	Tube furnace set to 150
10/22/2011	4:43:13 AM	H2 valve closed
10/22/2011	4:43:13 AM	BCl3 valve closed
10/22/2011	4:43:13 AM	PH3 valve closed
10/22/2011	4:43:13 AM	SiCl4 pre valve closed
10/22/2011	4:43:13 AM	SiCl4 post valve closed
10/22/2011	4:43:13 AM	Bypass valve closed
10/22/2011	4:43:13 AM	Bubbler valve closed
10/22/2011	4:43:13 AM	Helium valve opened
10/22/2011	4:43:13 AM	Main Vac valve opened
10/22/2011	4:43:13 AM	Helium MFC set to  20.000000
10/22/2011	4:43:13 AM	H2 MFC set to  0.000000
10/22/2011	4:43:13 AM	BCl3 MFC set to  0.000000
10/22/2011	4:43:13 AM	PHl3 MFC set to  0.000000
10/22/2011	4:43:13 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:43:13 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:43:13 AM	Tube furnace set to 150
10/22/2011	4:43:43 AM	Helium valve closed
10/22/2011	4:43:43 AM	H2 valve closed
10/22/2011	4:43:43 AM	BCl3 valve closed
10/22/2011	4:43:43 AM	PH3 valve closed
10/22/2011	4:43:43 AM	SiCl4 pre valve closed
10/22/2011	4:43:43 AM	SiCl4 post valve closed
10/22/2011	4:43:43 AM	Bypass valve closed
10/22/2011	4:43:43 AM	Bubbler valve closed
10/22/2011	4:43:43 AM	Main Vac valve opened
10/22/2011	4:43:43 AM	Helium MFC set to  0.000000
10/22/2011	4:43:43 AM	H2 MFC set to  0.000000
10/22/2011	4:43:43 AM	BCl3 MFC set to  0.000000
10/22/2011	4:43:43 AM	PHl3 MFC set to  0.000000
10/22/2011	4:43:43 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:43:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:43:43 AM	Tube furnace set to 150
10/22/2011	4:44:13 AM	H2 valve closed
10/22/2011	4:44:13 AM	BCl3 valve closed
10/22/2011	4:44:13 AM	PH3 valve closed
10/22/2011	4:44:13 AM	SiCl4 pre valve closed
10/22/2011	4:44:13 AM	SiCl4 post valve closed
10/22/2011	4:44:13 AM	Bypass valve closed
10/22/2011	4:44:13 AM	Bubbler valve closed
10/22/2011	4:44:13 AM	Helium valve opened
10/22/2011	4:44:13 AM	Main Vac valve opened
10/22/2011	4:44:13 AM	Helium MFC set to  20.000000
10/22/2011	4:44:13 AM	H2 MFC set to  0.000000
10/22/2011	4:44:13 AM	BCl3 MFC set to  0.000000
10/22/2011	4:44:13 AM	PHl3 MFC set to  0.000000
10/22/2011	4:44:13 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:44:13 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:44:13 AM	Tube furnace set to 150
10/22/2011	4:44:43 AM	Helium valve closed
10/22/2011	4:44:43 AM	H2 valve closed
10/22/2011	4:44:43 AM	BCl3 valve closed
10/22/2011	4:44:43 AM	PH3 valve closed
10/22/2011	4:44:43 AM	SiCl4 pre valve closed
10/22/2011	4:44:43 AM	SiCl4 post valve closed
10/22/2011	4:44:43 AM	Bypass valve closed
10/22/2011	4:44:43 AM	Bubbler valve closed
10/22/2011	4:44:43 AM	Main Vac valve opened
10/22/2011	4:44:43 AM	Helium MFC set to  0.000000
10/22/2011	4:44:43 AM	H2 MFC set to  0.000000
10/22/2011	4:44:43 AM	BCl3 MFC set to  0.000000
10/22/2011	4:44:43 AM	PHl3 MFC set to  0.000000
10/22/2011	4:44:43 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:44:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:44:43 AM	Tube furnace set to 150
10/22/2011	4:45:13 AM	H2 valve closed
10/22/2011	4:45:13 AM	BCl3 valve closed
10/22/2011	4:45:13 AM	PH3 valve closed
10/22/2011	4:45:13 AM	SiCl4 pre valve closed
10/22/2011	4:45:13 AM	SiCl4 post valve closed
10/22/2011	4:45:13 AM	Bypass valve closed
10/22/2011	4:45:13 AM	Bubbler valve closed
10/22/2011	4:45:13 AM	Helium valve opened
10/22/2011	4:45:13 AM	Main Vac valve opened
10/22/2011	4:45:13 AM	Helium MFC set to  20.000000
10/22/2011	4:45:13 AM	H2 MFC set to  0.000000
10/22/2011	4:45:13 AM	BCl3 MFC set to  0.000000
10/22/2011	4:45:13 AM	PHl3 MFC set to  0.000000
10/22/2011	4:45:13 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:45:13 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:45:14 AM	Tube furnace set to 150
10/22/2011	4:45:44 AM	Helium valve closed
10/22/2011	4:45:44 AM	H2 valve closed
10/22/2011	4:45:44 AM	BCl3 valve closed
10/22/2011	4:45:44 AM	PH3 valve closed
10/22/2011	4:45:44 AM	SiCl4 pre valve closed
10/22/2011	4:45:44 AM	SiCl4 post valve closed
10/22/2011	4:45:44 AM	Bypass valve closed
10/22/2011	4:45:44 AM	Bubbler valve closed
10/22/2011	4:45:44 AM	Main Vac valve opened
10/22/2011	4:45:44 AM	Helium MFC set to  0.000000
10/22/2011	4:45:44 AM	H2 MFC set to  0.000000
10/22/2011	4:45:44 AM	BCl3 MFC set to  0.000000
10/22/2011	4:45:44 AM	PHl3 MFC set to  0.000000
10/22/2011	4:45:44 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:45:44 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:45:44 AM	Tube furnace set to 150
10/22/2011	4:46:14 AM	H2 valve closed
10/22/2011	4:46:14 AM	BCl3 valve closed
10/22/2011	4:46:14 AM	PH3 valve closed
10/22/2011	4:46:14 AM	SiCl4 pre valve closed
10/22/2011	4:46:14 AM	SiCl4 post valve closed
10/22/2011	4:46:14 AM	Bypass valve closed
10/22/2011	4:46:14 AM	Bubbler valve closed
10/22/2011	4:46:14 AM	Helium valve opened
10/22/2011	4:46:14 AM	Main Vac valve opened
10/22/2011	4:46:14 AM	Helium MFC set to  20.000000
10/22/2011	4:46:14 AM	H2 MFC set to  0.000000
10/22/2011	4:46:14 AM	BCl3 MFC set to  0.000000
10/22/2011	4:46:14 AM	PHl3 MFC set to  0.000000
10/22/2011	4:46:14 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:46:14 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:46:14 AM	Tube furnace set to 150
10/22/2011	4:46:44 AM	Helium valve closed
10/22/2011	4:46:44 AM	H2 valve closed
10/22/2011	4:46:44 AM	BCl3 valve closed
10/22/2011	4:46:44 AM	PH3 valve closed
10/22/2011	4:46:44 AM	SiCl4 pre valve closed
10/22/2011	4:46:44 AM	SiCl4 post valve closed
10/22/2011	4:46:44 AM	Bypass valve closed
10/22/2011	4:46:44 AM	Bubbler valve closed
10/22/2011	4:46:44 AM	Main Vac valve opened
10/22/2011	4:46:44 AM	Helium MFC set to  0.000000
10/22/2011	4:46:44 AM	H2 MFC set to  0.000000
10/22/2011	4:46:44 AM	BCl3 MFC set to  0.000000
10/22/2011	4:46:44 AM	PHl3 MFC set to  0.000000
10/22/2011	4:46:44 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:46:44 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:46:44 AM	Tube furnace set to 150
10/22/2011	4:47:14 AM	H2 valve closed
10/22/2011	4:47:14 AM	BCl3 valve closed
10/22/2011	4:47:14 AM	PH3 valve closed
10/22/2011	4:47:14 AM	SiCl4 pre valve closed
10/22/2011	4:47:14 AM	SiCl4 post valve closed
10/22/2011	4:47:14 AM	Bypass valve closed
10/22/2011	4:47:14 AM	Bubbler valve closed
10/22/2011	4:47:14 AM	Helium valve opened
10/22/2011	4:47:14 AM	Main Vac valve opened
10/22/2011	4:47:14 AM	Helium MFC set to  20.000000
10/22/2011	4:47:14 AM	H2 MFC set to  0.000000
10/22/2011	4:47:14 AM	BCl3 MFC set to  0.000000
10/22/2011	4:47:14 AM	PHl3 MFC set to  0.000000
10/22/2011	4:47:14 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:47:14 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:47:14 AM	Tube furnace set to 150
10/22/2011	4:47:44 AM	Helium valve closed
10/22/2011	4:47:44 AM	H2 valve closed
10/22/2011	4:47:44 AM	BCl3 valve closed
10/22/2011	4:47:44 AM	PH3 valve closed
10/22/2011	4:47:44 AM	SiCl4 pre valve closed
10/22/2011	4:47:44 AM	SiCl4 post valve closed
10/22/2011	4:47:44 AM	Bypass valve closed
10/22/2011	4:47:44 AM	Bubbler valve closed
10/22/2011	4:47:44 AM	Main Vac valve opened
10/22/2011	4:47:44 AM	Helium MFC set to  0.000000
10/22/2011	4:47:44 AM	H2 MFC set to  0.000000
10/22/2011	4:47:44 AM	BCl3 MFC set to  0.000000
10/22/2011	4:47:44 AM	PHl3 MFC set to  0.000000
10/22/2011	4:47:44 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:47:44 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:47:45 AM	Tube furnace set to 150
10/22/2011	4:48:15 AM	H2 valve closed
10/22/2011	4:48:15 AM	BCl3 valve closed
10/22/2011	4:48:15 AM	PH3 valve closed
10/22/2011	4:48:15 AM	SiCl4 pre valve closed
10/22/2011	4:48:15 AM	SiCl4 post valve closed
10/22/2011	4:48:15 AM	Bypass valve closed
10/22/2011	4:48:15 AM	Bubbler valve closed
10/22/2011	4:48:15 AM	Helium valve opened
10/22/2011	4:48:15 AM	Main Vac valve opened
10/22/2011	4:48:15 AM	Helium MFC set to  20.000000
10/22/2011	4:48:15 AM	H2 MFC set to  0.000000
10/22/2011	4:48:15 AM	BCl3 MFC set to  0.000000
10/22/2011	4:48:15 AM	PHl3 MFC set to  0.000000
10/22/2011	4:48:15 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:48:15 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:48:15 AM	Tube furnace set to 150
10/22/2011	4:48:45 AM	Helium valve closed
10/22/2011	4:48:45 AM	H2 valve closed
10/22/2011	4:48:45 AM	BCl3 valve closed
10/22/2011	4:48:45 AM	PH3 valve closed
10/22/2011	4:48:45 AM	SiCl4 pre valve closed
10/22/2011	4:48:45 AM	SiCl4 post valve closed
10/22/2011	4:48:45 AM	Bypass valve closed
10/22/2011	4:48:45 AM	Bubbler valve closed
10/22/2011	4:48:45 AM	Main Vac valve opened
10/22/2011	4:48:45 AM	Helium MFC set to  0.000000
10/22/2011	4:48:45 AM	H2 MFC set to  0.000000
10/22/2011	4:48:45 AM	BCl3 MFC set to  0.000000
10/22/2011	4:48:45 AM	PHl3 MFC set to  0.000000
10/22/2011	4:48:45 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:48:45 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:48:45 AM	Tube furnace set to 150
10/22/2011	4:49:15 AM	H2 valve closed
10/22/2011	4:49:15 AM	BCl3 valve closed
10/22/2011	4:49:15 AM	PH3 valve closed
10/22/2011	4:49:15 AM	SiCl4 pre valve closed
10/22/2011	4:49:15 AM	SiCl4 post valve closed
10/22/2011	4:49:15 AM	Bypass valve closed
10/22/2011	4:49:15 AM	Bubbler valve closed
10/22/2011	4:49:15 AM	Helium valve opened
10/22/2011	4:49:15 AM	Main Vac valve opened
10/22/2011	4:49:15 AM	Helium MFC set to  20.000000
10/22/2011	4:49:15 AM	H2 MFC set to  0.000000
10/22/2011	4:49:15 AM	BCl3 MFC set to  0.000000
10/22/2011	4:49:15 AM	PHl3 MFC set to  0.000000
10/22/2011	4:49:15 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:49:15 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:49:15 AM	Tube furnace set to 150
10/22/2011	4:49:45 AM	Helium valve closed
10/22/2011	4:49:45 AM	H2 valve closed
10/22/2011	4:49:45 AM	BCl3 valve closed
10/22/2011	4:49:45 AM	PH3 valve closed
10/22/2011	4:49:45 AM	SiCl4 pre valve closed
10/22/2011	4:49:45 AM	SiCl4 post valve closed
10/22/2011	4:49:45 AM	Bypass valve closed
10/22/2011	4:49:45 AM	Bubbler valve closed
10/22/2011	4:49:45 AM	Main Vac valve opened
10/22/2011	4:49:45 AM	Helium MFC set to  0.000000
10/22/2011	4:49:45 AM	H2 MFC set to  0.000000
10/22/2011	4:49:45 AM	BCl3 MFC set to  0.000000
10/22/2011	4:49:45 AM	PHl3 MFC set to  0.000000
10/22/2011	4:49:45 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:49:45 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:49:45 AM	Tube furnace set to 150
10/22/2011	4:50:15 AM	H2 valve closed
10/22/2011	4:50:15 AM	BCl3 valve closed
10/22/2011	4:50:15 AM	PH3 valve closed
10/22/2011	4:50:15 AM	SiCl4 pre valve closed
10/22/2011	4:50:15 AM	SiCl4 post valve closed
10/22/2011	4:50:15 AM	Bypass valve closed
10/22/2011	4:50:15 AM	Bubbler valve closed
10/22/2011	4:50:15 AM	Helium valve opened
10/22/2011	4:50:15 AM	Main Vac valve opened
10/22/2011	4:50:15 AM	Helium MFC set to  20.000000
10/22/2011	4:50:15 AM	H2 MFC set to  0.000000
10/22/2011	4:50:15 AM	BCl3 MFC set to  0.000000
10/22/2011	4:50:15 AM	PHl3 MFC set to  0.000000
10/22/2011	4:50:15 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:50:15 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:50:16 AM	Tube furnace set to 150
10/22/2011	4:50:46 AM	Helium valve closed
10/22/2011	4:50:46 AM	H2 valve closed
10/22/2011	4:50:46 AM	BCl3 valve closed
10/22/2011	4:50:46 AM	PH3 valve closed
10/22/2011	4:50:46 AM	SiCl4 pre valve closed
10/22/2011	4:50:46 AM	SiCl4 post valve closed
10/22/2011	4:50:46 AM	Bypass valve closed
10/22/2011	4:50:46 AM	Bubbler valve closed
10/22/2011	4:50:46 AM	Main Vac valve opened
10/22/2011	4:50:46 AM	Helium MFC set to  0.000000
10/22/2011	4:50:46 AM	H2 MFC set to  0.000000
10/22/2011	4:50:46 AM	BCl3 MFC set to  0.000000
10/22/2011	4:50:46 AM	PHl3 MFC set to  0.000000
10/22/2011	4:50:46 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:50:46 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:50:46 AM	Tube furnace set to 150
10/22/2011	4:50:47 AM	Run finished at 4:50 AM
10/22/2011	4:53:16 AM	Main Vac valve closed
10/22/2011	4:53:27 AM	Main Vac valve opened
10/22/2011	4:54:50 AM	Recipe started at 4:54 AM
10/22/2011	4:54:50 AM	Helium valve closed
10/22/2011	4:54:50 AM	H2 valve closed
10/22/2011	4:54:50 AM	BCl3 valve closed
10/22/2011	4:54:50 AM	PH3 valve closed
10/22/2011	4:54:50 AM	SiCl4 pre valve closed
10/22/2011	4:54:50 AM	SiCl4 post valve closed
10/22/2011	4:54:50 AM	Main Vac valve closed
10/22/2011	4:54:50 AM	Bypass valve closed
10/22/2011	4:54:50 AM	Bubbler valve closed
10/22/2011	4:54:50 AM	Helium MFC set to  0.000000
10/22/2011	4:54:50 AM	H2 MFC set to  0.000000
10/22/2011	4:54:50 AM	BCl3 MFC set to  0.000000
10/22/2011	4:54:50 AM	PHl3 MFC set to  0.000000
10/22/2011	4:54:50 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:54:50 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:54:50 AM	Tube furnace set to 0
10/22/2011	4:54:53 AM	Helium valve closed
10/22/2011	4:54:53 AM	BCl3 valve closed
10/22/2011	4:54:53 AM	PH3 valve closed
10/22/2011	4:54:53 AM	SiCl4 pre valve closed
10/22/2011	4:54:53 AM	SiCl4 post valve closed
10/22/2011	4:54:53 AM	Main Vac valve closed
10/22/2011	4:54:53 AM	Bypass valve closed
10/22/2011	4:54:53 AM	Bubbler valve closed
10/22/2011	4:54:53 AM	H2 valve opened
10/22/2011	4:54:53 AM	Helium MFC set to  0.000000
10/22/2011	4:54:53 AM	H2 MFC set to  500.000000
10/22/2011	4:54:53 AM	BCl3 MFC set to  0.000000
10/22/2011	4:54:53 AM	PHl3 MFC set to  0.000000
10/22/2011	4:54:53 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:54:53 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:54:53 AM	Tube furnace set to 0
10/22/2011	4:55:58 AM	Helium valve closed
10/22/2011	4:55:58 AM	BCl3 valve closed
10/22/2011	4:55:58 AM	PH3 valve closed
10/22/2011	4:55:58 AM	SiCl4 pre valve closed
10/22/2011	4:55:58 AM	SiCl4 post valve closed
10/22/2011	4:55:58 AM	Main Vac valve closed
10/22/2011	4:55:58 AM	Bypass valve closed
10/22/2011	4:55:58 AM	H2 valve opened
10/22/2011	4:55:58 AM	Bubbler valve opened
10/22/2011	4:55:58 AM	Helium MFC set to  0.000000
10/22/2011	4:55:58 AM	H2 MFC set to  500.000000
10/22/2011	4:55:58 AM	BCl3 MFC set to  0.000000
10/22/2011	4:55:58 AM	PHl3 MFC set to  0.000000
10/22/2011	4:55:58 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:55:58 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:55:58 AM	Tube furnace set to 0
10/22/2011	4:55:59 AM	Helium valve closed
10/22/2011	4:55:59 AM	BCl3 valve closed
10/22/2011	4:55:59 AM	PH3 valve closed
10/22/2011	4:55:59 AM	SiCl4 pre valve closed
10/22/2011	4:55:59 AM	SiCl4 post valve closed
10/22/2011	4:55:59 AM	Main Vac valve closed
10/22/2011	4:55:59 AM	Bypass valve closed
10/22/2011	4:55:59 AM	H2 valve opened
10/22/2011	4:55:59 AM	Bubbler valve opened
10/22/2011	4:55:59 AM	Helium MFC set to  0.000000
10/22/2011	4:55:59 AM	H2 MFC set to  500.000000
10/22/2011	4:55:59 AM	BCl3 MFC set to  0.000000
10/22/2011	4:55:59 AM	PHl3 MFC set to  0.000000
10/22/2011	4:55:59 AM	SiCl4 MFC set to  0.000000
10/22/2011	4:55:59 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:55:59 AM	Tube furnace set to 1025
10/22/2011	5:25:59 AM	Helium valve closed
10/22/2011	5:25:59 AM	BCl3 valve closed
10/22/2011	5:25:59 AM	PH3 valve closed
10/22/2011	5:25:59 AM	Main Vac valve closed
10/22/2011	5:25:59 AM	Bypass valve closed
10/22/2011	5:25:59 AM	H2 valve opened
10/22/2011	5:25:59 AM	SiCl4 pre valve opened
10/22/2011	5:25:59 AM	SiCl4 post valve opened
10/22/2011	5:25:59 AM	Bubbler valve opened
10/22/2011	5:25:59 AM	Helium MFC set to  0.000000
10/22/2011	5:25:59 AM	H2 MFC set to  500.000000
10/22/2011	5:25:59 AM	BCl3 MFC set to  0.000000
10/22/2011	5:25:59 AM	PHl3 MFC set to  0.000000
10/22/2011	5:25:59 AM	SiCl4 MFC set to  47.500000
10/22/2011	5:25:59 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:25:59 AM	Tube furnace set to 1025
10/22/2011	5:35:59 AM	Helium valve closed
10/22/2011	5:35:59 AM	BCl3 valve closed
10/22/2011	5:35:59 AM	PH3 valve closed
10/22/2011	5:35:59 AM	SiCl4 pre valve closed
10/22/2011	5:35:59 AM	SiCl4 post valve closed
10/22/2011	5:35:59 AM	Main Vac valve closed
10/22/2011	5:35:59 AM	Bypass valve closed
10/22/2011	5:35:59 AM	H2 valve opened
10/22/2011	5:35:59 AM	Bubbler valve opened
10/22/2011	5:35:59 AM	Helium MFC set to  0.000000
10/22/2011	5:35:59 AM	H2 MFC set to  500.000000
10/22/2011	5:35:59 AM	BCl3 MFC set to  0.000000
10/22/2011	5:35:59 AM	PHl3 MFC set to  0.000000
10/22/2011	5:35:59 AM	SiCl4 MFC set to  0.000000
10/22/2011	5:35:59 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:35:59 AM	Tube furnace set to 750
10/22/2011	5:45:59 AM	H2 valve closed
10/22/2011	5:45:59 AM	BCl3 valve closed
10/22/2011	5:45:59 AM	PH3 valve closed
10/22/2011	5:45:59 AM	SiCl4 pre valve closed
10/22/2011	5:45:59 AM	SiCl4 post valve closed
10/22/2011	5:45:59 AM	Main Vac valve closed
10/22/2011	5:45:59 AM	Bypass valve closed
10/22/2011	5:45:59 AM	Helium valve opened
10/22/2011	5:45:59 AM	Bubbler valve opened
10/22/2011	5:45:59 AM	Helium MFC set to  500.000000
10/22/2011	5:45:59 AM	H2 MFC set to  0.000000
10/22/2011	5:45:59 AM	BCl3 MFC set to  0.000000
10/22/2011	5:45:59 AM	PHl3 MFC set to  0.000000
10/22/2011	5:45:59 AM	SiCl4 MFC set to  0.000000
10/22/2011	5:45:59 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:45:59 AM	Tube furnace set to 0
10/22/2011	5:58:35 AM	Helium valve closed
10/22/2011	5:58:35 AM	H2 valve closed
10/22/2011	5:58:35 AM	BCl3 valve closed
10/22/2011	5:58:35 AM	PH3 valve closed
10/22/2011	5:58:35 AM	SiCl4 pre valve closed
10/22/2011	5:58:35 AM	SiCl4 post valve closed
10/22/2011	5:58:35 AM	Main Vac valve closed
10/22/2011	5:58:35 AM	Bypass valve closed
10/22/2011	5:58:35 AM	Bubbler valve closed
10/22/2011	5:58:35 AM	Helium MFC set to  0.000000
10/22/2011	5:58:35 AM	H2 MFC set to  0.000000
10/22/2011	5:58:35 AM	BCl3 MFC set to  0.000000
10/22/2011	5:58:35 AM	PHl3 MFC set to  0.000000
10/22/2011	5:58:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	5:58:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:58:35 AM	Tube furnace set to 0
10/22/2011	5:58:36 AM	Run finished at 5:58 AM
10/22/2011	5:58:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	5:58:43 AM	Recipe started at 5:58 AM
10/22/2011	5:58:43 AM	Helium valve closed
10/22/2011	5:58:43 AM	H2 valve closed
10/22/2011	5:58:43 AM	BCl3 valve closed
10/22/2011	5:58:43 AM	PH3 valve closed
10/22/2011	5:58:43 AM	SiCl4 pre valve closed
10/22/2011	5:58:43 AM	SiCl4 post valve closed
10/22/2011	5:58:43 AM	Main Vac valve closed
10/22/2011	5:58:43 AM	Bypass valve closed
10/22/2011	5:58:43 AM	Bubbler valve closed
10/22/2011	5:58:43 AM	Helium MFC set to  0.000000
10/22/2011	5:58:43 AM	H2 MFC set to  0.000000
10/22/2011	5:58:43 AM	BCl3 MFC set to  0.000000
10/22/2011	5:58:43 AM	PHl3 MFC set to  0.000000
10/22/2011	5:58:43 AM	SiCl4 MFC set to  0.000000
10/22/2011	5:58:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:58:43 AM	Tube furnace set to 0
10/22/2011	5:58:46 AM	H2 valve closed
10/22/2011	5:58:46 AM	BCl3 valve closed
10/22/2011	5:58:46 AM	PH3 valve closed
10/22/2011	5:58:46 AM	SiCl4 pre valve closed
10/22/2011	5:58:46 AM	SiCl4 post valve closed
10/22/2011	5:58:46 AM	Main Vac valve closed
10/22/2011	5:58:46 AM	Bypass valve closed
10/22/2011	5:58:46 AM	Bubbler valve closed
10/22/2011	5:58:46 AM	Helium valve opened
10/22/2011	5:58:46 AM	Helium MFC set to  500.000000
10/22/2011	5:58:46 AM	H2 MFC set to  0.000000
10/22/2011	5:58:46 AM	BCl3 MFC set to  0.000000
10/22/2011	5:58:46 AM	PHl3 MFC set to  0.000000
10/22/2011	5:58:46 AM	SiCl4 MFC set to  0.000000
10/22/2011	5:58:46 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:58:46 AM	Tube furnace set to 0
10/22/2011	5:58:46 AM	Helium valve closed
10/22/2011	5:58:46 AM	H2 valve closed
10/22/2011	5:58:47 AM	BCl3 valve closed
10/22/2011	5:58:47 AM	PH3 valve closed
10/22/2011	5:58:47 AM	SiCl4 pre valve closed
10/22/2011	5:58:47 AM	SiCl4 post valve closed
10/22/2011	5:58:47 AM	Main Vac valve closed
10/22/2011	5:58:47 AM	Bypass valve closed
10/22/2011	5:58:47 AM	Bubbler valve closed
10/22/2011	5:58:47 AM	Helium MFC set to  0.000000
10/22/2011	5:58:47 AM	H2 MFC set to  0.000000
10/22/2011	5:58:47 AM	BCl3 MFC set to  0.000000
10/22/2011	5:58:47 AM	PHl3 MFC set to  0.000000
10/22/2011	5:58:47 AM	SiCl4 MFC set to  0.000000
10/22/2011	5:58:47 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:58:47 AM	Tube furnace set to 0
10/22/2011	5:58:48 AM	Run finished at 5:58 AM
10/22/2011	5:58:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	6:08:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	6:08:06 AM	Recipe started at 6:08 AM
10/22/2011	6:08:06 AM	Helium valve closed
10/22/2011	6:08:06 AM	H2 valve closed
10/22/2011	6:08:06 AM	BCl3 valve closed
10/22/2011	6:08:06 AM	PH3 valve closed
10/22/2011	6:08:06 AM	SiCl4 pre valve closed
10/22/2011	6:08:06 AM	SiCl4 post valve closed
10/22/2011	6:08:06 AM	Main Vac valve closed
10/22/2011	6:08:06 AM	Bubbler valve closed
10/22/2011	6:08:06 AM	Bypass valve opened
10/22/2011	6:08:06 AM	Helium MFC set to  0.000000
10/22/2011	6:08:06 AM	H2 MFC set to  0.000000
10/22/2011	6:08:06 AM	BCl3 MFC set to  0.000000
10/22/2011	6:08:06 AM	PHl3 MFC set to  0.000000
10/22/2011	6:08:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	6:08:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:08:06 AM	Tube furnace set to 0
10/22/2011	6:09:15 AM	Helium valve closed
10/22/2011	6:09:15 AM	H2 valve closed
10/22/2011	6:09:15 AM	BCl3 valve closed
10/22/2011	6:09:15 AM	PH3 valve closed
10/22/2011	6:09:15 AM	SiCl4 pre valve closed
10/22/2011	6:09:15 AM	SiCl4 post valve closed
10/22/2011	6:09:15 AM	Main Vac valve closed
10/22/2011	6:09:15 AM	Bubbler valve closed
10/22/2011	6:09:15 AM	Bypass valve opened
10/22/2011	6:09:15 AM	Helium MFC set to  0.000000
10/22/2011	6:09:15 AM	H2 MFC set to  0.000000
10/22/2011	6:09:15 AM	BCl3 MFC set to  0.000000
10/22/2011	6:09:15 AM	PHl3 MFC set to  0.000000
10/22/2011	6:09:15 AM	SiCl4 MFC set to  0.000000
10/22/2011	6:09:15 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:09:15 AM	Tube furnace set to 0
10/22/2011	6:10:15 AM	Helium valve closed
10/22/2011	6:10:15 AM	H2 valve closed
10/22/2011	6:10:15 AM	BCl3 valve closed
10/22/2011	6:10:15 AM	PH3 valve closed
10/22/2011	6:10:15 AM	SiCl4 pre valve closed
10/22/2011	6:10:15 AM	SiCl4 post valve closed
10/22/2011	6:10:15 AM	Bypass valve closed
10/22/2011	6:10:15 AM	Bubbler valve closed
10/22/2011	6:10:15 AM	Main Vac valve opened
10/22/2011	6:10:15 AM	Helium MFC set to  0.000000
10/22/2011	6:10:15 AM	H2 MFC set to  0.000000
10/22/2011	6:10:15 AM	BCl3 MFC set to  0.000000
10/22/2011	6:10:15 AM	PHl3 MFC set to  0.000000
10/22/2011	6:10:15 AM	SiCl4 MFC set to  0.000000
10/22/2011	6:10:15 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:10:16 AM	Tube furnace set to 0
10/22/2011	6:10:17 AM	Run finished at 6:10 AM
10/22/2011	6:10:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	9:55:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	9:55:59 AM	Recipe started at 9:55 AM
10/22/2011	9:55:59 AM	Helium valve closed
10/22/2011	9:55:59 AM	H2 valve closed
10/22/2011	9:55:59 AM	BCl3 valve closed
10/22/2011	9:55:59 AM	PH3 valve closed
10/22/2011	9:55:59 AM	SiCl4 pre valve closed
10/22/2011	9:55:59 AM	SiCl4 post valve closed
10/22/2011	9:55:59 AM	Main Vac valve closed
10/22/2011	9:55:59 AM	Bypass valve closed
10/22/2011	9:55:59 AM	Bubbler valve closed
10/22/2011	9:55:59 AM	Helium MFC set to  0.000000
10/22/2011	9:55:59 AM	H2 MFC set to  0.000000
10/22/2011	9:55:59 AM	BCl3 MFC set to  0.000000
10/22/2011	9:55:59 AM	PHl3 MFC set to  0.000000
10/22/2011	9:55:59 AM	SiCl4 MFC set to  0.000000
10/22/2011	9:55:59 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:55:59 AM	Tube furnace set to 0
10/22/2011	9:56:02 AM	H2 valve closed
10/22/2011	9:56:02 AM	BCl3 valve closed
10/22/2011	9:56:02 AM	PH3 valve closed
10/22/2011	9:56:02 AM	SiCl4 pre valve closed
10/22/2011	9:56:02 AM	SiCl4 post valve closed
10/22/2011	9:56:02 AM	Main Vac valve closed
10/22/2011	9:56:02 AM	Bypass valve closed
10/22/2011	9:56:02 AM	Bubbler valve closed
10/22/2011	9:56:02 AM	Helium valve opened
10/22/2011	9:56:02 AM	Helium MFC set to  500.000000
10/22/2011	9:56:02 AM	H2 MFC set to  0.000000
10/22/2011	9:56:02 AM	BCl3 MFC set to  0.000000
10/22/2011	9:56:02 AM	PHl3 MFC set to  0.000000
10/22/2011	9:56:02 AM	SiCl4 MFC set to  0.000000
10/22/2011	9:56:02 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:56:02 AM	Tube furnace set to 0
10/22/2011	9:57:08 AM	Helium valve closed
10/22/2011	9:57:08 AM	H2 valve closed
10/22/2011	9:57:08 AM	BCl3 valve closed
10/22/2011	9:57:08 AM	PH3 valve closed
10/22/2011	9:57:08 AM	SiCl4 pre valve closed
10/22/2011	9:57:08 AM	SiCl4 post valve closed
10/22/2011	9:57:08 AM	Main Vac valve closed
10/22/2011	9:57:08 AM	Bypass valve closed
10/22/2011	9:57:08 AM	Bubbler valve closed
10/22/2011	9:57:08 AM	Helium MFC set to  0.000000
10/22/2011	9:57:08 AM	H2 MFC set to  0.000000
10/22/2011	9:57:08 AM	BCl3 MFC set to  0.000000
10/22/2011	9:57:08 AM	PHl3 MFC set to  0.000000
10/22/2011	9:57:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	9:57:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:57:09 AM	Tube furnace set to 0
10/22/2011	9:57:10 AM	Run finished at 9:57 AM
10/22/2011	9:57:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	10:11:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	10:11:36 AM	Recipe started at 10:11 AM
10/22/2011	10:11:36 AM	Helium valve closed
10/22/2011	10:11:36 AM	H2 valve closed
10/22/2011	10:11:36 AM	BCl3 valve closed
10/22/2011	10:11:36 AM	PH3 valve closed
10/22/2011	10:11:37 AM	SiCl4 pre valve closed
10/22/2011	10:11:37 AM	SiCl4 post valve closed
10/22/2011	10:11:37 AM	Main Vac valve closed
10/22/2011	10:11:37 AM	Bubbler valve closed
10/22/2011	10:11:37 AM	Bypass valve opened
10/22/2011	10:11:37 AM	Helium MFC set to  0.000000
10/22/2011	10:11:37 AM	H2 MFC set to  0.000000
10/22/2011	10:11:37 AM	BCl3 MFC set to  0.000000
10/22/2011	10:11:37 AM	PHl3 MFC set to  0.000000
10/22/2011	10:11:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:11:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:11:37 AM	Tube furnace set to 0
10/22/2011	10:12:49 AM	Helium valve closed
10/22/2011	10:12:49 AM	H2 valve closed
10/22/2011	10:12:49 AM	BCl3 valve closed
10/22/2011	10:12:49 AM	PH3 valve closed
10/22/2011	10:12:49 AM	SiCl4 pre valve closed
10/22/2011	10:12:49 AM	SiCl4 post valve closed
10/22/2011	10:12:49 AM	Main Vac valve closed
10/22/2011	10:12:49 AM	Bubbler valve closed
10/22/2011	10:12:49 AM	Bypass valve opened
10/22/2011	10:12:49 AM	Helium MFC set to  0.000000
10/22/2011	10:12:49 AM	H2 MFC set to  0.000000
10/22/2011	10:12:49 AM	BCl3 MFC set to  0.000000
10/22/2011	10:12:49 AM	PHl3 MFC set to  0.000000
10/22/2011	10:12:49 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:12:49 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:12:49 AM	Tube furnace set to 0
10/22/2011	10:13:49 AM	Helium valve closed
10/22/2011	10:13:49 AM	H2 valve closed
10/22/2011	10:13:49 AM	BCl3 valve closed
10/22/2011	10:13:49 AM	PH3 valve closed
10/22/2011	10:13:49 AM	SiCl4 pre valve closed
10/22/2011	10:13:49 AM	SiCl4 post valve closed
10/22/2011	10:13:49 AM	Bypass valve closed
10/22/2011	10:13:49 AM	Bubbler valve closed
10/22/2011	10:13:49 AM	Main Vac valve opened
10/22/2011	10:13:49 AM	Helium MFC set to  0.000000
10/22/2011	10:13:49 AM	H2 MFC set to  0.000000
10/22/2011	10:13:49 AM	BCl3 MFC set to  0.000000
10/22/2011	10:13:49 AM	PHl3 MFC set to  0.000000
10/22/2011	10:13:49 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:13:49 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:13:49 AM	Tube furnace set to 0
10/22/2011	10:13:50 AM	Run finished at 10:13 AM
10/22/2011	10:13:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	10:15:02 AM	Recipe started at 10:14 AM
10/22/2011	10:15:02 AM	Helium valve closed
10/22/2011	10:15:02 AM	H2 valve closed
10/22/2011	10:15:02 AM	BCl3 valve closed
10/22/2011	10:15:02 AM	PH3 valve closed
10/22/2011	10:15:02 AM	SiCl4 pre valve closed
10/22/2011	10:15:02 AM	SiCl4 post valve closed
10/22/2011	10:15:02 AM	Main Vac valve closed
10/22/2011	10:15:02 AM	Bubbler valve closed
10/22/2011	10:15:02 AM	Bypass valve opened
10/22/2011	10:15:02 AM	Helium MFC set to  0.000000
10/22/2011	10:15:02 AM	H2 MFC set to  0.000000
10/22/2011	10:15:02 AM	BCl3 MFC set to  0.000000
10/22/2011	10:15:02 AM	PHl3 MFC set to  0.000000
10/22/2011	10:15:02 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:15:02 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:15:02 AM	Tube furnace set to 150
10/22/2011	10:15:02 AM	Helium valve closed
10/22/2011	10:15:02 AM	H2 valve closed
10/22/2011	10:15:02 AM	BCl3 valve closed
10/22/2011	10:15:02 AM	PH3 valve closed
10/22/2011	10:15:02 AM	SiCl4 pre valve closed
10/22/2011	10:15:02 AM	SiCl4 post valve closed
10/22/2011	10:15:02 AM	Main Vac valve closed
10/22/2011	10:15:02 AM	Bubbler valve closed
10/22/2011	10:15:02 AM	Bypass valve opened
10/22/2011	10:15:02 AM	Helium MFC set to  0.000000
10/22/2011	10:15:02 AM	H2 MFC set to  0.000000
10/22/2011	10:15:02 AM	BCl3 MFC set to  0.000000
10/22/2011	10:15:02 AM	PHl3 MFC set to  0.000000
10/22/2011	10:15:02 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:15:02 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:15:02 AM	Tube furnace set to 150
10/22/2011	10:15:11 AM	Helium valve closed
10/22/2011	10:15:11 AM	H2 valve closed
10/22/2011	10:15:11 AM	BCl3 valve closed
10/22/2011	10:15:11 AM	PH3 valve closed
10/22/2011	10:15:11 AM	SiCl4 pre valve closed
10/22/2011	10:15:11 AM	SiCl4 post valve closed
10/22/2011	10:15:11 AM	Bypass valve closed
10/22/2011	10:15:11 AM	Bubbler valve closed
10/22/2011	10:15:11 AM	Main Vac valve opened
10/22/2011	10:15:11 AM	Helium MFC set to  0.000000
10/22/2011	10:15:11 AM	H2 MFC set to  0.000000
10/22/2011	10:15:11 AM	BCl3 MFC set to  0.000000
10/22/2011	10:15:11 AM	PHl3 MFC set to  0.000000
10/22/2011	10:15:11 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:15:11 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:15:11 AM	Tube furnace set to 150
10/22/2011	10:15:41 AM	H2 valve closed
10/22/2011	10:15:41 AM	BCl3 valve closed
10/22/2011	10:15:41 AM	PH3 valve closed
10/22/2011	10:15:41 AM	SiCl4 pre valve closed
10/22/2011	10:15:41 AM	SiCl4 post valve closed
10/22/2011	10:15:41 AM	Bypass valve closed
10/22/2011	10:15:41 AM	Bubbler valve closed
10/22/2011	10:15:41 AM	Helium valve opened
10/22/2011	10:15:41 AM	Main Vac valve opened
10/22/2011	10:15:41 AM	Helium MFC set to  20.000000
10/22/2011	10:15:41 AM	H2 MFC set to  0.000000
10/22/2011	10:15:41 AM	BCl3 MFC set to  0.000000
10/22/2011	10:15:41 AM	PHl3 MFC set to  0.000000
10/22/2011	10:15:41 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:15:41 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:15:41 AM	Tube furnace set to 150
10/22/2011	10:16:11 AM	Helium valve closed
10/22/2011	10:16:11 AM	H2 valve closed
10/22/2011	10:16:11 AM	BCl3 valve closed
10/22/2011	10:16:11 AM	PH3 valve closed
10/22/2011	10:16:11 AM	SiCl4 pre valve closed
10/22/2011	10:16:11 AM	SiCl4 post valve closed
10/22/2011	10:16:11 AM	Bypass valve closed
10/22/2011	10:16:11 AM	Bubbler valve closed
10/22/2011	10:16:11 AM	Main Vac valve opened
10/22/2011	10:16:11 AM	Helium MFC set to  0.000000
10/22/2011	10:16:11 AM	H2 MFC set to  0.000000
10/22/2011	10:16:11 AM	BCl3 MFC set to  0.000000
10/22/2011	10:16:11 AM	PHl3 MFC set to  0.000000
10/22/2011	10:16:11 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:16:11 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:16:11 AM	Tube furnace set to 150
10/22/2011	10:16:41 AM	H2 valve closed
10/22/2011	10:16:41 AM	BCl3 valve closed
10/22/2011	10:16:41 AM	PH3 valve closed
10/22/2011	10:16:41 AM	SiCl4 pre valve closed
10/22/2011	10:16:41 AM	SiCl4 post valve closed
10/22/2011	10:16:41 AM	Bypass valve closed
10/22/2011	10:16:41 AM	Bubbler valve closed
10/22/2011	10:16:41 AM	Helium valve opened
10/22/2011	10:16:41 AM	Main Vac valve opened
10/22/2011	10:16:41 AM	Helium MFC set to  20.000000
10/22/2011	10:16:41 AM	H2 MFC set to  0.000000
10/22/2011	10:16:41 AM	BCl3 MFC set to  0.000000
10/22/2011	10:16:41 AM	PHl3 MFC set to  0.000000
10/22/2011	10:16:41 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:16:41 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:16:41 AM	Tube furnace set to 150
10/22/2011	10:17:12 AM	Helium valve closed
10/22/2011	10:17:12 AM	H2 valve closed
10/22/2011	10:17:12 AM	BCl3 valve closed
10/22/2011	10:17:12 AM	PH3 valve closed
10/22/2011	10:17:12 AM	SiCl4 pre valve closed
10/22/2011	10:17:12 AM	SiCl4 post valve closed
10/22/2011	10:17:12 AM	Bypass valve closed
10/22/2011	10:17:12 AM	Bubbler valve closed
10/22/2011	10:17:12 AM	Main Vac valve opened
10/22/2011	10:17:12 AM	Helium MFC set to  0.000000
10/22/2011	10:17:12 AM	H2 MFC set to  0.000000
10/22/2011	10:17:12 AM	BCl3 MFC set to  0.000000
10/22/2011	10:17:12 AM	PHl3 MFC set to  0.000000
10/22/2011	10:17:12 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:17:12 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:17:12 AM	Tube furnace set to 150
10/22/2011	10:17:42 AM	H2 valve closed
10/22/2011	10:17:42 AM	BCl3 valve closed
10/22/2011	10:17:42 AM	PH3 valve closed
10/22/2011	10:17:42 AM	SiCl4 pre valve closed
10/22/2011	10:17:42 AM	SiCl4 post valve closed
10/22/2011	10:17:42 AM	Bypass valve closed
10/22/2011	10:17:42 AM	Bubbler valve closed
10/22/2011	10:17:42 AM	Helium valve opened
10/22/2011	10:17:42 AM	Main Vac valve opened
10/22/2011	10:17:42 AM	Helium MFC set to  20.000000
10/22/2011	10:17:42 AM	H2 MFC set to  0.000000
10/22/2011	10:17:42 AM	BCl3 MFC set to  0.000000
10/22/2011	10:17:42 AM	PHl3 MFC set to  0.000000
10/22/2011	10:17:42 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:17:42 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:17:42 AM	Tube furnace set to 150
10/22/2011	10:18:12 AM	Helium valve closed
10/22/2011	10:18:12 AM	H2 valve closed
10/22/2011	10:18:12 AM	BCl3 valve closed
10/22/2011	10:18:12 AM	PH3 valve closed
10/22/2011	10:18:12 AM	SiCl4 pre valve closed
10/22/2011	10:18:12 AM	SiCl4 post valve closed
10/22/2011	10:18:12 AM	Bypass valve closed
10/22/2011	10:18:12 AM	Bubbler valve closed
10/22/2011	10:18:12 AM	Main Vac valve opened
10/22/2011	10:18:12 AM	Helium MFC set to  0.000000
10/22/2011	10:18:12 AM	H2 MFC set to  0.000000
10/22/2011	10:18:12 AM	BCl3 MFC set to  0.000000
10/22/2011	10:18:12 AM	PHl3 MFC set to  0.000000
10/22/2011	10:18:12 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:18:12 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:18:12 AM	Tube furnace set to 150
10/22/2011	10:18:42 AM	H2 valve closed
10/22/2011	10:18:42 AM	BCl3 valve closed
10/22/2011	10:18:42 AM	PH3 valve closed
10/22/2011	10:18:42 AM	SiCl4 pre valve closed
10/22/2011	10:18:42 AM	SiCl4 post valve closed
10/22/2011	10:18:42 AM	Bypass valve closed
10/22/2011	10:18:42 AM	Bubbler valve closed
10/22/2011	10:18:42 AM	Helium valve opened
10/22/2011	10:18:42 AM	Main Vac valve opened
10/22/2011	10:18:42 AM	Helium MFC set to  20.000000
10/22/2011	10:18:42 AM	H2 MFC set to  0.000000
10/22/2011	10:18:42 AM	BCl3 MFC set to  0.000000
10/22/2011	10:18:42 AM	PHl3 MFC set to  0.000000
10/22/2011	10:18:42 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:18:42 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:18:42 AM	Tube furnace set to 150
10/22/2011	10:19:12 AM	Helium valve closed
10/22/2011	10:19:12 AM	H2 valve closed
10/22/2011	10:19:12 AM	BCl3 valve closed
10/22/2011	10:19:12 AM	PH3 valve closed
10/22/2011	10:19:12 AM	SiCl4 pre valve closed
10/22/2011	10:19:12 AM	SiCl4 post valve closed
10/22/2011	10:19:12 AM	Bypass valve closed
10/22/2011	10:19:12 AM	Bubbler valve closed
10/22/2011	10:19:12 AM	Main Vac valve opened
10/22/2011	10:19:12 AM	Helium MFC set to  0.000000
10/22/2011	10:19:12 AM	H2 MFC set to  0.000000
10/22/2011	10:19:12 AM	BCl3 MFC set to  0.000000
10/22/2011	10:19:12 AM	PHl3 MFC set to  0.000000
10/22/2011	10:19:12 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:19:12 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:19:13 AM	Tube furnace set to 150
10/22/2011	10:19:43 AM	H2 valve closed
10/22/2011	10:19:43 AM	BCl3 valve closed
10/22/2011	10:19:43 AM	PH3 valve closed
10/22/2011	10:19:43 AM	SiCl4 pre valve closed
10/22/2011	10:19:43 AM	SiCl4 post valve closed
10/22/2011	10:19:43 AM	Bypass valve closed
10/22/2011	10:19:43 AM	Bubbler valve closed
10/22/2011	10:19:43 AM	Helium valve opened
10/22/2011	10:19:43 AM	Main Vac valve opened
10/22/2011	10:19:43 AM	Helium MFC set to  20.000000
10/22/2011	10:19:43 AM	H2 MFC set to  0.000000
10/22/2011	10:19:43 AM	BCl3 MFC set to  0.000000
10/22/2011	10:19:43 AM	PHl3 MFC set to  0.000000
10/22/2011	10:19:43 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:19:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:19:43 AM	Tube furnace set to 150
10/22/2011	10:20:13 AM	Helium valve closed
10/22/2011	10:20:13 AM	H2 valve closed
10/22/2011	10:20:13 AM	BCl3 valve closed
10/22/2011	10:20:13 AM	PH3 valve closed
10/22/2011	10:20:13 AM	SiCl4 pre valve closed
10/22/2011	10:20:13 AM	SiCl4 post valve closed
10/22/2011	10:20:13 AM	Bypass valve closed
10/22/2011	10:20:13 AM	Bubbler valve closed
10/22/2011	10:20:13 AM	Main Vac valve opened
10/22/2011	10:20:13 AM	Helium MFC set to  0.000000
10/22/2011	10:20:13 AM	H2 MFC set to  0.000000
10/22/2011	10:20:13 AM	BCl3 MFC set to  0.000000
10/22/2011	10:20:13 AM	PHl3 MFC set to  0.000000
10/22/2011	10:20:13 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:20:13 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:20:13 AM	Tube furnace set to 150
10/22/2011	10:20:43 AM	H2 valve closed
10/22/2011	10:20:43 AM	BCl3 valve closed
10/22/2011	10:20:43 AM	PH3 valve closed
10/22/2011	10:20:43 AM	SiCl4 pre valve closed
10/22/2011	10:20:43 AM	SiCl4 post valve closed
10/22/2011	10:20:43 AM	Bypass valve closed
10/22/2011	10:20:43 AM	Bubbler valve closed
10/22/2011	10:20:43 AM	Helium valve opened
10/22/2011	10:20:43 AM	Main Vac valve opened
10/22/2011	10:20:43 AM	Helium MFC set to  20.000000
10/22/2011	10:20:43 AM	H2 MFC set to  0.000000
10/22/2011	10:20:43 AM	BCl3 MFC set to  0.000000
10/22/2011	10:20:43 AM	PHl3 MFC set to  0.000000
10/22/2011	10:20:43 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:20:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:20:43 AM	Tube furnace set to 150
10/22/2011	10:21:13 AM	Helium valve closed
10/22/2011	10:21:13 AM	H2 valve closed
10/22/2011	10:21:13 AM	BCl3 valve closed
10/22/2011	10:21:13 AM	PH3 valve closed
10/22/2011	10:21:13 AM	SiCl4 pre valve closed
10/22/2011	10:21:13 AM	SiCl4 post valve closed
10/22/2011	10:21:13 AM	Bypass valve closed
10/22/2011	10:21:13 AM	Bubbler valve closed
10/22/2011	10:21:13 AM	Main Vac valve opened
10/22/2011	10:21:13 AM	Helium MFC set to  0.000000
10/22/2011	10:21:13 AM	H2 MFC set to  0.000000
10/22/2011	10:21:13 AM	BCl3 MFC set to  0.000000
10/22/2011	10:21:13 AM	PHl3 MFC set to  0.000000
10/22/2011	10:21:13 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:21:13 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:21:13 AM	Tube furnace set to 150
10/22/2011	10:21:43 AM	H2 valve closed
10/22/2011	10:21:43 AM	BCl3 valve closed
10/22/2011	10:21:43 AM	PH3 valve closed
10/22/2011	10:21:43 AM	SiCl4 pre valve closed
10/22/2011	10:21:43 AM	SiCl4 post valve closed
10/22/2011	10:21:43 AM	Bypass valve closed
10/22/2011	10:21:43 AM	Bubbler valve closed
10/22/2011	10:21:43 AM	Helium valve opened
10/22/2011	10:21:43 AM	Main Vac valve opened
10/22/2011	10:21:43 AM	Helium MFC set to  20.000000
10/22/2011	10:21:43 AM	H2 MFC set to  0.000000
10/22/2011	10:21:43 AM	BCl3 MFC set to  0.000000
10/22/2011	10:21:43 AM	PHl3 MFC set to  0.000000
10/22/2011	10:21:43 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:21:43 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:21:44 AM	Tube furnace set to 150
10/22/2011	10:22:14 AM	Helium valve closed
10/22/2011	10:22:14 AM	H2 valve closed
10/22/2011	10:22:14 AM	BCl3 valve closed
10/22/2011	10:22:14 AM	PH3 valve closed
10/22/2011	10:22:14 AM	SiCl4 pre valve closed
10/22/2011	10:22:14 AM	SiCl4 post valve closed
10/22/2011	10:22:14 AM	Bypass valve closed
10/22/2011	10:22:14 AM	Bubbler valve closed
10/22/2011	10:22:14 AM	Main Vac valve opened
10/22/2011	10:22:14 AM	Helium MFC set to  0.000000
10/22/2011	10:22:14 AM	H2 MFC set to  0.000000
10/22/2011	10:22:14 AM	BCl3 MFC set to  0.000000
10/22/2011	10:22:14 AM	PHl3 MFC set to  0.000000
10/22/2011	10:22:14 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:22:14 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:22:14 AM	Tube furnace set to 150
10/22/2011	10:22:44 AM	H2 valve closed
10/22/2011	10:22:44 AM	BCl3 valve closed
10/22/2011	10:22:44 AM	PH3 valve closed
10/22/2011	10:22:44 AM	SiCl4 pre valve closed
10/22/2011	10:22:44 AM	SiCl4 post valve closed
10/22/2011	10:22:44 AM	Bypass valve closed
10/22/2011	10:22:44 AM	Bubbler valve closed
10/22/2011	10:22:44 AM	Helium valve opened
10/22/2011	10:22:44 AM	Main Vac valve opened
10/22/2011	10:22:44 AM	Helium MFC set to  20.000000
10/22/2011	10:22:44 AM	H2 MFC set to  0.000000
10/22/2011	10:22:44 AM	BCl3 MFC set to  0.000000
10/22/2011	10:22:44 AM	PHl3 MFC set to  0.000000
10/22/2011	10:22:44 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:22:44 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:22:44 AM	Tube furnace set to 150
10/22/2011	10:23:14 AM	Helium valve closed
10/22/2011	10:23:14 AM	H2 valve closed
10/22/2011	10:23:14 AM	BCl3 valve closed
10/22/2011	10:23:14 AM	PH3 valve closed
10/22/2011	10:23:14 AM	SiCl4 pre valve closed
10/22/2011	10:23:14 AM	SiCl4 post valve closed
10/22/2011	10:23:14 AM	Bypass valve closed
10/22/2011	10:23:14 AM	Bubbler valve closed
10/22/2011	10:23:14 AM	Main Vac valve opened
10/22/2011	10:23:14 AM	Helium MFC set to  0.000000
10/22/2011	10:23:14 AM	H2 MFC set to  0.000000
10/22/2011	10:23:14 AM	BCl3 MFC set to  0.000000
10/22/2011	10:23:14 AM	PHl3 MFC set to  0.000000
10/22/2011	10:23:14 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:23:14 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:23:14 AM	Tube furnace set to 150
10/22/2011	10:23:44 AM	H2 valve closed
10/22/2011	10:23:44 AM	BCl3 valve closed
10/22/2011	10:23:44 AM	PH3 valve closed
10/22/2011	10:23:44 AM	SiCl4 pre valve closed
10/22/2011	10:23:44 AM	SiCl4 post valve closed
10/22/2011	10:23:44 AM	Bypass valve closed
10/22/2011	10:23:44 AM	Bubbler valve closed
10/22/2011	10:23:44 AM	Helium valve opened
10/22/2011	10:23:44 AM	Main Vac valve opened
10/22/2011	10:23:44 AM	Helium MFC set to  20.000000
10/22/2011	10:23:44 AM	H2 MFC set to  0.000000
10/22/2011	10:23:44 AM	BCl3 MFC set to  0.000000
10/22/2011	10:23:44 AM	PHl3 MFC set to  0.000000
10/22/2011	10:23:44 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:23:44 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:23:44 AM	Tube furnace set to 150
10/22/2011	10:24:15 AM	Helium valve closed
10/22/2011	10:24:15 AM	H2 valve closed
10/22/2011	10:24:15 AM	BCl3 valve closed
10/22/2011	10:24:15 AM	PH3 valve closed
10/22/2011	10:24:15 AM	SiCl4 pre valve closed
10/22/2011	10:24:15 AM	SiCl4 post valve closed
10/22/2011	10:24:15 AM	Bypass valve closed
10/22/2011	10:24:15 AM	Bubbler valve closed
10/22/2011	10:24:15 AM	Main Vac valve opened
10/22/2011	10:24:15 AM	Helium MFC set to  0.000000
10/22/2011	10:24:15 AM	H2 MFC set to  0.000000
10/22/2011	10:24:15 AM	BCl3 MFC set to  0.000000
10/22/2011	10:24:15 AM	PHl3 MFC set to  0.000000
10/22/2011	10:24:15 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:24:15 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:24:15 AM	Tube furnace set to 150
10/22/2011	10:24:45 AM	H2 valve closed
10/22/2011	10:24:45 AM	BCl3 valve closed
10/22/2011	10:24:45 AM	PH3 valve closed
10/22/2011	10:24:45 AM	SiCl4 pre valve closed
10/22/2011	10:24:45 AM	SiCl4 post valve closed
10/22/2011	10:24:45 AM	Bypass valve closed
10/22/2011	10:24:45 AM	Bubbler valve closed
10/22/2011	10:24:45 AM	Helium valve opened
10/22/2011	10:24:45 AM	Main Vac valve opened
10/22/2011	10:24:45 AM	Helium MFC set to  20.000000
10/22/2011	10:24:45 AM	H2 MFC set to  0.000000
10/22/2011	10:24:45 AM	BCl3 MFC set to  0.000000
10/22/2011	10:24:45 AM	PHl3 MFC set to  0.000000
10/22/2011	10:24:45 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:24:45 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:24:45 AM	Tube furnace set to 150
10/22/2011	10:25:15 AM	Helium valve closed
10/22/2011	10:25:15 AM	H2 valve closed
10/22/2011	10:25:15 AM	BCl3 valve closed
10/22/2011	10:25:15 AM	PH3 valve closed
10/22/2011	10:25:15 AM	SiCl4 pre valve closed
10/22/2011	10:25:15 AM	SiCl4 post valve closed
10/22/2011	10:25:15 AM	Bypass valve closed
10/22/2011	10:25:15 AM	Bubbler valve closed
10/22/2011	10:25:15 AM	Main Vac valve opened
10/22/2011	10:25:15 AM	Helium MFC set to  0.000000
10/22/2011	10:25:15 AM	H2 MFC set to  0.000000
10/22/2011	10:25:15 AM	BCl3 MFC set to  0.000000
10/22/2011	10:25:15 AM	PHl3 MFC set to  0.000000
10/22/2011	10:25:15 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:25:15 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:25:15 AM	Tube furnace set to 150
10/22/2011	10:25:45 AM	H2 valve closed
10/22/2011	10:25:45 AM	BCl3 valve closed
10/22/2011	10:25:45 AM	PH3 valve closed
10/22/2011	10:25:45 AM	SiCl4 pre valve closed
10/22/2011	10:25:45 AM	SiCl4 post valve closed
10/22/2011	10:25:45 AM	Bypass valve closed
10/22/2011	10:25:45 AM	Bubbler valve closed
10/22/2011	10:25:45 AM	Helium valve opened
10/22/2011	10:25:45 AM	Main Vac valve opened
10/22/2011	10:25:45 AM	Helium MFC set to  20.000000
10/22/2011	10:25:45 AM	H2 MFC set to  0.000000
10/22/2011	10:25:45 AM	BCl3 MFC set to  0.000000
10/22/2011	10:25:45 AM	PHl3 MFC set to  0.000000
10/22/2011	10:25:45 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:25:45 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:25:45 AM	Tube furnace set to 150
10/22/2011	10:26:15 AM	Helium valve closed
10/22/2011	10:26:15 AM	H2 valve closed
10/22/2011	10:26:15 AM	BCl3 valve closed
10/22/2011	10:26:15 AM	PH3 valve closed
10/22/2011	10:26:15 AM	SiCl4 pre valve closed
10/22/2011	10:26:15 AM	SiCl4 post valve closed
10/22/2011	10:26:15 AM	Bypass valve closed
10/22/2011	10:26:15 AM	Bubbler valve closed
10/22/2011	10:26:15 AM	Main Vac valve opened
10/22/2011	10:26:15 AM	Helium MFC set to  0.000000
10/22/2011	10:26:15 AM	H2 MFC set to  0.000000
10/22/2011	10:26:15 AM	BCl3 MFC set to  0.000000
10/22/2011	10:26:15 AM	PHl3 MFC set to  0.000000
10/22/2011	10:26:15 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:26:15 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:26:16 AM	Tube furnace set to 150
10/22/2011	10:26:46 AM	H2 valve closed
10/22/2011	10:26:46 AM	BCl3 valve closed
10/22/2011	10:26:46 AM	PH3 valve closed
10/22/2011	10:26:46 AM	SiCl4 pre valve closed
10/22/2011	10:26:46 AM	SiCl4 post valve closed
10/22/2011	10:26:46 AM	Bypass valve closed
10/22/2011	10:26:46 AM	Bubbler valve closed
10/22/2011	10:26:46 AM	Helium valve opened
10/22/2011	10:26:46 AM	Main Vac valve opened
10/22/2011	10:26:46 AM	Helium MFC set to  20.000000
10/22/2011	10:26:46 AM	H2 MFC set to  0.000000
10/22/2011	10:26:46 AM	BCl3 MFC set to  0.000000
10/22/2011	10:26:46 AM	PHl3 MFC set to  0.000000
10/22/2011	10:26:46 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:26:46 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:26:46 AM	Tube furnace set to 150
10/22/2011	10:27:16 AM	Helium valve closed
10/22/2011	10:27:16 AM	H2 valve closed
10/22/2011	10:27:16 AM	BCl3 valve closed
10/22/2011	10:27:16 AM	PH3 valve closed
10/22/2011	10:27:16 AM	SiCl4 pre valve closed
10/22/2011	10:27:16 AM	SiCl4 post valve closed
10/22/2011	10:27:16 AM	Bypass valve closed
10/22/2011	10:27:16 AM	Bubbler valve closed
10/22/2011	10:27:16 AM	Main Vac valve opened
10/22/2011	10:27:16 AM	Helium MFC set to  0.000000
10/22/2011	10:27:16 AM	H2 MFC set to  0.000000
10/22/2011	10:27:16 AM	BCl3 MFC set to  0.000000
10/22/2011	10:27:16 AM	PHl3 MFC set to  0.000000
10/22/2011	10:27:16 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:27:16 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:27:16 AM	Tube furnace set to 150
10/22/2011	10:27:46 AM	H2 valve closed
10/22/2011	10:27:46 AM	BCl3 valve closed
10/22/2011	10:27:46 AM	PH3 valve closed
10/22/2011	10:27:46 AM	SiCl4 pre valve closed
10/22/2011	10:27:46 AM	SiCl4 post valve closed
10/22/2011	10:27:46 AM	Bypass valve closed
10/22/2011	10:27:46 AM	Bubbler valve closed
10/22/2011	10:27:46 AM	Helium valve opened
10/22/2011	10:27:46 AM	Main Vac valve opened
10/22/2011	10:27:46 AM	Helium MFC set to  20.000000
10/22/2011	10:27:46 AM	H2 MFC set to  0.000000
10/22/2011	10:27:46 AM	BCl3 MFC set to  0.000000
10/22/2011	10:27:46 AM	PHl3 MFC set to  0.000000
10/22/2011	10:27:46 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:27:46 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:27:46 AM	Tube furnace set to 150
10/22/2011	10:28:16 AM	Helium valve closed
10/22/2011	10:28:16 AM	H2 valve closed
10/22/2011	10:28:16 AM	BCl3 valve closed
10/22/2011	10:28:16 AM	PH3 valve closed
10/22/2011	10:28:16 AM	SiCl4 pre valve closed
10/22/2011	10:28:16 AM	SiCl4 post valve closed
10/22/2011	10:28:16 AM	Bypass valve closed
10/22/2011	10:28:16 AM	Bubbler valve closed
10/22/2011	10:28:16 AM	Main Vac valve opened
10/22/2011	10:28:16 AM	Helium MFC set to  0.000000
10/22/2011	10:28:16 AM	H2 MFC set to  0.000000
10/22/2011	10:28:16 AM	BCl3 MFC set to  0.000000
10/22/2011	10:28:16 AM	PHl3 MFC set to  0.000000
10/22/2011	10:28:16 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:28:16 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:28:16 AM	Tube furnace set to 150
10/22/2011	10:28:46 AM	H2 valve closed
10/22/2011	10:28:46 AM	BCl3 valve closed
10/22/2011	10:28:46 AM	PH3 valve closed
10/22/2011	10:28:46 AM	SiCl4 pre valve closed
10/22/2011	10:28:46 AM	SiCl4 post valve closed
10/22/2011	10:28:46 AM	Bypass valve closed
10/22/2011	10:28:46 AM	Bubbler valve closed
10/22/2011	10:28:46 AM	Helium valve opened
10/22/2011	10:28:46 AM	Main Vac valve opened
10/22/2011	10:28:46 AM	Helium MFC set to  20.000000
10/22/2011	10:28:46 AM	H2 MFC set to  0.000000
10/22/2011	10:28:46 AM	BCl3 MFC set to  0.000000
10/22/2011	10:28:46 AM	PHl3 MFC set to  0.000000
10/22/2011	10:28:46 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:28:46 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:28:47 AM	Tube furnace set to 150
10/22/2011	10:29:17 AM	Helium valve closed
10/22/2011	10:29:17 AM	H2 valve closed
10/22/2011	10:29:17 AM	BCl3 valve closed
10/22/2011	10:29:17 AM	PH3 valve closed
10/22/2011	10:29:17 AM	SiCl4 pre valve closed
10/22/2011	10:29:17 AM	SiCl4 post valve closed
10/22/2011	10:29:17 AM	Bypass valve closed
10/22/2011	10:29:17 AM	Bubbler valve closed
10/22/2011	10:29:17 AM	Main Vac valve opened
10/22/2011	10:29:17 AM	Helium MFC set to  0.000000
10/22/2011	10:29:17 AM	H2 MFC set to  0.000000
10/22/2011	10:29:17 AM	BCl3 MFC set to  0.000000
10/22/2011	10:29:17 AM	PHl3 MFC set to  0.000000
10/22/2011	10:29:17 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:29:17 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:29:17 AM	Tube furnace set to 150
10/22/2011	10:29:47 AM	H2 valve closed
10/22/2011	10:29:47 AM	BCl3 valve closed
10/22/2011	10:29:47 AM	PH3 valve closed
10/22/2011	10:29:47 AM	SiCl4 pre valve closed
10/22/2011	10:29:47 AM	SiCl4 post valve closed
10/22/2011	10:29:47 AM	Bypass valve closed
10/22/2011	10:29:47 AM	Bubbler valve closed
10/22/2011	10:29:47 AM	Helium valve opened
10/22/2011	10:29:47 AM	Main Vac valve opened
10/22/2011	10:29:47 AM	Helium MFC set to  20.000000
10/22/2011	10:29:47 AM	H2 MFC set to  0.000000
10/22/2011	10:29:47 AM	BCl3 MFC set to  0.000000
10/22/2011	10:29:47 AM	PHl3 MFC set to  0.000000
10/22/2011	10:29:47 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:29:47 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:29:47 AM	Tube furnace set to 150
10/22/2011	10:30:17 AM	Helium valve closed
10/22/2011	10:30:17 AM	H2 valve closed
10/22/2011	10:30:17 AM	BCl3 valve closed
10/22/2011	10:30:17 AM	PH3 valve closed
10/22/2011	10:30:17 AM	SiCl4 pre valve closed
10/22/2011	10:30:17 AM	SiCl4 post valve closed
10/22/2011	10:30:17 AM	Bypass valve closed
10/22/2011	10:30:17 AM	Bubbler valve closed
10/22/2011	10:30:17 AM	Main Vac valve opened
10/22/2011	10:30:17 AM	Helium MFC set to  0.000000
10/22/2011	10:30:17 AM	H2 MFC set to  0.000000
10/22/2011	10:30:17 AM	BCl3 MFC set to  0.000000
10/22/2011	10:30:17 AM	PHl3 MFC set to  0.000000
10/22/2011	10:30:17 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:30:17 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:30:17 AM	Tube furnace set to 150
10/22/2011	10:30:47 AM	H2 valve closed
10/22/2011	10:30:47 AM	BCl3 valve closed
10/22/2011	10:30:47 AM	PH3 valve closed
10/22/2011	10:30:47 AM	SiCl4 pre valve closed
10/22/2011	10:30:47 AM	SiCl4 post valve closed
10/22/2011	10:30:47 AM	Bypass valve closed
10/22/2011	10:30:47 AM	Bubbler valve closed
10/22/2011	10:30:47 AM	Helium valve opened
10/22/2011	10:30:47 AM	Main Vac valve opened
10/22/2011	10:30:47 AM	Helium MFC set to  20.000000
10/22/2011	10:30:47 AM	H2 MFC set to  0.000000
10/22/2011	10:30:47 AM	BCl3 MFC set to  0.000000
10/22/2011	10:30:47 AM	PHl3 MFC set to  0.000000
10/22/2011	10:30:47 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:30:47 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:30:48 AM	Tube furnace set to 150
10/22/2011	10:31:18 AM	Helium valve closed
10/22/2011	10:31:18 AM	H2 valve closed
10/22/2011	10:31:18 AM	BCl3 valve closed
10/22/2011	10:31:18 AM	PH3 valve closed
10/22/2011	10:31:18 AM	SiCl4 pre valve closed
10/22/2011	10:31:18 AM	SiCl4 post valve closed
10/22/2011	10:31:18 AM	Bypass valve closed
10/22/2011	10:31:18 AM	Bubbler valve closed
10/22/2011	10:31:18 AM	Main Vac valve opened
10/22/2011	10:31:18 AM	Helium MFC set to  0.000000
10/22/2011	10:31:18 AM	H2 MFC set to  0.000000
10/22/2011	10:31:18 AM	BCl3 MFC set to  0.000000
10/22/2011	10:31:18 AM	PHl3 MFC set to  0.000000
10/22/2011	10:31:18 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:31:18 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:31:18 AM	Tube furnace set to 150
10/22/2011	10:31:48 AM	H2 valve closed
10/22/2011	10:31:48 AM	BCl3 valve closed
10/22/2011	10:31:48 AM	PH3 valve closed
10/22/2011	10:31:48 AM	SiCl4 pre valve closed
10/22/2011	10:31:48 AM	SiCl4 post valve closed
10/22/2011	10:31:48 AM	Bypass valve closed
10/22/2011	10:31:48 AM	Bubbler valve closed
10/22/2011	10:31:48 AM	Helium valve opened
10/22/2011	10:31:48 AM	Main Vac valve opened
10/22/2011	10:31:48 AM	Helium MFC set to  20.000000
10/22/2011	10:31:48 AM	H2 MFC set to  0.000000
10/22/2011	10:31:48 AM	BCl3 MFC set to  0.000000
10/22/2011	10:31:48 AM	PHl3 MFC set to  0.000000
10/22/2011	10:31:48 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:31:48 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:31:48 AM	Tube furnace set to 150
10/22/2011	10:32:18 AM	Helium valve closed
10/22/2011	10:32:18 AM	H2 valve closed
10/22/2011	10:32:18 AM	BCl3 valve closed
10/22/2011	10:32:18 AM	PH3 valve closed
10/22/2011	10:32:18 AM	SiCl4 pre valve closed
10/22/2011	10:32:18 AM	SiCl4 post valve closed
10/22/2011	10:32:18 AM	Bypass valve closed
10/22/2011	10:32:18 AM	Bubbler valve closed
10/22/2011	10:32:18 AM	Main Vac valve opened
10/22/2011	10:32:18 AM	Helium MFC set to  0.000000
10/22/2011	10:32:18 AM	H2 MFC set to  0.000000
10/22/2011	10:32:18 AM	BCl3 MFC set to  0.000000
10/22/2011	10:32:18 AM	PHl3 MFC set to  0.000000
10/22/2011	10:32:18 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:32:18 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:32:18 AM	Tube furnace set to 150
10/22/2011	10:32:37 AM	Run aborted at 10:32 AM
10/22/2011	10:32:37 AM	Helium valve closed
10/22/2011	10:32:37 AM	H2 valve closed
10/22/2011	10:32:37 AM	BCl3 valve closed
10/22/2011	10:32:37 AM	PH3 valve closed
10/22/2011	10:32:37 AM	SiCl4 pre valve closed
10/22/2011	10:32:37 AM	SiCl4 post valve closed
10/22/2011	10:32:37 AM	Bypass valve closed
10/22/2011	10:32:37 AM	Main Vac valve closed
10/22/2011	10:32:37 AM	Bubbler valve closed
10/22/2011	10:32:37 AM	Helium MFC set to  0.000000
10/22/2011	10:32:37 AM	H2 MFC set to  0.000000
10/22/2011	10:32:37 AM	BCl3 MFC set to  0.000000
10/22/2011	10:32:37 AM	PHl3 MFC set to  0.000000
10/22/2011	10:32:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:32:37 AM	Tube furnace set to 0
10/22/2011	10:32:39 AM	Main Vac valve opened
10/22/2011	10:33:00 AM	Recipe started at 10:32 AM
10/22/2011	10:33:00 AM	Helium valve closed
10/22/2011	10:33:00 AM	H2 valve closed
10/22/2011	10:33:00 AM	BCl3 valve closed
10/22/2011	10:33:00 AM	PH3 valve closed
10/22/2011	10:33:00 AM	SiCl4 pre valve closed
10/22/2011	10:33:00 AM	SiCl4 post valve closed
10/22/2011	10:33:01 AM	Main Vac valve closed
10/22/2011	10:33:01 AM	Bubbler valve closed
10/22/2011	10:33:01 AM	Bypass valve opened
10/22/2011	10:33:01 AM	Helium MFC set to  0.000000
10/22/2011	10:33:01 AM	H2 MFC set to  0.000000
10/22/2011	10:33:01 AM	BCl3 MFC set to  0.000000
10/22/2011	10:33:01 AM	PHl3 MFC set to  0.000000
10/22/2011	10:33:01 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:33:01 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:33:01 AM	Tube furnace set to 150
10/22/2011	10:33:01 AM	Helium valve closed
10/22/2011	10:33:01 AM	H2 valve closed
10/22/2011	10:33:01 AM	BCl3 valve closed
10/22/2011	10:33:01 AM	PH3 valve closed
10/22/2011	10:33:01 AM	SiCl4 pre valve closed
10/22/2011	10:33:01 AM	SiCl4 post valve closed
10/22/2011	10:33:01 AM	Main Vac valve closed
10/22/2011	10:33:01 AM	Bubbler valve closed
10/22/2011	10:33:01 AM	Bypass valve opened
10/22/2011	10:33:01 AM	Helium MFC set to  0.000000
10/22/2011	10:33:01 AM	H2 MFC set to  0.000000
10/22/2011	10:33:01 AM	BCl3 MFC set to  0.000000
10/22/2011	10:33:01 AM	PHl3 MFC set to  0.000000
10/22/2011	10:33:01 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:33:01 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:33:01 AM	Tube furnace set to 150
10/22/2011	10:33:31 AM	Helium valve closed
10/22/2011	10:33:31 AM	H2 valve closed
10/22/2011	10:33:31 AM	BCl3 valve closed
10/22/2011	10:33:31 AM	PH3 valve closed
10/22/2011	10:33:31 AM	SiCl4 pre valve closed
10/22/2011	10:33:31 AM	SiCl4 post valve closed
10/22/2011	10:33:31 AM	Bypass valve closed
10/22/2011	10:33:31 AM	Bubbler valve closed
10/22/2011	10:33:31 AM	Main Vac valve opened
10/22/2011	10:33:31 AM	Helium MFC set to  0.000000
10/22/2011	10:33:31 AM	H2 MFC set to  0.000000
10/22/2011	10:33:31 AM	BCl3 MFC set to  0.000000
10/22/2011	10:33:31 AM	PHl3 MFC set to  0.000000
10/22/2011	10:33:31 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:33:31 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:33:31 AM	Tube furnace set to 150
10/22/2011	10:34:01 AM	H2 valve closed
10/22/2011	10:34:01 AM	BCl3 valve closed
10/22/2011	10:34:01 AM	PH3 valve closed
10/22/2011	10:34:01 AM	SiCl4 pre valve closed
10/22/2011	10:34:01 AM	SiCl4 post valve closed
10/22/2011	10:34:01 AM	Bypass valve closed
10/22/2011	10:34:01 AM	Bubbler valve closed
10/22/2011	10:34:01 AM	Helium valve opened
10/22/2011	10:34:01 AM	Main Vac valve opened
10/22/2011	10:34:01 AM	Helium MFC set to  20.000000
10/22/2011	10:34:01 AM	H2 MFC set to  0.000000
10/22/2011	10:34:01 AM	BCl3 MFC set to  0.000000
10/22/2011	10:34:01 AM	PHl3 MFC set to  0.000000
10/22/2011	10:34:01 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:34:01 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:34:02 AM	Tube furnace set to 150
10/22/2011	10:34:32 AM	Helium valve closed
10/22/2011	10:34:32 AM	H2 valve closed
10/22/2011	10:34:32 AM	BCl3 valve closed
10/22/2011	10:34:32 AM	PH3 valve closed
10/22/2011	10:34:32 AM	SiCl4 pre valve closed
10/22/2011	10:34:32 AM	SiCl4 post valve closed
10/22/2011	10:34:32 AM	Bypass valve closed
10/22/2011	10:34:32 AM	Bubbler valve closed
10/22/2011	10:34:32 AM	Main Vac valve opened
10/22/2011	10:34:32 AM	Helium MFC set to  0.000000
10/22/2011	10:34:32 AM	H2 MFC set to  0.000000
10/22/2011	10:34:32 AM	BCl3 MFC set to  0.000000
10/22/2011	10:34:32 AM	PHl3 MFC set to  0.000000
10/22/2011	10:34:32 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:34:32 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:34:32 AM	Tube furnace set to 150
10/22/2011	10:35:02 AM	H2 valve closed
10/22/2011	10:35:02 AM	BCl3 valve closed
10/22/2011	10:35:02 AM	PH3 valve closed
10/22/2011	10:35:02 AM	SiCl4 pre valve closed
10/22/2011	10:35:02 AM	SiCl4 post valve closed
10/22/2011	10:35:02 AM	Bypass valve closed
10/22/2011	10:35:02 AM	Bubbler valve closed
10/22/2011	10:35:02 AM	Helium valve opened
10/22/2011	10:35:02 AM	Main Vac valve opened
10/22/2011	10:35:02 AM	Helium MFC set to  20.000000
10/22/2011	10:35:02 AM	H2 MFC set to  0.000000
10/22/2011	10:35:02 AM	BCl3 MFC set to  0.000000
10/22/2011	10:35:02 AM	PHl3 MFC set to  0.000000
10/22/2011	10:35:02 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:35:02 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:35:02 AM	Tube furnace set to 150
10/22/2011	10:35:32 AM	Helium valve closed
10/22/2011	10:35:32 AM	H2 valve closed
10/22/2011	10:35:32 AM	BCl3 valve closed
10/22/2011	10:35:32 AM	PH3 valve closed
10/22/2011	10:35:32 AM	SiCl4 pre valve closed
10/22/2011	10:35:32 AM	SiCl4 post valve closed
10/22/2011	10:35:32 AM	Bypass valve closed
10/22/2011	10:35:32 AM	Bubbler valve closed
10/22/2011	10:35:32 AM	Main Vac valve opened
10/22/2011	10:35:32 AM	Helium MFC set to  0.000000
10/22/2011	10:35:32 AM	H2 MFC set to  0.000000
10/22/2011	10:35:32 AM	BCl3 MFC set to  0.000000
10/22/2011	10:35:32 AM	PHl3 MFC set to  0.000000
10/22/2011	10:35:32 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:35:32 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:35:32 AM	Tube furnace set to 150
10/22/2011	10:36:02 AM	H2 valve closed
10/22/2011	10:36:02 AM	BCl3 valve closed
10/22/2011	10:36:02 AM	PH3 valve closed
10/22/2011	10:36:02 AM	SiCl4 pre valve closed
10/22/2011	10:36:02 AM	SiCl4 post valve closed
10/22/2011	10:36:02 AM	Bypass valve closed
10/22/2011	10:36:02 AM	Bubbler valve closed
10/22/2011	10:36:02 AM	Helium valve opened
10/22/2011	10:36:02 AM	Main Vac valve opened
10/22/2011	10:36:02 AM	Helium MFC set to  20.000000
10/22/2011	10:36:02 AM	H2 MFC set to  0.000000
10/22/2011	10:36:02 AM	BCl3 MFC set to  0.000000
10/22/2011	10:36:02 AM	PHl3 MFC set to  0.000000
10/22/2011	10:36:02 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:36:02 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:36:02 AM	Tube furnace set to 150
10/22/2011	10:36:32 AM	Helium valve closed
10/22/2011	10:36:32 AM	H2 valve closed
10/22/2011	10:36:32 AM	BCl3 valve closed
10/22/2011	10:36:32 AM	PH3 valve closed
10/22/2011	10:36:32 AM	SiCl4 pre valve closed
10/22/2011	10:36:32 AM	SiCl4 post valve closed
10/22/2011	10:36:32 AM	Bypass valve closed
10/22/2011	10:36:32 AM	Bubbler valve closed
10/22/2011	10:36:32 AM	Main Vac valve opened
10/22/2011	10:36:32 AM	Helium MFC set to  0.000000
10/22/2011	10:36:32 AM	H2 MFC set to  0.000000
10/22/2011	10:36:32 AM	BCl3 MFC set to  0.000000
10/22/2011	10:36:32 AM	PHl3 MFC set to  0.000000
10/22/2011	10:36:32 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:36:32 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:36:32 AM	Tube furnace set to 150
10/22/2011	10:37:03 AM	H2 valve closed
10/22/2011	10:37:03 AM	BCl3 valve closed
10/22/2011	10:37:03 AM	PH3 valve closed
10/22/2011	10:37:03 AM	SiCl4 pre valve closed
10/22/2011	10:37:03 AM	SiCl4 post valve closed
10/22/2011	10:37:03 AM	Bypass valve closed
10/22/2011	10:37:03 AM	Bubbler valve closed
10/22/2011	10:37:03 AM	Helium valve opened
10/22/2011	10:37:03 AM	Main Vac valve opened
10/22/2011	10:37:03 AM	Helium MFC set to  20.000000
10/22/2011	10:37:03 AM	H2 MFC set to  0.000000
10/22/2011	10:37:03 AM	BCl3 MFC set to  0.000000
10/22/2011	10:37:03 AM	PHl3 MFC set to  0.000000
10/22/2011	10:37:03 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:37:03 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:37:03 AM	Tube furnace set to 150
10/22/2011	10:37:33 AM	Helium valve closed
10/22/2011	10:37:33 AM	H2 valve closed
10/22/2011	10:37:33 AM	BCl3 valve closed
10/22/2011	10:37:33 AM	PH3 valve closed
10/22/2011	10:37:33 AM	SiCl4 pre valve closed
10/22/2011	10:37:33 AM	SiCl4 post valve closed
10/22/2011	10:37:33 AM	Bypass valve closed
10/22/2011	10:37:33 AM	Bubbler valve closed
10/22/2011	10:37:33 AM	Main Vac valve opened
10/22/2011	10:37:33 AM	Helium MFC set to  0.000000
10/22/2011	10:37:33 AM	H2 MFC set to  0.000000
10/22/2011	10:37:33 AM	BCl3 MFC set to  0.000000
10/22/2011	10:37:33 AM	PHl3 MFC set to  0.000000
10/22/2011	10:37:33 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:37:33 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:37:33 AM	Tube furnace set to 150
10/22/2011	10:38:03 AM	H2 valve closed
10/22/2011	10:38:03 AM	BCl3 valve closed
10/22/2011	10:38:03 AM	PH3 valve closed
10/22/2011	10:38:03 AM	SiCl4 pre valve closed
10/22/2011	10:38:03 AM	SiCl4 post valve closed
10/22/2011	10:38:03 AM	Bypass valve closed
10/22/2011	10:38:03 AM	Bubbler valve closed
10/22/2011	10:38:03 AM	Helium valve opened
10/22/2011	10:38:03 AM	Main Vac valve opened
10/22/2011	10:38:03 AM	Helium MFC set to  20.000000
10/22/2011	10:38:03 AM	H2 MFC set to  0.000000
10/22/2011	10:38:03 AM	BCl3 MFC set to  0.000000
10/22/2011	10:38:03 AM	PHl3 MFC set to  0.000000
10/22/2011	10:38:03 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:38:03 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:38:03 AM	Tube furnace set to 150
10/22/2011	10:38:33 AM	Helium valve closed
10/22/2011	10:38:33 AM	H2 valve closed
10/22/2011	10:38:33 AM	BCl3 valve closed
10/22/2011	10:38:33 AM	PH3 valve closed
10/22/2011	10:38:33 AM	SiCl4 pre valve closed
10/22/2011	10:38:33 AM	SiCl4 post valve closed
10/22/2011	10:38:33 AM	Bypass valve closed
10/22/2011	10:38:33 AM	Bubbler valve closed
10/22/2011	10:38:33 AM	Main Vac valve opened
10/22/2011	10:38:33 AM	Helium MFC set to  0.000000
10/22/2011	10:38:33 AM	H2 MFC set to  0.000000
10/22/2011	10:38:33 AM	BCl3 MFC set to  0.000000
10/22/2011	10:38:33 AM	PHl3 MFC set to  0.000000
10/22/2011	10:38:33 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:38:33 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:38:33 AM	Tube furnace set to 150
10/22/2011	10:39:03 AM	H2 valve closed
10/22/2011	10:39:03 AM	BCl3 valve closed
10/22/2011	10:39:03 AM	PH3 valve closed
10/22/2011	10:39:03 AM	SiCl4 pre valve closed
10/22/2011	10:39:03 AM	SiCl4 post valve closed
10/22/2011	10:39:03 AM	Bypass valve closed
10/22/2011	10:39:03 AM	Bubbler valve closed
10/22/2011	10:39:03 AM	Helium valve opened
10/22/2011	10:39:03 AM	Main Vac valve opened
10/22/2011	10:39:03 AM	Helium MFC set to  20.000000
10/22/2011	10:39:03 AM	H2 MFC set to  0.000000
10/22/2011	10:39:03 AM	BCl3 MFC set to  0.000000
10/22/2011	10:39:03 AM	PHl3 MFC set to  0.000000
10/22/2011	10:39:03 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:39:03 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:39:03 AM	Tube furnace set to 150
10/22/2011	10:39:33 AM	Helium valve closed
10/22/2011	10:39:33 AM	H2 valve closed
10/22/2011	10:39:33 AM	BCl3 valve closed
10/22/2011	10:39:33 AM	PH3 valve closed
10/22/2011	10:39:34 AM	SiCl4 pre valve closed
10/22/2011	10:39:34 AM	SiCl4 post valve closed
10/22/2011	10:39:34 AM	Bypass valve closed
10/22/2011	10:39:34 AM	Bubbler valve closed
10/22/2011	10:39:34 AM	Main Vac valve opened
10/22/2011	10:39:34 AM	Helium MFC set to  0.000000
10/22/2011	10:39:34 AM	H2 MFC set to  0.000000
10/22/2011	10:39:34 AM	BCl3 MFC set to  0.000000
10/22/2011	10:39:34 AM	PHl3 MFC set to  0.000000
10/22/2011	10:39:34 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:39:34 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:39:34 AM	Tube furnace set to 150
10/22/2011	10:40:04 AM	H2 valve closed
10/22/2011	10:40:04 AM	BCl3 valve closed
10/22/2011	10:40:04 AM	PH3 valve closed
10/22/2011	10:40:04 AM	SiCl4 pre valve closed
10/22/2011	10:40:04 AM	SiCl4 post valve closed
10/22/2011	10:40:04 AM	Bypass valve closed
10/22/2011	10:40:04 AM	Bubbler valve closed
10/22/2011	10:40:04 AM	Helium valve opened
10/22/2011	10:40:04 AM	Main Vac valve opened
10/22/2011	10:40:04 AM	Helium MFC set to  20.000000
10/22/2011	10:40:04 AM	H2 MFC set to  0.000000
10/22/2011	10:40:04 AM	BCl3 MFC set to  0.000000
10/22/2011	10:40:04 AM	PHl3 MFC set to  0.000000
10/22/2011	10:40:04 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:40:04 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:40:04 AM	Tube furnace set to 150
10/22/2011	10:40:34 AM	Helium valve closed
10/22/2011	10:40:34 AM	H2 valve closed
10/22/2011	10:40:34 AM	BCl3 valve closed
10/22/2011	10:40:34 AM	PH3 valve closed
10/22/2011	10:40:34 AM	SiCl4 pre valve closed
10/22/2011	10:40:34 AM	SiCl4 post valve closed
10/22/2011	10:40:34 AM	Bypass valve closed
10/22/2011	10:40:34 AM	Bubbler valve closed
10/22/2011	10:40:34 AM	Main Vac valve opened
10/22/2011	10:40:34 AM	Helium MFC set to  0.000000
10/22/2011	10:40:34 AM	H2 MFC set to  0.000000
10/22/2011	10:40:34 AM	BCl3 MFC set to  0.000000
10/22/2011	10:40:34 AM	PHl3 MFC set to  0.000000
10/22/2011	10:40:34 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:40:34 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:40:34 AM	Tube furnace set to 150
10/22/2011	10:41:04 AM	H2 valve closed
10/22/2011	10:41:04 AM	BCl3 valve closed
10/22/2011	10:41:04 AM	PH3 valve closed
10/22/2011	10:41:04 AM	SiCl4 pre valve closed
10/22/2011	10:41:04 AM	SiCl4 post valve closed
10/22/2011	10:41:04 AM	Bypass valve closed
10/22/2011	10:41:04 AM	Bubbler valve closed
10/22/2011	10:41:04 AM	Helium valve opened
10/22/2011	10:41:04 AM	Main Vac valve opened
10/22/2011	10:41:04 AM	Helium MFC set to  20.000000
10/22/2011	10:41:04 AM	H2 MFC set to  0.000000
10/22/2011	10:41:04 AM	BCl3 MFC set to  0.000000
10/22/2011	10:41:04 AM	PHl3 MFC set to  0.000000
10/22/2011	10:41:04 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:41:04 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:41:04 AM	Tube furnace set to 150
10/22/2011	10:41:34 AM	Helium valve closed
10/22/2011	10:41:34 AM	H2 valve closed
10/22/2011	10:41:34 AM	BCl3 valve closed
10/22/2011	10:41:34 AM	PH3 valve closed
10/22/2011	10:41:34 AM	SiCl4 pre valve closed
10/22/2011	10:41:34 AM	SiCl4 post valve closed
10/22/2011	10:41:34 AM	Bypass valve closed
10/22/2011	10:41:34 AM	Bubbler valve closed
10/22/2011	10:41:34 AM	Main Vac valve opened
10/22/2011	10:41:34 AM	Helium MFC set to  0.000000
10/22/2011	10:41:34 AM	H2 MFC set to  0.000000
10/22/2011	10:41:34 AM	BCl3 MFC set to  0.000000
10/22/2011	10:41:34 AM	PHl3 MFC set to  0.000000
10/22/2011	10:41:34 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:41:34 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:41:34 AM	Tube furnace set to 150
10/22/2011	10:42:04 AM	H2 valve closed
10/22/2011	10:42:04 AM	BCl3 valve closed
10/22/2011	10:42:04 AM	PH3 valve closed
10/22/2011	10:42:04 AM	SiCl4 pre valve closed
10/22/2011	10:42:04 AM	SiCl4 post valve closed
10/22/2011	10:42:04 AM	Bypass valve closed
10/22/2011	10:42:04 AM	Bubbler valve closed
10/22/2011	10:42:04 AM	Helium valve opened
10/22/2011	10:42:04 AM	Main Vac valve opened
10/22/2011	10:42:04 AM	Helium MFC set to  20.000000
10/22/2011	10:42:04 AM	H2 MFC set to  0.000000
10/22/2011	10:42:04 AM	BCl3 MFC set to  0.000000
10/22/2011	10:42:04 AM	PHl3 MFC set to  0.000000
10/22/2011	10:42:04 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:42:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:42:05 AM	Tube furnace set to 150
10/22/2011	10:42:35 AM	Helium valve closed
10/22/2011	10:42:35 AM	H2 valve closed
10/22/2011	10:42:35 AM	BCl3 valve closed
10/22/2011	10:42:35 AM	PH3 valve closed
10/22/2011	10:42:35 AM	SiCl4 pre valve closed
10/22/2011	10:42:35 AM	SiCl4 post valve closed
10/22/2011	10:42:35 AM	Bypass valve closed
10/22/2011	10:42:35 AM	Bubbler valve closed
10/22/2011	10:42:35 AM	Main Vac valve opened
10/22/2011	10:42:35 AM	Helium MFC set to  0.000000
10/22/2011	10:42:35 AM	H2 MFC set to  0.000000
10/22/2011	10:42:35 AM	BCl3 MFC set to  0.000000
10/22/2011	10:42:35 AM	PHl3 MFC set to  0.000000
10/22/2011	10:42:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:42:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:42:35 AM	Tube furnace set to 150
10/22/2011	10:43:05 AM	H2 valve closed
10/22/2011	10:43:05 AM	BCl3 valve closed
10/22/2011	10:43:05 AM	PH3 valve closed
10/22/2011	10:43:05 AM	SiCl4 pre valve closed
10/22/2011	10:43:05 AM	SiCl4 post valve closed
10/22/2011	10:43:05 AM	Bypass valve closed
10/22/2011	10:43:05 AM	Bubbler valve closed
10/22/2011	10:43:05 AM	Helium valve opened
10/22/2011	10:43:05 AM	Main Vac valve opened
10/22/2011	10:43:05 AM	Helium MFC set to  20.000000
10/22/2011	10:43:05 AM	H2 MFC set to  0.000000
10/22/2011	10:43:05 AM	BCl3 MFC set to  0.000000
10/22/2011	10:43:05 AM	PHl3 MFC set to  0.000000
10/22/2011	10:43:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:43:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:43:05 AM	Tube furnace set to 150
10/22/2011	10:43:35 AM	Helium valve closed
10/22/2011	10:43:35 AM	H2 valve closed
10/22/2011	10:43:35 AM	BCl3 valve closed
10/22/2011	10:43:35 AM	PH3 valve closed
10/22/2011	10:43:35 AM	SiCl4 pre valve closed
10/22/2011	10:43:35 AM	SiCl4 post valve closed
10/22/2011	10:43:35 AM	Bypass valve closed
10/22/2011	10:43:35 AM	Bubbler valve closed
10/22/2011	10:43:35 AM	Main Vac valve opened
10/22/2011	10:43:35 AM	Helium MFC set to  0.000000
10/22/2011	10:43:35 AM	H2 MFC set to  0.000000
10/22/2011	10:43:35 AM	BCl3 MFC set to  0.000000
10/22/2011	10:43:35 AM	PHl3 MFC set to  0.000000
10/22/2011	10:43:35 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:43:35 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:43:35 AM	Tube furnace set to 150
10/22/2011	10:44:05 AM	H2 valve closed
10/22/2011	10:44:05 AM	BCl3 valve closed
10/22/2011	10:44:05 AM	PH3 valve closed
10/22/2011	10:44:05 AM	SiCl4 pre valve closed
10/22/2011	10:44:05 AM	SiCl4 post valve closed
10/22/2011	10:44:05 AM	Bypass valve closed
10/22/2011	10:44:05 AM	Bubbler valve closed
10/22/2011	10:44:05 AM	Helium valve opened
10/22/2011	10:44:05 AM	Main Vac valve opened
10/22/2011	10:44:05 AM	Helium MFC set to  20.000000
10/22/2011	10:44:05 AM	H2 MFC set to  0.000000
10/22/2011	10:44:05 AM	BCl3 MFC set to  0.000000
10/22/2011	10:44:05 AM	PHl3 MFC set to  0.000000
10/22/2011	10:44:05 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:44:05 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:44:06 AM	Tube furnace set to 150
10/22/2011	10:44:36 AM	Helium valve closed
10/22/2011	10:44:36 AM	H2 valve closed
10/22/2011	10:44:36 AM	BCl3 valve closed
10/22/2011	10:44:36 AM	PH3 valve closed
10/22/2011	10:44:36 AM	SiCl4 pre valve closed
10/22/2011	10:44:36 AM	SiCl4 post valve closed
10/22/2011	10:44:36 AM	Bypass valve closed
10/22/2011	10:44:36 AM	Bubbler valve closed
10/22/2011	10:44:36 AM	Main Vac valve opened
10/22/2011	10:44:36 AM	Helium MFC set to  0.000000
10/22/2011	10:44:36 AM	H2 MFC set to  0.000000
10/22/2011	10:44:36 AM	BCl3 MFC set to  0.000000
10/22/2011	10:44:36 AM	PHl3 MFC set to  0.000000
10/22/2011	10:44:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:44:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:44:36 AM	Tube furnace set to 150
10/22/2011	10:45:06 AM	H2 valve closed
10/22/2011	10:45:06 AM	BCl3 valve closed
10/22/2011	10:45:06 AM	PH3 valve closed
10/22/2011	10:45:06 AM	SiCl4 pre valve closed
10/22/2011	10:45:06 AM	SiCl4 post valve closed
10/22/2011	10:45:06 AM	Bypass valve closed
10/22/2011	10:45:06 AM	Bubbler valve closed
10/22/2011	10:45:06 AM	Helium valve opened
10/22/2011	10:45:06 AM	Main Vac valve opened
10/22/2011	10:45:06 AM	Helium MFC set to  20.000000
10/22/2011	10:45:06 AM	H2 MFC set to  0.000000
10/22/2011	10:45:06 AM	BCl3 MFC set to  0.000000
10/22/2011	10:45:06 AM	PHl3 MFC set to  0.000000
10/22/2011	10:45:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:45:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:45:06 AM	Tube furnace set to 150
10/22/2011	10:45:36 AM	Helium valve closed
10/22/2011	10:45:36 AM	H2 valve closed
10/22/2011	10:45:36 AM	BCl3 valve closed
10/22/2011	10:45:36 AM	PH3 valve closed
10/22/2011	10:45:36 AM	SiCl4 pre valve closed
10/22/2011	10:45:36 AM	SiCl4 post valve closed
10/22/2011	10:45:36 AM	Bypass valve closed
10/22/2011	10:45:36 AM	Bubbler valve closed
10/22/2011	10:45:36 AM	Main Vac valve opened
10/22/2011	10:45:36 AM	Helium MFC set to  0.000000
10/22/2011	10:45:36 AM	H2 MFC set to  0.000000
10/22/2011	10:45:36 AM	BCl3 MFC set to  0.000000
10/22/2011	10:45:36 AM	PHl3 MFC set to  0.000000
10/22/2011	10:45:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:45:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:45:36 AM	Tube furnace set to 150
10/22/2011	10:46:06 AM	H2 valve closed
10/22/2011	10:46:06 AM	BCl3 valve closed
10/22/2011	10:46:06 AM	PH3 valve closed
10/22/2011	10:46:06 AM	SiCl4 pre valve closed
10/22/2011	10:46:06 AM	SiCl4 post valve closed
10/22/2011	10:46:06 AM	Bypass valve closed
10/22/2011	10:46:06 AM	Bubbler valve closed
10/22/2011	10:46:06 AM	Helium valve opened
10/22/2011	10:46:06 AM	Main Vac valve opened
10/22/2011	10:46:06 AM	Helium MFC set to  20.000000
10/22/2011	10:46:06 AM	H2 MFC set to  0.000000
10/22/2011	10:46:06 AM	BCl3 MFC set to  0.000000
10/22/2011	10:46:06 AM	PHl3 MFC set to  0.000000
10/22/2011	10:46:06 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:46:06 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:46:06 AM	Tube furnace set to 150
10/22/2011	10:46:36 AM	Helium valve closed
10/22/2011	10:46:36 AM	H2 valve closed
10/22/2011	10:46:36 AM	BCl3 valve closed
10/22/2011	10:46:36 AM	PH3 valve closed
10/22/2011	10:46:36 AM	SiCl4 pre valve closed
10/22/2011	10:46:36 AM	SiCl4 post valve closed
10/22/2011	10:46:36 AM	Bypass valve closed
10/22/2011	10:46:36 AM	Bubbler valve closed
10/22/2011	10:46:36 AM	Main Vac valve opened
10/22/2011	10:46:36 AM	Helium MFC set to  0.000000
10/22/2011	10:46:36 AM	H2 MFC set to  0.000000
10/22/2011	10:46:36 AM	BCl3 MFC set to  0.000000
10/22/2011	10:46:36 AM	PHl3 MFC set to  0.000000
10/22/2011	10:46:36 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:46:36 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:46:37 AM	Tube furnace set to 150
10/22/2011	10:47:07 AM	H2 valve closed
10/22/2011	10:47:07 AM	BCl3 valve closed
10/22/2011	10:47:07 AM	PH3 valve closed
10/22/2011	10:47:07 AM	SiCl4 pre valve closed
10/22/2011	10:47:07 AM	SiCl4 post valve closed
10/22/2011	10:47:07 AM	Bypass valve closed
10/22/2011	10:47:07 AM	Bubbler valve closed
10/22/2011	10:47:07 AM	Helium valve opened
10/22/2011	10:47:07 AM	Main Vac valve opened
10/22/2011	10:47:07 AM	Helium MFC set to  20.000000
10/22/2011	10:47:07 AM	H2 MFC set to  0.000000
10/22/2011	10:47:07 AM	BCl3 MFC set to  0.000000
10/22/2011	10:47:07 AM	PHl3 MFC set to  0.000000
10/22/2011	10:47:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:47:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:47:07 AM	Tube furnace set to 150
10/22/2011	10:47:37 AM	Helium valve closed
10/22/2011	10:47:37 AM	H2 valve closed
10/22/2011	10:47:37 AM	BCl3 valve closed
10/22/2011	10:47:37 AM	PH3 valve closed
10/22/2011	10:47:37 AM	SiCl4 pre valve closed
10/22/2011	10:47:37 AM	SiCl4 post valve closed
10/22/2011	10:47:37 AM	Bypass valve closed
10/22/2011	10:47:37 AM	Bubbler valve closed
10/22/2011	10:47:37 AM	Main Vac valve opened
10/22/2011	10:47:37 AM	Helium MFC set to  0.000000
10/22/2011	10:47:37 AM	H2 MFC set to  0.000000
10/22/2011	10:47:37 AM	BCl3 MFC set to  0.000000
10/22/2011	10:47:37 AM	PHl3 MFC set to  0.000000
10/22/2011	10:47:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:47:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:47:37 AM	Tube furnace set to 150
10/22/2011	10:48:07 AM	H2 valve closed
10/22/2011	10:48:07 AM	BCl3 valve closed
10/22/2011	10:48:07 AM	PH3 valve closed
10/22/2011	10:48:07 AM	SiCl4 pre valve closed
10/22/2011	10:48:07 AM	SiCl4 post valve closed
10/22/2011	10:48:07 AM	Bypass valve closed
10/22/2011	10:48:07 AM	Bubbler valve closed
10/22/2011	10:48:07 AM	Helium valve opened
10/22/2011	10:48:07 AM	Main Vac valve opened
10/22/2011	10:48:07 AM	Helium MFC set to  20.000000
10/22/2011	10:48:07 AM	H2 MFC set to  0.000000
10/22/2011	10:48:07 AM	BCl3 MFC set to  0.000000
10/22/2011	10:48:07 AM	PHl3 MFC set to  0.000000
10/22/2011	10:48:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:48:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:48:07 AM	Tube furnace set to 150
10/22/2011	10:48:37 AM	Helium valve closed
10/22/2011	10:48:37 AM	H2 valve closed
10/22/2011	10:48:37 AM	BCl3 valve closed
10/22/2011	10:48:37 AM	PH3 valve closed
10/22/2011	10:48:37 AM	SiCl4 pre valve closed
10/22/2011	10:48:37 AM	SiCl4 post valve closed
10/22/2011	10:48:37 AM	Bypass valve closed
10/22/2011	10:48:37 AM	Bubbler valve closed
10/22/2011	10:48:37 AM	Main Vac valve opened
10/22/2011	10:48:37 AM	Helium MFC set to  0.000000
10/22/2011	10:48:37 AM	H2 MFC set to  0.000000
10/22/2011	10:48:37 AM	BCl3 MFC set to  0.000000
10/22/2011	10:48:37 AM	PHl3 MFC set to  0.000000
10/22/2011	10:48:37 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:48:37 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:48:37 AM	Tube furnace set to 150
10/22/2011	10:49:07 AM	H2 valve closed
10/22/2011	10:49:07 AM	BCl3 valve closed
10/22/2011	10:49:07 AM	PH3 valve closed
10/22/2011	10:49:07 AM	SiCl4 pre valve closed
10/22/2011	10:49:07 AM	SiCl4 post valve closed
10/22/2011	10:49:07 AM	Bypass valve closed
10/22/2011	10:49:07 AM	Bubbler valve closed
10/22/2011	10:49:07 AM	Helium valve opened
10/22/2011	10:49:07 AM	Main Vac valve opened
10/22/2011	10:49:07 AM	Helium MFC set to  20.000000
10/22/2011	10:49:07 AM	H2 MFC set to  0.000000
10/22/2011	10:49:07 AM	BCl3 MFC set to  0.000000
10/22/2011	10:49:07 AM	PHl3 MFC set to  0.000000
10/22/2011	10:49:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:49:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:49:08 AM	Tube furnace set to 150
10/22/2011	10:49:38 AM	Helium valve closed
10/22/2011	10:49:38 AM	H2 valve closed
10/22/2011	10:49:38 AM	BCl3 valve closed
10/22/2011	10:49:38 AM	PH3 valve closed
10/22/2011	10:49:38 AM	SiCl4 pre valve closed
10/22/2011	10:49:38 AM	SiCl4 post valve closed
10/22/2011	10:49:38 AM	Bypass valve closed
10/22/2011	10:49:38 AM	Bubbler valve closed
10/22/2011	10:49:38 AM	Main Vac valve opened
10/22/2011	10:49:38 AM	Helium MFC set to  0.000000
10/22/2011	10:49:38 AM	H2 MFC set to  0.000000
10/22/2011	10:49:38 AM	BCl3 MFC set to  0.000000
10/22/2011	10:49:38 AM	PHl3 MFC set to  0.000000
10/22/2011	10:49:38 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:49:38 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:49:38 AM	Tube furnace set to 150
10/22/2011	10:50:08 AM	H2 valve closed
10/22/2011	10:50:08 AM	BCl3 valve closed
10/22/2011	10:50:08 AM	PH3 valve closed
10/22/2011	10:50:08 AM	SiCl4 pre valve closed
10/22/2011	10:50:08 AM	SiCl4 post valve closed
10/22/2011	10:50:08 AM	Bypass valve closed
10/22/2011	10:50:08 AM	Bubbler valve closed
10/22/2011	10:50:08 AM	Helium valve opened
10/22/2011	10:50:08 AM	Main Vac valve opened
10/22/2011	10:50:08 AM	Helium MFC set to  20.000000
10/22/2011	10:50:08 AM	H2 MFC set to  0.000000
10/22/2011	10:50:08 AM	BCl3 MFC set to  0.000000
10/22/2011	10:50:08 AM	PHl3 MFC set to  0.000000
10/22/2011	10:50:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:50:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:50:08 AM	Tube furnace set to 150
10/22/2011	10:50:38 AM	Helium valve closed
10/22/2011	10:50:38 AM	H2 valve closed
10/22/2011	10:50:38 AM	BCl3 valve closed
10/22/2011	10:50:38 AM	PH3 valve closed
10/22/2011	10:50:38 AM	SiCl4 pre valve closed
10/22/2011	10:50:38 AM	SiCl4 post valve closed
10/22/2011	10:50:38 AM	Bypass valve closed
10/22/2011	10:50:38 AM	Bubbler valve closed
10/22/2011	10:50:38 AM	Main Vac valve opened
10/22/2011	10:50:38 AM	Helium MFC set to  0.000000
10/22/2011	10:50:38 AM	H2 MFC set to  0.000000
10/22/2011	10:50:38 AM	BCl3 MFC set to  0.000000
10/22/2011	10:50:38 AM	PHl3 MFC set to  0.000000
10/22/2011	10:50:38 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:50:38 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:50:38 AM	Tube furnace set to 150
10/22/2011	10:51:08 AM	H2 valve closed
10/22/2011	10:51:08 AM	BCl3 valve closed
10/22/2011	10:51:08 AM	PH3 valve closed
10/22/2011	10:51:08 AM	SiCl4 pre valve closed
10/22/2011	10:51:08 AM	SiCl4 post valve closed
10/22/2011	10:51:08 AM	Bypass valve closed
10/22/2011	10:51:08 AM	Bubbler valve closed
10/22/2011	10:51:08 AM	Helium valve opened
10/22/2011	10:51:08 AM	Main Vac valve opened
10/22/2011	10:51:08 AM	Helium MFC set to  20.000000
10/22/2011	10:51:08 AM	H2 MFC set to  0.000000
10/22/2011	10:51:08 AM	BCl3 MFC set to  0.000000
10/22/2011	10:51:08 AM	PHl3 MFC set to  0.000000
10/22/2011	10:51:08 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:51:08 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:51:09 AM	Tube furnace set to 150
10/22/2011	10:51:39 AM	Helium valve closed
10/22/2011	10:51:39 AM	H2 valve closed
10/22/2011	10:51:39 AM	BCl3 valve closed
10/22/2011	10:51:39 AM	PH3 valve closed
10/22/2011	10:51:39 AM	SiCl4 pre valve closed
10/22/2011	10:51:39 AM	SiCl4 post valve closed
10/22/2011	10:51:39 AM	Bypass valve closed
10/22/2011	10:51:39 AM	Bubbler valve closed
10/22/2011	10:51:39 AM	Main Vac valve opened
10/22/2011	10:51:39 AM	Helium MFC set to  0.000000
10/22/2011	10:51:39 AM	H2 MFC set to  0.000000
10/22/2011	10:51:39 AM	BCl3 MFC set to  0.000000
10/22/2011	10:51:39 AM	PHl3 MFC set to  0.000000
10/22/2011	10:51:39 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:51:39 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:51:39 AM	Tube furnace set to 150
10/22/2011	10:52:09 AM	H2 valve closed
10/22/2011	10:52:09 AM	BCl3 valve closed
10/22/2011	10:52:09 AM	PH3 valve closed
10/22/2011	10:52:09 AM	SiCl4 pre valve closed
10/22/2011	10:52:09 AM	SiCl4 post valve closed
10/22/2011	10:52:09 AM	Bypass valve closed
10/22/2011	10:52:09 AM	Bubbler valve closed
10/22/2011	10:52:09 AM	Helium valve opened
10/22/2011	10:52:09 AM	Main Vac valve opened
10/22/2011	10:52:09 AM	Helium MFC set to  20.000000
10/22/2011	10:52:09 AM	H2 MFC set to  0.000000
10/22/2011	10:52:09 AM	BCl3 MFC set to  0.000000
10/22/2011	10:52:09 AM	PHl3 MFC set to  0.000000
10/22/2011	10:52:09 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:52:09 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:52:09 AM	Tube furnace set to 150
10/22/2011	10:52:39 AM	Helium valve closed
10/22/2011	10:52:39 AM	H2 valve closed
10/22/2011	10:52:39 AM	BCl3 valve closed
10/22/2011	10:52:39 AM	PH3 valve closed
10/22/2011	10:52:39 AM	SiCl4 pre valve closed
10/22/2011	10:52:39 AM	SiCl4 post valve closed
10/22/2011	10:52:39 AM	Bypass valve closed
10/22/2011	10:52:39 AM	Bubbler valve closed
10/22/2011	10:52:39 AM	Main Vac valve opened
10/22/2011	10:52:39 AM	Helium MFC set to  0.000000
10/22/2011	10:52:39 AM	H2 MFC set to  0.000000
10/22/2011	10:52:39 AM	BCl3 MFC set to  0.000000
10/22/2011	10:52:39 AM	PHl3 MFC set to  0.000000
10/22/2011	10:52:39 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:52:39 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:52:39 AM	Tube furnace set to 150
10/22/2011	10:53:09 AM	H2 valve closed
10/22/2011	10:53:09 AM	BCl3 valve closed
10/22/2011	10:53:09 AM	PH3 valve closed
10/22/2011	10:53:09 AM	SiCl4 pre valve closed
10/22/2011	10:53:09 AM	SiCl4 post valve closed
10/22/2011	10:53:09 AM	Bypass valve closed
10/22/2011	10:53:09 AM	Bubbler valve closed
10/22/2011	10:53:09 AM	Helium valve opened
10/22/2011	10:53:09 AM	Main Vac valve opened
10/22/2011	10:53:09 AM	Helium MFC set to  20.000000
10/22/2011	10:53:09 AM	H2 MFC set to  0.000000
10/22/2011	10:53:09 AM	BCl3 MFC set to  0.000000
10/22/2011	10:53:09 AM	PHl3 MFC set to  0.000000
10/22/2011	10:53:09 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:53:09 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:53:09 AM	Tube furnace set to 150
10/22/2011	10:53:39 AM	Helium valve closed
10/22/2011	10:53:39 AM	H2 valve closed
10/22/2011	10:53:39 AM	BCl3 valve closed
10/22/2011	10:53:39 AM	PH3 valve closed
10/22/2011	10:53:39 AM	SiCl4 pre valve closed
10/22/2011	10:53:39 AM	SiCl4 post valve closed
10/22/2011	10:53:39 AM	Bypass valve closed
10/22/2011	10:53:39 AM	Bubbler valve closed
10/22/2011	10:53:39 AM	Main Vac valve opened
10/22/2011	10:53:39 AM	Helium MFC set to  0.000000
10/22/2011	10:53:39 AM	H2 MFC set to  0.000000
10/22/2011	10:53:39 AM	BCl3 MFC set to  0.000000
10/22/2011	10:53:39 AM	PHl3 MFC set to  0.000000
10/22/2011	10:53:39 AM	SiCl4 MFC set to  0.000000
10/22/2011	10:53:39 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:53:40 AM	Tube furnace set to 180
10/22/2011	10:53:45 AM	Run finished at 10:53 AM
10/22/2011	11:28:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/22/2011	11:28:48 AM	Recipe started at 11:28 AM
10/22/2011	11:28:48 AM	Helium valve closed
10/22/2011	11:28:48 AM	H2 valve closed
10/22/2011	11:28:48 AM	BCl3 valve closed
10/22/2011	11:28:48 AM	PH3 valve closed
10/22/2011	11:28:48 AM	SiCl4 pre valve closed
10/22/2011	11:28:48 AM	SiCl4 post valve closed
10/22/2011	11:28:48 AM	Main Vac valve closed
10/22/2011	11:28:48 AM	Bubbler valve closed
10/22/2011	11:28:48 AM	Bypass valve opened
10/22/2011	11:28:48 AM	Helium MFC set to  0.000000
10/22/2011	11:28:48 AM	H2 MFC set to  0.000000
10/22/2011	11:28:48 AM	BCl3 MFC set to  0.000000
10/22/2011	11:28:48 AM	PHl3 MFC set to  0.000000
10/22/2011	11:28:48 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:28:48 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:28:48 AM	Tube furnace set to 0
10/22/2011	11:28:48 AM	Helium valve closed
10/22/2011	11:28:48 AM	H2 valve closed
10/22/2011	11:28:48 AM	BCl3 valve closed
10/22/2011	11:28:48 AM	PH3 valve closed
10/22/2011	11:28:48 AM	SiCl4 pre valve closed
10/22/2011	11:28:48 AM	SiCl4 post valve closed
10/22/2011	11:28:48 AM	Main Vac valve closed
10/22/2011	11:28:48 AM	Bubbler valve closed
10/22/2011	11:28:48 AM	Bypass valve opened
10/22/2011	11:28:48 AM	Helium MFC set to  0.000000
10/22/2011	11:28:48 AM	H2 MFC set to  0.000000
10/22/2011	11:28:48 AM	BCl3 MFC set to  0.000000
10/22/2011	11:28:48 AM	PHl3 MFC set to  0.000000
10/22/2011	11:28:48 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:28:48 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:28:48 AM	Tube furnace set to 0
10/22/2011	11:29:18 AM	Helium valve closed
10/22/2011	11:29:18 AM	H2 valve closed
10/22/2011	11:29:18 AM	BCl3 valve closed
10/22/2011	11:29:18 AM	PH3 valve closed
10/22/2011	11:29:18 AM	SiCl4 pre valve closed
10/22/2011	11:29:18 AM	SiCl4 post valve closed
10/22/2011	11:29:18 AM	Bypass valve closed
10/22/2011	11:29:18 AM	Bubbler valve closed
10/22/2011	11:29:18 AM	Main Vac valve opened
10/22/2011	11:29:18 AM	Helium MFC set to  0.000000
10/22/2011	11:29:18 AM	H2 MFC set to  0.000000
10/22/2011	11:29:18 AM	BCl3 MFC set to  0.000000
10/22/2011	11:29:18 AM	PHl3 MFC set to  0.000000
10/22/2011	11:29:18 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:29:18 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:29:19 AM	Tube furnace set to 0
10/22/2011	11:29:49 AM	H2 valve closed
10/22/2011	11:29:49 AM	BCl3 valve closed
10/22/2011	11:29:49 AM	PH3 valve closed
10/22/2011	11:29:49 AM	SiCl4 pre valve closed
10/22/2011	11:29:49 AM	SiCl4 post valve closed
10/22/2011	11:29:49 AM	Bypass valve closed
10/22/2011	11:29:49 AM	Bubbler valve closed
10/22/2011	11:29:49 AM	Helium valve opened
10/22/2011	11:29:49 AM	Main Vac valve opened
10/22/2011	11:29:49 AM	Helium MFC set to  20.000000
10/22/2011	11:29:49 AM	H2 MFC set to  0.000000
10/22/2011	11:29:49 AM	BCl3 MFC set to  0.000000
10/22/2011	11:29:49 AM	PHl3 MFC set to  0.000000
10/22/2011	11:29:49 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:29:49 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:29:49 AM	Tube furnace set to 0
10/22/2011	11:30:19 AM	Helium valve closed
10/22/2011	11:30:19 AM	H2 valve closed
10/22/2011	11:30:19 AM	BCl3 valve closed
10/22/2011	11:30:19 AM	PH3 valve closed
10/22/2011	11:30:19 AM	SiCl4 pre valve closed
10/22/2011	11:30:19 AM	SiCl4 post valve closed
10/22/2011	11:30:19 AM	Bypass valve closed
10/22/2011	11:30:19 AM	Bubbler valve closed
10/22/2011	11:30:19 AM	Main Vac valve opened
10/22/2011	11:30:19 AM	Helium MFC set to  0.000000
10/22/2011	11:30:19 AM	H2 MFC set to  0.000000
10/22/2011	11:30:19 AM	BCl3 MFC set to  0.000000
10/22/2011	11:30:19 AM	PHl3 MFC set to  0.000000
10/22/2011	11:30:19 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:30:19 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:30:19 AM	Tube furnace set to 0
10/22/2011	11:30:49 AM	H2 valve closed
10/22/2011	11:30:49 AM	BCl3 valve closed
10/22/2011	11:30:49 AM	PH3 valve closed
10/22/2011	11:30:49 AM	SiCl4 pre valve closed
10/22/2011	11:30:49 AM	SiCl4 post valve closed
10/22/2011	11:30:49 AM	Bypass valve closed
10/22/2011	11:30:49 AM	Bubbler valve closed
10/22/2011	11:30:49 AM	Helium valve opened
10/22/2011	11:30:49 AM	Main Vac valve opened
10/22/2011	11:30:49 AM	Helium MFC set to  20.000000
10/22/2011	11:30:49 AM	H2 MFC set to  0.000000
10/22/2011	11:30:49 AM	BCl3 MFC set to  0.000000
10/22/2011	11:30:49 AM	PHl3 MFC set to  0.000000
10/22/2011	11:30:49 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:30:49 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:30:49 AM	Tube furnace set to 0
10/22/2011	11:31:19 AM	Helium valve closed
10/22/2011	11:31:19 AM	H2 valve closed
10/22/2011	11:31:19 AM	BCl3 valve closed
10/22/2011	11:31:19 AM	PH3 valve closed
10/22/2011	11:31:19 AM	SiCl4 pre valve closed
10/22/2011	11:31:19 AM	SiCl4 post valve closed
10/22/2011	11:31:19 AM	Bypass valve closed
10/22/2011	11:31:19 AM	Bubbler valve closed
10/22/2011	11:31:19 AM	Main Vac valve opened
10/22/2011	11:31:19 AM	Helium MFC set to  0.000000
10/22/2011	11:31:19 AM	H2 MFC set to  0.000000
10/22/2011	11:31:19 AM	BCl3 MFC set to  0.000000
10/22/2011	11:31:19 AM	PHl3 MFC set to  0.000000
10/22/2011	11:31:19 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:31:19 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:31:19 AM	Tube furnace set to 0
10/22/2011	11:31:49 AM	H2 valve closed
10/22/2011	11:31:49 AM	BCl3 valve closed
10/22/2011	11:31:49 AM	PH3 valve closed
10/22/2011	11:31:49 AM	SiCl4 pre valve closed
10/22/2011	11:31:49 AM	SiCl4 post valve closed
10/22/2011	11:31:49 AM	Bypass valve closed
10/22/2011	11:31:49 AM	Bubbler valve closed
10/22/2011	11:31:49 AM	Helium valve opened
10/22/2011	11:31:49 AM	Main Vac valve opened
10/22/2011	11:31:49 AM	Helium MFC set to  20.000000
10/22/2011	11:31:49 AM	H2 MFC set to  0.000000
10/22/2011	11:31:49 AM	BCl3 MFC set to  0.000000
10/22/2011	11:31:49 AM	PHl3 MFC set to  0.000000
10/22/2011	11:31:49 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:31:49 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:31:50 AM	Tube furnace set to 0
10/22/2011	11:32:20 AM	Helium valve closed
10/22/2011	11:32:20 AM	H2 valve closed
10/22/2011	11:32:20 AM	BCl3 valve closed
10/22/2011	11:32:20 AM	PH3 valve closed
10/22/2011	11:32:20 AM	SiCl4 pre valve closed
10/22/2011	11:32:20 AM	SiCl4 post valve closed
10/22/2011	11:32:20 AM	Bypass valve closed
10/22/2011	11:32:20 AM	Bubbler valve closed
10/22/2011	11:32:20 AM	Main Vac valve opened
10/22/2011	11:32:20 AM	Helium MFC set to  0.000000
10/22/2011	11:32:20 AM	H2 MFC set to  0.000000
10/22/2011	11:32:20 AM	BCl3 MFC set to  0.000000
10/22/2011	11:32:20 AM	PHl3 MFC set to  0.000000
10/22/2011	11:32:20 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:32:20 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:32:20 AM	Tube furnace set to 0
10/22/2011	11:32:50 AM	H2 valve closed
10/22/2011	11:32:50 AM	BCl3 valve closed
10/22/2011	11:32:50 AM	PH3 valve closed
10/22/2011	11:32:50 AM	SiCl4 pre valve closed
10/22/2011	11:32:50 AM	SiCl4 post valve closed
10/22/2011	11:32:50 AM	Bypass valve closed
10/22/2011	11:32:50 AM	Bubbler valve closed
10/22/2011	11:32:50 AM	Helium valve opened
10/22/2011	11:32:50 AM	Main Vac valve opened
10/22/2011	11:32:50 AM	Helium MFC set to  20.000000
10/22/2011	11:32:50 AM	H2 MFC set to  0.000000
10/22/2011	11:32:50 AM	BCl3 MFC set to  0.000000
10/22/2011	11:32:50 AM	PHl3 MFC set to  0.000000
10/22/2011	11:32:50 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:32:50 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:32:50 AM	Tube furnace set to 0
10/22/2011	11:33:20 AM	Helium valve closed
10/22/2011	11:33:20 AM	H2 valve closed
10/22/2011	11:33:20 AM	BCl3 valve closed
10/22/2011	11:33:20 AM	PH3 valve closed
10/22/2011	11:33:20 AM	SiCl4 pre valve closed
10/22/2011	11:33:20 AM	SiCl4 post valve closed
10/22/2011	11:33:20 AM	Bypass valve closed
10/22/2011	11:33:20 AM	Bubbler valve closed
10/22/2011	11:33:20 AM	Main Vac valve opened
10/22/2011	11:33:20 AM	Helium MFC set to  0.000000
10/22/2011	11:33:20 AM	H2 MFC set to  0.000000
10/22/2011	11:33:20 AM	BCl3 MFC set to  0.000000
10/22/2011	11:33:20 AM	PHl3 MFC set to  0.000000
10/22/2011	11:33:20 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:33:20 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:33:20 AM	Tube furnace set to 0
10/22/2011	11:33:50 AM	H2 valve closed
10/22/2011	11:33:50 AM	BCl3 valve closed
10/22/2011	11:33:50 AM	PH3 valve closed
10/22/2011	11:33:50 AM	SiCl4 pre valve closed
10/22/2011	11:33:50 AM	SiCl4 post valve closed
10/22/2011	11:33:50 AM	Bypass valve closed
10/22/2011	11:33:50 AM	Bubbler valve closed
10/22/2011	11:33:50 AM	Helium valve opened
10/22/2011	11:33:50 AM	Main Vac valve opened
10/22/2011	11:33:50 AM	Helium MFC set to  20.000000
10/22/2011	11:33:50 AM	H2 MFC set to  0.000000
10/22/2011	11:33:50 AM	BCl3 MFC set to  0.000000
10/22/2011	11:33:50 AM	PHl3 MFC set to  0.000000
10/22/2011	11:33:50 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:33:50 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:33:50 AM	Tube furnace set to 0
10/22/2011	11:34:17 AM	Run aborted at 11:34 AM
10/22/2011	11:34:17 AM	Helium valve closed
10/22/2011	11:34:17 AM	H2 valve closed
10/22/2011	11:34:17 AM	BCl3 valve closed
10/22/2011	11:34:17 AM	PH3 valve closed
10/22/2011	11:34:17 AM	SiCl4 pre valve closed
10/22/2011	11:34:17 AM	SiCl4 post valve closed
10/22/2011	11:34:17 AM	Bypass valve closed
10/22/2011	11:34:17 AM	Main Vac valve closed
10/22/2011	11:34:17 AM	Bubbler valve closed
10/22/2011	11:34:17 AM	Helium MFC set to  0.000000
10/22/2011	11:34:17 AM	H2 MFC set to  0.000000
10/22/2011	11:34:17 AM	BCl3 MFC set to  0.000000
10/22/2011	11:34:17 AM	PHl3 MFC set to  0.000000
10/22/2011	11:34:17 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:34:18 AM	Tube furnace set to 0
10/22/2011	11:34:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/22/2011	11:34:20 AM	Main Vac valve opened
10/22/2011	11:36:07 AM	Recipe started at 11:36 AM
10/22/2011	11:36:07 AM	Helium valve closed
10/22/2011	11:36:07 AM	H2 valve closed
10/22/2011	11:36:07 AM	BCl3 valve closed
10/22/2011	11:36:07 AM	PH3 valve closed
10/22/2011	11:36:07 AM	SiCl4 pre valve closed
10/22/2011	11:36:07 AM	SiCl4 post valve closed
10/22/2011	11:36:07 AM	Main Vac valve closed
10/22/2011	11:36:07 AM	Bypass valve closed
10/22/2011	11:36:07 AM	Bubbler valve closed
10/22/2011	11:36:07 AM	Helium MFC set to  0.000000
10/22/2011	11:36:07 AM	H2 MFC set to  0.000000
10/22/2011	11:36:07 AM	BCl3 MFC set to  0.000000
10/22/2011	11:36:07 AM	PHl3 MFC set to  0.000000
10/22/2011	11:36:07 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:36:07 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:36:07 AM	Tube furnace set to 0
10/22/2011	11:36:10 AM	Helium valve closed
10/22/2011	11:36:10 AM	BCl3 valve closed
10/22/2011	11:36:10 AM	PH3 valve closed
10/22/2011	11:36:10 AM	SiCl4 pre valve closed
10/22/2011	11:36:10 AM	SiCl4 post valve closed
10/22/2011	11:36:10 AM	Main Vac valve closed
10/22/2011	11:36:10 AM	Bypass valve closed
10/22/2011	11:36:10 AM	Bubbler valve closed
10/22/2011	11:36:10 AM	H2 valve opened
10/22/2011	11:36:10 AM	Helium MFC set to  0.000000
10/22/2011	11:36:10 AM	H2 MFC set to  500.000000
10/22/2011	11:36:10 AM	BCl3 MFC set to  0.000000
10/22/2011	11:36:10 AM	PHl3 MFC set to  0.000000
10/22/2011	11:36:10 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:36:10 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:36:10 AM	Tube furnace set to 0
10/22/2011	11:37:15 AM	Helium valve closed
10/22/2011	11:37:15 AM	BCl3 valve closed
10/22/2011	11:37:15 AM	PH3 valve closed
10/22/2011	11:37:15 AM	SiCl4 pre valve closed
10/22/2011	11:37:15 AM	SiCl4 post valve closed
10/22/2011	11:37:15 AM	Main Vac valve closed
10/22/2011	11:37:15 AM	Bypass valve closed
10/22/2011	11:37:15 AM	H2 valve opened
10/22/2011	11:37:15 AM	Bubbler valve opened
10/22/2011	11:37:15 AM	Helium MFC set to  0.000000
10/22/2011	11:37:15 AM	H2 MFC set to  500.000000
10/22/2011	11:37:15 AM	BCl3 MFC set to  0.000000
10/22/2011	11:37:15 AM	PHl3 MFC set to  0.000000
10/22/2011	11:37:15 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:37:15 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:37:15 AM	Tube furnace set to 0
10/22/2011	11:37:16 AM	Helium valve closed
10/22/2011	11:37:16 AM	BCl3 valve closed
10/22/2011	11:37:16 AM	PH3 valve closed
10/22/2011	11:37:16 AM	SiCl4 pre valve closed
10/22/2011	11:37:16 AM	SiCl4 post valve closed
10/22/2011	11:37:16 AM	Main Vac valve closed
10/22/2011	11:37:16 AM	Bypass valve closed
10/22/2011	11:37:16 AM	H2 valve opened
10/22/2011	11:37:16 AM	Bubbler valve opened
10/22/2011	11:37:16 AM	Helium MFC set to  0.000000
10/22/2011	11:37:16 AM	H2 MFC set to  500.000000
10/22/2011	11:37:16 AM	BCl3 MFC set to  0.000000
10/22/2011	11:37:16 AM	PHl3 MFC set to  0.000000
10/22/2011	11:37:16 AM	SiCl4 MFC set to  0.000000
10/22/2011	11:37:16 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:37:16 AM	Tube furnace set to 1040
10/22/2011	11:57:16 AM	Helium valve closed
10/22/2011	11:57:16 AM	BCl3 valve closed
10/22/2011	11:57:16 AM	PH3 valve closed
10/22/2011	11:57:16 AM	Main Vac valve closed
10/22/2011	11:57:16 AM	Bypass valve closed
10/22/2011	11:57:16 AM	H2 valve opened
10/22/2011	11:57:16 AM	SiCl4 pre valve opened
10/22/2011	11:57:16 AM	SiCl4 post valve opened
10/22/2011	11:57:16 AM	Bubbler valve opened
10/22/2011	11:57:16 AM	Helium MFC set to  0.000000
10/22/2011	11:57:16 AM	H2 MFC set to  500.000000
10/22/2011	11:57:16 AM	BCl3 MFC set to  0.000000
10/22/2011	11:57:16 AM	PHl3 MFC set to  0.000000
10/22/2011	11:57:16 AM	SiCl4 MFC set to  48.000000
10/22/2011	11:57:16 AM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:57:16 AM	Tube furnace set to 1040
10/22/2011	12:07:16 PM	Helium valve closed
10/22/2011	12:07:16 PM	BCl3 valve closed
10/22/2011	12:07:16 PM	PH3 valve closed
10/22/2011	12:07:16 PM	SiCl4 pre valve closed
10/22/2011	12:07:16 PM	SiCl4 post valve closed
10/22/2011	12:07:16 PM	Main Vac valve closed
10/22/2011	12:07:16 PM	Bypass valve closed
10/22/2011	12:07:16 PM	H2 valve opened
10/22/2011	12:07:16 PM	Bubbler valve opened
10/22/2011	12:07:16 PM	Helium MFC set to  0.000000
10/22/2011	12:07:16 PM	H2 MFC set to  500.000000
10/22/2011	12:07:16 PM	BCl3 MFC set to  0.000000
10/22/2011	12:07:16 PM	PHl3 MFC set to  0.000000
10/22/2011	12:07:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:07:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:07:17 PM	Tube furnace set to 750
10/22/2011	12:12:17 PM	H2 valve closed
10/22/2011	12:12:17 PM	BCl3 valve closed
10/22/2011	12:12:17 PM	PH3 valve closed
10/22/2011	12:12:17 PM	SiCl4 pre valve closed
10/22/2011	12:12:17 PM	SiCl4 post valve closed
10/22/2011	12:12:17 PM	Main Vac valve closed
10/22/2011	12:12:17 PM	Bypass valve closed
10/22/2011	12:12:17 PM	Helium valve opened
10/22/2011	12:12:17 PM	Bubbler valve opened
10/22/2011	12:12:17 PM	Helium MFC set to  500.000000
10/22/2011	12:12:17 PM	H2 MFC set to  0.000000
10/22/2011	12:12:17 PM	BCl3 MFC set to  0.000000
10/22/2011	12:12:17 PM	PHl3 MFC set to  0.000000
10/22/2011	12:12:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:12:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:12:17 PM	Tube furnace set to 0
10/22/2011	12:19:10 PM	Helium valve closed
10/22/2011	12:19:10 PM	H2 valve closed
10/22/2011	12:19:10 PM	BCl3 valve closed
10/22/2011	12:19:10 PM	PH3 valve closed
10/22/2011	12:19:10 PM	SiCl4 pre valve closed
10/22/2011	12:19:10 PM	SiCl4 post valve closed
10/22/2011	12:19:10 PM	Main Vac valve closed
10/22/2011	12:19:10 PM	Bypass valve closed
10/22/2011	12:19:10 PM	Bubbler valve closed
10/22/2011	12:19:10 PM	Helium MFC set to  0.000000
10/22/2011	12:19:10 PM	H2 MFC set to  0.000000
10/22/2011	12:19:10 PM	BCl3 MFC set to  0.000000
10/22/2011	12:19:10 PM	PHl3 MFC set to  0.000000
10/22/2011	12:19:10 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:19:10 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:19:10 PM	Tube furnace set to 0
10/22/2011	12:19:11 PM	Run finished at 12:19 PM
10/22/2011	12:19:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	12:19:16 PM	Recipe started at 12:19 PM
10/22/2011	12:19:16 PM	Helium valve closed
10/22/2011	12:19:16 PM	H2 valve closed
10/22/2011	12:19:16 PM	BCl3 valve closed
10/22/2011	12:19:16 PM	PH3 valve closed
10/22/2011	12:19:16 PM	SiCl4 pre valve closed
10/22/2011	12:19:16 PM	SiCl4 post valve closed
10/22/2011	12:19:16 PM	Main Vac valve closed
10/22/2011	12:19:16 PM	Bypass valve closed
10/22/2011	12:19:16 PM	Bubbler valve closed
10/22/2011	12:19:16 PM	Helium MFC set to  0.000000
10/22/2011	12:19:16 PM	H2 MFC set to  0.000000
10/22/2011	12:19:16 PM	BCl3 MFC set to  0.000000
10/22/2011	12:19:16 PM	PHl3 MFC set to  0.000000
10/22/2011	12:19:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:19:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:19:17 PM	Tube furnace set to 0
10/22/2011	12:19:20 PM	H2 valve closed
10/22/2011	12:19:20 PM	BCl3 valve closed
10/22/2011	12:19:20 PM	PH3 valve closed
10/22/2011	12:19:20 PM	SiCl4 pre valve closed
10/22/2011	12:19:20 PM	SiCl4 post valve closed
10/22/2011	12:19:20 PM	Main Vac valve closed
10/22/2011	12:19:20 PM	Bypass valve closed
10/22/2011	12:19:20 PM	Bubbler valve closed
10/22/2011	12:19:20 PM	Helium valve opened
10/22/2011	12:19:20 PM	Helium MFC set to  500.000000
10/22/2011	12:19:20 PM	H2 MFC set to  0.000000
10/22/2011	12:19:20 PM	BCl3 MFC set to  0.000000
10/22/2011	12:19:20 PM	PHl3 MFC set to  0.000000
10/22/2011	12:19:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:19:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:19:20 PM	Tube furnace set to 0
10/22/2011	12:19:20 PM	Helium valve closed
10/22/2011	12:19:20 PM	H2 valve closed
10/22/2011	12:19:20 PM	BCl3 valve closed
10/22/2011	12:19:20 PM	PH3 valve closed
10/22/2011	12:19:20 PM	SiCl4 pre valve closed
10/22/2011	12:19:20 PM	SiCl4 post valve closed
10/22/2011	12:19:20 PM	Main Vac valve closed
10/22/2011	12:19:20 PM	Bypass valve closed
10/22/2011	12:19:20 PM	Bubbler valve closed
10/22/2011	12:19:20 PM	Helium MFC set to  0.000000
10/22/2011	12:19:20 PM	H2 MFC set to  0.000000
10/22/2011	12:19:20 PM	BCl3 MFC set to  0.000000
10/22/2011	12:19:20 PM	PHl3 MFC set to  0.000000
10/22/2011	12:19:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:19:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:19:20 PM	Tube furnace set to 0
10/22/2011	12:19:21 PM	Run finished at 12:19 PM
10/22/2011	12:19:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	12:25:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	12:25:52 PM	Recipe started at 12:25 PM
10/22/2011	12:25:52 PM	Helium valve closed
10/22/2011	12:25:52 PM	H2 valve closed
10/22/2011	12:25:52 PM	BCl3 valve closed
10/22/2011	12:25:52 PM	PH3 valve closed
10/22/2011	12:25:52 PM	SiCl4 pre valve closed
10/22/2011	12:25:52 PM	SiCl4 post valve closed
10/22/2011	12:25:52 PM	Main Vac valve closed
10/22/2011	12:25:52 PM	Bubbler valve closed
10/22/2011	12:25:52 PM	Bypass valve opened
10/22/2011	12:25:52 PM	Helium MFC set to  0.000000
10/22/2011	12:25:52 PM	H2 MFC set to  0.000000
10/22/2011	12:25:52 PM	BCl3 MFC set to  0.000000
10/22/2011	12:25:52 PM	PHl3 MFC set to  0.000000
10/22/2011	12:25:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:25:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:25:52 PM	Tube furnace set to 0
10/22/2011	12:26:55 PM	Helium valve closed
10/22/2011	12:26:55 PM	H2 valve closed
10/22/2011	12:26:55 PM	BCl3 valve closed
10/22/2011	12:26:55 PM	PH3 valve closed
10/22/2011	12:26:55 PM	SiCl4 pre valve closed
10/22/2011	12:26:55 PM	SiCl4 post valve closed
10/22/2011	12:26:55 PM	Main Vac valve closed
10/22/2011	12:26:55 PM	Bubbler valve closed
10/22/2011	12:26:55 PM	Bypass valve opened
10/22/2011	12:26:55 PM	Helium MFC set to  0.000000
10/22/2011	12:26:55 PM	H2 MFC set to  0.000000
10/22/2011	12:26:55 PM	BCl3 MFC set to  0.000000
10/22/2011	12:26:55 PM	PHl3 MFC set to  0.000000
10/22/2011	12:26:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:26:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:26:55 PM	Tube furnace set to 0
10/22/2011	12:27:55 PM	Helium valve closed
10/22/2011	12:27:55 PM	H2 valve closed
10/22/2011	12:27:55 PM	BCl3 valve closed
10/22/2011	12:27:55 PM	PH3 valve closed
10/22/2011	12:27:55 PM	SiCl4 pre valve closed
10/22/2011	12:27:55 PM	SiCl4 post valve closed
10/22/2011	12:27:55 PM	Bypass valve closed
10/22/2011	12:27:55 PM	Bubbler valve closed
10/22/2011	12:27:55 PM	Main Vac valve opened
10/22/2011	12:27:55 PM	Helium MFC set to  0.000000
10/22/2011	12:27:55 PM	H2 MFC set to  0.000000
10/22/2011	12:27:55 PM	BCl3 MFC set to  0.000000
10/22/2011	12:27:55 PM	PHl3 MFC set to  0.000000
10/22/2011	12:27:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:27:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:27:55 PM	Tube furnace set to 0
10/22/2011	12:27:56 PM	Run finished at 12:27 PM
10/22/2011	12:27:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	12:32:40 PM	Recipe started at 12:32 PM
10/22/2011	12:32:40 PM	Helium valve closed
10/22/2011	12:32:40 PM	H2 valve closed
10/22/2011	12:32:40 PM	BCl3 valve closed
10/22/2011	12:32:40 PM	PH3 valve closed
10/22/2011	12:32:40 PM	SiCl4 pre valve closed
10/22/2011	12:32:40 PM	SiCl4 post valve closed
10/22/2011	12:32:40 PM	Main Vac valve closed
10/22/2011	12:32:40 PM	Bubbler valve closed
10/22/2011	12:32:40 PM	Bypass valve opened
10/22/2011	12:32:40 PM	Helium MFC set to  0.000000
10/22/2011	12:32:40 PM	H2 MFC set to  0.000000
10/22/2011	12:32:40 PM	BCl3 MFC set to  0.000000
10/22/2011	12:32:40 PM	PHl3 MFC set to  0.000000
10/22/2011	12:32:40 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:32:40 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:32:40 PM	Tube furnace set to 150
10/22/2011	12:32:40 PM	Helium valve closed
10/22/2011	12:32:40 PM	H2 valve closed
10/22/2011	12:32:40 PM	BCl3 valve closed
10/22/2011	12:32:40 PM	PH3 valve closed
10/22/2011	12:32:40 PM	SiCl4 pre valve closed
10/22/2011	12:32:40 PM	SiCl4 post valve closed
10/22/2011	12:32:40 PM	Main Vac valve closed
10/22/2011	12:32:40 PM	Bubbler valve closed
10/22/2011	12:32:40 PM	Bypass valve opened
10/22/2011	12:32:40 PM	Helium MFC set to  0.000000
10/22/2011	12:32:40 PM	H2 MFC set to  0.000000
10/22/2011	12:32:40 PM	BCl3 MFC set to  0.000000
10/22/2011	12:32:40 PM	PHl3 MFC set to  0.000000
10/22/2011	12:32:40 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:32:40 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:32:40 PM	Tube furnace set to 150
10/22/2011	12:33:10 PM	Helium valve closed
10/22/2011	12:33:10 PM	H2 valve closed
10/22/2011	12:33:10 PM	BCl3 valve closed
10/22/2011	12:33:10 PM	PH3 valve closed
10/22/2011	12:33:10 PM	SiCl4 pre valve closed
10/22/2011	12:33:10 PM	SiCl4 post valve closed
10/22/2011	12:33:10 PM	Bypass valve closed
10/22/2011	12:33:10 PM	Bubbler valve closed
10/22/2011	12:33:10 PM	Main Vac valve opened
10/22/2011	12:33:10 PM	Helium MFC set to  0.000000
10/22/2011	12:33:10 PM	H2 MFC set to  0.000000
10/22/2011	12:33:10 PM	BCl3 MFC set to  0.000000
10/22/2011	12:33:10 PM	PHl3 MFC set to  0.000000
10/22/2011	12:33:10 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:33:10 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:33:11 PM	Tube furnace set to 150
10/22/2011	12:33:41 PM	H2 valve closed
10/22/2011	12:33:41 PM	BCl3 valve closed
10/22/2011	12:33:41 PM	PH3 valve closed
10/22/2011	12:33:41 PM	SiCl4 pre valve closed
10/22/2011	12:33:41 PM	SiCl4 post valve closed
10/22/2011	12:33:41 PM	Bypass valve closed
10/22/2011	12:33:41 PM	Bubbler valve closed
10/22/2011	12:33:41 PM	Helium valve opened
10/22/2011	12:33:41 PM	Main Vac valve opened
10/22/2011	12:33:41 PM	Helium MFC set to  20.000000
10/22/2011	12:33:41 PM	H2 MFC set to  0.000000
10/22/2011	12:33:41 PM	BCl3 MFC set to  0.000000
10/22/2011	12:33:41 PM	PHl3 MFC set to  0.000000
10/22/2011	12:33:41 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:33:41 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:33:41 PM	Tube furnace set to 150
10/22/2011	12:34:11 PM	Helium valve closed
10/22/2011	12:34:11 PM	H2 valve closed
10/22/2011	12:34:11 PM	BCl3 valve closed
10/22/2011	12:34:11 PM	PH3 valve closed
10/22/2011	12:34:11 PM	SiCl4 pre valve closed
10/22/2011	12:34:11 PM	SiCl4 post valve closed
10/22/2011	12:34:11 PM	Bypass valve closed
10/22/2011	12:34:11 PM	Bubbler valve closed
10/22/2011	12:34:11 PM	Main Vac valve opened
10/22/2011	12:34:11 PM	Helium MFC set to  0.000000
10/22/2011	12:34:11 PM	H2 MFC set to  0.000000
10/22/2011	12:34:11 PM	BCl3 MFC set to  0.000000
10/22/2011	12:34:11 PM	PHl3 MFC set to  0.000000
10/22/2011	12:34:11 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:34:11 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:34:11 PM	Tube furnace set to 150
10/22/2011	12:34:41 PM	H2 valve closed
10/22/2011	12:34:41 PM	BCl3 valve closed
10/22/2011	12:34:41 PM	PH3 valve closed
10/22/2011	12:34:41 PM	SiCl4 pre valve closed
10/22/2011	12:34:41 PM	SiCl4 post valve closed
10/22/2011	12:34:41 PM	Bypass valve closed
10/22/2011	12:34:41 PM	Bubbler valve closed
10/22/2011	12:34:41 PM	Helium valve opened
10/22/2011	12:34:41 PM	Main Vac valve opened
10/22/2011	12:34:41 PM	Helium MFC set to  20.000000
10/22/2011	12:34:41 PM	H2 MFC set to  0.000000
10/22/2011	12:34:41 PM	BCl3 MFC set to  0.000000
10/22/2011	12:34:41 PM	PHl3 MFC set to  0.000000
10/22/2011	12:34:41 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:34:41 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:34:41 PM	Tube furnace set to 150
10/22/2011	12:35:11 PM	Helium valve closed
10/22/2011	12:35:11 PM	H2 valve closed
10/22/2011	12:35:11 PM	BCl3 valve closed
10/22/2011	12:35:11 PM	PH3 valve closed
10/22/2011	12:35:11 PM	SiCl4 pre valve closed
10/22/2011	12:35:11 PM	SiCl4 post valve closed
10/22/2011	12:35:11 PM	Bypass valve closed
10/22/2011	12:35:11 PM	Bubbler valve closed
10/22/2011	12:35:11 PM	Main Vac valve opened
10/22/2011	12:35:11 PM	Helium MFC set to  0.000000
10/22/2011	12:35:11 PM	H2 MFC set to  0.000000
10/22/2011	12:35:11 PM	BCl3 MFC set to  0.000000
10/22/2011	12:35:11 PM	PHl3 MFC set to  0.000000
10/22/2011	12:35:11 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:35:11 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:35:11 PM	Tube furnace set to 150
10/22/2011	12:35:41 PM	H2 valve closed
10/22/2011	12:35:41 PM	BCl3 valve closed
10/22/2011	12:35:41 PM	PH3 valve closed
10/22/2011	12:35:41 PM	SiCl4 pre valve closed
10/22/2011	12:35:41 PM	SiCl4 post valve closed
10/22/2011	12:35:41 PM	Bypass valve closed
10/22/2011	12:35:41 PM	Bubbler valve closed
10/22/2011	12:35:41 PM	Helium valve opened
10/22/2011	12:35:41 PM	Main Vac valve opened
10/22/2011	12:35:41 PM	Helium MFC set to  20.000000
10/22/2011	12:35:41 PM	H2 MFC set to  0.000000
10/22/2011	12:35:41 PM	BCl3 MFC set to  0.000000
10/22/2011	12:35:41 PM	PHl3 MFC set to  0.000000
10/22/2011	12:35:41 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:35:41 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:35:42 PM	Tube furnace set to 150
10/22/2011	12:36:12 PM	Helium valve closed
10/22/2011	12:36:12 PM	H2 valve closed
10/22/2011	12:36:12 PM	BCl3 valve closed
10/22/2011	12:36:12 PM	PH3 valve closed
10/22/2011	12:36:12 PM	SiCl4 pre valve closed
10/22/2011	12:36:12 PM	SiCl4 post valve closed
10/22/2011	12:36:12 PM	Bypass valve closed
10/22/2011	12:36:12 PM	Bubbler valve closed
10/22/2011	12:36:12 PM	Main Vac valve opened
10/22/2011	12:36:12 PM	Helium MFC set to  0.000000
10/22/2011	12:36:12 PM	H2 MFC set to  0.000000
10/22/2011	12:36:12 PM	BCl3 MFC set to  0.000000
10/22/2011	12:36:12 PM	PHl3 MFC set to  0.000000
10/22/2011	12:36:12 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:36:12 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:36:12 PM	Tube furnace set to 150
10/22/2011	12:36:42 PM	H2 valve closed
10/22/2011	12:36:42 PM	BCl3 valve closed
10/22/2011	12:36:42 PM	PH3 valve closed
10/22/2011	12:36:42 PM	SiCl4 pre valve closed
10/22/2011	12:36:42 PM	SiCl4 post valve closed
10/22/2011	12:36:42 PM	Bypass valve closed
10/22/2011	12:36:42 PM	Bubbler valve closed
10/22/2011	12:36:42 PM	Helium valve opened
10/22/2011	12:36:42 PM	Main Vac valve opened
10/22/2011	12:36:42 PM	Helium MFC set to  20.000000
10/22/2011	12:36:42 PM	H2 MFC set to  0.000000
10/22/2011	12:36:42 PM	BCl3 MFC set to  0.000000
10/22/2011	12:36:42 PM	PHl3 MFC set to  0.000000
10/22/2011	12:36:42 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:36:42 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:36:42 PM	Tube furnace set to 150
10/22/2011	12:37:12 PM	Helium valve closed
10/22/2011	12:37:12 PM	H2 valve closed
10/22/2011	12:37:12 PM	BCl3 valve closed
10/22/2011	12:37:12 PM	PH3 valve closed
10/22/2011	12:37:12 PM	SiCl4 pre valve closed
10/22/2011	12:37:12 PM	SiCl4 post valve closed
10/22/2011	12:37:12 PM	Bypass valve closed
10/22/2011	12:37:12 PM	Bubbler valve closed
10/22/2011	12:37:12 PM	Main Vac valve opened
10/22/2011	12:37:12 PM	Helium MFC set to  0.000000
10/22/2011	12:37:12 PM	H2 MFC set to  0.000000
10/22/2011	12:37:12 PM	BCl3 MFC set to  0.000000
10/22/2011	12:37:12 PM	PHl3 MFC set to  0.000000
10/22/2011	12:37:12 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:37:12 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:37:12 PM	Tube furnace set to 150
10/22/2011	12:37:42 PM	H2 valve closed
10/22/2011	12:37:42 PM	BCl3 valve closed
10/22/2011	12:37:42 PM	PH3 valve closed
10/22/2011	12:37:42 PM	SiCl4 pre valve closed
10/22/2011	12:37:42 PM	SiCl4 post valve closed
10/22/2011	12:37:42 PM	Bypass valve closed
10/22/2011	12:37:42 PM	Bubbler valve closed
10/22/2011	12:37:42 PM	Helium valve opened
10/22/2011	12:37:42 PM	Main Vac valve opened
10/22/2011	12:37:42 PM	Helium MFC set to  20.000000
10/22/2011	12:37:42 PM	H2 MFC set to  0.000000
10/22/2011	12:37:42 PM	BCl3 MFC set to  0.000000
10/22/2011	12:37:42 PM	PHl3 MFC set to  0.000000
10/22/2011	12:37:42 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:37:42 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:37:42 PM	Tube furnace set to 150
10/22/2011	12:38:12 PM	Helium valve closed
10/22/2011	12:38:12 PM	H2 valve closed
10/22/2011	12:38:12 PM	BCl3 valve closed
10/22/2011	12:38:12 PM	PH3 valve closed
10/22/2011	12:38:12 PM	SiCl4 pre valve closed
10/22/2011	12:38:12 PM	SiCl4 post valve closed
10/22/2011	12:38:12 PM	Bypass valve closed
10/22/2011	12:38:12 PM	Bubbler valve closed
10/22/2011	12:38:12 PM	Main Vac valve opened
10/22/2011	12:38:12 PM	Helium MFC set to  0.000000
10/22/2011	12:38:12 PM	H2 MFC set to  0.000000
10/22/2011	12:38:12 PM	BCl3 MFC set to  0.000000
10/22/2011	12:38:12 PM	PHl3 MFC set to  0.000000
10/22/2011	12:38:12 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:38:12 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:38:13 PM	Tube furnace set to 150
10/22/2011	12:38:43 PM	H2 valve closed
10/22/2011	12:38:43 PM	BCl3 valve closed
10/22/2011	12:38:43 PM	PH3 valve closed
10/22/2011	12:38:43 PM	SiCl4 pre valve closed
10/22/2011	12:38:43 PM	SiCl4 post valve closed
10/22/2011	12:38:43 PM	Bypass valve closed
10/22/2011	12:38:43 PM	Bubbler valve closed
10/22/2011	12:38:43 PM	Helium valve opened
10/22/2011	12:38:43 PM	Main Vac valve opened
10/22/2011	12:38:43 PM	Helium MFC set to  20.000000
10/22/2011	12:38:43 PM	H2 MFC set to  0.000000
10/22/2011	12:38:43 PM	BCl3 MFC set to  0.000000
10/22/2011	12:38:43 PM	PHl3 MFC set to  0.000000
10/22/2011	12:38:43 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:38:43 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:38:43 PM	Tube furnace set to 150
10/22/2011	12:39:13 PM	Helium valve closed
10/22/2011	12:39:13 PM	H2 valve closed
10/22/2011	12:39:13 PM	BCl3 valve closed
10/22/2011	12:39:13 PM	PH3 valve closed
10/22/2011	12:39:13 PM	SiCl4 pre valve closed
10/22/2011	12:39:13 PM	SiCl4 post valve closed
10/22/2011	12:39:13 PM	Bypass valve closed
10/22/2011	12:39:13 PM	Bubbler valve closed
10/22/2011	12:39:13 PM	Main Vac valve opened
10/22/2011	12:39:13 PM	Helium MFC set to  0.000000
10/22/2011	12:39:13 PM	H2 MFC set to  0.000000
10/22/2011	12:39:13 PM	BCl3 MFC set to  0.000000
10/22/2011	12:39:13 PM	PHl3 MFC set to  0.000000
10/22/2011	12:39:13 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:39:13 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:39:13 PM	Tube furnace set to 150
10/22/2011	12:39:43 PM	H2 valve closed
10/22/2011	12:39:43 PM	BCl3 valve closed
10/22/2011	12:39:43 PM	PH3 valve closed
10/22/2011	12:39:43 PM	SiCl4 pre valve closed
10/22/2011	12:39:43 PM	SiCl4 post valve closed
10/22/2011	12:39:43 PM	Bypass valve closed
10/22/2011	12:39:43 PM	Bubbler valve closed
10/22/2011	12:39:43 PM	Helium valve opened
10/22/2011	12:39:43 PM	Main Vac valve opened
10/22/2011	12:39:43 PM	Helium MFC set to  20.000000
10/22/2011	12:39:43 PM	H2 MFC set to  0.000000
10/22/2011	12:39:43 PM	BCl3 MFC set to  0.000000
10/22/2011	12:39:43 PM	PHl3 MFC set to  0.000000
10/22/2011	12:39:43 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:39:43 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:39:43 PM	Tube furnace set to 150
10/22/2011	12:40:13 PM	Helium valve closed
10/22/2011	12:40:13 PM	H2 valve closed
10/22/2011	12:40:13 PM	BCl3 valve closed
10/22/2011	12:40:13 PM	PH3 valve closed
10/22/2011	12:40:13 PM	SiCl4 pre valve closed
10/22/2011	12:40:13 PM	SiCl4 post valve closed
10/22/2011	12:40:13 PM	Bypass valve closed
10/22/2011	12:40:13 PM	Bubbler valve closed
10/22/2011	12:40:13 PM	Main Vac valve opened
10/22/2011	12:40:13 PM	Helium MFC set to  0.000000
10/22/2011	12:40:13 PM	H2 MFC set to  0.000000
10/22/2011	12:40:13 PM	BCl3 MFC set to  0.000000
10/22/2011	12:40:13 PM	PHl3 MFC set to  0.000000
10/22/2011	12:40:13 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:40:13 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:40:13 PM	Tube furnace set to 150
10/22/2011	12:40:43 PM	H2 valve closed
10/22/2011	12:40:43 PM	BCl3 valve closed
10/22/2011	12:40:43 PM	PH3 valve closed
10/22/2011	12:40:43 PM	SiCl4 pre valve closed
10/22/2011	12:40:43 PM	SiCl4 post valve closed
10/22/2011	12:40:43 PM	Bypass valve closed
10/22/2011	12:40:43 PM	Bubbler valve closed
10/22/2011	12:40:43 PM	Helium valve opened
10/22/2011	12:40:43 PM	Main Vac valve opened
10/22/2011	12:40:43 PM	Helium MFC set to  20.000000
10/22/2011	12:40:43 PM	H2 MFC set to  0.000000
10/22/2011	12:40:43 PM	BCl3 MFC set to  0.000000
10/22/2011	12:40:43 PM	PHl3 MFC set to  0.000000
10/22/2011	12:40:43 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:40:44 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:40:44 PM	Tube furnace set to 150
10/22/2011	12:41:10 PM	Run aborted at 12:41 PM
10/22/2011	12:41:10 PM	Helium valve closed
10/22/2011	12:41:10 PM	H2 valve closed
10/22/2011	12:41:10 PM	BCl3 valve closed
10/22/2011	12:41:10 PM	PH3 valve closed
10/22/2011	12:41:10 PM	SiCl4 pre valve closed
10/22/2011	12:41:10 PM	SiCl4 post valve closed
10/22/2011	12:41:10 PM	Bypass valve closed
10/22/2011	12:41:10 PM	Main Vac valve closed
10/22/2011	12:41:10 PM	Bubbler valve closed
10/22/2011	12:41:10 PM	Helium MFC set to  0.000000
10/22/2011	12:41:10 PM	H2 MFC set to  0.000000
10/22/2011	12:41:10 PM	BCl3 MFC set to  0.000000
10/22/2011	12:41:10 PM	PHl3 MFC set to  0.000000
10/22/2011	12:41:10 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:41:10 PM	Tube furnace set to 0
10/22/2011	12:41:11 PM	Main Vac valve opened
10/22/2011	12:41:28 PM	Recipe started at 12:41 PM
10/22/2011	12:41:28 PM	Helium valve closed
10/22/2011	12:41:28 PM	H2 valve closed
10/22/2011	12:41:28 PM	BCl3 valve closed
10/22/2011	12:41:28 PM	PH3 valve closed
10/22/2011	12:41:28 PM	SiCl4 pre valve closed
10/22/2011	12:41:28 PM	SiCl4 post valve closed
10/22/2011	12:41:28 PM	Main Vac valve closed
10/22/2011	12:41:28 PM	Bubbler valve closed
10/22/2011	12:41:28 PM	Bypass valve opened
10/22/2011	12:41:28 PM	Helium MFC set to  0.000000
10/22/2011	12:41:28 PM	H2 MFC set to  0.000000
10/22/2011	12:41:28 PM	BCl3 MFC set to  0.000000
10/22/2011	12:41:28 PM	PHl3 MFC set to  0.000000
10/22/2011	12:41:28 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:41:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:41:28 PM	Tube furnace set to 150
10/22/2011	12:41:29 PM	Helium valve closed
10/22/2011	12:41:29 PM	H2 valve closed
10/22/2011	12:41:29 PM	BCl3 valve closed
10/22/2011	12:41:29 PM	PH3 valve closed
10/22/2011	12:41:29 PM	SiCl4 pre valve closed
10/22/2011	12:41:29 PM	SiCl4 post valve closed
10/22/2011	12:41:29 PM	Main Vac valve closed
10/22/2011	12:41:29 PM	Bubbler valve closed
10/22/2011	12:41:29 PM	Bypass valve opened
10/22/2011	12:41:29 PM	Helium MFC set to  0.000000
10/22/2011	12:41:29 PM	H2 MFC set to  0.000000
10/22/2011	12:41:29 PM	BCl3 MFC set to  0.000000
10/22/2011	12:41:29 PM	PHl3 MFC set to  0.000000
10/22/2011	12:41:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:41:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:41:29 PM	Tube furnace set to 150
10/22/2011	12:41:59 PM	Helium valve closed
10/22/2011	12:41:59 PM	H2 valve closed
10/22/2011	12:41:59 PM	BCl3 valve closed
10/22/2011	12:41:59 PM	PH3 valve closed
10/22/2011	12:41:59 PM	SiCl4 pre valve closed
10/22/2011	12:41:59 PM	SiCl4 post valve closed
10/22/2011	12:41:59 PM	Bypass valve closed
10/22/2011	12:41:59 PM	Bubbler valve closed
10/22/2011	12:41:59 PM	Main Vac valve opened
10/22/2011	12:41:59 PM	Helium MFC set to  0.000000
10/22/2011	12:41:59 PM	H2 MFC set to  0.000000
10/22/2011	12:41:59 PM	BCl3 MFC set to  0.000000
10/22/2011	12:41:59 PM	PHl3 MFC set to  0.000000
10/22/2011	12:41:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:41:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:41:59 PM	Tube furnace set to 150
10/22/2011	12:42:29 PM	H2 valve closed
10/22/2011	12:42:29 PM	BCl3 valve closed
10/22/2011	12:42:29 PM	PH3 valve closed
10/22/2011	12:42:29 PM	SiCl4 pre valve closed
10/22/2011	12:42:29 PM	SiCl4 post valve closed
10/22/2011	12:42:29 PM	Bypass valve closed
10/22/2011	12:42:29 PM	Bubbler valve closed
10/22/2011	12:42:29 PM	Helium valve opened
10/22/2011	12:42:29 PM	Main Vac valve opened
10/22/2011	12:42:29 PM	Helium MFC set to  20.000000
10/22/2011	12:42:29 PM	H2 MFC set to  0.000000
10/22/2011	12:42:29 PM	BCl3 MFC set to  0.000000
10/22/2011	12:42:29 PM	PHl3 MFC set to  0.000000
10/22/2011	12:42:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:42:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:42:29 PM	Tube furnace set to 150
10/22/2011	12:42:59 PM	Helium valve closed
10/22/2011	12:42:59 PM	H2 valve closed
10/22/2011	12:42:59 PM	BCl3 valve closed
10/22/2011	12:42:59 PM	PH3 valve closed
10/22/2011	12:42:59 PM	SiCl4 pre valve closed
10/22/2011	12:42:59 PM	SiCl4 post valve closed
10/22/2011	12:42:59 PM	Bypass valve closed
10/22/2011	12:42:59 PM	Bubbler valve closed
10/22/2011	12:42:59 PM	Main Vac valve opened
10/22/2011	12:42:59 PM	Helium MFC set to  0.000000
10/22/2011	12:42:59 PM	H2 MFC set to  0.000000
10/22/2011	12:42:59 PM	BCl3 MFC set to  0.000000
10/22/2011	12:42:59 PM	PHl3 MFC set to  0.000000
10/22/2011	12:42:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:42:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:42:59 PM	Tube furnace set to 150
10/22/2011	12:43:29 PM	H2 valve closed
10/22/2011	12:43:29 PM	BCl3 valve closed
10/22/2011	12:43:29 PM	PH3 valve closed
10/22/2011	12:43:29 PM	SiCl4 pre valve closed
10/22/2011	12:43:29 PM	SiCl4 post valve closed
10/22/2011	12:43:29 PM	Bypass valve closed
10/22/2011	12:43:29 PM	Bubbler valve closed
10/22/2011	12:43:29 PM	Helium valve opened
10/22/2011	12:43:29 PM	Main Vac valve opened
10/22/2011	12:43:29 PM	Helium MFC set to  20.000000
10/22/2011	12:43:29 PM	H2 MFC set to  0.000000
10/22/2011	12:43:29 PM	BCl3 MFC set to  0.000000
10/22/2011	12:43:29 PM	PHl3 MFC set to  0.000000
10/22/2011	12:43:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:43:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:43:30 PM	Tube furnace set to 150
10/22/2011	12:44:00 PM	Helium valve closed
10/22/2011	12:44:00 PM	H2 valve closed
10/22/2011	12:44:00 PM	BCl3 valve closed
10/22/2011	12:44:00 PM	PH3 valve closed
10/22/2011	12:44:00 PM	SiCl4 pre valve closed
10/22/2011	12:44:00 PM	SiCl4 post valve closed
10/22/2011	12:44:00 PM	Bypass valve closed
10/22/2011	12:44:00 PM	Bubbler valve closed
10/22/2011	12:44:00 PM	Main Vac valve opened
10/22/2011	12:44:00 PM	Helium MFC set to  0.000000
10/22/2011	12:44:00 PM	H2 MFC set to  0.000000
10/22/2011	12:44:00 PM	BCl3 MFC set to  0.000000
10/22/2011	12:44:00 PM	PHl3 MFC set to  0.000000
10/22/2011	12:44:00 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:44:00 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:44:00 PM	Tube furnace set to 150
10/22/2011	12:44:30 PM	H2 valve closed
10/22/2011	12:44:30 PM	BCl3 valve closed
10/22/2011	12:44:30 PM	PH3 valve closed
10/22/2011	12:44:30 PM	SiCl4 pre valve closed
10/22/2011	12:44:30 PM	SiCl4 post valve closed
10/22/2011	12:44:30 PM	Bypass valve closed
10/22/2011	12:44:30 PM	Bubbler valve closed
10/22/2011	12:44:30 PM	Helium valve opened
10/22/2011	12:44:30 PM	Main Vac valve opened
10/22/2011	12:44:30 PM	Helium MFC set to  20.000000
10/22/2011	12:44:30 PM	H2 MFC set to  0.000000
10/22/2011	12:44:30 PM	BCl3 MFC set to  0.000000
10/22/2011	12:44:30 PM	PHl3 MFC set to  0.000000
10/22/2011	12:44:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:44:30 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:44:30 PM	Tube furnace set to 150
10/22/2011	12:45:00 PM	Helium valve closed
10/22/2011	12:45:00 PM	H2 valve closed
10/22/2011	12:45:00 PM	BCl3 valve closed
10/22/2011	12:45:00 PM	PH3 valve closed
10/22/2011	12:45:00 PM	SiCl4 pre valve closed
10/22/2011	12:45:00 PM	SiCl4 post valve closed
10/22/2011	12:45:00 PM	Bypass valve closed
10/22/2011	12:45:00 PM	Bubbler valve closed
10/22/2011	12:45:00 PM	Main Vac valve opened
10/22/2011	12:45:00 PM	Helium MFC set to  0.000000
10/22/2011	12:45:00 PM	H2 MFC set to  0.000000
10/22/2011	12:45:00 PM	BCl3 MFC set to  0.000000
10/22/2011	12:45:00 PM	PHl3 MFC set to  0.000000
10/22/2011	12:45:00 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:45:00 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:45:00 PM	Tube furnace set to 150
10/22/2011	12:45:30 PM	H2 valve closed
10/22/2011	12:45:30 PM	BCl3 valve closed
10/22/2011	12:45:30 PM	PH3 valve closed
10/22/2011	12:45:30 PM	SiCl4 pre valve closed
10/22/2011	12:45:30 PM	SiCl4 post valve closed
10/22/2011	12:45:30 PM	Bypass valve closed
10/22/2011	12:45:30 PM	Bubbler valve closed
10/22/2011	12:45:30 PM	Helium valve opened
10/22/2011	12:45:30 PM	Main Vac valve opened
10/22/2011	12:45:30 PM	Helium MFC set to  20.000000
10/22/2011	12:45:30 PM	H2 MFC set to  0.000000
10/22/2011	12:45:30 PM	BCl3 MFC set to  0.000000
10/22/2011	12:45:30 PM	PHl3 MFC set to  0.000000
10/22/2011	12:45:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:45:30 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:45:30 PM	Tube furnace set to 150
10/22/2011	12:46:00 PM	Helium valve closed
10/22/2011	12:46:00 PM	H2 valve closed
10/22/2011	12:46:00 PM	BCl3 valve closed
10/22/2011	12:46:00 PM	PH3 valve closed
10/22/2011	12:46:00 PM	SiCl4 pre valve closed
10/22/2011	12:46:00 PM	SiCl4 post valve closed
10/22/2011	12:46:01 PM	Bypass valve closed
10/22/2011	12:46:01 PM	Bubbler valve closed
10/22/2011	12:46:01 PM	Main Vac valve opened
10/22/2011	12:46:01 PM	Helium MFC set to  0.000000
10/22/2011	12:46:01 PM	H2 MFC set to  0.000000
10/22/2011	12:46:01 PM	BCl3 MFC set to  0.000000
10/22/2011	12:46:01 PM	PHl3 MFC set to  0.000000
10/22/2011	12:46:01 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:46:01 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:46:01 PM	Tube furnace set to 150
10/22/2011	12:46:31 PM	H2 valve closed
10/22/2011	12:46:31 PM	BCl3 valve closed
10/22/2011	12:46:31 PM	PH3 valve closed
10/22/2011	12:46:31 PM	SiCl4 pre valve closed
10/22/2011	12:46:31 PM	SiCl4 post valve closed
10/22/2011	12:46:31 PM	Bypass valve closed
10/22/2011	12:46:31 PM	Bubbler valve closed
10/22/2011	12:46:31 PM	Helium valve opened
10/22/2011	12:46:31 PM	Main Vac valve opened
10/22/2011	12:46:31 PM	Helium MFC set to  20.000000
10/22/2011	12:46:31 PM	H2 MFC set to  0.000000
10/22/2011	12:46:31 PM	BCl3 MFC set to  0.000000
10/22/2011	12:46:31 PM	PHl3 MFC set to  0.000000
10/22/2011	12:46:31 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:46:31 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:46:31 PM	Tube furnace set to 150
10/22/2011	12:47:01 PM	Helium valve closed
10/22/2011	12:47:01 PM	H2 valve closed
10/22/2011	12:47:01 PM	BCl3 valve closed
10/22/2011	12:47:01 PM	PH3 valve closed
10/22/2011	12:47:01 PM	SiCl4 pre valve closed
10/22/2011	12:47:01 PM	SiCl4 post valve closed
10/22/2011	12:47:01 PM	Bypass valve closed
10/22/2011	12:47:01 PM	Bubbler valve closed
10/22/2011	12:47:01 PM	Main Vac valve opened
10/22/2011	12:47:01 PM	Helium MFC set to  0.000000
10/22/2011	12:47:01 PM	H2 MFC set to  0.000000
10/22/2011	12:47:01 PM	BCl3 MFC set to  0.000000
10/22/2011	12:47:01 PM	PHl3 MFC set to  0.000000
10/22/2011	12:47:01 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:47:01 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:47:01 PM	Tube furnace set to 150
10/22/2011	12:47:31 PM	H2 valve closed
10/22/2011	12:47:31 PM	BCl3 valve closed
10/22/2011	12:47:31 PM	PH3 valve closed
10/22/2011	12:47:31 PM	SiCl4 pre valve closed
10/22/2011	12:47:31 PM	SiCl4 post valve closed
10/22/2011	12:47:31 PM	Bypass valve closed
10/22/2011	12:47:31 PM	Bubbler valve closed
10/22/2011	12:47:31 PM	Helium valve opened
10/22/2011	12:47:31 PM	Main Vac valve opened
10/22/2011	12:47:31 PM	Helium MFC set to  20.000000
10/22/2011	12:47:31 PM	H2 MFC set to  0.000000
10/22/2011	12:47:31 PM	BCl3 MFC set to  0.000000
10/22/2011	12:47:31 PM	PHl3 MFC set to  0.000000
10/22/2011	12:47:31 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:47:31 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:47:31 PM	Tube furnace set to 150
10/22/2011	12:48:01 PM	Helium valve closed
10/22/2011	12:48:01 PM	H2 valve closed
10/22/2011	12:48:01 PM	BCl3 valve closed
10/22/2011	12:48:01 PM	PH3 valve closed
10/22/2011	12:48:01 PM	SiCl4 pre valve closed
10/22/2011	12:48:01 PM	SiCl4 post valve closed
10/22/2011	12:48:01 PM	Bypass valve closed
10/22/2011	12:48:01 PM	Bubbler valve closed
10/22/2011	12:48:01 PM	Main Vac valve opened
10/22/2011	12:48:01 PM	Helium MFC set to  0.000000
10/22/2011	12:48:01 PM	H2 MFC set to  0.000000
10/22/2011	12:48:01 PM	BCl3 MFC set to  0.000000
10/22/2011	12:48:01 PM	PHl3 MFC set to  0.000000
10/22/2011	12:48:01 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:48:01 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:48:02 PM	Tube furnace set to 150
10/22/2011	12:48:32 PM	H2 valve closed
10/22/2011	12:48:32 PM	BCl3 valve closed
10/22/2011	12:48:32 PM	PH3 valve closed
10/22/2011	12:48:32 PM	SiCl4 pre valve closed
10/22/2011	12:48:32 PM	SiCl4 post valve closed
10/22/2011	12:48:32 PM	Bypass valve closed
10/22/2011	12:48:32 PM	Bubbler valve closed
10/22/2011	12:48:32 PM	Helium valve opened
10/22/2011	12:48:32 PM	Main Vac valve opened
10/22/2011	12:48:32 PM	Helium MFC set to  20.000000
10/22/2011	12:48:32 PM	H2 MFC set to  0.000000
10/22/2011	12:48:32 PM	BCl3 MFC set to  0.000000
10/22/2011	12:48:32 PM	PHl3 MFC set to  0.000000
10/22/2011	12:48:32 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:48:32 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:48:32 PM	Tube furnace set to 150
10/22/2011	12:49:02 PM	Helium valve closed
10/22/2011	12:49:02 PM	H2 valve closed
10/22/2011	12:49:02 PM	BCl3 valve closed
10/22/2011	12:49:02 PM	PH3 valve closed
10/22/2011	12:49:02 PM	SiCl4 pre valve closed
10/22/2011	12:49:02 PM	SiCl4 post valve closed
10/22/2011	12:49:02 PM	Bypass valve closed
10/22/2011	12:49:02 PM	Bubbler valve closed
10/22/2011	12:49:02 PM	Main Vac valve opened
10/22/2011	12:49:02 PM	Helium MFC set to  0.000000
10/22/2011	12:49:02 PM	H2 MFC set to  0.000000
10/22/2011	12:49:02 PM	BCl3 MFC set to  0.000000
10/22/2011	12:49:02 PM	PHl3 MFC set to  0.000000
10/22/2011	12:49:02 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:49:02 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:49:02 PM	Tube furnace set to 150
10/22/2011	12:49:32 PM	H2 valve closed
10/22/2011	12:49:32 PM	BCl3 valve closed
10/22/2011	12:49:32 PM	PH3 valve closed
10/22/2011	12:49:32 PM	SiCl4 pre valve closed
10/22/2011	12:49:32 PM	SiCl4 post valve closed
10/22/2011	12:49:32 PM	Bypass valve closed
10/22/2011	12:49:32 PM	Bubbler valve closed
10/22/2011	12:49:32 PM	Helium valve opened
10/22/2011	12:49:32 PM	Main Vac valve opened
10/22/2011	12:49:32 PM	Helium MFC set to  20.000000
10/22/2011	12:49:32 PM	H2 MFC set to  0.000000
10/22/2011	12:49:32 PM	BCl3 MFC set to  0.000000
10/22/2011	12:49:32 PM	PHl3 MFC set to  0.000000
10/22/2011	12:49:32 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:49:32 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:49:32 PM	Tube furnace set to 150
10/22/2011	12:50:02 PM	Helium valve closed
10/22/2011	12:50:02 PM	H2 valve closed
10/22/2011	12:50:02 PM	BCl3 valve closed
10/22/2011	12:50:02 PM	PH3 valve closed
10/22/2011	12:50:02 PM	SiCl4 pre valve closed
10/22/2011	12:50:02 PM	SiCl4 post valve closed
10/22/2011	12:50:02 PM	Bypass valve closed
10/22/2011	12:50:02 PM	Bubbler valve closed
10/22/2011	12:50:02 PM	Main Vac valve opened
10/22/2011	12:50:02 PM	Helium MFC set to  0.000000
10/22/2011	12:50:02 PM	H2 MFC set to  0.000000
10/22/2011	12:50:02 PM	BCl3 MFC set to  0.000000
10/22/2011	12:50:02 PM	PHl3 MFC set to  0.000000
10/22/2011	12:50:02 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:50:02 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:50:02 PM	Tube furnace set to 150
10/22/2011	12:50:32 PM	H2 valve closed
10/22/2011	12:50:32 PM	BCl3 valve closed
10/22/2011	12:50:32 PM	PH3 valve closed
10/22/2011	12:50:32 PM	SiCl4 pre valve closed
10/22/2011	12:50:32 PM	SiCl4 post valve closed
10/22/2011	12:50:32 PM	Bypass valve closed
10/22/2011	12:50:32 PM	Bubbler valve closed
10/22/2011	12:50:32 PM	Helium valve opened
10/22/2011	12:50:32 PM	Main Vac valve opened
10/22/2011	12:50:32 PM	Helium MFC set to  20.000000
10/22/2011	12:50:32 PM	H2 MFC set to  0.000000
10/22/2011	12:50:32 PM	BCl3 MFC set to  0.000000
10/22/2011	12:50:32 PM	PHl3 MFC set to  0.000000
10/22/2011	12:50:32 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:50:32 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:50:33 PM	Tube furnace set to 150
10/22/2011	12:51:03 PM	Helium valve closed
10/22/2011	12:51:03 PM	H2 valve closed
10/22/2011	12:51:03 PM	BCl3 valve closed
10/22/2011	12:51:03 PM	PH3 valve closed
10/22/2011	12:51:03 PM	SiCl4 pre valve closed
10/22/2011	12:51:03 PM	SiCl4 post valve closed
10/22/2011	12:51:03 PM	Bypass valve closed
10/22/2011	12:51:03 PM	Bubbler valve closed
10/22/2011	12:51:03 PM	Main Vac valve opened
10/22/2011	12:51:03 PM	Helium MFC set to  0.000000
10/22/2011	12:51:03 PM	H2 MFC set to  0.000000
10/22/2011	12:51:03 PM	BCl3 MFC set to  0.000000
10/22/2011	12:51:03 PM	PHl3 MFC set to  0.000000
10/22/2011	12:51:03 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:51:03 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:51:03 PM	Tube furnace set to 150
10/22/2011	12:51:33 PM	H2 valve closed
10/22/2011	12:51:33 PM	BCl3 valve closed
10/22/2011	12:51:33 PM	PH3 valve closed
10/22/2011	12:51:33 PM	SiCl4 pre valve closed
10/22/2011	12:51:33 PM	SiCl4 post valve closed
10/22/2011	12:51:33 PM	Bypass valve closed
10/22/2011	12:51:33 PM	Bubbler valve closed
10/22/2011	12:51:33 PM	Helium valve opened
10/22/2011	12:51:33 PM	Main Vac valve opened
10/22/2011	12:51:33 PM	Helium MFC set to  20.000000
10/22/2011	12:51:33 PM	H2 MFC set to  0.000000
10/22/2011	12:51:33 PM	BCl3 MFC set to  0.000000
10/22/2011	12:51:33 PM	PHl3 MFC set to  0.000000
10/22/2011	12:51:33 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:51:33 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:51:33 PM	Tube furnace set to 150
10/22/2011	12:52:03 PM	Helium valve closed
10/22/2011	12:52:03 PM	H2 valve closed
10/22/2011	12:52:03 PM	BCl3 valve closed
10/22/2011	12:52:03 PM	PH3 valve closed
10/22/2011	12:52:03 PM	SiCl4 pre valve closed
10/22/2011	12:52:03 PM	SiCl4 post valve closed
10/22/2011	12:52:03 PM	Bypass valve closed
10/22/2011	12:52:03 PM	Bubbler valve closed
10/22/2011	12:52:03 PM	Main Vac valve opened
10/22/2011	12:52:03 PM	Helium MFC set to  0.000000
10/22/2011	12:52:03 PM	H2 MFC set to  0.000000
10/22/2011	12:52:03 PM	BCl3 MFC set to  0.000000
10/22/2011	12:52:03 PM	PHl3 MFC set to  0.000000
10/22/2011	12:52:03 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:52:03 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:52:03 PM	Tube furnace set to 150
10/22/2011	12:52:33 PM	H2 valve closed
10/22/2011	12:52:33 PM	BCl3 valve closed
10/22/2011	12:52:33 PM	PH3 valve closed
10/22/2011	12:52:33 PM	SiCl4 pre valve closed
10/22/2011	12:52:33 PM	SiCl4 post valve closed
10/22/2011	12:52:33 PM	Bypass valve closed
10/22/2011	12:52:33 PM	Bubbler valve closed
10/22/2011	12:52:33 PM	Helium valve opened
10/22/2011	12:52:33 PM	Main Vac valve opened
10/22/2011	12:52:33 PM	Helium MFC set to  20.000000
10/22/2011	12:52:33 PM	H2 MFC set to  0.000000
10/22/2011	12:52:33 PM	BCl3 MFC set to  0.000000
10/22/2011	12:52:33 PM	PHl3 MFC set to  0.000000
10/22/2011	12:52:33 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:52:33 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:52:33 PM	Tube furnace set to 150
10/22/2011	12:53:04 PM	Helium valve closed
10/22/2011	12:53:04 PM	H2 valve closed
10/22/2011	12:53:04 PM	BCl3 valve closed
10/22/2011	12:53:04 PM	PH3 valve closed
10/22/2011	12:53:04 PM	SiCl4 pre valve closed
10/22/2011	12:53:04 PM	SiCl4 post valve closed
10/22/2011	12:53:04 PM	Bypass valve closed
10/22/2011	12:53:04 PM	Bubbler valve closed
10/22/2011	12:53:04 PM	Main Vac valve opened
10/22/2011	12:53:04 PM	Helium MFC set to  0.000000
10/22/2011	12:53:04 PM	H2 MFC set to  0.000000
10/22/2011	12:53:04 PM	BCl3 MFC set to  0.000000
10/22/2011	12:53:04 PM	PHl3 MFC set to  0.000000
10/22/2011	12:53:04 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:53:04 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:53:04 PM	Tube furnace set to 150
10/22/2011	12:53:34 PM	H2 valve closed
10/22/2011	12:53:34 PM	BCl3 valve closed
10/22/2011	12:53:34 PM	PH3 valve closed
10/22/2011	12:53:34 PM	SiCl4 pre valve closed
10/22/2011	12:53:34 PM	SiCl4 post valve closed
10/22/2011	12:53:34 PM	Bypass valve closed
10/22/2011	12:53:34 PM	Bubbler valve closed
10/22/2011	12:53:34 PM	Helium valve opened
10/22/2011	12:53:34 PM	Main Vac valve opened
10/22/2011	12:53:34 PM	Helium MFC set to  20.000000
10/22/2011	12:53:34 PM	H2 MFC set to  0.000000
10/22/2011	12:53:34 PM	BCl3 MFC set to  0.000000
10/22/2011	12:53:34 PM	PHl3 MFC set to  0.000000
10/22/2011	12:53:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:53:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:53:34 PM	Tube furnace set to 150
10/22/2011	12:54:04 PM	Helium valve closed
10/22/2011	12:54:04 PM	H2 valve closed
10/22/2011	12:54:04 PM	BCl3 valve closed
10/22/2011	12:54:04 PM	PH3 valve closed
10/22/2011	12:54:04 PM	SiCl4 pre valve closed
10/22/2011	12:54:04 PM	SiCl4 post valve closed
10/22/2011	12:54:04 PM	Bypass valve closed
10/22/2011	12:54:04 PM	Bubbler valve closed
10/22/2011	12:54:04 PM	Main Vac valve opened
10/22/2011	12:54:04 PM	Helium MFC set to  0.000000
10/22/2011	12:54:04 PM	H2 MFC set to  0.000000
10/22/2011	12:54:04 PM	BCl3 MFC set to  0.000000
10/22/2011	12:54:04 PM	PHl3 MFC set to  0.000000
10/22/2011	12:54:04 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:54:04 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:54:04 PM	Tube furnace set to 150
10/22/2011	12:54:34 PM	H2 valve closed
10/22/2011	12:54:34 PM	BCl3 valve closed
10/22/2011	12:54:34 PM	PH3 valve closed
10/22/2011	12:54:34 PM	SiCl4 pre valve closed
10/22/2011	12:54:34 PM	SiCl4 post valve closed
10/22/2011	12:54:34 PM	Bypass valve closed
10/22/2011	12:54:34 PM	Bubbler valve closed
10/22/2011	12:54:34 PM	Helium valve opened
10/22/2011	12:54:34 PM	Main Vac valve opened
10/22/2011	12:54:34 PM	Helium MFC set to  20.000000
10/22/2011	12:54:34 PM	H2 MFC set to  0.000000
10/22/2011	12:54:34 PM	BCl3 MFC set to  0.000000
10/22/2011	12:54:34 PM	PHl3 MFC set to  0.000000
10/22/2011	12:54:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:54:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:54:34 PM	Tube furnace set to 150
10/22/2011	12:55:04 PM	Helium valve closed
10/22/2011	12:55:04 PM	H2 valve closed
10/22/2011	12:55:04 PM	BCl3 valve closed
10/22/2011	12:55:04 PM	PH3 valve closed
10/22/2011	12:55:04 PM	SiCl4 pre valve closed
10/22/2011	12:55:04 PM	SiCl4 post valve closed
10/22/2011	12:55:04 PM	Bypass valve closed
10/22/2011	12:55:04 PM	Bubbler valve closed
10/22/2011	12:55:04 PM	Main Vac valve opened
10/22/2011	12:55:04 PM	Helium MFC set to  0.000000
10/22/2011	12:55:04 PM	H2 MFC set to  0.000000
10/22/2011	12:55:04 PM	BCl3 MFC set to  0.000000
10/22/2011	12:55:04 PM	PHl3 MFC set to  0.000000
10/22/2011	12:55:04 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:55:04 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:55:05 PM	Tube furnace set to 150
10/22/2011	12:55:35 PM	H2 valve closed
10/22/2011	12:55:35 PM	BCl3 valve closed
10/22/2011	12:55:35 PM	PH3 valve closed
10/22/2011	12:55:35 PM	SiCl4 pre valve closed
10/22/2011	12:55:35 PM	SiCl4 post valve closed
10/22/2011	12:55:35 PM	Bypass valve closed
10/22/2011	12:55:35 PM	Bubbler valve closed
10/22/2011	12:55:35 PM	Helium valve opened
10/22/2011	12:55:35 PM	Main Vac valve opened
10/22/2011	12:55:35 PM	Helium MFC set to  20.000000
10/22/2011	12:55:35 PM	H2 MFC set to  0.000000
10/22/2011	12:55:35 PM	BCl3 MFC set to  0.000000
10/22/2011	12:55:35 PM	PHl3 MFC set to  0.000000
10/22/2011	12:55:35 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:55:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:55:35 PM	Tube furnace set to 150
10/22/2011	12:56:05 PM	Helium valve closed
10/22/2011	12:56:05 PM	H2 valve closed
10/22/2011	12:56:05 PM	BCl3 valve closed
10/22/2011	12:56:05 PM	PH3 valve closed
10/22/2011	12:56:05 PM	SiCl4 pre valve closed
10/22/2011	12:56:05 PM	SiCl4 post valve closed
10/22/2011	12:56:05 PM	Bypass valve closed
10/22/2011	12:56:05 PM	Bubbler valve closed
10/22/2011	12:56:05 PM	Main Vac valve opened
10/22/2011	12:56:05 PM	Helium MFC set to  0.000000
10/22/2011	12:56:05 PM	H2 MFC set to  0.000000
10/22/2011	12:56:05 PM	BCl3 MFC set to  0.000000
10/22/2011	12:56:05 PM	PHl3 MFC set to  0.000000
10/22/2011	12:56:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:56:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:56:05 PM	Tube furnace set to 150
10/22/2011	12:56:35 PM	H2 valve closed
10/22/2011	12:56:35 PM	BCl3 valve closed
10/22/2011	12:56:35 PM	PH3 valve closed
10/22/2011	12:56:35 PM	SiCl4 pre valve closed
10/22/2011	12:56:35 PM	SiCl4 post valve closed
10/22/2011	12:56:35 PM	Bypass valve closed
10/22/2011	12:56:35 PM	Bubbler valve closed
10/22/2011	12:56:35 PM	Helium valve opened
10/22/2011	12:56:35 PM	Main Vac valve opened
10/22/2011	12:56:35 PM	Helium MFC set to  20.000000
10/22/2011	12:56:35 PM	H2 MFC set to  0.000000
10/22/2011	12:56:35 PM	BCl3 MFC set to  0.000000
10/22/2011	12:56:35 PM	PHl3 MFC set to  0.000000
10/22/2011	12:56:35 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:56:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:56:35 PM	Tube furnace set to 150
10/22/2011	12:57:05 PM	Helium valve closed
10/22/2011	12:57:05 PM	H2 valve closed
10/22/2011	12:57:05 PM	BCl3 valve closed
10/22/2011	12:57:05 PM	PH3 valve closed
10/22/2011	12:57:05 PM	SiCl4 pre valve closed
10/22/2011	12:57:05 PM	SiCl4 post valve closed
10/22/2011	12:57:05 PM	Bypass valve closed
10/22/2011	12:57:05 PM	Bubbler valve closed
10/22/2011	12:57:05 PM	Main Vac valve opened
10/22/2011	12:57:05 PM	Helium MFC set to  0.000000
10/22/2011	12:57:05 PM	H2 MFC set to  0.000000
10/22/2011	12:57:05 PM	BCl3 MFC set to  0.000000
10/22/2011	12:57:05 PM	PHl3 MFC set to  0.000000
10/22/2011	12:57:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:57:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:57:05 PM	Tube furnace set to 150
10/22/2011	12:57:35 PM	H2 valve closed
10/22/2011	12:57:35 PM	BCl3 valve closed
10/22/2011	12:57:35 PM	PH3 valve closed
10/22/2011	12:57:35 PM	SiCl4 pre valve closed
10/22/2011	12:57:35 PM	SiCl4 post valve closed
10/22/2011	12:57:35 PM	Bypass valve closed
10/22/2011	12:57:35 PM	Bubbler valve closed
10/22/2011	12:57:35 PM	Helium valve opened
10/22/2011	12:57:35 PM	Main Vac valve opened
10/22/2011	12:57:35 PM	Helium MFC set to  20.000000
10/22/2011	12:57:35 PM	H2 MFC set to  0.000000
10/22/2011	12:57:35 PM	BCl3 MFC set to  0.000000
10/22/2011	12:57:35 PM	PHl3 MFC set to  0.000000
10/22/2011	12:57:35 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:57:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:57:36 PM	Tube furnace set to 150
10/22/2011	12:58:06 PM	Helium valve closed
10/22/2011	12:58:06 PM	H2 valve closed
10/22/2011	12:58:06 PM	BCl3 valve closed
10/22/2011	12:58:06 PM	PH3 valve closed
10/22/2011	12:58:06 PM	SiCl4 pre valve closed
10/22/2011	12:58:06 PM	SiCl4 post valve closed
10/22/2011	12:58:06 PM	Bypass valve closed
10/22/2011	12:58:06 PM	Bubbler valve closed
10/22/2011	12:58:06 PM	Main Vac valve opened
10/22/2011	12:58:06 PM	Helium MFC set to  0.000000
10/22/2011	12:58:06 PM	H2 MFC set to  0.000000
10/22/2011	12:58:06 PM	BCl3 MFC set to  0.000000
10/22/2011	12:58:06 PM	PHl3 MFC set to  0.000000
10/22/2011	12:58:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:58:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:58:06 PM	Tube furnace set to 150
10/22/2011	12:58:36 PM	H2 valve closed
10/22/2011	12:58:36 PM	BCl3 valve closed
10/22/2011	12:58:36 PM	PH3 valve closed
10/22/2011	12:58:36 PM	SiCl4 pre valve closed
10/22/2011	12:58:36 PM	SiCl4 post valve closed
10/22/2011	12:58:36 PM	Bypass valve closed
10/22/2011	12:58:36 PM	Bubbler valve closed
10/22/2011	12:58:36 PM	Helium valve opened
10/22/2011	12:58:36 PM	Main Vac valve opened
10/22/2011	12:58:36 PM	Helium MFC set to  20.000000
10/22/2011	12:58:36 PM	H2 MFC set to  0.000000
10/22/2011	12:58:36 PM	BCl3 MFC set to  0.000000
10/22/2011	12:58:36 PM	PHl3 MFC set to  0.000000
10/22/2011	12:58:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:58:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:58:36 PM	Tube furnace set to 150
10/22/2011	12:59:06 PM	Helium valve closed
10/22/2011	12:59:06 PM	H2 valve closed
10/22/2011	12:59:06 PM	BCl3 valve closed
10/22/2011	12:59:06 PM	PH3 valve closed
10/22/2011	12:59:06 PM	SiCl4 pre valve closed
10/22/2011	12:59:06 PM	SiCl4 post valve closed
10/22/2011	12:59:06 PM	Bypass valve closed
10/22/2011	12:59:06 PM	Bubbler valve closed
10/22/2011	12:59:06 PM	Main Vac valve opened
10/22/2011	12:59:06 PM	Helium MFC set to  0.000000
10/22/2011	12:59:06 PM	H2 MFC set to  0.000000
10/22/2011	12:59:06 PM	BCl3 MFC set to  0.000000
10/22/2011	12:59:06 PM	PHl3 MFC set to  0.000000
10/22/2011	12:59:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:59:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:59:06 PM	Tube furnace set to 150
10/22/2011	12:59:36 PM	H2 valve closed
10/22/2011	12:59:36 PM	BCl3 valve closed
10/22/2011	12:59:36 PM	PH3 valve closed
10/22/2011	12:59:36 PM	SiCl4 pre valve closed
10/22/2011	12:59:36 PM	SiCl4 post valve closed
10/22/2011	12:59:36 PM	Bypass valve closed
10/22/2011	12:59:36 PM	Bubbler valve closed
10/22/2011	12:59:36 PM	Helium valve opened
10/22/2011	12:59:36 PM	Main Vac valve opened
10/22/2011	12:59:36 PM	Helium MFC set to  20.000000
10/22/2011	12:59:36 PM	H2 MFC set to  0.000000
10/22/2011	12:59:36 PM	BCl3 MFC set to  0.000000
10/22/2011	12:59:36 PM	PHl3 MFC set to  0.000000
10/22/2011	12:59:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	12:59:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	12:59:37 PM	Tube furnace set to 150
10/22/2011	1:00:07 PM	Helium valve closed
10/22/2011	1:00:07 PM	H2 valve closed
10/22/2011	1:00:07 PM	BCl3 valve closed
10/22/2011	1:00:07 PM	PH3 valve closed
10/22/2011	1:00:07 PM	SiCl4 pre valve closed
10/22/2011	1:00:07 PM	SiCl4 post valve closed
10/22/2011	1:00:07 PM	Bypass valve closed
10/22/2011	1:00:07 PM	Bubbler valve closed
10/22/2011	1:00:07 PM	Main Vac valve opened
10/22/2011	1:00:07 PM	Helium MFC set to  0.000000
10/22/2011	1:00:07 PM	H2 MFC set to  0.000000
10/22/2011	1:00:07 PM	BCl3 MFC set to  0.000000
10/22/2011	1:00:07 PM	PHl3 MFC set to  0.000000
10/22/2011	1:00:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:00:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:00:07 PM	Tube furnace set to 150
10/22/2011	1:00:37 PM	H2 valve closed
10/22/2011	1:00:37 PM	BCl3 valve closed
10/22/2011	1:00:37 PM	PH3 valve closed
10/22/2011	1:00:37 PM	SiCl4 pre valve closed
10/22/2011	1:00:37 PM	SiCl4 post valve closed
10/22/2011	1:00:37 PM	Bypass valve closed
10/22/2011	1:00:37 PM	Bubbler valve closed
10/22/2011	1:00:37 PM	Helium valve opened
10/22/2011	1:00:37 PM	Main Vac valve opened
10/22/2011	1:00:37 PM	Helium MFC set to  20.000000
10/22/2011	1:00:37 PM	H2 MFC set to  0.000000
10/22/2011	1:00:37 PM	BCl3 MFC set to  0.000000
10/22/2011	1:00:37 PM	PHl3 MFC set to  0.000000
10/22/2011	1:00:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:00:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:00:37 PM	Tube furnace set to 150
10/22/2011	1:01:07 PM	Helium valve closed
10/22/2011	1:01:07 PM	H2 valve closed
10/22/2011	1:01:07 PM	BCl3 valve closed
10/22/2011	1:01:07 PM	PH3 valve closed
10/22/2011	1:01:07 PM	SiCl4 pre valve closed
10/22/2011	1:01:07 PM	SiCl4 post valve closed
10/22/2011	1:01:07 PM	Bypass valve closed
10/22/2011	1:01:07 PM	Bubbler valve closed
10/22/2011	1:01:07 PM	Main Vac valve opened
10/22/2011	1:01:07 PM	Helium MFC set to  0.000000
10/22/2011	1:01:07 PM	H2 MFC set to  0.000000
10/22/2011	1:01:07 PM	BCl3 MFC set to  0.000000
10/22/2011	1:01:07 PM	PHl3 MFC set to  0.000000
10/22/2011	1:01:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:01:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:01:07 PM	Tube furnace set to 150
10/22/2011	1:01:37 PM	H2 valve closed
10/22/2011	1:01:37 PM	BCl3 valve closed
10/22/2011	1:01:37 PM	PH3 valve closed
10/22/2011	1:01:37 PM	SiCl4 pre valve closed
10/22/2011	1:01:37 PM	SiCl4 post valve closed
10/22/2011	1:01:37 PM	Bypass valve closed
10/22/2011	1:01:37 PM	Bubbler valve closed
10/22/2011	1:01:37 PM	Helium valve opened
10/22/2011	1:01:37 PM	Main Vac valve opened
10/22/2011	1:01:37 PM	Helium MFC set to  20.000000
10/22/2011	1:01:37 PM	H2 MFC set to  0.000000
10/22/2011	1:01:37 PM	BCl3 MFC set to  0.000000
10/22/2011	1:01:37 PM	PHl3 MFC set to  0.000000
10/22/2011	1:01:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:01:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:01:37 PM	Tube furnace set to 150
10/22/2011	1:02:07 PM	Helium valve closed
10/22/2011	1:02:07 PM	H2 valve closed
10/22/2011	1:02:07 PM	BCl3 valve closed
10/22/2011	1:02:07 PM	PH3 valve closed
10/22/2011	1:02:07 PM	SiCl4 pre valve closed
10/22/2011	1:02:07 PM	SiCl4 post valve closed
10/22/2011	1:02:07 PM	Bypass valve closed
10/22/2011	1:02:07 PM	Bubbler valve closed
10/22/2011	1:02:07 PM	Main Vac valve opened
10/22/2011	1:02:07 PM	Helium MFC set to  0.000000
10/22/2011	1:02:07 PM	H2 MFC set to  0.000000
10/22/2011	1:02:07 PM	BCl3 MFC set to  0.000000
10/22/2011	1:02:07 PM	PHl3 MFC set to  0.000000
10/22/2011	1:02:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:02:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:02:08 PM	Tube furnace set to 180
10/22/2011	1:02:13 PM	Run finished at 1:02 PM
10/22/2011	1:31:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/22/2011	1:31:20 PM	Recipe started at 1:31 PM
10/22/2011	1:31:20 PM	Helium valve closed
10/22/2011	1:31:20 PM	H2 valve closed
10/22/2011	1:31:20 PM	BCl3 valve closed
10/22/2011	1:31:20 PM	PH3 valve closed
10/22/2011	1:31:20 PM	SiCl4 pre valve closed
10/22/2011	1:31:20 PM	SiCl4 post valve closed
10/22/2011	1:31:20 PM	Main Vac valve closed
10/22/2011	1:31:20 PM	Bubbler valve closed
10/22/2011	1:31:20 PM	Bypass valve opened
10/22/2011	1:31:20 PM	Helium MFC set to  0.000000
10/22/2011	1:31:20 PM	H2 MFC set to  0.000000
10/22/2011	1:31:20 PM	BCl3 MFC set to  0.000000
10/22/2011	1:31:20 PM	PHl3 MFC set to  0.000000
10/22/2011	1:31:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:31:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:31:20 PM	Tube furnace set to 0
10/22/2011	1:31:20 PM	Helium valve closed
10/22/2011	1:31:20 PM	H2 valve closed
10/22/2011	1:31:20 PM	BCl3 valve closed
10/22/2011	1:31:20 PM	PH3 valve closed
10/22/2011	1:31:20 PM	SiCl4 pre valve closed
10/22/2011	1:31:20 PM	SiCl4 post valve closed
10/22/2011	1:31:20 PM	Main Vac valve closed
10/22/2011	1:31:20 PM	Bubbler valve closed
10/22/2011	1:31:20 PM	Bypass valve opened
10/22/2011	1:31:20 PM	Helium MFC set to  0.000000
10/22/2011	1:31:20 PM	H2 MFC set to  0.000000
10/22/2011	1:31:20 PM	BCl3 MFC set to  0.000000
10/22/2011	1:31:20 PM	PHl3 MFC set to  0.000000
10/22/2011	1:31:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:31:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:31:20 PM	Tube furnace set to 0
10/22/2011	1:31:45 PM	Run aborted at 1:31 PM
10/22/2011	1:31:45 PM	Helium valve closed
10/22/2011	1:31:45 PM	H2 valve closed
10/22/2011	1:31:45 PM	BCl3 valve closed
10/22/2011	1:31:45 PM	PH3 valve closed
10/22/2011	1:31:45 PM	SiCl4 pre valve closed
10/22/2011	1:31:45 PM	SiCl4 post valve closed
10/22/2011	1:31:45 PM	Bypass valve closed
10/22/2011	1:31:45 PM	Main Vac valve closed
10/22/2011	1:31:45 PM	Bubbler valve closed
10/22/2011	1:31:45 PM	Helium MFC set to  0.000000
10/22/2011	1:31:45 PM	H2 MFC set to  0.000000
10/22/2011	1:31:45 PM	BCl3 MFC set to  0.000000
10/22/2011	1:31:45 PM	PHl3 MFC set to  0.000000
10/22/2011	1:31:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:31:45 PM	Tube furnace set to 0
10/22/2011	1:31:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/22/2011	1:31:47 PM	Bypass valve opened
10/22/2011	1:31:56 PM	Bypass valve closed
10/22/2011	1:31:57 PM	Main Vac valve opened
10/22/2011	1:33:12 PM	Main Vac valve closed
10/22/2011	1:33:17 PM	Main Vac valve opened
10/22/2011	1:33:49 PM	Recipe started at 1:33 PM
10/22/2011	1:33:49 PM	Helium valve closed
10/22/2011	1:33:49 PM	H2 valve closed
10/22/2011	1:33:49 PM	BCl3 valve closed
10/22/2011	1:33:49 PM	PH3 valve closed
10/22/2011	1:33:49 PM	SiCl4 pre valve closed
10/22/2011	1:33:49 PM	SiCl4 post valve closed
10/22/2011	1:33:49 PM	Main Vac valve closed
10/22/2011	1:33:49 PM	Bypass valve closed
10/22/2011	1:33:49 PM	Bubbler valve closed
10/22/2011	1:33:49 PM	Helium MFC set to  0.000000
10/22/2011	1:33:49 PM	H2 MFC set to  0.000000
10/22/2011	1:33:49 PM	BCl3 MFC set to  0.000000
10/22/2011	1:33:49 PM	PHl3 MFC set to  0.000000
10/22/2011	1:33:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:33:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:33:49 PM	Tube furnace set to 0
10/22/2011	1:33:52 PM	Helium valve closed
10/22/2011	1:33:52 PM	BCl3 valve closed
10/22/2011	1:33:52 PM	PH3 valve closed
10/22/2011	1:33:52 PM	SiCl4 pre valve closed
10/22/2011	1:33:52 PM	SiCl4 post valve closed
10/22/2011	1:33:52 PM	Main Vac valve closed
10/22/2011	1:33:52 PM	Bypass valve closed
10/22/2011	1:33:52 PM	Bubbler valve closed
10/22/2011	1:33:52 PM	H2 valve opened
10/22/2011	1:33:52 PM	Helium MFC set to  0.000000
10/22/2011	1:33:52 PM	H2 MFC set to  500.000000
10/22/2011	1:33:52 PM	BCl3 MFC set to  0.000000
10/22/2011	1:33:52 PM	PHl3 MFC set to  0.000000
10/22/2011	1:33:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:33:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:33:52 PM	Tube furnace set to 0
10/22/2011	1:34:56 PM	Helium valve closed
10/22/2011	1:34:56 PM	BCl3 valve closed
10/22/2011	1:34:56 PM	PH3 valve closed
10/22/2011	1:34:56 PM	SiCl4 pre valve closed
10/22/2011	1:34:56 PM	SiCl4 post valve closed
10/22/2011	1:34:56 PM	Main Vac valve closed
10/22/2011	1:34:56 PM	Bypass valve closed
10/22/2011	1:34:56 PM	H2 valve opened
10/22/2011	1:34:56 PM	Bubbler valve opened
10/22/2011	1:34:56 PM	Helium MFC set to  0.000000
10/22/2011	1:34:56 PM	H2 MFC set to  500.000000
10/22/2011	1:34:56 PM	BCl3 MFC set to  0.000000
10/22/2011	1:34:56 PM	PHl3 MFC set to  0.000000
10/22/2011	1:34:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:34:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:34:57 PM	Tube furnace set to 0
10/22/2011	1:34:58 PM	Helium valve closed
10/22/2011	1:34:58 PM	BCl3 valve closed
10/22/2011	1:34:58 PM	PH3 valve closed
10/22/2011	1:34:58 PM	SiCl4 pre valve closed
10/22/2011	1:34:58 PM	SiCl4 post valve closed
10/22/2011	1:34:58 PM	Main Vac valve closed
10/22/2011	1:34:58 PM	Bypass valve closed
10/22/2011	1:34:58 PM	H2 valve opened
10/22/2011	1:34:58 PM	Bubbler valve opened
10/22/2011	1:34:58 PM	Helium MFC set to  0.000000
10/22/2011	1:34:58 PM	H2 MFC set to  500.000000
10/22/2011	1:34:58 PM	BCl3 MFC set to  0.000000
10/22/2011	1:34:58 PM	PHl3 MFC set to  0.000000
10/22/2011	1:34:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	1:34:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:34:58 PM	Tube furnace set to 1040
10/22/2011	1:54:58 PM	Helium valve closed
10/22/2011	1:54:58 PM	BCl3 valve closed
10/22/2011	1:54:58 PM	PH3 valve closed
10/22/2011	1:54:58 PM	Main Vac valve closed
10/22/2011	1:54:58 PM	Bypass valve closed
10/22/2011	1:54:58 PM	H2 valve opened
10/22/2011	1:54:58 PM	SiCl4 pre valve opened
10/22/2011	1:54:58 PM	SiCl4 post valve opened
10/22/2011	1:54:58 PM	Bubbler valve opened
10/22/2011	1:54:58 PM	Helium MFC set to  0.000000
10/22/2011	1:54:58 PM	H2 MFC set to  500.000000
10/22/2011	1:54:58 PM	BCl3 MFC set to  0.000000
10/22/2011	1:54:58 PM	PHl3 MFC set to  0.000000
10/22/2011	1:54:58 PM	SiCl4 MFC set to  48.000000
10/22/2011	1:54:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	1:54:58 PM	Tube furnace set to 1040
10/22/2011	2:04:58 PM	Helium valve closed
10/22/2011	2:04:58 PM	BCl3 valve closed
10/22/2011	2:04:58 PM	PH3 valve closed
10/22/2011	2:04:58 PM	SiCl4 pre valve closed
10/22/2011	2:04:58 PM	SiCl4 post valve closed
10/22/2011	2:04:58 PM	Main Vac valve closed
10/22/2011	2:04:58 PM	Bypass valve closed
10/22/2011	2:04:58 PM	H2 valve opened
10/22/2011	2:04:58 PM	Bubbler valve opened
10/22/2011	2:04:58 PM	Helium MFC set to  0.000000
10/22/2011	2:04:58 PM	H2 MFC set to  500.000000
10/22/2011	2:04:58 PM	BCl3 MFC set to  0.000000
10/22/2011	2:04:58 PM	PHl3 MFC set to  0.000000
10/22/2011	2:04:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:04:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:04:58 PM	Tube furnace set to 750
10/22/2011	2:09:58 PM	H2 valve closed
10/22/2011	2:09:58 PM	BCl3 valve closed
10/22/2011	2:09:58 PM	PH3 valve closed
10/22/2011	2:09:58 PM	SiCl4 pre valve closed
10/22/2011	2:09:58 PM	SiCl4 post valve closed
10/22/2011	2:09:58 PM	Main Vac valve closed
10/22/2011	2:09:58 PM	Bypass valve closed
10/22/2011	2:09:58 PM	Helium valve opened
10/22/2011	2:09:58 PM	Bubbler valve opened
10/22/2011	2:09:58 PM	Helium MFC set to  500.000000
10/22/2011	2:09:58 PM	H2 MFC set to  0.000000
10/22/2011	2:09:58 PM	BCl3 MFC set to  0.000000
10/22/2011	2:09:58 PM	PHl3 MFC set to  0.000000
10/22/2011	2:09:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:09:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:09:58 PM	Tube furnace set to 0
10/22/2011	2:19:10 PM	Run aborted at 2:19 PM
10/22/2011	2:19:10 PM	Helium valve closed
10/22/2011	2:19:10 PM	H2 valve closed
10/22/2011	2:19:10 PM	BCl3 valve closed
10/22/2011	2:19:10 PM	PH3 valve closed
10/22/2011	2:19:10 PM	SiCl4 pre valve closed
10/22/2011	2:19:10 PM	SiCl4 post valve closed
10/22/2011	2:19:10 PM	Bypass valve closed
10/22/2011	2:19:10 PM	Main Vac valve closed
10/22/2011	2:19:10 PM	Bubbler valve closed
10/22/2011	2:19:10 PM	Helium MFC set to  0.000000
10/22/2011	2:19:10 PM	H2 MFC set to  0.000000
10/22/2011	2:19:10 PM	BCl3 MFC set to  0.000000
10/22/2011	2:19:10 PM	PHl3 MFC set to  0.000000
10/22/2011	2:19:10 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:19:10 PM	Tube furnace set to 0
10/22/2011	2:19:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	2:19:14 PM	Recipe started at 2:19 PM
10/22/2011	2:19:14 PM	Helium valve closed
10/22/2011	2:19:14 PM	H2 valve closed
10/22/2011	2:19:14 PM	BCl3 valve closed
10/22/2011	2:19:14 PM	PH3 valve closed
10/22/2011	2:19:14 PM	SiCl4 pre valve closed
10/22/2011	2:19:14 PM	SiCl4 post valve closed
10/22/2011	2:19:14 PM	Main Vac valve closed
10/22/2011	2:19:14 PM	Bypass valve closed
10/22/2011	2:19:14 PM	Bubbler valve closed
10/22/2011	2:19:14 PM	Helium MFC set to  0.000000
10/22/2011	2:19:14 PM	H2 MFC set to  0.000000
10/22/2011	2:19:14 PM	BCl3 MFC set to  0.000000
10/22/2011	2:19:14 PM	PHl3 MFC set to  0.000000
10/22/2011	2:19:14 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:19:14 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:19:14 PM	Tube furnace set to 0
10/22/2011	2:19:17 PM	H2 valve closed
10/22/2011	2:19:17 PM	BCl3 valve closed
10/22/2011	2:19:17 PM	PH3 valve closed
10/22/2011	2:19:17 PM	SiCl4 pre valve closed
10/22/2011	2:19:17 PM	SiCl4 post valve closed
10/22/2011	2:19:17 PM	Main Vac valve closed
10/22/2011	2:19:17 PM	Bypass valve closed
10/22/2011	2:19:17 PM	Bubbler valve closed
10/22/2011	2:19:17 PM	Helium valve opened
10/22/2011	2:19:17 PM	Helium MFC set to  500.000000
10/22/2011	2:19:17 PM	H2 MFC set to  0.000000
10/22/2011	2:19:17 PM	BCl3 MFC set to  0.000000
10/22/2011	2:19:17 PM	PHl3 MFC set to  0.000000
10/22/2011	2:19:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:19:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:19:17 PM	Tube furnace set to 0
10/22/2011	2:19:17 PM	Helium valve closed
10/22/2011	2:19:17 PM	H2 valve closed
10/22/2011	2:19:18 PM	BCl3 valve closed
10/22/2011	2:19:18 PM	PH3 valve closed
10/22/2011	2:19:18 PM	SiCl4 pre valve closed
10/22/2011	2:19:18 PM	SiCl4 post valve closed
10/22/2011	2:19:18 PM	Main Vac valve closed
10/22/2011	2:19:18 PM	Bypass valve closed
10/22/2011	2:19:18 PM	Bubbler valve closed
10/22/2011	2:19:18 PM	Helium MFC set to  0.000000
10/22/2011	2:19:18 PM	H2 MFC set to  0.000000
10/22/2011	2:19:18 PM	BCl3 MFC set to  0.000000
10/22/2011	2:19:18 PM	PHl3 MFC set to  0.000000
10/22/2011	2:19:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:19:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:19:18 PM	Tube furnace set to 0
10/22/2011	2:19:19 PM	Run finished at 2:19 PM
10/22/2011	2:19:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	2:24:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	2:24:41 PM	Recipe started at 2:24 PM
10/22/2011	2:24:41 PM	Helium valve closed
10/22/2011	2:24:41 PM	H2 valve closed
10/22/2011	2:24:41 PM	BCl3 valve closed
10/22/2011	2:24:41 PM	PH3 valve closed
10/22/2011	2:24:41 PM	SiCl4 pre valve closed
10/22/2011	2:24:41 PM	SiCl4 post valve closed
10/22/2011	2:24:41 PM	Main Vac valve closed
10/22/2011	2:24:41 PM	Bubbler valve closed
10/22/2011	2:24:41 PM	Bypass valve opened
10/22/2011	2:24:41 PM	Helium MFC set to  0.000000
10/22/2011	2:24:41 PM	H2 MFC set to  0.000000
10/22/2011	2:24:41 PM	BCl3 MFC set to  0.000000
10/22/2011	2:24:41 PM	PHl3 MFC set to  0.000000
10/22/2011	2:24:41 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:24:41 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:24:41 PM	Tube furnace set to 0
10/22/2011	2:25:42 PM	Helium valve closed
10/22/2011	2:25:42 PM	H2 valve closed
10/22/2011	2:25:42 PM	BCl3 valve closed
10/22/2011	2:25:42 PM	PH3 valve closed
10/22/2011	2:25:42 PM	SiCl4 pre valve closed
10/22/2011	2:25:42 PM	SiCl4 post valve closed
10/22/2011	2:25:42 PM	Main Vac valve closed
10/22/2011	2:25:42 PM	Bubbler valve closed
10/22/2011	2:25:42 PM	Bypass valve opened
10/22/2011	2:25:42 PM	Helium MFC set to  0.000000
10/22/2011	2:25:42 PM	H2 MFC set to  0.000000
10/22/2011	2:25:42 PM	BCl3 MFC set to  0.000000
10/22/2011	2:25:42 PM	PHl3 MFC set to  0.000000
10/22/2011	2:25:42 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:25:42 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:25:42 PM	Tube furnace set to 0
10/22/2011	2:26:33 PM	Helium valve closed
10/22/2011	2:26:33 PM	H2 valve closed
10/22/2011	2:26:33 PM	BCl3 valve closed
10/22/2011	2:26:33 PM	PH3 valve closed
10/22/2011	2:26:34 PM	SiCl4 pre valve closed
10/22/2011	2:26:34 PM	SiCl4 post valve closed
10/22/2011	2:26:34 PM	Bypass valve closed
10/22/2011	2:26:34 PM	Bubbler valve closed
10/22/2011	2:26:34 PM	Main Vac valve opened
10/22/2011	2:26:34 PM	Helium MFC set to  0.000000
10/22/2011	2:26:34 PM	H2 MFC set to  0.000000
10/22/2011	2:26:34 PM	BCl3 MFC set to  0.000000
10/22/2011	2:26:34 PM	PHl3 MFC set to  0.000000
10/22/2011	2:26:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:26:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:26:34 PM	Tube furnace set to 0
10/22/2011	2:26:35 PM	Run finished at 2:26 PM
10/22/2011	2:26:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	2:27:15 PM	Recipe started at 2:26 PM
10/22/2011	2:27:15 PM	Helium valve closed
10/22/2011	2:27:15 PM	H2 valve closed
10/22/2011	2:27:15 PM	BCl3 valve closed
10/22/2011	2:27:15 PM	PH3 valve closed
10/22/2011	2:27:15 PM	SiCl4 pre valve closed
10/22/2011	2:27:15 PM	SiCl4 post valve closed
10/22/2011	2:27:15 PM	Main Vac valve closed
10/22/2011	2:27:15 PM	Bubbler valve closed
10/22/2011	2:27:15 PM	Bypass valve opened
10/22/2011	2:27:15 PM	Helium MFC set to  0.000000
10/22/2011	2:27:15 PM	H2 MFC set to  0.000000
10/22/2011	2:27:15 PM	BCl3 MFC set to  0.000000
10/22/2011	2:27:15 PM	PHl3 MFC set to  0.000000
10/22/2011	2:27:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:27:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:27:15 PM	Tube furnace set to 150
10/22/2011	2:27:15 PM	Helium valve closed
10/22/2011	2:27:15 PM	H2 valve closed
10/22/2011	2:27:15 PM	BCl3 valve closed
10/22/2011	2:27:15 PM	PH3 valve closed
10/22/2011	2:27:15 PM	SiCl4 pre valve closed
10/22/2011	2:27:15 PM	SiCl4 post valve closed
10/22/2011	2:27:15 PM	Main Vac valve closed
10/22/2011	2:27:15 PM	Bubbler valve closed
10/22/2011	2:27:15 PM	Bypass valve opened
10/22/2011	2:27:15 PM	Helium MFC set to  0.000000
10/22/2011	2:27:15 PM	H2 MFC set to  0.000000
10/22/2011	2:27:15 PM	BCl3 MFC set to  0.000000
10/22/2011	2:27:15 PM	PHl3 MFC set to  0.000000
10/22/2011	2:27:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:27:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:27:16 PM	Tube furnace set to 150
10/22/2011	2:27:46 PM	Helium valve closed
10/22/2011	2:27:46 PM	H2 valve closed
10/22/2011	2:27:46 PM	BCl3 valve closed
10/22/2011	2:27:46 PM	PH3 valve closed
10/22/2011	2:27:46 PM	SiCl4 pre valve closed
10/22/2011	2:27:46 PM	SiCl4 post valve closed
10/22/2011	2:27:46 PM	Bypass valve closed
10/22/2011	2:27:46 PM	Bubbler valve closed
10/22/2011	2:27:46 PM	Main Vac valve opened
10/22/2011	2:27:46 PM	Helium MFC set to  0.000000
10/22/2011	2:27:46 PM	H2 MFC set to  0.000000
10/22/2011	2:27:46 PM	BCl3 MFC set to  0.000000
10/22/2011	2:27:46 PM	PHl3 MFC set to  0.000000
10/22/2011	2:27:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:27:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:27:46 PM	Tube furnace set to 150
10/22/2011	2:28:16 PM	H2 valve closed
10/22/2011	2:28:16 PM	BCl3 valve closed
10/22/2011	2:28:16 PM	PH3 valve closed
10/22/2011	2:28:16 PM	SiCl4 pre valve closed
10/22/2011	2:28:16 PM	SiCl4 post valve closed
10/22/2011	2:28:16 PM	Bypass valve closed
10/22/2011	2:28:16 PM	Bubbler valve closed
10/22/2011	2:28:16 PM	Helium valve opened
10/22/2011	2:28:16 PM	Main Vac valve opened
10/22/2011	2:28:16 PM	Helium MFC set to  20.000000
10/22/2011	2:28:16 PM	H2 MFC set to  0.000000
10/22/2011	2:28:16 PM	BCl3 MFC set to  0.000000
10/22/2011	2:28:16 PM	PHl3 MFC set to  0.000000
10/22/2011	2:28:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:28:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:28:16 PM	Tube furnace set to 150
10/22/2011	2:28:46 PM	Helium valve closed
10/22/2011	2:28:46 PM	H2 valve closed
10/22/2011	2:28:46 PM	BCl3 valve closed
10/22/2011	2:28:46 PM	PH3 valve closed
10/22/2011	2:28:46 PM	SiCl4 pre valve closed
10/22/2011	2:28:46 PM	SiCl4 post valve closed
10/22/2011	2:28:46 PM	Bypass valve closed
10/22/2011	2:28:46 PM	Bubbler valve closed
10/22/2011	2:28:46 PM	Main Vac valve opened
10/22/2011	2:28:46 PM	Helium MFC set to  0.000000
10/22/2011	2:28:46 PM	H2 MFC set to  0.000000
10/22/2011	2:28:46 PM	BCl3 MFC set to  0.000000
10/22/2011	2:28:46 PM	PHl3 MFC set to  0.000000
10/22/2011	2:28:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:28:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:28:46 PM	Tube furnace set to 150
10/22/2011	2:29:16 PM	H2 valve closed
10/22/2011	2:29:16 PM	BCl3 valve closed
10/22/2011	2:29:16 PM	PH3 valve closed
10/22/2011	2:29:16 PM	SiCl4 pre valve closed
10/22/2011	2:29:16 PM	SiCl4 post valve closed
10/22/2011	2:29:16 PM	Bypass valve closed
10/22/2011	2:29:16 PM	Bubbler valve closed
10/22/2011	2:29:16 PM	Helium valve opened
10/22/2011	2:29:16 PM	Main Vac valve opened
10/22/2011	2:29:16 PM	Helium MFC set to  20.000000
10/22/2011	2:29:16 PM	H2 MFC set to  0.000000
10/22/2011	2:29:16 PM	BCl3 MFC set to  0.000000
10/22/2011	2:29:16 PM	PHl3 MFC set to  0.000000
10/22/2011	2:29:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:29:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:29:16 PM	Tube furnace set to 150
10/22/2011	2:29:46 PM	Helium valve closed
10/22/2011	2:29:46 PM	H2 valve closed
10/22/2011	2:29:46 PM	BCl3 valve closed
10/22/2011	2:29:46 PM	PH3 valve closed
10/22/2011	2:29:46 PM	SiCl4 pre valve closed
10/22/2011	2:29:46 PM	SiCl4 post valve closed
10/22/2011	2:29:46 PM	Bypass valve closed
10/22/2011	2:29:46 PM	Bubbler valve closed
10/22/2011	2:29:46 PM	Main Vac valve opened
10/22/2011	2:29:46 PM	Helium MFC set to  0.000000
10/22/2011	2:29:46 PM	H2 MFC set to  0.000000
10/22/2011	2:29:46 PM	BCl3 MFC set to  0.000000
10/22/2011	2:29:46 PM	PHl3 MFC set to  0.000000
10/22/2011	2:29:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:29:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:29:47 PM	Tube furnace set to 150
10/22/2011	2:30:17 PM	H2 valve closed
10/22/2011	2:30:17 PM	BCl3 valve closed
10/22/2011	2:30:17 PM	PH3 valve closed
10/22/2011	2:30:17 PM	SiCl4 pre valve closed
10/22/2011	2:30:17 PM	SiCl4 post valve closed
10/22/2011	2:30:17 PM	Bypass valve closed
10/22/2011	2:30:17 PM	Bubbler valve closed
10/22/2011	2:30:17 PM	Helium valve opened
10/22/2011	2:30:17 PM	Main Vac valve opened
10/22/2011	2:30:17 PM	Helium MFC set to  20.000000
10/22/2011	2:30:17 PM	H2 MFC set to  0.000000
10/22/2011	2:30:17 PM	BCl3 MFC set to  0.000000
10/22/2011	2:30:17 PM	PHl3 MFC set to  0.000000
10/22/2011	2:30:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:30:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:30:17 PM	Tube furnace set to 150
10/22/2011	2:30:47 PM	Helium valve closed
10/22/2011	2:30:47 PM	H2 valve closed
10/22/2011	2:30:47 PM	BCl3 valve closed
10/22/2011	2:30:47 PM	PH3 valve closed
10/22/2011	2:30:47 PM	SiCl4 pre valve closed
10/22/2011	2:30:47 PM	SiCl4 post valve closed
10/22/2011	2:30:47 PM	Bypass valve closed
10/22/2011	2:30:47 PM	Bubbler valve closed
10/22/2011	2:30:47 PM	Main Vac valve opened
10/22/2011	2:30:47 PM	Helium MFC set to  0.000000
10/22/2011	2:30:47 PM	H2 MFC set to  0.000000
10/22/2011	2:30:47 PM	BCl3 MFC set to  0.000000
10/22/2011	2:30:47 PM	PHl3 MFC set to  0.000000
10/22/2011	2:30:47 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:30:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:30:47 PM	Tube furnace set to 150
10/22/2011	2:31:17 PM	H2 valve closed
10/22/2011	2:31:17 PM	BCl3 valve closed
10/22/2011	2:31:17 PM	PH3 valve closed
10/22/2011	2:31:17 PM	SiCl4 pre valve closed
10/22/2011	2:31:17 PM	SiCl4 post valve closed
10/22/2011	2:31:17 PM	Bypass valve closed
10/22/2011	2:31:17 PM	Bubbler valve closed
10/22/2011	2:31:17 PM	Helium valve opened
10/22/2011	2:31:17 PM	Main Vac valve opened
10/22/2011	2:31:17 PM	Helium MFC set to  20.000000
10/22/2011	2:31:17 PM	H2 MFC set to  0.000000
10/22/2011	2:31:17 PM	BCl3 MFC set to  0.000000
10/22/2011	2:31:17 PM	PHl3 MFC set to  0.000000
10/22/2011	2:31:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:31:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:31:17 PM	Tube furnace set to 150
10/22/2011	2:31:47 PM	Helium valve closed
10/22/2011	2:31:47 PM	H2 valve closed
10/22/2011	2:31:47 PM	BCl3 valve closed
10/22/2011	2:31:47 PM	PH3 valve closed
10/22/2011	2:31:47 PM	SiCl4 pre valve closed
10/22/2011	2:31:47 PM	SiCl4 post valve closed
10/22/2011	2:31:47 PM	Bypass valve closed
10/22/2011	2:31:47 PM	Bubbler valve closed
10/22/2011	2:31:47 PM	Main Vac valve opened
10/22/2011	2:31:47 PM	Helium MFC set to  0.000000
10/22/2011	2:31:47 PM	H2 MFC set to  0.000000
10/22/2011	2:31:47 PM	BCl3 MFC set to  0.000000
10/22/2011	2:31:47 PM	PHl3 MFC set to  0.000000
10/22/2011	2:31:47 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:31:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:31:47 PM	Tube furnace set to 150
10/22/2011	2:32:17 PM	H2 valve closed
10/22/2011	2:32:17 PM	BCl3 valve closed
10/22/2011	2:32:17 PM	PH3 valve closed
10/22/2011	2:32:17 PM	SiCl4 pre valve closed
10/22/2011	2:32:17 PM	SiCl4 post valve closed
10/22/2011	2:32:18 PM	Bypass valve closed
10/22/2011	2:32:18 PM	Bubbler valve closed
10/22/2011	2:32:18 PM	Helium valve opened
10/22/2011	2:32:18 PM	Main Vac valve opened
10/22/2011	2:32:18 PM	Helium MFC set to  20.000000
10/22/2011	2:32:18 PM	H2 MFC set to  0.000000
10/22/2011	2:32:18 PM	BCl3 MFC set to  0.000000
10/22/2011	2:32:18 PM	PHl3 MFC set to  0.000000
10/22/2011	2:32:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:32:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:32:18 PM	Tube furnace set to 150
10/22/2011	2:32:48 PM	Helium valve closed
10/22/2011	2:32:48 PM	H2 valve closed
10/22/2011	2:32:48 PM	BCl3 valve closed
10/22/2011	2:32:48 PM	PH3 valve closed
10/22/2011	2:32:48 PM	SiCl4 pre valve closed
10/22/2011	2:32:48 PM	SiCl4 post valve closed
10/22/2011	2:32:48 PM	Bypass valve closed
10/22/2011	2:32:48 PM	Bubbler valve closed
10/22/2011	2:32:48 PM	Main Vac valve opened
10/22/2011	2:32:48 PM	Helium MFC set to  0.000000
10/22/2011	2:32:48 PM	H2 MFC set to  0.000000
10/22/2011	2:32:48 PM	BCl3 MFC set to  0.000000
10/22/2011	2:32:48 PM	PHl3 MFC set to  0.000000
10/22/2011	2:32:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:32:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:32:48 PM	Tube furnace set to 150
10/22/2011	2:33:18 PM	H2 valve closed
10/22/2011	2:33:18 PM	BCl3 valve closed
10/22/2011	2:33:18 PM	PH3 valve closed
10/22/2011	2:33:18 PM	SiCl4 pre valve closed
10/22/2011	2:33:18 PM	SiCl4 post valve closed
10/22/2011	2:33:18 PM	Bypass valve closed
10/22/2011	2:33:18 PM	Bubbler valve closed
10/22/2011	2:33:18 PM	Helium valve opened
10/22/2011	2:33:18 PM	Main Vac valve opened
10/22/2011	2:33:18 PM	Helium MFC set to  20.000000
10/22/2011	2:33:18 PM	H2 MFC set to  0.000000
10/22/2011	2:33:18 PM	BCl3 MFC set to  0.000000
10/22/2011	2:33:18 PM	PHl3 MFC set to  0.000000
10/22/2011	2:33:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:33:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:33:18 PM	Tube furnace set to 150
10/22/2011	2:33:48 PM	Helium valve closed
10/22/2011	2:33:48 PM	H2 valve closed
10/22/2011	2:33:48 PM	BCl3 valve closed
10/22/2011	2:33:48 PM	PH3 valve closed
10/22/2011	2:33:48 PM	SiCl4 pre valve closed
10/22/2011	2:33:48 PM	SiCl4 post valve closed
10/22/2011	2:33:48 PM	Bypass valve closed
10/22/2011	2:33:48 PM	Bubbler valve closed
10/22/2011	2:33:48 PM	Main Vac valve opened
10/22/2011	2:33:48 PM	Helium MFC set to  0.000000
10/22/2011	2:33:48 PM	H2 MFC set to  0.000000
10/22/2011	2:33:48 PM	BCl3 MFC set to  0.000000
10/22/2011	2:33:48 PM	PHl3 MFC set to  0.000000
10/22/2011	2:33:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:33:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:33:48 PM	Tube furnace set to 150
10/22/2011	2:34:18 PM	H2 valve closed
10/22/2011	2:34:18 PM	BCl3 valve closed
10/22/2011	2:34:18 PM	PH3 valve closed
10/22/2011	2:34:18 PM	SiCl4 pre valve closed
10/22/2011	2:34:18 PM	SiCl4 post valve closed
10/22/2011	2:34:18 PM	Bypass valve closed
10/22/2011	2:34:18 PM	Bubbler valve closed
10/22/2011	2:34:18 PM	Helium valve opened
10/22/2011	2:34:18 PM	Main Vac valve opened
10/22/2011	2:34:18 PM	Helium MFC set to  20.000000
10/22/2011	2:34:18 PM	H2 MFC set to  0.000000
10/22/2011	2:34:18 PM	BCl3 MFC set to  0.000000
10/22/2011	2:34:18 PM	PHl3 MFC set to  0.000000
10/22/2011	2:34:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:34:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:34:19 PM	Tube furnace set to 150
10/22/2011	2:34:49 PM	Helium valve closed
10/22/2011	2:34:49 PM	H2 valve closed
10/22/2011	2:34:49 PM	BCl3 valve closed
10/22/2011	2:34:49 PM	PH3 valve closed
10/22/2011	2:34:49 PM	SiCl4 pre valve closed
10/22/2011	2:34:49 PM	SiCl4 post valve closed
10/22/2011	2:34:49 PM	Bypass valve closed
10/22/2011	2:34:49 PM	Bubbler valve closed
10/22/2011	2:34:49 PM	Main Vac valve opened
10/22/2011	2:34:49 PM	Helium MFC set to  0.000000
10/22/2011	2:34:49 PM	H2 MFC set to  0.000000
10/22/2011	2:34:49 PM	BCl3 MFC set to  0.000000
10/22/2011	2:34:49 PM	PHl3 MFC set to  0.000000
10/22/2011	2:34:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:34:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:34:49 PM	Tube furnace set to 150
10/22/2011	2:35:19 PM	H2 valve closed
10/22/2011	2:35:19 PM	BCl3 valve closed
10/22/2011	2:35:19 PM	PH3 valve closed
10/22/2011	2:35:19 PM	SiCl4 pre valve closed
10/22/2011	2:35:19 PM	SiCl4 post valve closed
10/22/2011	2:35:19 PM	Bypass valve closed
10/22/2011	2:35:19 PM	Bubbler valve closed
10/22/2011	2:35:19 PM	Helium valve opened
10/22/2011	2:35:19 PM	Main Vac valve opened
10/22/2011	2:35:19 PM	Helium MFC set to  20.000000
10/22/2011	2:35:19 PM	H2 MFC set to  0.000000
10/22/2011	2:35:19 PM	BCl3 MFC set to  0.000000
10/22/2011	2:35:19 PM	PHl3 MFC set to  0.000000
10/22/2011	2:35:19 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:35:19 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:35:19 PM	Tube furnace set to 150
10/22/2011	2:35:49 PM	Helium valve closed
10/22/2011	2:35:49 PM	H2 valve closed
10/22/2011	2:35:49 PM	BCl3 valve closed
10/22/2011	2:35:49 PM	PH3 valve closed
10/22/2011	2:35:49 PM	SiCl4 pre valve closed
10/22/2011	2:35:49 PM	SiCl4 post valve closed
10/22/2011	2:35:49 PM	Bypass valve closed
10/22/2011	2:35:49 PM	Bubbler valve closed
10/22/2011	2:35:49 PM	Main Vac valve opened
10/22/2011	2:35:49 PM	Helium MFC set to  0.000000
10/22/2011	2:35:49 PM	H2 MFC set to  0.000000
10/22/2011	2:35:49 PM	BCl3 MFC set to  0.000000
10/22/2011	2:35:49 PM	PHl3 MFC set to  0.000000
10/22/2011	2:35:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:35:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:35:49 PM	Tube furnace set to 150
10/22/2011	2:36:19 PM	H2 valve closed
10/22/2011	2:36:19 PM	BCl3 valve closed
10/22/2011	2:36:19 PM	PH3 valve closed
10/22/2011	2:36:19 PM	SiCl4 pre valve closed
10/22/2011	2:36:19 PM	SiCl4 post valve closed
10/22/2011	2:36:19 PM	Bypass valve closed
10/22/2011	2:36:19 PM	Bubbler valve closed
10/22/2011	2:36:19 PM	Helium valve opened
10/22/2011	2:36:19 PM	Main Vac valve opened
10/22/2011	2:36:19 PM	Helium MFC set to  20.000000
10/22/2011	2:36:19 PM	H2 MFC set to  0.000000
10/22/2011	2:36:19 PM	BCl3 MFC set to  0.000000
10/22/2011	2:36:19 PM	PHl3 MFC set to  0.000000
10/22/2011	2:36:19 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:36:19 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:36:19 PM	Tube furnace set to 150
10/22/2011	2:36:49 PM	Helium valve closed
10/22/2011	2:36:49 PM	H2 valve closed
10/22/2011	2:36:49 PM	BCl3 valve closed
10/22/2011	2:36:49 PM	PH3 valve closed
10/22/2011	2:36:49 PM	SiCl4 pre valve closed
10/22/2011	2:36:49 PM	SiCl4 post valve closed
10/22/2011	2:36:49 PM	Bypass valve closed
10/22/2011	2:36:49 PM	Bubbler valve closed
10/22/2011	2:36:49 PM	Main Vac valve opened
10/22/2011	2:36:49 PM	Helium MFC set to  0.000000
10/22/2011	2:36:49 PM	H2 MFC set to  0.000000
10/22/2011	2:36:49 PM	BCl3 MFC set to  0.000000
10/22/2011	2:36:49 PM	PHl3 MFC set to  0.000000
10/22/2011	2:36:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:36:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:36:50 PM	Tube furnace set to 150
10/22/2011	2:37:20 PM	H2 valve closed
10/22/2011	2:37:20 PM	BCl3 valve closed
10/22/2011	2:37:20 PM	PH3 valve closed
10/22/2011	2:37:20 PM	SiCl4 pre valve closed
10/22/2011	2:37:20 PM	SiCl4 post valve closed
10/22/2011	2:37:20 PM	Bypass valve closed
10/22/2011	2:37:20 PM	Bubbler valve closed
10/22/2011	2:37:20 PM	Helium valve opened
10/22/2011	2:37:20 PM	Main Vac valve opened
10/22/2011	2:37:20 PM	Helium MFC set to  20.000000
10/22/2011	2:37:20 PM	H2 MFC set to  0.000000
10/22/2011	2:37:20 PM	BCl3 MFC set to  0.000000
10/22/2011	2:37:20 PM	PHl3 MFC set to  0.000000
10/22/2011	2:37:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:37:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:37:20 PM	Tube furnace set to 150
10/22/2011	2:37:50 PM	Helium valve closed
10/22/2011	2:37:50 PM	H2 valve closed
10/22/2011	2:37:50 PM	BCl3 valve closed
10/22/2011	2:37:50 PM	PH3 valve closed
10/22/2011	2:37:50 PM	SiCl4 pre valve closed
10/22/2011	2:37:50 PM	SiCl4 post valve closed
10/22/2011	2:37:50 PM	Bypass valve closed
10/22/2011	2:37:50 PM	Bubbler valve closed
10/22/2011	2:37:50 PM	Main Vac valve opened
10/22/2011	2:37:50 PM	Helium MFC set to  0.000000
10/22/2011	2:37:50 PM	H2 MFC set to  0.000000
10/22/2011	2:37:50 PM	BCl3 MFC set to  0.000000
10/22/2011	2:37:50 PM	PHl3 MFC set to  0.000000
10/22/2011	2:37:50 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:37:50 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:37:50 PM	Tube furnace set to 150
10/22/2011	2:38:20 PM	H2 valve closed
10/22/2011	2:38:20 PM	BCl3 valve closed
10/22/2011	2:38:20 PM	PH3 valve closed
10/22/2011	2:38:20 PM	SiCl4 pre valve closed
10/22/2011	2:38:20 PM	SiCl4 post valve closed
10/22/2011	2:38:20 PM	Bypass valve closed
10/22/2011	2:38:20 PM	Bubbler valve closed
10/22/2011	2:38:20 PM	Helium valve opened
10/22/2011	2:38:20 PM	Main Vac valve opened
10/22/2011	2:38:20 PM	Helium MFC set to  20.000000
10/22/2011	2:38:20 PM	H2 MFC set to  0.000000
10/22/2011	2:38:20 PM	BCl3 MFC set to  0.000000
10/22/2011	2:38:20 PM	PHl3 MFC set to  0.000000
10/22/2011	2:38:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:38:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:38:20 PM	Tube furnace set to 150
10/22/2011	2:38:50 PM	Helium valve closed
10/22/2011	2:38:50 PM	H2 valve closed
10/22/2011	2:38:50 PM	BCl3 valve closed
10/22/2011	2:38:50 PM	PH3 valve closed
10/22/2011	2:38:50 PM	SiCl4 pre valve closed
10/22/2011	2:38:50 PM	SiCl4 post valve closed
10/22/2011	2:38:50 PM	Bypass valve closed
10/22/2011	2:38:50 PM	Bubbler valve closed
10/22/2011	2:38:50 PM	Main Vac valve opened
10/22/2011	2:38:50 PM	Helium MFC set to  0.000000
10/22/2011	2:38:50 PM	H2 MFC set to  0.000000
10/22/2011	2:38:50 PM	BCl3 MFC set to  0.000000
10/22/2011	2:38:50 PM	PHl3 MFC set to  0.000000
10/22/2011	2:38:50 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:38:50 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:38:50 PM	Tube furnace set to 150
10/22/2011	2:39:21 PM	H2 valve closed
10/22/2011	2:39:21 PM	BCl3 valve closed
10/22/2011	2:39:21 PM	PH3 valve closed
10/22/2011	2:39:21 PM	SiCl4 pre valve closed
10/22/2011	2:39:21 PM	SiCl4 post valve closed
10/22/2011	2:39:21 PM	Bypass valve closed
10/22/2011	2:39:21 PM	Bubbler valve closed
10/22/2011	2:39:21 PM	Helium valve opened
10/22/2011	2:39:21 PM	Main Vac valve opened
10/22/2011	2:39:21 PM	Helium MFC set to  20.000000
10/22/2011	2:39:21 PM	H2 MFC set to  0.000000
10/22/2011	2:39:21 PM	BCl3 MFC set to  0.000000
10/22/2011	2:39:21 PM	PHl3 MFC set to  0.000000
10/22/2011	2:39:21 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:39:21 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:39:21 PM	Tube furnace set to 150
10/22/2011	2:39:51 PM	Helium valve closed
10/22/2011	2:39:51 PM	H2 valve closed
10/22/2011	2:39:51 PM	BCl3 valve closed
10/22/2011	2:39:51 PM	PH3 valve closed
10/22/2011	2:39:51 PM	SiCl4 pre valve closed
10/22/2011	2:39:51 PM	SiCl4 post valve closed
10/22/2011	2:39:51 PM	Bypass valve closed
10/22/2011	2:39:51 PM	Bubbler valve closed
10/22/2011	2:39:51 PM	Main Vac valve opened
10/22/2011	2:39:51 PM	Helium MFC set to  0.000000
10/22/2011	2:39:51 PM	H2 MFC set to  0.000000
10/22/2011	2:39:51 PM	BCl3 MFC set to  0.000000
10/22/2011	2:39:51 PM	PHl3 MFC set to  0.000000
10/22/2011	2:39:51 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:39:51 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:39:51 PM	Tube furnace set to 150
10/22/2011	2:40:21 PM	H2 valve closed
10/22/2011	2:40:21 PM	BCl3 valve closed
10/22/2011	2:40:21 PM	PH3 valve closed
10/22/2011	2:40:21 PM	SiCl4 pre valve closed
10/22/2011	2:40:21 PM	SiCl4 post valve closed
10/22/2011	2:40:21 PM	Bypass valve closed
10/22/2011	2:40:21 PM	Bubbler valve closed
10/22/2011	2:40:21 PM	Helium valve opened
10/22/2011	2:40:21 PM	Main Vac valve opened
10/22/2011	2:40:21 PM	Helium MFC set to  20.000000
10/22/2011	2:40:21 PM	H2 MFC set to  0.000000
10/22/2011	2:40:21 PM	BCl3 MFC set to  0.000000
10/22/2011	2:40:21 PM	PHl3 MFC set to  0.000000
10/22/2011	2:40:21 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:40:21 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:40:21 PM	Tube furnace set to 150
10/22/2011	2:40:51 PM	Helium valve closed
10/22/2011	2:40:51 PM	H2 valve closed
10/22/2011	2:40:51 PM	BCl3 valve closed
10/22/2011	2:40:51 PM	PH3 valve closed
10/22/2011	2:40:51 PM	SiCl4 pre valve closed
10/22/2011	2:40:51 PM	SiCl4 post valve closed
10/22/2011	2:40:51 PM	Bypass valve closed
10/22/2011	2:40:51 PM	Bubbler valve closed
10/22/2011	2:40:51 PM	Main Vac valve opened
10/22/2011	2:40:51 PM	Helium MFC set to  0.000000
10/22/2011	2:40:51 PM	H2 MFC set to  0.000000
10/22/2011	2:40:51 PM	BCl3 MFC set to  0.000000
10/22/2011	2:40:51 PM	PHl3 MFC set to  0.000000
10/22/2011	2:40:51 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:40:51 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:40:51 PM	Tube furnace set to 150
10/22/2011	2:41:21 PM	H2 valve closed
10/22/2011	2:41:21 PM	BCl3 valve closed
10/22/2011	2:41:21 PM	PH3 valve closed
10/22/2011	2:41:21 PM	SiCl4 pre valve closed
10/22/2011	2:41:21 PM	SiCl4 post valve closed
10/22/2011	2:41:21 PM	Bypass valve closed
10/22/2011	2:41:21 PM	Bubbler valve closed
10/22/2011	2:41:21 PM	Helium valve opened
10/22/2011	2:41:21 PM	Main Vac valve opened
10/22/2011	2:41:21 PM	Helium MFC set to  20.000000
10/22/2011	2:41:21 PM	H2 MFC set to  0.000000
10/22/2011	2:41:21 PM	BCl3 MFC set to  0.000000
10/22/2011	2:41:21 PM	PHl3 MFC set to  0.000000
10/22/2011	2:41:21 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:41:21 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:41:22 PM	Tube furnace set to 150
10/22/2011	2:41:52 PM	Helium valve closed
10/22/2011	2:41:52 PM	H2 valve closed
10/22/2011	2:41:52 PM	BCl3 valve closed
10/22/2011	2:41:52 PM	PH3 valve closed
10/22/2011	2:41:52 PM	SiCl4 pre valve closed
10/22/2011	2:41:52 PM	SiCl4 post valve closed
10/22/2011	2:41:52 PM	Bypass valve closed
10/22/2011	2:41:52 PM	Bubbler valve closed
10/22/2011	2:41:52 PM	Main Vac valve opened
10/22/2011	2:41:52 PM	Helium MFC set to  0.000000
10/22/2011	2:41:52 PM	H2 MFC set to  0.000000
10/22/2011	2:41:52 PM	BCl3 MFC set to  0.000000
10/22/2011	2:41:52 PM	PHl3 MFC set to  0.000000
10/22/2011	2:41:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:41:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:41:52 PM	Tube furnace set to 150
10/22/2011	2:42:22 PM	H2 valve closed
10/22/2011	2:42:22 PM	BCl3 valve closed
10/22/2011	2:42:22 PM	PH3 valve closed
10/22/2011	2:42:22 PM	SiCl4 pre valve closed
10/22/2011	2:42:22 PM	SiCl4 post valve closed
10/22/2011	2:42:22 PM	Bypass valve closed
10/22/2011	2:42:22 PM	Bubbler valve closed
10/22/2011	2:42:22 PM	Helium valve opened
10/22/2011	2:42:22 PM	Main Vac valve opened
10/22/2011	2:42:22 PM	Helium MFC set to  20.000000
10/22/2011	2:42:22 PM	H2 MFC set to  0.000000
10/22/2011	2:42:22 PM	BCl3 MFC set to  0.000000
10/22/2011	2:42:22 PM	PHl3 MFC set to  0.000000
10/22/2011	2:42:22 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:42:22 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:42:22 PM	Tube furnace set to 150
10/22/2011	2:42:52 PM	Helium valve closed
10/22/2011	2:42:52 PM	H2 valve closed
10/22/2011	2:42:52 PM	BCl3 valve closed
10/22/2011	2:42:52 PM	PH3 valve closed
10/22/2011	2:42:52 PM	SiCl4 pre valve closed
10/22/2011	2:42:52 PM	SiCl4 post valve closed
10/22/2011	2:42:52 PM	Bypass valve closed
10/22/2011	2:42:52 PM	Bubbler valve closed
10/22/2011	2:42:52 PM	Main Vac valve opened
10/22/2011	2:42:52 PM	Helium MFC set to  0.000000
10/22/2011	2:42:52 PM	H2 MFC set to  0.000000
10/22/2011	2:42:52 PM	BCl3 MFC set to  0.000000
10/22/2011	2:42:52 PM	PHl3 MFC set to  0.000000
10/22/2011	2:42:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:42:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:42:52 PM	Tube furnace set to 150
10/22/2011	2:43:22 PM	H2 valve closed
10/22/2011	2:43:22 PM	BCl3 valve closed
10/22/2011	2:43:22 PM	PH3 valve closed
10/22/2011	2:43:22 PM	SiCl4 pre valve closed
10/22/2011	2:43:22 PM	SiCl4 post valve closed
10/22/2011	2:43:22 PM	Bypass valve closed
10/22/2011	2:43:22 PM	Bubbler valve closed
10/22/2011	2:43:22 PM	Helium valve opened
10/22/2011	2:43:22 PM	Main Vac valve opened
10/22/2011	2:43:22 PM	Helium MFC set to  20.000000
10/22/2011	2:43:22 PM	H2 MFC set to  0.000000
10/22/2011	2:43:22 PM	BCl3 MFC set to  0.000000
10/22/2011	2:43:22 PM	PHl3 MFC set to  0.000000
10/22/2011	2:43:22 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:43:22 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:43:22 PM	Tube furnace set to 150
10/22/2011	2:43:52 PM	Helium valve closed
10/22/2011	2:43:52 PM	H2 valve closed
10/22/2011	2:43:52 PM	BCl3 valve closed
10/22/2011	2:43:52 PM	PH3 valve closed
10/22/2011	2:43:52 PM	SiCl4 pre valve closed
10/22/2011	2:43:52 PM	SiCl4 post valve closed
10/22/2011	2:43:52 PM	Bypass valve closed
10/22/2011	2:43:52 PM	Bubbler valve closed
10/22/2011	2:43:52 PM	Main Vac valve opened
10/22/2011	2:43:52 PM	Helium MFC set to  0.000000
10/22/2011	2:43:52 PM	H2 MFC set to  0.000000
10/22/2011	2:43:52 PM	BCl3 MFC set to  0.000000
10/22/2011	2:43:52 PM	PHl3 MFC set to  0.000000
10/22/2011	2:43:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:43:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:43:53 PM	Tube furnace set to 150
10/22/2011	2:44:23 PM	H2 valve closed
10/22/2011	2:44:23 PM	BCl3 valve closed
10/22/2011	2:44:23 PM	PH3 valve closed
10/22/2011	2:44:23 PM	SiCl4 pre valve closed
10/22/2011	2:44:23 PM	SiCl4 post valve closed
10/22/2011	2:44:23 PM	Bypass valve closed
10/22/2011	2:44:23 PM	Bubbler valve closed
10/22/2011	2:44:23 PM	Helium valve opened
10/22/2011	2:44:23 PM	Main Vac valve opened
10/22/2011	2:44:23 PM	Helium MFC set to  20.000000
10/22/2011	2:44:23 PM	H2 MFC set to  0.000000
10/22/2011	2:44:23 PM	BCl3 MFC set to  0.000000
10/22/2011	2:44:23 PM	PHl3 MFC set to  0.000000
10/22/2011	2:44:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:44:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:44:23 PM	Tube furnace set to 150
10/22/2011	2:44:53 PM	Helium valve closed
10/22/2011	2:44:53 PM	H2 valve closed
10/22/2011	2:44:53 PM	BCl3 valve closed
10/22/2011	2:44:53 PM	PH3 valve closed
10/22/2011	2:44:53 PM	SiCl4 pre valve closed
10/22/2011	2:44:53 PM	SiCl4 post valve closed
10/22/2011	2:44:53 PM	Bypass valve closed
10/22/2011	2:44:53 PM	Bubbler valve closed
10/22/2011	2:44:53 PM	Main Vac valve opened
10/22/2011	2:44:53 PM	Helium MFC set to  0.000000
10/22/2011	2:44:53 PM	H2 MFC set to  0.000000
10/22/2011	2:44:53 PM	BCl3 MFC set to  0.000000
10/22/2011	2:44:53 PM	PHl3 MFC set to  0.000000
10/22/2011	2:44:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:44:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:44:53 PM	Tube furnace set to 150
10/22/2011	2:45:23 PM	H2 valve closed
10/22/2011	2:45:23 PM	BCl3 valve closed
10/22/2011	2:45:23 PM	PH3 valve closed
10/22/2011	2:45:23 PM	SiCl4 pre valve closed
10/22/2011	2:45:23 PM	SiCl4 post valve closed
10/22/2011	2:45:23 PM	Bypass valve closed
10/22/2011	2:45:23 PM	Bubbler valve closed
10/22/2011	2:45:23 PM	Helium valve opened
10/22/2011	2:45:23 PM	Main Vac valve opened
10/22/2011	2:45:23 PM	Helium MFC set to  20.000000
10/22/2011	2:45:23 PM	H2 MFC set to  0.000000
10/22/2011	2:45:23 PM	BCl3 MFC set to  0.000000
10/22/2011	2:45:23 PM	PHl3 MFC set to  0.000000
10/22/2011	2:45:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:45:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:45:23 PM	Tube furnace set to 150
10/22/2011	2:45:53 PM	Helium valve closed
10/22/2011	2:45:53 PM	H2 valve closed
10/22/2011	2:45:53 PM	BCl3 valve closed
10/22/2011	2:45:53 PM	PH3 valve closed
10/22/2011	2:45:53 PM	SiCl4 pre valve closed
10/22/2011	2:45:53 PM	SiCl4 post valve closed
10/22/2011	2:45:53 PM	Bypass valve closed
10/22/2011	2:45:53 PM	Bubbler valve closed
10/22/2011	2:45:53 PM	Main Vac valve opened
10/22/2011	2:45:53 PM	Helium MFC set to  0.000000
10/22/2011	2:45:53 PM	H2 MFC set to  0.000000
10/22/2011	2:45:53 PM	BCl3 MFC set to  0.000000
10/22/2011	2:45:53 PM	PHl3 MFC set to  0.000000
10/22/2011	2:45:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:45:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:45:54 PM	Tube furnace set to 150
10/22/2011	2:46:24 PM	H2 valve closed
10/22/2011	2:46:24 PM	BCl3 valve closed
10/22/2011	2:46:24 PM	PH3 valve closed
10/22/2011	2:46:24 PM	SiCl4 pre valve closed
10/22/2011	2:46:24 PM	SiCl4 post valve closed
10/22/2011	2:46:24 PM	Bypass valve closed
10/22/2011	2:46:24 PM	Bubbler valve closed
10/22/2011	2:46:24 PM	Helium valve opened
10/22/2011	2:46:24 PM	Main Vac valve opened
10/22/2011	2:46:24 PM	Helium MFC set to  20.000000
10/22/2011	2:46:24 PM	H2 MFC set to  0.000000
10/22/2011	2:46:24 PM	BCl3 MFC set to  0.000000
10/22/2011	2:46:24 PM	PHl3 MFC set to  0.000000
10/22/2011	2:46:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:46:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:46:24 PM	Tube furnace set to 150
10/22/2011	2:46:54 PM	Helium valve closed
10/22/2011	2:46:54 PM	H2 valve closed
10/22/2011	2:46:54 PM	BCl3 valve closed
10/22/2011	2:46:54 PM	PH3 valve closed
10/22/2011	2:46:54 PM	SiCl4 pre valve closed
10/22/2011	2:46:54 PM	SiCl4 post valve closed
10/22/2011	2:46:54 PM	Bypass valve closed
10/22/2011	2:46:54 PM	Bubbler valve closed
10/22/2011	2:46:54 PM	Main Vac valve opened
10/22/2011	2:46:54 PM	Helium MFC set to  0.000000
10/22/2011	2:46:54 PM	H2 MFC set to  0.000000
10/22/2011	2:46:54 PM	BCl3 MFC set to  0.000000
10/22/2011	2:46:54 PM	PHl3 MFC set to  0.000000
10/22/2011	2:46:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:46:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:46:54 PM	Tube furnace set to 150
10/22/2011	2:47:24 PM	H2 valve closed
10/22/2011	2:47:24 PM	BCl3 valve closed
10/22/2011	2:47:24 PM	PH3 valve closed
10/22/2011	2:47:24 PM	SiCl4 pre valve closed
10/22/2011	2:47:24 PM	SiCl4 post valve closed
10/22/2011	2:47:24 PM	Bypass valve closed
10/22/2011	2:47:24 PM	Bubbler valve closed
10/22/2011	2:47:24 PM	Helium valve opened
10/22/2011	2:47:24 PM	Main Vac valve opened
10/22/2011	2:47:24 PM	Helium MFC set to  20.000000
10/22/2011	2:47:24 PM	H2 MFC set to  0.000000
10/22/2011	2:47:24 PM	BCl3 MFC set to  0.000000
10/22/2011	2:47:24 PM	PHl3 MFC set to  0.000000
10/22/2011	2:47:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:47:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:47:24 PM	Tube furnace set to 150
10/22/2011	2:47:54 PM	Helium valve closed
10/22/2011	2:47:54 PM	H2 valve closed
10/22/2011	2:47:54 PM	BCl3 valve closed
10/22/2011	2:47:54 PM	PH3 valve closed
10/22/2011	2:47:54 PM	SiCl4 pre valve closed
10/22/2011	2:47:54 PM	SiCl4 post valve closed
10/22/2011	2:47:54 PM	Bypass valve closed
10/22/2011	2:47:54 PM	Bubbler valve closed
10/22/2011	2:47:54 PM	Main Vac valve opened
10/22/2011	2:47:54 PM	Helium MFC set to  0.000000
10/22/2011	2:47:54 PM	H2 MFC set to  0.000000
10/22/2011	2:47:54 PM	BCl3 MFC set to  0.000000
10/22/2011	2:47:54 PM	PHl3 MFC set to  0.000000
10/22/2011	2:47:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:47:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:47:54 PM	Tube furnace set to 180
10/22/2011	2:47:59 PM	Run finished at 2:47 PM
10/22/2011	2:50:04 PM	Recipe started at 2:49 PM
10/22/2011	2:50:05 PM	Helium valve closed
10/22/2011	2:50:05 PM	H2 valve closed
10/22/2011	2:50:05 PM	BCl3 valve closed
10/22/2011	2:50:05 PM	PH3 valve closed
10/22/2011	2:50:05 PM	SiCl4 pre valve closed
10/22/2011	2:50:05 PM	SiCl4 post valve closed
10/22/2011	2:50:05 PM	Main Vac valve closed
10/22/2011	2:50:05 PM	Bubbler valve closed
10/22/2011	2:50:05 PM	Bypass valve opened
10/22/2011	2:50:05 PM	Helium MFC set to  0.000000
10/22/2011	2:50:05 PM	H2 MFC set to  0.000000
10/22/2011	2:50:05 PM	BCl3 MFC set to  0.000000
10/22/2011	2:50:05 PM	PHl3 MFC set to  0.000000
10/22/2011	2:50:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:50:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:50:05 PM	Tube furnace set to 150
10/22/2011	2:50:05 PM	Helium valve closed
10/22/2011	2:50:05 PM	H2 valve closed
10/22/2011	2:50:05 PM	BCl3 valve closed
10/22/2011	2:50:05 PM	PH3 valve closed
10/22/2011	2:50:05 PM	SiCl4 pre valve closed
10/22/2011	2:50:05 PM	SiCl4 post valve closed
10/22/2011	2:50:05 PM	Main Vac valve closed
10/22/2011	2:50:05 PM	Bubbler valve closed
10/22/2011	2:50:05 PM	Bypass valve opened
10/22/2011	2:50:05 PM	Helium MFC set to  0.000000
10/22/2011	2:50:05 PM	H2 MFC set to  0.000000
10/22/2011	2:50:05 PM	BCl3 MFC set to  0.000000
10/22/2011	2:50:05 PM	PHl3 MFC set to  0.000000
10/22/2011	2:50:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:50:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:50:05 PM	Tube furnace set to 150
10/22/2011	2:50:35 PM	Helium valve closed
10/22/2011	2:50:35 PM	H2 valve closed
10/22/2011	2:50:35 PM	BCl3 valve closed
10/22/2011	2:50:35 PM	PH3 valve closed
10/22/2011	2:50:35 PM	SiCl4 pre valve closed
10/22/2011	2:50:35 PM	SiCl4 post valve closed
10/22/2011	2:50:35 PM	Bypass valve closed
10/22/2011	2:50:35 PM	Bubbler valve closed
10/22/2011	2:50:35 PM	Main Vac valve opened
10/22/2011	2:50:35 PM	Helium MFC set to  0.000000
10/22/2011	2:50:35 PM	H2 MFC set to  0.000000
10/22/2011	2:50:35 PM	BCl3 MFC set to  0.000000
10/22/2011	2:50:35 PM	PHl3 MFC set to  0.000000
10/22/2011	2:50:35 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:50:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:50:35 PM	Tube furnace set to 150
10/22/2011	2:51:05 PM	H2 valve closed
10/22/2011	2:51:05 PM	BCl3 valve closed
10/22/2011	2:51:05 PM	PH3 valve closed
10/22/2011	2:51:05 PM	SiCl4 pre valve closed
10/22/2011	2:51:05 PM	SiCl4 post valve closed
10/22/2011	2:51:05 PM	Bypass valve closed
10/22/2011	2:51:05 PM	Bubbler valve closed
10/22/2011	2:51:05 PM	Helium valve opened
10/22/2011	2:51:05 PM	Main Vac valve opened
10/22/2011	2:51:05 PM	Helium MFC set to  20.000000
10/22/2011	2:51:05 PM	H2 MFC set to  0.000000
10/22/2011	2:51:05 PM	BCl3 MFC set to  0.000000
10/22/2011	2:51:05 PM	PHl3 MFC set to  0.000000
10/22/2011	2:51:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:51:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:51:06 PM	Tube furnace set to 150
10/22/2011	2:51:36 PM	Helium valve closed
10/22/2011	2:51:36 PM	H2 valve closed
10/22/2011	2:51:36 PM	BCl3 valve closed
10/22/2011	2:51:36 PM	PH3 valve closed
10/22/2011	2:51:36 PM	SiCl4 pre valve closed
10/22/2011	2:51:36 PM	SiCl4 post valve closed
10/22/2011	2:51:36 PM	Bypass valve closed
10/22/2011	2:51:36 PM	Bubbler valve closed
10/22/2011	2:51:36 PM	Main Vac valve opened
10/22/2011	2:51:36 PM	Helium MFC set to  0.000000
10/22/2011	2:51:36 PM	H2 MFC set to  0.000000
10/22/2011	2:51:36 PM	BCl3 MFC set to  0.000000
10/22/2011	2:51:36 PM	PHl3 MFC set to  0.000000
10/22/2011	2:51:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:51:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:51:36 PM	Tube furnace set to 150
10/22/2011	2:52:06 PM	H2 valve closed
10/22/2011	2:52:06 PM	BCl3 valve closed
10/22/2011	2:52:06 PM	PH3 valve closed
10/22/2011	2:52:06 PM	SiCl4 pre valve closed
10/22/2011	2:52:06 PM	SiCl4 post valve closed
10/22/2011	2:52:06 PM	Bypass valve closed
10/22/2011	2:52:06 PM	Bubbler valve closed
10/22/2011	2:52:06 PM	Helium valve opened
10/22/2011	2:52:06 PM	Main Vac valve opened
10/22/2011	2:52:06 PM	Helium MFC set to  20.000000
10/22/2011	2:52:06 PM	H2 MFC set to  0.000000
10/22/2011	2:52:06 PM	BCl3 MFC set to  0.000000
10/22/2011	2:52:06 PM	PHl3 MFC set to  0.000000
10/22/2011	2:52:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:52:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:52:06 PM	Tube furnace set to 150
10/22/2011	2:52:36 PM	Helium valve closed
10/22/2011	2:52:36 PM	H2 valve closed
10/22/2011	2:52:36 PM	BCl3 valve closed
10/22/2011	2:52:36 PM	PH3 valve closed
10/22/2011	2:52:36 PM	SiCl4 pre valve closed
10/22/2011	2:52:36 PM	SiCl4 post valve closed
10/22/2011	2:52:36 PM	Bypass valve closed
10/22/2011	2:52:36 PM	Bubbler valve closed
10/22/2011	2:52:36 PM	Main Vac valve opened
10/22/2011	2:52:36 PM	Helium MFC set to  0.000000
10/22/2011	2:52:36 PM	H2 MFC set to  0.000000
10/22/2011	2:52:36 PM	BCl3 MFC set to  0.000000
10/22/2011	2:52:36 PM	PHl3 MFC set to  0.000000
10/22/2011	2:52:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:52:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:52:36 PM	Tube furnace set to 150
10/22/2011	2:53:06 PM	H2 valve closed
10/22/2011	2:53:06 PM	BCl3 valve closed
10/22/2011	2:53:06 PM	PH3 valve closed
10/22/2011	2:53:06 PM	SiCl4 pre valve closed
10/22/2011	2:53:06 PM	SiCl4 post valve closed
10/22/2011	2:53:06 PM	Bypass valve closed
10/22/2011	2:53:06 PM	Bubbler valve closed
10/22/2011	2:53:06 PM	Helium valve opened
10/22/2011	2:53:06 PM	Main Vac valve opened
10/22/2011	2:53:06 PM	Helium MFC set to  20.000000
10/22/2011	2:53:06 PM	H2 MFC set to  0.000000
10/22/2011	2:53:06 PM	BCl3 MFC set to  0.000000
10/22/2011	2:53:06 PM	PHl3 MFC set to  0.000000
10/22/2011	2:53:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:53:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:53:06 PM	Tube furnace set to 150
10/22/2011	2:53:36 PM	Helium valve closed
10/22/2011	2:53:36 PM	H2 valve closed
10/22/2011	2:53:36 PM	BCl3 valve closed
10/22/2011	2:53:36 PM	PH3 valve closed
10/22/2011	2:53:36 PM	SiCl4 pre valve closed
10/22/2011	2:53:36 PM	SiCl4 post valve closed
10/22/2011	2:53:36 PM	Bypass valve closed
10/22/2011	2:53:36 PM	Bubbler valve closed
10/22/2011	2:53:36 PM	Main Vac valve opened
10/22/2011	2:53:36 PM	Helium MFC set to  0.000000
10/22/2011	2:53:36 PM	H2 MFC set to  0.000000
10/22/2011	2:53:36 PM	BCl3 MFC set to  0.000000
10/22/2011	2:53:36 PM	PHl3 MFC set to  0.000000
10/22/2011	2:53:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:53:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:53:37 PM	Tube furnace set to 150
10/22/2011	2:54:07 PM	H2 valve closed
10/22/2011	2:54:07 PM	BCl3 valve closed
10/22/2011	2:54:07 PM	PH3 valve closed
10/22/2011	2:54:07 PM	SiCl4 pre valve closed
10/22/2011	2:54:07 PM	SiCl4 post valve closed
10/22/2011	2:54:07 PM	Bypass valve closed
10/22/2011	2:54:07 PM	Bubbler valve closed
10/22/2011	2:54:07 PM	Helium valve opened
10/22/2011	2:54:07 PM	Main Vac valve opened
10/22/2011	2:54:07 PM	Helium MFC set to  20.000000
10/22/2011	2:54:07 PM	H2 MFC set to  0.000000
10/22/2011	2:54:07 PM	BCl3 MFC set to  0.000000
10/22/2011	2:54:07 PM	PHl3 MFC set to  0.000000
10/22/2011	2:54:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:54:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:54:07 PM	Tube furnace set to 150
10/22/2011	2:54:37 PM	Helium valve closed
10/22/2011	2:54:37 PM	H2 valve closed
10/22/2011	2:54:37 PM	BCl3 valve closed
10/22/2011	2:54:37 PM	PH3 valve closed
10/22/2011	2:54:37 PM	SiCl4 pre valve closed
10/22/2011	2:54:37 PM	SiCl4 post valve closed
10/22/2011	2:54:37 PM	Bypass valve closed
10/22/2011	2:54:37 PM	Bubbler valve closed
10/22/2011	2:54:37 PM	Main Vac valve opened
10/22/2011	2:54:37 PM	Helium MFC set to  0.000000
10/22/2011	2:54:37 PM	H2 MFC set to  0.000000
10/22/2011	2:54:37 PM	BCl3 MFC set to  0.000000
10/22/2011	2:54:37 PM	PHl3 MFC set to  0.000000
10/22/2011	2:54:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:54:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:54:37 PM	Tube furnace set to 150
10/22/2011	2:55:07 PM	H2 valve closed
10/22/2011	2:55:07 PM	BCl3 valve closed
10/22/2011	2:55:07 PM	PH3 valve closed
10/22/2011	2:55:07 PM	SiCl4 pre valve closed
10/22/2011	2:55:07 PM	SiCl4 post valve closed
10/22/2011	2:55:07 PM	Bypass valve closed
10/22/2011	2:55:07 PM	Bubbler valve closed
10/22/2011	2:55:07 PM	Helium valve opened
10/22/2011	2:55:07 PM	Main Vac valve opened
10/22/2011	2:55:07 PM	Helium MFC set to  20.000000
10/22/2011	2:55:07 PM	H2 MFC set to  0.000000
10/22/2011	2:55:07 PM	BCl3 MFC set to  0.000000
10/22/2011	2:55:07 PM	PHl3 MFC set to  0.000000
10/22/2011	2:55:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:55:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:55:07 PM	Tube furnace set to 150
10/22/2011	2:55:37 PM	Helium valve closed
10/22/2011	2:55:37 PM	H2 valve closed
10/22/2011	2:55:37 PM	BCl3 valve closed
10/22/2011	2:55:37 PM	PH3 valve closed
10/22/2011	2:55:37 PM	SiCl4 pre valve closed
10/22/2011	2:55:37 PM	SiCl4 post valve closed
10/22/2011	2:55:37 PM	Bypass valve closed
10/22/2011	2:55:37 PM	Bubbler valve closed
10/22/2011	2:55:37 PM	Main Vac valve opened
10/22/2011	2:55:37 PM	Helium MFC set to  0.000000
10/22/2011	2:55:37 PM	H2 MFC set to  0.000000
10/22/2011	2:55:37 PM	BCl3 MFC set to  0.000000
10/22/2011	2:55:37 PM	PHl3 MFC set to  0.000000
10/22/2011	2:55:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:55:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:55:38 PM	Tube furnace set to 150
10/22/2011	2:56:08 PM	H2 valve closed
10/22/2011	2:56:08 PM	BCl3 valve closed
10/22/2011	2:56:08 PM	PH3 valve closed
10/22/2011	2:56:08 PM	SiCl4 pre valve closed
10/22/2011	2:56:08 PM	SiCl4 post valve closed
10/22/2011	2:56:08 PM	Bypass valve closed
10/22/2011	2:56:08 PM	Bubbler valve closed
10/22/2011	2:56:08 PM	Helium valve opened
10/22/2011	2:56:08 PM	Main Vac valve opened
10/22/2011	2:56:08 PM	Helium MFC set to  20.000000
10/22/2011	2:56:08 PM	H2 MFC set to  0.000000
10/22/2011	2:56:08 PM	BCl3 MFC set to  0.000000
10/22/2011	2:56:08 PM	PHl3 MFC set to  0.000000
10/22/2011	2:56:08 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:56:08 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:56:08 PM	Tube furnace set to 150
10/22/2011	2:56:38 PM	Helium valve closed
10/22/2011	2:56:38 PM	H2 valve closed
10/22/2011	2:56:38 PM	BCl3 valve closed
10/22/2011	2:56:38 PM	PH3 valve closed
10/22/2011	2:56:38 PM	SiCl4 pre valve closed
10/22/2011	2:56:38 PM	SiCl4 post valve closed
10/22/2011	2:56:38 PM	Bypass valve closed
10/22/2011	2:56:38 PM	Bubbler valve closed
10/22/2011	2:56:38 PM	Main Vac valve opened
10/22/2011	2:56:38 PM	Helium MFC set to  0.000000
10/22/2011	2:56:38 PM	H2 MFC set to  0.000000
10/22/2011	2:56:38 PM	BCl3 MFC set to  0.000000
10/22/2011	2:56:38 PM	PHl3 MFC set to  0.000000
10/22/2011	2:56:38 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:56:38 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:56:38 PM	Tube furnace set to 150
10/22/2011	2:57:08 PM	H2 valve closed
10/22/2011	2:57:08 PM	BCl3 valve closed
10/22/2011	2:57:08 PM	PH3 valve closed
10/22/2011	2:57:08 PM	SiCl4 pre valve closed
10/22/2011	2:57:08 PM	SiCl4 post valve closed
10/22/2011	2:57:08 PM	Bypass valve closed
10/22/2011	2:57:08 PM	Bubbler valve closed
10/22/2011	2:57:08 PM	Helium valve opened
10/22/2011	2:57:08 PM	Main Vac valve opened
10/22/2011	2:57:08 PM	Helium MFC set to  20.000000
10/22/2011	2:57:08 PM	H2 MFC set to  0.000000
10/22/2011	2:57:08 PM	BCl3 MFC set to  0.000000
10/22/2011	2:57:08 PM	PHl3 MFC set to  0.000000
10/22/2011	2:57:08 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:57:08 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:57:08 PM	Tube furnace set to 150
10/22/2011	2:57:38 PM	Helium valve closed
10/22/2011	2:57:38 PM	H2 valve closed
10/22/2011	2:57:38 PM	BCl3 valve closed
10/22/2011	2:57:38 PM	PH3 valve closed
10/22/2011	2:57:38 PM	SiCl4 pre valve closed
10/22/2011	2:57:38 PM	SiCl4 post valve closed
10/22/2011	2:57:38 PM	Bypass valve closed
10/22/2011	2:57:38 PM	Bubbler valve closed
10/22/2011	2:57:38 PM	Main Vac valve opened
10/22/2011	2:57:38 PM	Helium MFC set to  0.000000
10/22/2011	2:57:38 PM	H2 MFC set to  0.000000
10/22/2011	2:57:38 PM	BCl3 MFC set to  0.000000
10/22/2011	2:57:38 PM	PHl3 MFC set to  0.000000
10/22/2011	2:57:38 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:57:38 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:57:38 PM	Tube furnace set to 150
10/22/2011	2:58:08 PM	H2 valve closed
10/22/2011	2:58:08 PM	BCl3 valve closed
10/22/2011	2:58:08 PM	PH3 valve closed
10/22/2011	2:58:08 PM	SiCl4 pre valve closed
10/22/2011	2:58:08 PM	SiCl4 post valve closed
10/22/2011	2:58:08 PM	Bypass valve closed
10/22/2011	2:58:08 PM	Bubbler valve closed
10/22/2011	2:58:08 PM	Helium valve opened
10/22/2011	2:58:08 PM	Main Vac valve opened
10/22/2011	2:58:08 PM	Helium MFC set to  20.000000
10/22/2011	2:58:08 PM	H2 MFC set to  0.000000
10/22/2011	2:58:08 PM	BCl3 MFC set to  0.000000
10/22/2011	2:58:08 PM	PHl3 MFC set to  0.000000
10/22/2011	2:58:08 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:58:08 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:58:09 PM	Tube furnace set to 150
10/22/2011	2:58:39 PM	Helium valve closed
10/22/2011	2:58:39 PM	H2 valve closed
10/22/2011	2:58:39 PM	BCl3 valve closed
10/22/2011	2:58:39 PM	PH3 valve closed
10/22/2011	2:58:39 PM	SiCl4 pre valve closed
10/22/2011	2:58:39 PM	SiCl4 post valve closed
10/22/2011	2:58:39 PM	Bypass valve closed
10/22/2011	2:58:39 PM	Bubbler valve closed
10/22/2011	2:58:39 PM	Main Vac valve opened
10/22/2011	2:58:39 PM	Helium MFC set to  0.000000
10/22/2011	2:58:39 PM	H2 MFC set to  0.000000
10/22/2011	2:58:39 PM	BCl3 MFC set to  0.000000
10/22/2011	2:58:39 PM	PHl3 MFC set to  0.000000
10/22/2011	2:58:39 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:58:39 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:58:39 PM	Tube furnace set to 150
10/22/2011	2:59:09 PM	H2 valve closed
10/22/2011	2:59:09 PM	BCl3 valve closed
10/22/2011	2:59:09 PM	PH3 valve closed
10/22/2011	2:59:09 PM	SiCl4 pre valve closed
10/22/2011	2:59:09 PM	SiCl4 post valve closed
10/22/2011	2:59:09 PM	Bypass valve closed
10/22/2011	2:59:09 PM	Bubbler valve closed
10/22/2011	2:59:09 PM	Helium valve opened
10/22/2011	2:59:09 PM	Main Vac valve opened
10/22/2011	2:59:09 PM	Helium MFC set to  20.000000
10/22/2011	2:59:09 PM	H2 MFC set to  0.000000
10/22/2011	2:59:09 PM	BCl3 MFC set to  0.000000
10/22/2011	2:59:09 PM	PHl3 MFC set to  0.000000
10/22/2011	2:59:09 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:59:09 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:59:09 PM	Tube furnace set to 150
10/22/2011	2:59:39 PM	Helium valve closed
10/22/2011	2:59:39 PM	H2 valve closed
10/22/2011	2:59:39 PM	BCl3 valve closed
10/22/2011	2:59:39 PM	PH3 valve closed
10/22/2011	2:59:39 PM	SiCl4 pre valve closed
10/22/2011	2:59:39 PM	SiCl4 post valve closed
10/22/2011	2:59:39 PM	Bypass valve closed
10/22/2011	2:59:39 PM	Bubbler valve closed
10/22/2011	2:59:39 PM	Main Vac valve opened
10/22/2011	2:59:39 PM	Helium MFC set to  0.000000
10/22/2011	2:59:39 PM	H2 MFC set to  0.000000
10/22/2011	2:59:39 PM	BCl3 MFC set to  0.000000
10/22/2011	2:59:39 PM	PHl3 MFC set to  0.000000
10/22/2011	2:59:39 PM	SiCl4 MFC set to  0.000000
10/22/2011	2:59:39 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	2:59:39 PM	Tube furnace set to 150
10/22/2011	3:00:09 PM	H2 valve closed
10/22/2011	3:00:09 PM	BCl3 valve closed
10/22/2011	3:00:09 PM	PH3 valve closed
10/22/2011	3:00:09 PM	SiCl4 pre valve closed
10/22/2011	3:00:09 PM	SiCl4 post valve closed
10/22/2011	3:00:09 PM	Bypass valve closed
10/22/2011	3:00:09 PM	Bubbler valve closed
10/22/2011	3:00:09 PM	Helium valve opened
10/22/2011	3:00:09 PM	Main Vac valve opened
10/22/2011	3:00:09 PM	Helium MFC set to  20.000000
10/22/2011	3:00:09 PM	H2 MFC set to  0.000000
10/22/2011	3:00:09 PM	BCl3 MFC set to  0.000000
10/22/2011	3:00:09 PM	PHl3 MFC set to  0.000000
10/22/2011	3:00:09 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:00:09 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:00:09 PM	Tube furnace set to 150
10/22/2011	3:00:39 PM	Helium valve closed
10/22/2011	3:00:39 PM	H2 valve closed
10/22/2011	3:00:39 PM	BCl3 valve closed
10/22/2011	3:00:39 PM	PH3 valve closed
10/22/2011	3:00:39 PM	SiCl4 pre valve closed
10/22/2011	3:00:39 PM	SiCl4 post valve closed
10/22/2011	3:00:39 PM	Bypass valve closed
10/22/2011	3:00:39 PM	Bubbler valve closed
10/22/2011	3:00:39 PM	Main Vac valve opened
10/22/2011	3:00:39 PM	Helium MFC set to  0.000000
10/22/2011	3:00:40 PM	H2 MFC set to  0.000000
10/22/2011	3:00:40 PM	BCl3 MFC set to  0.000000
10/22/2011	3:00:40 PM	PHl3 MFC set to  0.000000
10/22/2011	3:00:40 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:00:40 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:00:40 PM	Tube furnace set to 150
10/22/2011	3:01:10 PM	H2 valve closed
10/22/2011	3:01:10 PM	BCl3 valve closed
10/22/2011	3:01:10 PM	PH3 valve closed
10/22/2011	3:01:10 PM	SiCl4 pre valve closed
10/22/2011	3:01:10 PM	SiCl4 post valve closed
10/22/2011	3:01:10 PM	Bypass valve closed
10/22/2011	3:01:10 PM	Bubbler valve closed
10/22/2011	3:01:10 PM	Helium valve opened
10/22/2011	3:01:10 PM	Main Vac valve opened
10/22/2011	3:01:10 PM	Helium MFC set to  20.000000
10/22/2011	3:01:10 PM	H2 MFC set to  0.000000
10/22/2011	3:01:10 PM	BCl3 MFC set to  0.000000
10/22/2011	3:01:10 PM	PHl3 MFC set to  0.000000
10/22/2011	3:01:10 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:01:10 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:01:10 PM	Tube furnace set to 150
10/22/2011	3:01:40 PM	Helium valve closed
10/22/2011	3:01:40 PM	H2 valve closed
10/22/2011	3:01:40 PM	BCl3 valve closed
10/22/2011	3:01:40 PM	PH3 valve closed
10/22/2011	3:01:40 PM	SiCl4 pre valve closed
10/22/2011	3:01:40 PM	SiCl4 post valve closed
10/22/2011	3:01:40 PM	Bypass valve closed
10/22/2011	3:01:40 PM	Bubbler valve closed
10/22/2011	3:01:40 PM	Main Vac valve opened
10/22/2011	3:01:40 PM	Helium MFC set to  0.000000
10/22/2011	3:01:40 PM	H2 MFC set to  0.000000
10/22/2011	3:01:40 PM	BCl3 MFC set to  0.000000
10/22/2011	3:01:40 PM	PHl3 MFC set to  0.000000
10/22/2011	3:01:40 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:01:40 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:01:40 PM	Tube furnace set to 150
10/22/2011	3:02:10 PM	H2 valve closed
10/22/2011	3:02:10 PM	BCl3 valve closed
10/22/2011	3:02:10 PM	PH3 valve closed
10/22/2011	3:02:10 PM	SiCl4 pre valve closed
10/22/2011	3:02:10 PM	SiCl4 post valve closed
10/22/2011	3:02:10 PM	Bypass valve closed
10/22/2011	3:02:10 PM	Bubbler valve closed
10/22/2011	3:02:10 PM	Helium valve opened
10/22/2011	3:02:10 PM	Main Vac valve opened
10/22/2011	3:02:10 PM	Helium MFC set to  20.000000
10/22/2011	3:02:10 PM	H2 MFC set to  0.000000
10/22/2011	3:02:10 PM	BCl3 MFC set to  0.000000
10/22/2011	3:02:10 PM	PHl3 MFC set to  0.000000
10/22/2011	3:02:10 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:02:10 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:02:10 PM	Tube furnace set to 150
10/22/2011	3:02:40 PM	Helium valve closed
10/22/2011	3:02:40 PM	H2 valve closed
10/22/2011	3:02:40 PM	BCl3 valve closed
10/22/2011	3:02:40 PM	PH3 valve closed
10/22/2011	3:02:40 PM	SiCl4 pre valve closed
10/22/2011	3:02:40 PM	SiCl4 post valve closed
10/22/2011	3:02:40 PM	Bypass valve closed
10/22/2011	3:02:40 PM	Bubbler valve closed
10/22/2011	3:02:40 PM	Main Vac valve opened
10/22/2011	3:02:40 PM	Helium MFC set to  0.000000
10/22/2011	3:02:40 PM	H2 MFC set to  0.000000
10/22/2011	3:02:40 PM	BCl3 MFC set to  0.000000
10/22/2011	3:02:40 PM	PHl3 MFC set to  0.000000
10/22/2011	3:02:40 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:02:40 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:02:41 PM	Tube furnace set to 150
10/22/2011	3:03:11 PM	H2 valve closed
10/22/2011	3:03:11 PM	BCl3 valve closed
10/22/2011	3:03:11 PM	PH3 valve closed
10/22/2011	3:03:11 PM	SiCl4 pre valve closed
10/22/2011	3:03:11 PM	SiCl4 post valve closed
10/22/2011	3:03:11 PM	Bypass valve closed
10/22/2011	3:03:11 PM	Bubbler valve closed
10/22/2011	3:03:11 PM	Helium valve opened
10/22/2011	3:03:11 PM	Main Vac valve opened
10/22/2011	3:03:11 PM	Helium MFC set to  20.000000
10/22/2011	3:03:11 PM	H2 MFC set to  0.000000
10/22/2011	3:03:11 PM	BCl3 MFC set to  0.000000
10/22/2011	3:03:11 PM	PHl3 MFC set to  0.000000
10/22/2011	3:03:11 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:03:11 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:03:11 PM	Tube furnace set to 150
10/22/2011	3:03:41 PM	Helium valve closed
10/22/2011	3:03:41 PM	H2 valve closed
10/22/2011	3:03:41 PM	BCl3 valve closed
10/22/2011	3:03:41 PM	PH3 valve closed
10/22/2011	3:03:41 PM	SiCl4 pre valve closed
10/22/2011	3:03:41 PM	SiCl4 post valve closed
10/22/2011	3:03:41 PM	Bypass valve closed
10/22/2011	3:03:41 PM	Bubbler valve closed
10/22/2011	3:03:41 PM	Main Vac valve opened
10/22/2011	3:03:41 PM	Helium MFC set to  0.000000
10/22/2011	3:03:41 PM	H2 MFC set to  0.000000
10/22/2011	3:03:41 PM	BCl3 MFC set to  0.000000
10/22/2011	3:03:41 PM	PHl3 MFC set to  0.000000
10/22/2011	3:03:41 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:03:41 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:03:41 PM	Tube furnace set to 150
10/22/2011	3:04:11 PM	H2 valve closed
10/22/2011	3:04:11 PM	BCl3 valve closed
10/22/2011	3:04:11 PM	PH3 valve closed
10/22/2011	3:04:11 PM	SiCl4 pre valve closed
10/22/2011	3:04:11 PM	SiCl4 post valve closed
10/22/2011	3:04:11 PM	Bypass valve closed
10/22/2011	3:04:11 PM	Bubbler valve closed
10/22/2011	3:04:11 PM	Helium valve opened
10/22/2011	3:04:11 PM	Main Vac valve opened
10/22/2011	3:04:11 PM	Helium MFC set to  20.000000
10/22/2011	3:04:11 PM	H2 MFC set to  0.000000
10/22/2011	3:04:11 PM	BCl3 MFC set to  0.000000
10/22/2011	3:04:11 PM	PHl3 MFC set to  0.000000
10/22/2011	3:04:11 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:04:11 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:04:11 PM	Tube furnace set to 150
10/22/2011	3:04:41 PM	Helium valve closed
10/22/2011	3:04:41 PM	H2 valve closed
10/22/2011	3:04:41 PM	BCl3 valve closed
10/22/2011	3:04:41 PM	PH3 valve closed
10/22/2011	3:04:41 PM	SiCl4 pre valve closed
10/22/2011	3:04:41 PM	SiCl4 post valve closed
10/22/2011	3:04:41 PM	Bypass valve closed
10/22/2011	3:04:41 PM	Bubbler valve closed
10/22/2011	3:04:41 PM	Main Vac valve opened
10/22/2011	3:04:41 PM	Helium MFC set to  0.000000
10/22/2011	3:04:41 PM	H2 MFC set to  0.000000
10/22/2011	3:04:41 PM	BCl3 MFC set to  0.000000
10/22/2011	3:04:41 PM	PHl3 MFC set to  0.000000
10/22/2011	3:04:41 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:04:41 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:04:41 PM	Tube furnace set to 150
10/22/2011	3:05:11 PM	H2 valve closed
10/22/2011	3:05:11 PM	BCl3 valve closed
10/22/2011	3:05:11 PM	PH3 valve closed
10/22/2011	3:05:11 PM	SiCl4 pre valve closed
10/22/2011	3:05:11 PM	SiCl4 post valve closed
10/22/2011	3:05:11 PM	Bypass valve closed
10/22/2011	3:05:11 PM	Bubbler valve closed
10/22/2011	3:05:11 PM	Helium valve opened
10/22/2011	3:05:11 PM	Main Vac valve opened
10/22/2011	3:05:11 PM	Helium MFC set to  20.000000
10/22/2011	3:05:11 PM	H2 MFC set to  0.000000
10/22/2011	3:05:11 PM	BCl3 MFC set to  0.000000
10/22/2011	3:05:11 PM	PHl3 MFC set to  0.000000
10/22/2011	3:05:11 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:05:11 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:05:12 PM	Tube furnace set to 150
10/22/2011	3:05:23 PM	Run aborted at 3:05 PM
10/22/2011	3:05:23 PM	Helium valve closed
10/22/2011	3:05:23 PM	H2 valve closed
10/22/2011	3:05:23 PM	BCl3 valve closed
10/22/2011	3:05:23 PM	PH3 valve closed
10/22/2011	3:05:23 PM	SiCl4 pre valve closed
10/22/2011	3:05:23 PM	SiCl4 post valve closed
10/22/2011	3:05:23 PM	Bypass valve closed
10/22/2011	3:05:23 PM	Main Vac valve closed
10/22/2011	3:05:23 PM	Bubbler valve closed
10/22/2011	3:05:23 PM	Helium MFC set to  0.000000
10/22/2011	3:05:23 PM	H2 MFC set to  0.000000
10/22/2011	3:05:23 PM	BCl3 MFC set to  0.000000
10/22/2011	3:05:23 PM	PHl3 MFC set to  0.000000
10/22/2011	3:05:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:05:23 PM	Tube furnace set to 0
10/22/2011	3:05:25 PM	Main Vac valve opened
10/22/2011	3:06:43 PM	Main Vac valve closed
10/22/2011	3:06:48 PM	Main Vac valve opened
10/22/2011	3:07:12 PM	Recipe started at 3:07 PM
10/22/2011	3:07:12 PM	Helium valve closed
10/22/2011	3:07:12 PM	H2 valve closed
10/22/2011	3:07:12 PM	BCl3 valve closed
10/22/2011	3:07:12 PM	PH3 valve closed
10/22/2011	3:07:12 PM	SiCl4 pre valve closed
10/22/2011	3:07:12 PM	SiCl4 post valve closed
10/22/2011	3:07:12 PM	Main Vac valve closed
10/22/2011	3:07:12 PM	Bypass valve closed
10/22/2011	3:07:12 PM	Bubbler valve closed
10/22/2011	3:07:12 PM	Helium MFC set to  0.000000
10/22/2011	3:07:12 PM	H2 MFC set to  0.000000
10/22/2011	3:07:12 PM	BCl3 MFC set to  0.000000
10/22/2011	3:07:12 PM	PHl3 MFC set to  0.000000
10/22/2011	3:07:12 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:07:12 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:07:12 PM	Tube furnace set to 0
10/22/2011	3:07:15 PM	Helium valve closed
10/22/2011	3:07:15 PM	BCl3 valve closed
10/22/2011	3:07:15 PM	PH3 valve closed
10/22/2011	3:07:15 PM	SiCl4 pre valve closed
10/22/2011	3:07:15 PM	SiCl4 post valve closed
10/22/2011	3:07:15 PM	Main Vac valve closed
10/22/2011	3:07:15 PM	Bypass valve closed
10/22/2011	3:07:15 PM	Bubbler valve closed
10/22/2011	3:07:15 PM	H2 valve opened
10/22/2011	3:07:15 PM	Helium MFC set to  0.000000
10/22/2011	3:07:15 PM	H2 MFC set to  500.000000
10/22/2011	3:07:15 PM	BCl3 MFC set to  0.000000
10/22/2011	3:07:15 PM	PHl3 MFC set to  0.000000
10/22/2011	3:07:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:07:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:07:16 PM	Tube furnace set to 0
10/22/2011	3:08:18 PM	Helium valve closed
10/22/2011	3:08:18 PM	BCl3 valve closed
10/22/2011	3:08:18 PM	PH3 valve closed
10/22/2011	3:08:18 PM	SiCl4 pre valve closed
10/22/2011	3:08:18 PM	SiCl4 post valve closed
10/22/2011	3:08:18 PM	Main Vac valve closed
10/22/2011	3:08:18 PM	Bypass valve closed
10/22/2011	3:08:18 PM	H2 valve opened
10/22/2011	3:08:18 PM	Bubbler valve opened
10/22/2011	3:08:18 PM	Helium MFC set to  0.000000
10/22/2011	3:08:18 PM	H2 MFC set to  500.000000
10/22/2011	3:08:18 PM	BCl3 MFC set to  0.000000
10/22/2011	3:08:18 PM	PHl3 MFC set to  0.000000
10/22/2011	3:08:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:08:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:08:18 PM	Tube furnace set to 0
10/22/2011	3:08:20 PM	Helium valve closed
10/22/2011	3:08:20 PM	BCl3 valve closed
10/22/2011	3:08:20 PM	PH3 valve closed
10/22/2011	3:08:20 PM	SiCl4 pre valve closed
10/22/2011	3:08:20 PM	SiCl4 post valve closed
10/22/2011	3:08:20 PM	Main Vac valve closed
10/22/2011	3:08:20 PM	Bypass valve closed
10/22/2011	3:08:20 PM	H2 valve opened
10/22/2011	3:08:20 PM	Bubbler valve opened
10/22/2011	3:08:20 PM	Helium MFC set to  0.000000
10/22/2011	3:08:20 PM	H2 MFC set to  500.000000
10/22/2011	3:08:20 PM	BCl3 MFC set to  0.000000
10/22/2011	3:08:20 PM	PHl3 MFC set to  0.000000
10/22/2011	3:08:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:08:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:08:20 PM	Tube furnace set to 1045
10/22/2011	3:28:20 PM	Helium valve closed
10/22/2011	3:28:20 PM	BCl3 valve closed
10/22/2011	3:28:20 PM	PH3 valve closed
10/22/2011	3:28:20 PM	Main Vac valve closed
10/22/2011	3:28:20 PM	Bypass valve closed
10/22/2011	3:28:20 PM	H2 valve opened
10/22/2011	3:28:20 PM	SiCl4 pre valve opened
10/22/2011	3:28:20 PM	SiCl4 post valve opened
10/22/2011	3:28:20 PM	Bubbler valve opened
10/22/2011	3:28:20 PM	Helium MFC set to  0.000000
10/22/2011	3:28:20 PM	H2 MFC set to  500.000000
10/22/2011	3:28:20 PM	BCl3 MFC set to  0.000000
10/22/2011	3:28:20 PM	PHl3 MFC set to  0.000000
10/22/2011	3:28:20 PM	SiCl4 MFC set to  48.000000
10/22/2011	3:28:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:28:20 PM	Tube furnace set to 1045
10/22/2011	3:38:20 PM	Helium valve closed
10/22/2011	3:38:20 PM	BCl3 valve closed
10/22/2011	3:38:20 PM	PH3 valve closed
10/22/2011	3:38:20 PM	SiCl4 pre valve closed
10/22/2011	3:38:20 PM	SiCl4 post valve closed
10/22/2011	3:38:20 PM	Main Vac valve closed
10/22/2011	3:38:20 PM	Bypass valve closed
10/22/2011	3:38:20 PM	H2 valve opened
10/22/2011	3:38:20 PM	Bubbler valve opened
10/22/2011	3:38:20 PM	Helium MFC set to  0.000000
10/22/2011	3:38:20 PM	H2 MFC set to  500.000000
10/22/2011	3:38:20 PM	BCl3 MFC set to  0.000000
10/22/2011	3:38:20 PM	PHl3 MFC set to  0.000000
10/22/2011	3:38:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:38:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:38:20 PM	Tube furnace set to 750
10/22/2011	3:43:20 PM	H2 valve closed
10/22/2011	3:43:20 PM	BCl3 valve closed
10/22/2011	3:43:20 PM	PH3 valve closed
10/22/2011	3:43:20 PM	SiCl4 pre valve closed
10/22/2011	3:43:20 PM	SiCl4 post valve closed
10/22/2011	3:43:20 PM	Main Vac valve closed
10/22/2011	3:43:20 PM	Bypass valve closed
10/22/2011	3:43:20 PM	Helium valve opened
10/22/2011	3:43:20 PM	Bubbler valve opened
10/22/2011	3:43:20 PM	Helium MFC set to  500.000000
10/22/2011	3:43:20 PM	H2 MFC set to  0.000000
10/22/2011	3:43:20 PM	BCl3 MFC set to  0.000000
10/22/2011	3:43:20 PM	PHl3 MFC set to  0.000000
10/22/2011	3:43:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:43:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:43:20 PM	Tube furnace set to 0
10/22/2011	3:51:17 PM	Helium valve closed
10/22/2011	3:51:17 PM	H2 valve closed
10/22/2011	3:51:17 PM	BCl3 valve closed
10/22/2011	3:51:17 PM	PH3 valve closed
10/22/2011	3:51:17 PM	SiCl4 pre valve closed
10/22/2011	3:51:17 PM	SiCl4 post valve closed
10/22/2011	3:51:17 PM	Main Vac valve closed
10/22/2011	3:51:17 PM	Bypass valve closed
10/22/2011	3:51:17 PM	Bubbler valve closed
10/22/2011	3:51:17 PM	Helium MFC set to  0.000000
10/22/2011	3:51:17 PM	H2 MFC set to  0.000000
10/22/2011	3:51:17 PM	BCl3 MFC set to  0.000000
10/22/2011	3:51:17 PM	PHl3 MFC set to  0.000000
10/22/2011	3:51:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:51:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:51:18 PM	Tube furnace set to 0
10/22/2011	3:51:19 PM	Run finished at 3:51 PM
10/22/2011	3:51:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	3:51:23 PM	Recipe started at 3:51 PM
10/22/2011	3:51:23 PM	Helium valve closed
10/22/2011	3:51:23 PM	H2 valve closed
10/22/2011	3:51:23 PM	BCl3 valve closed
10/22/2011	3:51:23 PM	PH3 valve closed
10/22/2011	3:51:23 PM	SiCl4 pre valve closed
10/22/2011	3:51:23 PM	SiCl4 post valve closed
10/22/2011	3:51:23 PM	Main Vac valve closed
10/22/2011	3:51:23 PM	Bypass valve closed
10/22/2011	3:51:23 PM	Bubbler valve closed
10/22/2011	3:51:23 PM	Helium MFC set to  0.000000
10/22/2011	3:51:23 PM	H2 MFC set to  0.000000
10/22/2011	3:51:23 PM	BCl3 MFC set to  0.000000
10/22/2011	3:51:23 PM	PHl3 MFC set to  0.000000
10/22/2011	3:51:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:51:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:51:23 PM	Tube furnace set to 0
10/22/2011	3:51:26 PM	H2 valve closed
10/22/2011	3:51:26 PM	BCl3 valve closed
10/22/2011	3:51:26 PM	PH3 valve closed
10/22/2011	3:51:26 PM	SiCl4 pre valve closed
10/22/2011	3:51:26 PM	SiCl4 post valve closed
10/22/2011	3:51:26 PM	Main Vac valve closed
10/22/2011	3:51:26 PM	Bypass valve closed
10/22/2011	3:51:26 PM	Bubbler valve closed
10/22/2011	3:51:26 PM	Helium valve opened
10/22/2011	3:51:26 PM	Helium MFC set to  500.000000
10/22/2011	3:51:26 PM	H2 MFC set to  0.000000
10/22/2011	3:51:26 PM	BCl3 MFC set to  0.000000
10/22/2011	3:51:26 PM	PHl3 MFC set to  0.000000
10/22/2011	3:51:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:51:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:51:26 PM	Tube furnace set to 0
10/22/2011	3:51:26 PM	Helium valve closed
10/22/2011	3:51:26 PM	H2 valve closed
10/22/2011	3:51:26 PM	BCl3 valve closed
10/22/2011	3:51:26 PM	PH3 valve closed
10/22/2011	3:51:26 PM	SiCl4 pre valve closed
10/22/2011	3:51:26 PM	SiCl4 post valve closed
10/22/2011	3:51:26 PM	Main Vac valve closed
10/22/2011	3:51:26 PM	Bypass valve closed
10/22/2011	3:51:26 PM	Bubbler valve closed
10/22/2011	3:51:26 PM	Helium MFC set to  0.000000
10/22/2011	3:51:26 PM	H2 MFC set to  0.000000
10/22/2011	3:51:26 PM	BCl3 MFC set to  0.000000
10/22/2011	3:51:26 PM	PHl3 MFC set to  0.000000
10/22/2011	3:51:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:51:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:51:27 PM	Tube furnace set to 0
10/22/2011	3:51:28 PM	Run finished at 3:51 PM
10/22/2011	3:51:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	3:57:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	3:57:16 PM	Recipe started at 3:57 PM
10/22/2011	3:57:16 PM	Helium valve closed
10/22/2011	3:57:16 PM	H2 valve closed
10/22/2011	3:57:16 PM	BCl3 valve closed
10/22/2011	3:57:16 PM	PH3 valve closed
10/22/2011	3:57:16 PM	SiCl4 pre valve closed
10/22/2011	3:57:16 PM	SiCl4 post valve closed
10/22/2011	3:57:16 PM	Main Vac valve closed
10/22/2011	3:57:16 PM	Bubbler valve closed
10/22/2011	3:57:16 PM	Bypass valve opened
10/22/2011	3:57:16 PM	Helium MFC set to  0.000000
10/22/2011	3:57:16 PM	H2 MFC set to  0.000000
10/22/2011	3:57:16 PM	BCl3 MFC set to  0.000000
10/22/2011	3:57:16 PM	PHl3 MFC set to  0.000000
10/22/2011	3:57:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:57:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:57:16 PM	Tube furnace set to 0
10/22/2011	3:58:14 PM	Helium valve closed
10/22/2011	3:58:14 PM	H2 valve closed
10/22/2011	3:58:14 PM	BCl3 valve closed
10/22/2011	3:58:14 PM	PH3 valve closed
10/22/2011	3:58:14 PM	SiCl4 pre valve closed
10/22/2011	3:58:14 PM	SiCl4 post valve closed
10/22/2011	3:58:14 PM	Main Vac valve closed
10/22/2011	3:58:14 PM	Bubbler valve closed
10/22/2011	3:58:14 PM	Bypass valve opened
10/22/2011	3:58:14 PM	Helium MFC set to  0.000000
10/22/2011	3:58:14 PM	H2 MFC set to  0.000000
10/22/2011	3:58:14 PM	BCl3 MFC set to  0.000000
10/22/2011	3:58:14 PM	PHl3 MFC set to  0.000000
10/22/2011	3:58:14 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:58:14 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:58:14 PM	Tube furnace set to 0
10/22/2011	3:59:14 PM	Helium valve closed
10/22/2011	3:59:14 PM	H2 valve closed
10/22/2011	3:59:14 PM	BCl3 valve closed
10/22/2011	3:59:14 PM	PH3 valve closed
10/22/2011	3:59:14 PM	SiCl4 pre valve closed
10/22/2011	3:59:14 PM	SiCl4 post valve closed
10/22/2011	3:59:14 PM	Bypass valve closed
10/22/2011	3:59:14 PM	Bubbler valve closed
10/22/2011	3:59:14 PM	Main Vac valve opened
10/22/2011	3:59:14 PM	Helium MFC set to  0.000000
10/22/2011	3:59:14 PM	H2 MFC set to  0.000000
10/22/2011	3:59:14 PM	BCl3 MFC set to  0.000000
10/22/2011	3:59:14 PM	PHl3 MFC set to  0.000000
10/22/2011	3:59:14 PM	SiCl4 MFC set to  0.000000
10/22/2011	3:59:14 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	3:59:14 PM	Tube furnace set to 0
10/22/2011	3:59:15 PM	Run finished at 3:59 PM
10/22/2011	3:59:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	4:00:21 PM	Recipe started at 4:00 PM
10/22/2011	4:00:21 PM	Helium valve closed
10/22/2011	4:00:21 PM	H2 valve closed
10/22/2011	4:00:21 PM	BCl3 valve closed
10/22/2011	4:00:21 PM	PH3 valve closed
10/22/2011	4:00:21 PM	SiCl4 pre valve closed
10/22/2011	4:00:21 PM	SiCl4 post valve closed
10/22/2011	4:00:21 PM	Main Vac valve closed
10/22/2011	4:00:21 PM	Bubbler valve closed
10/22/2011	4:00:21 PM	Bypass valve opened
10/22/2011	4:00:21 PM	Helium MFC set to  0.000000
10/22/2011	4:00:21 PM	H2 MFC set to  0.000000
10/22/2011	4:00:21 PM	BCl3 MFC set to  0.000000
10/22/2011	4:00:21 PM	PHl3 MFC set to  0.000000
10/22/2011	4:00:21 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:00:21 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:00:21 PM	Tube furnace set to 150
10/22/2011	4:00:22 PM	Helium valve closed
10/22/2011	4:00:22 PM	H2 valve closed
10/22/2011	4:00:22 PM	BCl3 valve closed
10/22/2011	4:00:22 PM	PH3 valve closed
10/22/2011	4:00:22 PM	SiCl4 pre valve closed
10/22/2011	4:00:22 PM	SiCl4 post valve closed
10/22/2011	4:00:22 PM	Main Vac valve closed
10/22/2011	4:00:22 PM	Bubbler valve closed
10/22/2011	4:00:22 PM	Bypass valve opened
10/22/2011	4:00:22 PM	Helium MFC set to  0.000000
10/22/2011	4:00:22 PM	H2 MFC set to  0.000000
10/22/2011	4:00:22 PM	BCl3 MFC set to  0.000000
10/22/2011	4:00:22 PM	PHl3 MFC set to  0.000000
10/22/2011	4:00:22 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:00:22 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:00:22 PM	Tube furnace set to 150
10/22/2011	4:00:52 PM	Helium valve closed
10/22/2011	4:00:52 PM	H2 valve closed
10/22/2011	4:00:52 PM	BCl3 valve closed
10/22/2011	4:00:52 PM	PH3 valve closed
10/22/2011	4:00:52 PM	SiCl4 pre valve closed
10/22/2011	4:00:52 PM	SiCl4 post valve closed
10/22/2011	4:00:52 PM	Bypass valve closed
10/22/2011	4:00:52 PM	Bubbler valve closed
10/22/2011	4:00:52 PM	Main Vac valve opened
10/22/2011	4:00:52 PM	Helium MFC set to  0.000000
10/22/2011	4:00:52 PM	H2 MFC set to  0.000000
10/22/2011	4:00:52 PM	BCl3 MFC set to  0.000000
10/22/2011	4:00:52 PM	PHl3 MFC set to  0.000000
10/22/2011	4:00:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:00:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:00:52 PM	Tube furnace set to 150
10/22/2011	4:01:22 PM	H2 valve closed
10/22/2011	4:01:22 PM	BCl3 valve closed
10/22/2011	4:01:22 PM	PH3 valve closed
10/22/2011	4:01:22 PM	SiCl4 pre valve closed
10/22/2011	4:01:22 PM	SiCl4 post valve closed
10/22/2011	4:01:22 PM	Bypass valve closed
10/22/2011	4:01:22 PM	Bubbler valve closed
10/22/2011	4:01:22 PM	Helium valve opened
10/22/2011	4:01:22 PM	Main Vac valve opened
10/22/2011	4:01:22 PM	Helium MFC set to  20.000000
10/22/2011	4:01:22 PM	H2 MFC set to  0.000000
10/22/2011	4:01:22 PM	BCl3 MFC set to  0.000000
10/22/2011	4:01:22 PM	PHl3 MFC set to  0.000000
10/22/2011	4:01:22 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:01:22 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:01:22 PM	Tube furnace set to 150
10/22/2011	4:01:52 PM	Helium valve closed
10/22/2011	4:01:52 PM	H2 valve closed
10/22/2011	4:01:52 PM	BCl3 valve closed
10/22/2011	4:01:52 PM	PH3 valve closed
10/22/2011	4:01:52 PM	SiCl4 pre valve closed
10/22/2011	4:01:52 PM	SiCl4 post valve closed
10/22/2011	4:01:52 PM	Bypass valve closed
10/22/2011	4:01:52 PM	Bubbler valve closed
10/22/2011	4:01:52 PM	Main Vac valve opened
10/22/2011	4:01:52 PM	Helium MFC set to  0.000000
10/22/2011	4:01:52 PM	H2 MFC set to  0.000000
10/22/2011	4:01:52 PM	BCl3 MFC set to  0.000000
10/22/2011	4:01:52 PM	PHl3 MFC set to  0.000000
10/22/2011	4:01:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:01:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:01:53 PM	Tube furnace set to 150
10/22/2011	4:02:23 PM	H2 valve closed
10/22/2011	4:02:23 PM	BCl3 valve closed
10/22/2011	4:02:23 PM	PH3 valve closed
10/22/2011	4:02:23 PM	SiCl4 pre valve closed
10/22/2011	4:02:23 PM	SiCl4 post valve closed
10/22/2011	4:02:23 PM	Bypass valve closed
10/22/2011	4:02:23 PM	Bubbler valve closed
10/22/2011	4:02:23 PM	Helium valve opened
10/22/2011	4:02:23 PM	Main Vac valve opened
10/22/2011	4:02:23 PM	Helium MFC set to  20.000000
10/22/2011	4:02:23 PM	H2 MFC set to  0.000000
10/22/2011	4:02:23 PM	BCl3 MFC set to  0.000000
10/22/2011	4:02:23 PM	PHl3 MFC set to  0.000000
10/22/2011	4:02:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:02:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:02:23 PM	Tube furnace set to 150
10/22/2011	4:02:53 PM	Helium valve closed
10/22/2011	4:02:53 PM	H2 valve closed
10/22/2011	4:02:53 PM	BCl3 valve closed
10/22/2011	4:02:53 PM	PH3 valve closed
10/22/2011	4:02:53 PM	SiCl4 pre valve closed
10/22/2011	4:02:53 PM	SiCl4 post valve closed
10/22/2011	4:02:53 PM	Bypass valve closed
10/22/2011	4:02:53 PM	Bubbler valve closed
10/22/2011	4:02:53 PM	Main Vac valve opened
10/22/2011	4:02:53 PM	Helium MFC set to  0.000000
10/22/2011	4:02:53 PM	H2 MFC set to  0.000000
10/22/2011	4:02:53 PM	BCl3 MFC set to  0.000000
10/22/2011	4:02:53 PM	PHl3 MFC set to  0.000000
10/22/2011	4:02:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:02:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:02:53 PM	Tube furnace set to 150
10/22/2011	4:03:23 PM	H2 valve closed
10/22/2011	4:03:23 PM	BCl3 valve closed
10/22/2011	4:03:23 PM	PH3 valve closed
10/22/2011	4:03:23 PM	SiCl4 pre valve closed
10/22/2011	4:03:23 PM	SiCl4 post valve closed
10/22/2011	4:03:23 PM	Bypass valve closed
10/22/2011	4:03:23 PM	Bubbler valve closed
10/22/2011	4:03:23 PM	Helium valve opened
10/22/2011	4:03:23 PM	Main Vac valve opened
10/22/2011	4:03:23 PM	Helium MFC set to  20.000000
10/22/2011	4:03:23 PM	H2 MFC set to  0.000000
10/22/2011	4:03:23 PM	BCl3 MFC set to  0.000000
10/22/2011	4:03:23 PM	PHl3 MFC set to  0.000000
10/22/2011	4:03:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:03:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:03:23 PM	Tube furnace set to 150
10/22/2011	4:03:53 PM	Helium valve closed
10/22/2011	4:03:53 PM	H2 valve closed
10/22/2011	4:03:53 PM	BCl3 valve closed
10/22/2011	4:03:53 PM	PH3 valve closed
10/22/2011	4:03:53 PM	SiCl4 pre valve closed
10/22/2011	4:03:53 PM	SiCl4 post valve closed
10/22/2011	4:03:53 PM	Bypass valve closed
10/22/2011	4:03:53 PM	Bubbler valve closed
10/22/2011	4:03:53 PM	Main Vac valve opened
10/22/2011	4:03:53 PM	Helium MFC set to  0.000000
10/22/2011	4:03:53 PM	H2 MFC set to  0.000000
10/22/2011	4:03:53 PM	BCl3 MFC set to  0.000000
10/22/2011	4:03:53 PM	PHl3 MFC set to  0.000000
10/22/2011	4:03:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:03:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:03:53 PM	Tube furnace set to 150
10/22/2011	4:04:23 PM	H2 valve closed
10/22/2011	4:04:23 PM	BCl3 valve closed
10/22/2011	4:04:23 PM	PH3 valve closed
10/22/2011	4:04:23 PM	SiCl4 pre valve closed
10/22/2011	4:04:23 PM	SiCl4 post valve closed
10/22/2011	4:04:23 PM	Bypass valve closed
10/22/2011	4:04:23 PM	Bubbler valve closed
10/22/2011	4:04:23 PM	Helium valve opened
10/22/2011	4:04:23 PM	Main Vac valve opened
10/22/2011	4:04:23 PM	Helium MFC set to  20.000000
10/22/2011	4:04:23 PM	H2 MFC set to  0.000000
10/22/2011	4:04:23 PM	BCl3 MFC set to  0.000000
10/22/2011	4:04:23 PM	PHl3 MFC set to  0.000000
10/22/2011	4:04:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:04:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:04:24 PM	Tube furnace set to 150
10/22/2011	4:04:54 PM	Helium valve closed
10/22/2011	4:04:54 PM	H2 valve closed
10/22/2011	4:04:54 PM	BCl3 valve closed
10/22/2011	4:04:54 PM	PH3 valve closed
10/22/2011	4:04:54 PM	SiCl4 pre valve closed
10/22/2011	4:04:54 PM	SiCl4 post valve closed
10/22/2011	4:04:54 PM	Bypass valve closed
10/22/2011	4:04:54 PM	Bubbler valve closed
10/22/2011	4:04:54 PM	Main Vac valve opened
10/22/2011	4:04:54 PM	Helium MFC set to  0.000000
10/22/2011	4:04:54 PM	H2 MFC set to  0.000000
10/22/2011	4:04:54 PM	BCl3 MFC set to  0.000000
10/22/2011	4:04:54 PM	PHl3 MFC set to  0.000000
10/22/2011	4:04:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:04:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:04:54 PM	Tube furnace set to 150
10/22/2011	4:05:24 PM	H2 valve closed
10/22/2011	4:05:24 PM	BCl3 valve closed
10/22/2011	4:05:24 PM	PH3 valve closed
10/22/2011	4:05:24 PM	SiCl4 pre valve closed
10/22/2011	4:05:24 PM	SiCl4 post valve closed
10/22/2011	4:05:24 PM	Bypass valve closed
10/22/2011	4:05:24 PM	Bubbler valve closed
10/22/2011	4:05:24 PM	Helium valve opened
10/22/2011	4:05:24 PM	Main Vac valve opened
10/22/2011	4:05:24 PM	Helium MFC set to  20.000000
10/22/2011	4:05:24 PM	H2 MFC set to  0.000000
10/22/2011	4:05:24 PM	BCl3 MFC set to  0.000000
10/22/2011	4:05:24 PM	PHl3 MFC set to  0.000000
10/22/2011	4:05:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:05:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:05:24 PM	Tube furnace set to 150
10/22/2011	4:05:54 PM	Helium valve closed
10/22/2011	4:05:54 PM	H2 valve closed
10/22/2011	4:05:54 PM	BCl3 valve closed
10/22/2011	4:05:54 PM	PH3 valve closed
10/22/2011	4:05:54 PM	SiCl4 pre valve closed
10/22/2011	4:05:54 PM	SiCl4 post valve closed
10/22/2011	4:05:54 PM	Bypass valve closed
10/22/2011	4:05:54 PM	Bubbler valve closed
10/22/2011	4:05:54 PM	Main Vac valve opened
10/22/2011	4:05:54 PM	Helium MFC set to  0.000000
10/22/2011	4:05:54 PM	H2 MFC set to  0.000000
10/22/2011	4:05:54 PM	BCl3 MFC set to  0.000000
10/22/2011	4:05:54 PM	PHl3 MFC set to  0.000000
10/22/2011	4:05:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:05:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:05:54 PM	Tube furnace set to 150
10/22/2011	4:06:24 PM	H2 valve closed
10/22/2011	4:06:24 PM	BCl3 valve closed
10/22/2011	4:06:24 PM	PH3 valve closed
10/22/2011	4:06:24 PM	SiCl4 pre valve closed
10/22/2011	4:06:24 PM	SiCl4 post valve closed
10/22/2011	4:06:24 PM	Bypass valve closed
10/22/2011	4:06:24 PM	Bubbler valve closed
10/22/2011	4:06:24 PM	Helium valve opened
10/22/2011	4:06:24 PM	Main Vac valve opened
10/22/2011	4:06:24 PM	Helium MFC set to  20.000000
10/22/2011	4:06:24 PM	H2 MFC set to  0.000000
10/22/2011	4:06:24 PM	BCl3 MFC set to  0.000000
10/22/2011	4:06:24 PM	PHl3 MFC set to  0.000000
10/22/2011	4:06:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:06:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:06:24 PM	Tube furnace set to 150
10/22/2011	4:06:54 PM	Helium valve closed
10/22/2011	4:06:54 PM	H2 valve closed
10/22/2011	4:06:54 PM	BCl3 valve closed
10/22/2011	4:06:54 PM	PH3 valve closed
10/22/2011	4:06:54 PM	SiCl4 pre valve closed
10/22/2011	4:06:54 PM	SiCl4 post valve closed
10/22/2011	4:06:54 PM	Bypass valve closed
10/22/2011	4:06:54 PM	Bubbler valve closed
10/22/2011	4:06:54 PM	Main Vac valve opened
10/22/2011	4:06:54 PM	Helium MFC set to  0.000000
10/22/2011	4:06:54 PM	H2 MFC set to  0.000000
10/22/2011	4:06:54 PM	BCl3 MFC set to  0.000000
10/22/2011	4:06:54 PM	PHl3 MFC set to  0.000000
10/22/2011	4:06:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:06:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:06:54 PM	Tube furnace set to 150
10/22/2011	4:07:25 PM	H2 valve closed
10/22/2011	4:07:25 PM	BCl3 valve closed
10/22/2011	4:07:25 PM	PH3 valve closed
10/22/2011	4:07:25 PM	SiCl4 pre valve closed
10/22/2011	4:07:25 PM	SiCl4 post valve closed
10/22/2011	4:07:25 PM	Bypass valve closed
10/22/2011	4:07:25 PM	Bubbler valve closed
10/22/2011	4:07:25 PM	Helium valve opened
10/22/2011	4:07:25 PM	Main Vac valve opened
10/22/2011	4:07:25 PM	Helium MFC set to  20.000000
10/22/2011	4:07:25 PM	H2 MFC set to  0.000000
10/22/2011	4:07:25 PM	BCl3 MFC set to  0.000000
10/22/2011	4:07:25 PM	PHl3 MFC set to  0.000000
10/22/2011	4:07:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:07:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:07:25 PM	Tube furnace set to 150
10/22/2011	4:07:55 PM	Helium valve closed
10/22/2011	4:07:55 PM	H2 valve closed
10/22/2011	4:07:55 PM	BCl3 valve closed
10/22/2011	4:07:55 PM	PH3 valve closed
10/22/2011	4:07:55 PM	SiCl4 pre valve closed
10/22/2011	4:07:55 PM	SiCl4 post valve closed
10/22/2011	4:07:55 PM	Bypass valve closed
10/22/2011	4:07:55 PM	Bubbler valve closed
10/22/2011	4:07:55 PM	Main Vac valve opened
10/22/2011	4:07:55 PM	Helium MFC set to  0.000000
10/22/2011	4:07:55 PM	H2 MFC set to  0.000000
10/22/2011	4:07:55 PM	BCl3 MFC set to  0.000000
10/22/2011	4:07:55 PM	PHl3 MFC set to  0.000000
10/22/2011	4:07:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:07:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:07:55 PM	Tube furnace set to 150
10/22/2011	4:08:25 PM	H2 valve closed
10/22/2011	4:08:25 PM	BCl3 valve closed
10/22/2011	4:08:25 PM	PH3 valve closed
10/22/2011	4:08:25 PM	SiCl4 pre valve closed
10/22/2011	4:08:25 PM	SiCl4 post valve closed
10/22/2011	4:08:25 PM	Bypass valve closed
10/22/2011	4:08:25 PM	Bubbler valve closed
10/22/2011	4:08:25 PM	Helium valve opened
10/22/2011	4:08:25 PM	Main Vac valve opened
10/22/2011	4:08:25 PM	Helium MFC set to  20.000000
10/22/2011	4:08:25 PM	H2 MFC set to  0.000000
10/22/2011	4:08:25 PM	BCl3 MFC set to  0.000000
10/22/2011	4:08:25 PM	PHl3 MFC set to  0.000000
10/22/2011	4:08:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:08:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:08:25 PM	Tube furnace set to 150
10/22/2011	4:08:55 PM	Helium valve closed
10/22/2011	4:08:55 PM	H2 valve closed
10/22/2011	4:08:55 PM	BCl3 valve closed
10/22/2011	4:08:55 PM	PH3 valve closed
10/22/2011	4:08:55 PM	SiCl4 pre valve closed
10/22/2011	4:08:55 PM	SiCl4 post valve closed
10/22/2011	4:08:55 PM	Bypass valve closed
10/22/2011	4:08:55 PM	Bubbler valve closed
10/22/2011	4:08:55 PM	Main Vac valve opened
10/22/2011	4:08:55 PM	Helium MFC set to  0.000000
10/22/2011	4:08:55 PM	H2 MFC set to  0.000000
10/22/2011	4:08:55 PM	BCl3 MFC set to  0.000000
10/22/2011	4:08:55 PM	PHl3 MFC set to  0.000000
10/22/2011	4:08:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:08:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:08:55 PM	Tube furnace set to 150
10/22/2011	4:09:25 PM	H2 valve closed
10/22/2011	4:09:25 PM	BCl3 valve closed
10/22/2011	4:09:25 PM	PH3 valve closed
10/22/2011	4:09:25 PM	SiCl4 pre valve closed
10/22/2011	4:09:25 PM	SiCl4 post valve closed
10/22/2011	4:09:25 PM	Bypass valve closed
10/22/2011	4:09:25 PM	Bubbler valve closed
10/22/2011	4:09:25 PM	Helium valve opened
10/22/2011	4:09:25 PM	Main Vac valve opened
10/22/2011	4:09:25 PM	Helium MFC set to  20.000000
10/22/2011	4:09:25 PM	H2 MFC set to  0.000000
10/22/2011	4:09:25 PM	BCl3 MFC set to  0.000000
10/22/2011	4:09:25 PM	PHl3 MFC set to  0.000000
10/22/2011	4:09:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:09:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:09:25 PM	Tube furnace set to 150
10/22/2011	4:09:55 PM	Helium valve closed
10/22/2011	4:09:55 PM	H2 valve closed
10/22/2011	4:09:55 PM	BCl3 valve closed
10/22/2011	4:09:55 PM	PH3 valve closed
10/22/2011	4:09:56 PM	SiCl4 pre valve closed
10/22/2011	4:09:56 PM	SiCl4 post valve closed
10/22/2011	4:09:56 PM	Bypass valve closed
10/22/2011	4:09:56 PM	Bubbler valve closed
10/22/2011	4:09:56 PM	Main Vac valve opened
10/22/2011	4:09:56 PM	Helium MFC set to  0.000000
10/22/2011	4:09:56 PM	H2 MFC set to  0.000000
10/22/2011	4:09:56 PM	BCl3 MFC set to  0.000000
10/22/2011	4:09:56 PM	PHl3 MFC set to  0.000000
10/22/2011	4:09:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:09:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:09:56 PM	Tube furnace set to 150
10/22/2011	4:10:26 PM	H2 valve closed
10/22/2011	4:10:26 PM	BCl3 valve closed
10/22/2011	4:10:26 PM	PH3 valve closed
10/22/2011	4:10:26 PM	SiCl4 pre valve closed
10/22/2011	4:10:26 PM	SiCl4 post valve closed
10/22/2011	4:10:26 PM	Bypass valve closed
10/22/2011	4:10:26 PM	Bubbler valve closed
10/22/2011	4:10:26 PM	Helium valve opened
10/22/2011	4:10:26 PM	Main Vac valve opened
10/22/2011	4:10:26 PM	Helium MFC set to  20.000000
10/22/2011	4:10:26 PM	H2 MFC set to  0.000000
10/22/2011	4:10:26 PM	BCl3 MFC set to  0.000000
10/22/2011	4:10:26 PM	PHl3 MFC set to  0.000000
10/22/2011	4:10:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:10:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:10:26 PM	Tube furnace set to 150
10/22/2011	4:10:56 PM	Helium valve closed
10/22/2011	4:10:56 PM	H2 valve closed
10/22/2011	4:10:56 PM	BCl3 valve closed
10/22/2011	4:10:56 PM	PH3 valve closed
10/22/2011	4:10:56 PM	SiCl4 pre valve closed
10/22/2011	4:10:56 PM	SiCl4 post valve closed
10/22/2011	4:10:56 PM	Bypass valve closed
10/22/2011	4:10:56 PM	Bubbler valve closed
10/22/2011	4:10:56 PM	Main Vac valve opened
10/22/2011	4:10:56 PM	Helium MFC set to  0.000000
10/22/2011	4:10:56 PM	H2 MFC set to  0.000000
10/22/2011	4:10:56 PM	BCl3 MFC set to  0.000000
10/22/2011	4:10:56 PM	PHl3 MFC set to  0.000000
10/22/2011	4:10:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:10:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:10:56 PM	Tube furnace set to 150
10/22/2011	4:11:26 PM	H2 valve closed
10/22/2011	4:11:26 PM	BCl3 valve closed
10/22/2011	4:11:26 PM	PH3 valve closed
10/22/2011	4:11:26 PM	SiCl4 pre valve closed
10/22/2011	4:11:26 PM	SiCl4 post valve closed
10/22/2011	4:11:26 PM	Bypass valve closed
10/22/2011	4:11:26 PM	Bubbler valve closed
10/22/2011	4:11:26 PM	Helium valve opened
10/22/2011	4:11:26 PM	Main Vac valve opened
10/22/2011	4:11:26 PM	Helium MFC set to  20.000000
10/22/2011	4:11:26 PM	H2 MFC set to  0.000000
10/22/2011	4:11:26 PM	BCl3 MFC set to  0.000000
10/22/2011	4:11:26 PM	PHl3 MFC set to  0.000000
10/22/2011	4:11:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:11:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:11:26 PM	Tube furnace set to 150
10/22/2011	4:11:56 PM	Helium valve closed
10/22/2011	4:11:56 PM	H2 valve closed
10/22/2011	4:11:56 PM	BCl3 valve closed
10/22/2011	4:11:56 PM	PH3 valve closed
10/22/2011	4:11:56 PM	SiCl4 pre valve closed
10/22/2011	4:11:56 PM	SiCl4 post valve closed
10/22/2011	4:11:56 PM	Bypass valve closed
10/22/2011	4:11:56 PM	Bubbler valve closed
10/22/2011	4:11:56 PM	Main Vac valve opened
10/22/2011	4:11:56 PM	Helium MFC set to  0.000000
10/22/2011	4:11:56 PM	H2 MFC set to  0.000000
10/22/2011	4:11:56 PM	BCl3 MFC set to  0.000000
10/22/2011	4:11:56 PM	PHl3 MFC set to  0.000000
10/22/2011	4:11:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:11:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:11:56 PM	Tube furnace set to 150
10/22/2011	4:12:26 PM	H2 valve closed
10/22/2011	4:12:26 PM	BCl3 valve closed
10/22/2011	4:12:26 PM	PH3 valve closed
10/22/2011	4:12:26 PM	SiCl4 pre valve closed
10/22/2011	4:12:26 PM	SiCl4 post valve closed
10/22/2011	4:12:26 PM	Bypass valve closed
10/22/2011	4:12:26 PM	Bubbler valve closed
10/22/2011	4:12:26 PM	Helium valve opened
10/22/2011	4:12:26 PM	Main Vac valve opened
10/22/2011	4:12:26 PM	Helium MFC set to  20.000000
10/22/2011	4:12:26 PM	H2 MFC set to  0.000000
10/22/2011	4:12:26 PM	BCl3 MFC set to  0.000000
10/22/2011	4:12:26 PM	PHl3 MFC set to  0.000000
10/22/2011	4:12:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:12:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:12:27 PM	Tube furnace set to 150
10/22/2011	4:12:57 PM	Helium valve closed
10/22/2011	4:12:57 PM	H2 valve closed
10/22/2011	4:12:57 PM	BCl3 valve closed
10/22/2011	4:12:57 PM	PH3 valve closed
10/22/2011	4:12:57 PM	SiCl4 pre valve closed
10/22/2011	4:12:57 PM	SiCl4 post valve closed
10/22/2011	4:12:57 PM	Bypass valve closed
10/22/2011	4:12:57 PM	Bubbler valve closed
10/22/2011	4:12:57 PM	Main Vac valve opened
10/22/2011	4:12:57 PM	Helium MFC set to  0.000000
10/22/2011	4:12:57 PM	H2 MFC set to  0.000000
10/22/2011	4:12:57 PM	BCl3 MFC set to  0.000000
10/22/2011	4:12:57 PM	PHl3 MFC set to  0.000000
10/22/2011	4:12:57 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:12:57 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:12:57 PM	Tube furnace set to 150
10/22/2011	4:13:27 PM	H2 valve closed
10/22/2011	4:13:27 PM	BCl3 valve closed
10/22/2011	4:13:27 PM	PH3 valve closed
10/22/2011	4:13:27 PM	SiCl4 pre valve closed
10/22/2011	4:13:27 PM	SiCl4 post valve closed
10/22/2011	4:13:27 PM	Bypass valve closed
10/22/2011	4:13:27 PM	Bubbler valve closed
10/22/2011	4:13:27 PM	Helium valve opened
10/22/2011	4:13:27 PM	Main Vac valve opened
10/22/2011	4:13:27 PM	Helium MFC set to  20.000000
10/22/2011	4:13:27 PM	H2 MFC set to  0.000000
10/22/2011	4:13:27 PM	BCl3 MFC set to  0.000000
10/22/2011	4:13:27 PM	PHl3 MFC set to  0.000000
10/22/2011	4:13:27 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:13:27 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:13:27 PM	Tube furnace set to 150
10/22/2011	4:13:57 PM	Helium valve closed
10/22/2011	4:13:57 PM	H2 valve closed
10/22/2011	4:13:57 PM	BCl3 valve closed
10/22/2011	4:13:57 PM	PH3 valve closed
10/22/2011	4:13:57 PM	SiCl4 pre valve closed
10/22/2011	4:13:57 PM	SiCl4 post valve closed
10/22/2011	4:13:57 PM	Bypass valve closed
10/22/2011	4:13:57 PM	Bubbler valve closed
10/22/2011	4:13:57 PM	Main Vac valve opened
10/22/2011	4:13:57 PM	Helium MFC set to  0.000000
10/22/2011	4:13:57 PM	H2 MFC set to  0.000000
10/22/2011	4:13:57 PM	BCl3 MFC set to  0.000000
10/22/2011	4:13:57 PM	PHl3 MFC set to  0.000000
10/22/2011	4:13:57 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:13:57 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:13:57 PM	Tube furnace set to 150
10/22/2011	4:14:27 PM	H2 valve closed
10/22/2011	4:14:27 PM	BCl3 valve closed
10/22/2011	4:14:27 PM	PH3 valve closed
10/22/2011	4:14:27 PM	SiCl4 pre valve closed
10/22/2011	4:14:27 PM	SiCl4 post valve closed
10/22/2011	4:14:27 PM	Bypass valve closed
10/22/2011	4:14:27 PM	Bubbler valve closed
10/22/2011	4:14:27 PM	Helium valve opened
10/22/2011	4:14:27 PM	Main Vac valve opened
10/22/2011	4:14:27 PM	Helium MFC set to  20.000000
10/22/2011	4:14:27 PM	H2 MFC set to  0.000000
10/22/2011	4:14:27 PM	BCl3 MFC set to  0.000000
10/22/2011	4:14:27 PM	PHl3 MFC set to  0.000000
10/22/2011	4:14:27 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:14:27 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:14:28 PM	Tube furnace set to 150
10/22/2011	4:14:58 PM	Helium valve closed
10/22/2011	4:14:58 PM	H2 valve closed
10/22/2011	4:14:58 PM	BCl3 valve closed
10/22/2011	4:14:58 PM	PH3 valve closed
10/22/2011	4:14:58 PM	SiCl4 pre valve closed
10/22/2011	4:14:58 PM	SiCl4 post valve closed
10/22/2011	4:14:58 PM	Bypass valve closed
10/22/2011	4:14:58 PM	Bubbler valve closed
10/22/2011	4:14:58 PM	Main Vac valve opened
10/22/2011	4:14:58 PM	Helium MFC set to  0.000000
10/22/2011	4:14:58 PM	H2 MFC set to  0.000000
10/22/2011	4:14:58 PM	BCl3 MFC set to  0.000000
10/22/2011	4:14:58 PM	PHl3 MFC set to  0.000000
10/22/2011	4:14:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:14:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:14:58 PM	Tube furnace set to 150
10/22/2011	4:15:28 PM	H2 valve closed
10/22/2011	4:15:28 PM	BCl3 valve closed
10/22/2011	4:15:28 PM	PH3 valve closed
10/22/2011	4:15:28 PM	SiCl4 pre valve closed
10/22/2011	4:15:28 PM	SiCl4 post valve closed
10/22/2011	4:15:28 PM	Bypass valve closed
10/22/2011	4:15:28 PM	Bubbler valve closed
10/22/2011	4:15:28 PM	Helium valve opened
10/22/2011	4:15:28 PM	Main Vac valve opened
10/22/2011	4:15:28 PM	Helium MFC set to  20.000000
10/22/2011	4:15:28 PM	H2 MFC set to  0.000000
10/22/2011	4:15:28 PM	BCl3 MFC set to  0.000000
10/22/2011	4:15:28 PM	PHl3 MFC set to  0.000000
10/22/2011	4:15:28 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:15:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:15:28 PM	Tube furnace set to 150
10/22/2011	4:15:58 PM	Helium valve closed
10/22/2011	4:15:58 PM	H2 valve closed
10/22/2011	4:15:58 PM	BCl3 valve closed
10/22/2011	4:15:58 PM	PH3 valve closed
10/22/2011	4:15:58 PM	SiCl4 pre valve closed
10/22/2011	4:15:58 PM	SiCl4 post valve closed
10/22/2011	4:15:58 PM	Bypass valve closed
10/22/2011	4:15:58 PM	Bubbler valve closed
10/22/2011	4:15:58 PM	Main Vac valve opened
10/22/2011	4:15:58 PM	Helium MFC set to  0.000000
10/22/2011	4:15:58 PM	H2 MFC set to  0.000000
10/22/2011	4:15:58 PM	BCl3 MFC set to  0.000000
10/22/2011	4:15:58 PM	PHl3 MFC set to  0.000000
10/22/2011	4:15:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:15:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:15:58 PM	Tube furnace set to 150
10/22/2011	4:16:28 PM	H2 valve closed
10/22/2011	4:16:28 PM	BCl3 valve closed
10/22/2011	4:16:28 PM	PH3 valve closed
10/22/2011	4:16:28 PM	SiCl4 pre valve closed
10/22/2011	4:16:28 PM	SiCl4 post valve closed
10/22/2011	4:16:28 PM	Bypass valve closed
10/22/2011	4:16:28 PM	Bubbler valve closed
10/22/2011	4:16:28 PM	Helium valve opened
10/22/2011	4:16:28 PM	Main Vac valve opened
10/22/2011	4:16:28 PM	Helium MFC set to  20.000000
10/22/2011	4:16:28 PM	H2 MFC set to  0.000000
10/22/2011	4:16:28 PM	BCl3 MFC set to  0.000000
10/22/2011	4:16:28 PM	PHl3 MFC set to  0.000000
10/22/2011	4:16:28 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:16:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:16:28 PM	Tube furnace set to 150
10/22/2011	4:16:58 PM	Helium valve closed
10/22/2011	4:16:58 PM	H2 valve closed
10/22/2011	4:16:58 PM	BCl3 valve closed
10/22/2011	4:16:58 PM	PH3 valve closed
10/22/2011	4:16:58 PM	SiCl4 pre valve closed
10/22/2011	4:16:58 PM	SiCl4 post valve closed
10/22/2011	4:16:58 PM	Bypass valve closed
10/22/2011	4:16:58 PM	Bubbler valve closed
10/22/2011	4:16:58 PM	Main Vac valve opened
10/22/2011	4:16:58 PM	Helium MFC set to  0.000000
10/22/2011	4:16:58 PM	H2 MFC set to  0.000000
10/22/2011	4:16:58 PM	BCl3 MFC set to  0.000000
10/22/2011	4:16:58 PM	PHl3 MFC set to  0.000000
10/22/2011	4:16:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:16:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:16:59 PM	Tube furnace set to 150
10/22/2011	4:17:29 PM	H2 valve closed
10/22/2011	4:17:29 PM	BCl3 valve closed
10/22/2011	4:17:29 PM	PH3 valve closed
10/22/2011	4:17:29 PM	SiCl4 pre valve closed
10/22/2011	4:17:29 PM	SiCl4 post valve closed
10/22/2011	4:17:29 PM	Bypass valve closed
10/22/2011	4:17:29 PM	Bubbler valve closed
10/22/2011	4:17:29 PM	Helium valve opened
10/22/2011	4:17:29 PM	Main Vac valve opened
10/22/2011	4:17:29 PM	Helium MFC set to  20.000000
10/22/2011	4:17:29 PM	H2 MFC set to  0.000000
10/22/2011	4:17:29 PM	BCl3 MFC set to  0.000000
10/22/2011	4:17:29 PM	PHl3 MFC set to  0.000000
10/22/2011	4:17:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:17:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:17:29 PM	Tube furnace set to 150
10/22/2011	4:17:59 PM	Helium valve closed
10/22/2011	4:17:59 PM	H2 valve closed
10/22/2011	4:17:59 PM	BCl3 valve closed
10/22/2011	4:17:59 PM	PH3 valve closed
10/22/2011	4:17:59 PM	SiCl4 pre valve closed
10/22/2011	4:17:59 PM	SiCl4 post valve closed
10/22/2011	4:17:59 PM	Bypass valve closed
10/22/2011	4:17:59 PM	Bubbler valve closed
10/22/2011	4:17:59 PM	Main Vac valve opened
10/22/2011	4:17:59 PM	Helium MFC set to  0.000000
10/22/2011	4:17:59 PM	H2 MFC set to  0.000000
10/22/2011	4:17:59 PM	BCl3 MFC set to  0.000000
10/22/2011	4:17:59 PM	PHl3 MFC set to  0.000000
10/22/2011	4:17:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:17:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:17:59 PM	Tube furnace set to 150
10/22/2011	4:18:29 PM	H2 valve closed
10/22/2011	4:18:29 PM	BCl3 valve closed
10/22/2011	4:18:29 PM	PH3 valve closed
10/22/2011	4:18:29 PM	SiCl4 pre valve closed
10/22/2011	4:18:29 PM	SiCl4 post valve closed
10/22/2011	4:18:29 PM	Bypass valve closed
10/22/2011	4:18:29 PM	Bubbler valve closed
10/22/2011	4:18:29 PM	Helium valve opened
10/22/2011	4:18:29 PM	Main Vac valve opened
10/22/2011	4:18:29 PM	Helium MFC set to  20.000000
10/22/2011	4:18:29 PM	H2 MFC set to  0.000000
10/22/2011	4:18:29 PM	BCl3 MFC set to  0.000000
10/22/2011	4:18:29 PM	PHl3 MFC set to  0.000000
10/22/2011	4:18:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:18:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:18:29 PM	Tube furnace set to 150
10/22/2011	4:18:59 PM	Helium valve closed
10/22/2011	4:18:59 PM	H2 valve closed
10/22/2011	4:18:59 PM	BCl3 valve closed
10/22/2011	4:18:59 PM	PH3 valve closed
10/22/2011	4:18:59 PM	SiCl4 pre valve closed
10/22/2011	4:18:59 PM	SiCl4 post valve closed
10/22/2011	4:18:59 PM	Bypass valve closed
10/22/2011	4:18:59 PM	Bubbler valve closed
10/22/2011	4:18:59 PM	Main Vac valve opened
10/22/2011	4:18:59 PM	Helium MFC set to  0.000000
10/22/2011	4:18:59 PM	H2 MFC set to  0.000000
10/22/2011	4:18:59 PM	BCl3 MFC set to  0.000000
10/22/2011	4:18:59 PM	PHl3 MFC set to  0.000000
10/22/2011	4:18:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:18:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:18:59 PM	Tube furnace set to 150
10/22/2011	4:19:29 PM	H2 valve closed
10/22/2011	4:19:29 PM	BCl3 valve closed
10/22/2011	4:19:29 PM	PH3 valve closed
10/22/2011	4:19:29 PM	SiCl4 pre valve closed
10/22/2011	4:19:29 PM	SiCl4 post valve closed
10/22/2011	4:19:29 PM	Bypass valve closed
10/22/2011	4:19:29 PM	Bubbler valve closed
10/22/2011	4:19:29 PM	Helium valve opened
10/22/2011	4:19:30 PM	Main Vac valve opened
10/22/2011	4:19:30 PM	Helium MFC set to  20.000000
10/22/2011	4:19:30 PM	H2 MFC set to  0.000000
10/22/2011	4:19:30 PM	BCl3 MFC set to  0.000000
10/22/2011	4:19:30 PM	PHl3 MFC set to  0.000000
10/22/2011	4:19:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:19:30 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:19:30 PM	Tube furnace set to 150
10/22/2011	4:20:00 PM	Helium valve closed
10/22/2011	4:20:00 PM	H2 valve closed
10/22/2011	4:20:00 PM	BCl3 valve closed
10/22/2011	4:20:00 PM	PH3 valve closed
10/22/2011	4:20:00 PM	SiCl4 pre valve closed
10/22/2011	4:20:00 PM	SiCl4 post valve closed
10/22/2011	4:20:00 PM	Bypass valve closed
10/22/2011	4:20:00 PM	Bubbler valve closed
10/22/2011	4:20:00 PM	Main Vac valve opened
10/22/2011	4:20:00 PM	Helium MFC set to  0.000000
10/22/2011	4:20:00 PM	H2 MFC set to  0.000000
10/22/2011	4:20:00 PM	BCl3 MFC set to  0.000000
10/22/2011	4:20:00 PM	PHl3 MFC set to  0.000000
10/22/2011	4:20:00 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:20:00 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:20:00 PM	Tube furnace set to 150
10/22/2011	4:20:30 PM	H2 valve closed
10/22/2011	4:20:30 PM	BCl3 valve closed
10/22/2011	4:20:30 PM	PH3 valve closed
10/22/2011	4:20:30 PM	SiCl4 pre valve closed
10/22/2011	4:20:30 PM	SiCl4 post valve closed
10/22/2011	4:20:30 PM	Bypass valve closed
10/22/2011	4:20:30 PM	Bubbler valve closed
10/22/2011	4:20:30 PM	Helium valve opened
10/22/2011	4:20:30 PM	Main Vac valve opened
10/22/2011	4:20:30 PM	Helium MFC set to  20.000000
10/22/2011	4:20:30 PM	H2 MFC set to  0.000000
10/22/2011	4:20:30 PM	BCl3 MFC set to  0.000000
10/22/2011	4:20:30 PM	PHl3 MFC set to  0.000000
10/22/2011	4:20:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:20:30 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:20:30 PM	Tube furnace set to 150
10/22/2011	4:21:00 PM	Helium valve closed
10/22/2011	4:21:00 PM	H2 valve closed
10/22/2011	4:21:00 PM	BCl3 valve closed
10/22/2011	4:21:00 PM	PH3 valve closed
10/22/2011	4:21:00 PM	SiCl4 pre valve closed
10/22/2011	4:21:00 PM	SiCl4 post valve closed
10/22/2011	4:21:00 PM	Bypass valve closed
10/22/2011	4:21:00 PM	Bubbler valve closed
10/22/2011	4:21:00 PM	Main Vac valve opened
10/22/2011	4:21:00 PM	Helium MFC set to  0.000000
10/22/2011	4:21:00 PM	H2 MFC set to  0.000000
10/22/2011	4:21:00 PM	BCl3 MFC set to  0.000000
10/22/2011	4:21:00 PM	PHl3 MFC set to  0.000000
10/22/2011	4:21:00 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:21:00 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:21:00 PM	Tube furnace set to 180
10/22/2011	4:21:05 PM	Run finished at 4:21 PM
10/22/2011	4:41:43 PM	Recipe started at 4:41 PM
10/22/2011	4:41:43 PM	Helium valve closed
10/22/2011	4:41:43 PM	H2 valve closed
10/22/2011	4:41:43 PM	BCl3 valve closed
10/22/2011	4:41:43 PM	PH3 valve closed
10/22/2011	4:41:43 PM	SiCl4 pre valve closed
10/22/2011	4:41:43 PM	SiCl4 post valve closed
10/22/2011	4:41:43 PM	Main Vac valve closed
10/22/2011	4:41:43 PM	Bubbler valve closed
10/22/2011	4:41:43 PM	Bypass valve opened
10/22/2011	4:41:43 PM	Helium MFC set to  0.000000
10/22/2011	4:41:43 PM	H2 MFC set to  0.000000
10/22/2011	4:41:43 PM	BCl3 MFC set to  0.000000
10/22/2011	4:41:43 PM	PHl3 MFC set to  0.000000
10/22/2011	4:41:43 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:41:43 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:41:43 PM	Tube furnace set to 150
10/22/2011	4:41:44 PM	Helium valve closed
10/22/2011	4:41:44 PM	H2 valve closed
10/22/2011	4:41:44 PM	BCl3 valve closed
10/22/2011	4:41:44 PM	PH3 valve closed
10/22/2011	4:41:44 PM	SiCl4 pre valve closed
10/22/2011	4:41:44 PM	SiCl4 post valve closed
10/22/2011	4:41:44 PM	Main Vac valve closed
10/22/2011	4:41:44 PM	Bubbler valve closed
10/22/2011	4:41:44 PM	Bypass valve opened
10/22/2011	4:41:44 PM	Helium MFC set to  0.000000
10/22/2011	4:41:44 PM	H2 MFC set to  0.000000
10/22/2011	4:41:44 PM	BCl3 MFC set to  0.000000
10/22/2011	4:41:44 PM	PHl3 MFC set to  0.000000
10/22/2011	4:41:44 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:41:44 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:41:44 PM	Tube furnace set to 150
10/22/2011	4:42:14 PM	Helium valve closed
10/22/2011	4:42:14 PM	H2 valve closed
10/22/2011	4:42:14 PM	BCl3 valve closed
10/22/2011	4:42:14 PM	PH3 valve closed
10/22/2011	4:42:14 PM	SiCl4 pre valve closed
10/22/2011	4:42:14 PM	SiCl4 post valve closed
10/22/2011	4:42:14 PM	Bypass valve closed
10/22/2011	4:42:14 PM	Bubbler valve closed
10/22/2011	4:42:14 PM	Main Vac valve opened
10/22/2011	4:42:14 PM	Helium MFC set to  0.000000
10/22/2011	4:42:14 PM	H2 MFC set to  0.000000
10/22/2011	4:42:14 PM	BCl3 MFC set to  0.000000
10/22/2011	4:42:14 PM	PHl3 MFC set to  0.000000
10/22/2011	4:42:14 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:42:14 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:42:14 PM	Tube furnace set to 150
10/22/2011	4:42:44 PM	H2 valve closed
10/22/2011	4:42:44 PM	BCl3 valve closed
10/22/2011	4:42:44 PM	PH3 valve closed
10/22/2011	4:42:44 PM	SiCl4 pre valve closed
10/22/2011	4:42:44 PM	SiCl4 post valve closed
10/22/2011	4:42:44 PM	Bypass valve closed
10/22/2011	4:42:44 PM	Bubbler valve closed
10/22/2011	4:42:44 PM	Helium valve opened
10/22/2011	4:42:44 PM	Main Vac valve opened
10/22/2011	4:42:44 PM	Helium MFC set to  20.000000
10/22/2011	4:42:44 PM	H2 MFC set to  0.000000
10/22/2011	4:42:44 PM	BCl3 MFC set to  0.000000
10/22/2011	4:42:44 PM	PHl3 MFC set to  0.000000
10/22/2011	4:42:44 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:42:44 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:42:44 PM	Tube furnace set to 150
10/22/2011	4:43:14 PM	Helium valve closed
10/22/2011	4:43:14 PM	H2 valve closed
10/22/2011	4:43:14 PM	BCl3 valve closed
10/22/2011	4:43:14 PM	PH3 valve closed
10/22/2011	4:43:14 PM	SiCl4 pre valve closed
10/22/2011	4:43:14 PM	SiCl4 post valve closed
10/22/2011	4:43:14 PM	Bypass valve closed
10/22/2011	4:43:14 PM	Bubbler valve closed
10/22/2011	4:43:14 PM	Main Vac valve opened
10/22/2011	4:43:14 PM	Helium MFC set to  0.000000
10/22/2011	4:43:14 PM	H2 MFC set to  0.000000
10/22/2011	4:43:14 PM	BCl3 MFC set to  0.000000
10/22/2011	4:43:14 PM	PHl3 MFC set to  0.000000
10/22/2011	4:43:14 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:43:14 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:43:14 PM	Tube furnace set to 150
10/22/2011	4:43:44 PM	H2 valve closed
10/22/2011	4:43:44 PM	BCl3 valve closed
10/22/2011	4:43:44 PM	PH3 valve closed
10/22/2011	4:43:44 PM	SiCl4 pre valve closed
10/22/2011	4:43:44 PM	SiCl4 post valve closed
10/22/2011	4:43:44 PM	Bypass valve closed
10/22/2011	4:43:44 PM	Bubbler valve closed
10/22/2011	4:43:44 PM	Helium valve opened
10/22/2011	4:43:44 PM	Main Vac valve opened
10/22/2011	4:43:44 PM	Helium MFC set to  20.000000
10/22/2011	4:43:44 PM	H2 MFC set to  0.000000
10/22/2011	4:43:44 PM	BCl3 MFC set to  0.000000
10/22/2011	4:43:44 PM	PHl3 MFC set to  0.000000
10/22/2011	4:43:44 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:43:44 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:43:44 PM	Tube furnace set to 150
10/22/2011	4:44:15 PM	Helium valve closed
10/22/2011	4:44:15 PM	H2 valve closed
10/22/2011	4:44:15 PM	BCl3 valve closed
10/22/2011	4:44:15 PM	PH3 valve closed
10/22/2011	4:44:15 PM	SiCl4 pre valve closed
10/22/2011	4:44:15 PM	SiCl4 post valve closed
10/22/2011	4:44:15 PM	Bypass valve closed
10/22/2011	4:44:15 PM	Bubbler valve closed
10/22/2011	4:44:15 PM	Main Vac valve opened
10/22/2011	4:44:15 PM	Helium MFC set to  0.000000
10/22/2011	4:44:15 PM	H2 MFC set to  0.000000
10/22/2011	4:44:15 PM	BCl3 MFC set to  0.000000
10/22/2011	4:44:15 PM	PHl3 MFC set to  0.000000
10/22/2011	4:44:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:44:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:44:15 PM	Tube furnace set to 150
10/22/2011	4:44:45 PM	H2 valve closed
10/22/2011	4:44:45 PM	BCl3 valve closed
10/22/2011	4:44:45 PM	PH3 valve closed
10/22/2011	4:44:45 PM	SiCl4 pre valve closed
10/22/2011	4:44:45 PM	SiCl4 post valve closed
10/22/2011	4:44:45 PM	Bypass valve closed
10/22/2011	4:44:45 PM	Bubbler valve closed
10/22/2011	4:44:45 PM	Helium valve opened
10/22/2011	4:44:45 PM	Main Vac valve opened
10/22/2011	4:44:45 PM	Helium MFC set to  20.000000
10/22/2011	4:44:45 PM	H2 MFC set to  0.000000
10/22/2011	4:44:45 PM	BCl3 MFC set to  0.000000
10/22/2011	4:44:45 PM	PHl3 MFC set to  0.000000
10/22/2011	4:44:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:44:45 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:44:45 PM	Tube furnace set to 150
10/22/2011	4:45:15 PM	Helium valve closed
10/22/2011	4:45:15 PM	H2 valve closed
10/22/2011	4:45:15 PM	BCl3 valve closed
10/22/2011	4:45:15 PM	PH3 valve closed
10/22/2011	4:45:15 PM	SiCl4 pre valve closed
10/22/2011	4:45:15 PM	SiCl4 post valve closed
10/22/2011	4:45:15 PM	Bypass valve closed
10/22/2011	4:45:15 PM	Bubbler valve closed
10/22/2011	4:45:15 PM	Main Vac valve opened
10/22/2011	4:45:15 PM	Helium MFC set to  0.000000
10/22/2011	4:45:15 PM	H2 MFC set to  0.000000
10/22/2011	4:45:15 PM	BCl3 MFC set to  0.000000
10/22/2011	4:45:15 PM	PHl3 MFC set to  0.000000
10/22/2011	4:45:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:45:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:45:15 PM	Tube furnace set to 150
10/22/2011	4:45:45 PM	H2 valve closed
10/22/2011	4:45:45 PM	BCl3 valve closed
10/22/2011	4:45:45 PM	PH3 valve closed
10/22/2011	4:45:45 PM	SiCl4 pre valve closed
10/22/2011	4:45:45 PM	SiCl4 post valve closed
10/22/2011	4:45:45 PM	Bypass valve closed
10/22/2011	4:45:45 PM	Bubbler valve closed
10/22/2011	4:45:45 PM	Helium valve opened
10/22/2011	4:45:45 PM	Main Vac valve opened
10/22/2011	4:45:45 PM	Helium MFC set to  20.000000
10/22/2011	4:45:45 PM	H2 MFC set to  0.000000
10/22/2011	4:45:45 PM	BCl3 MFC set to  0.000000
10/22/2011	4:45:45 PM	PHl3 MFC set to  0.000000
10/22/2011	4:45:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:45:45 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:45:45 PM	Tube furnace set to 150
10/22/2011	4:46:15 PM	Helium valve closed
10/22/2011	4:46:15 PM	H2 valve closed
10/22/2011	4:46:15 PM	BCl3 valve closed
10/22/2011	4:46:15 PM	PH3 valve closed
10/22/2011	4:46:15 PM	SiCl4 pre valve closed
10/22/2011	4:46:15 PM	SiCl4 post valve closed
10/22/2011	4:46:15 PM	Bypass valve closed
10/22/2011	4:46:15 PM	Bubbler valve closed
10/22/2011	4:46:15 PM	Main Vac valve opened
10/22/2011	4:46:15 PM	Helium MFC set to  0.000000
10/22/2011	4:46:15 PM	H2 MFC set to  0.000000
10/22/2011	4:46:15 PM	BCl3 MFC set to  0.000000
10/22/2011	4:46:15 PM	PHl3 MFC set to  0.000000
10/22/2011	4:46:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:46:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:46:16 PM	Tube furnace set to 150
10/22/2011	4:46:46 PM	H2 valve closed
10/22/2011	4:46:46 PM	BCl3 valve closed
10/22/2011	4:46:46 PM	PH3 valve closed
10/22/2011	4:46:46 PM	SiCl4 pre valve closed
10/22/2011	4:46:46 PM	SiCl4 post valve closed
10/22/2011	4:46:46 PM	Bypass valve closed
10/22/2011	4:46:46 PM	Bubbler valve closed
10/22/2011	4:46:46 PM	Helium valve opened
10/22/2011	4:46:46 PM	Main Vac valve opened
10/22/2011	4:46:46 PM	Helium MFC set to  20.000000
10/22/2011	4:46:46 PM	H2 MFC set to  0.000000
10/22/2011	4:46:46 PM	BCl3 MFC set to  0.000000
10/22/2011	4:46:46 PM	PHl3 MFC set to  0.000000
10/22/2011	4:46:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:46:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:46:46 PM	Tube furnace set to 150
10/22/2011	4:47:16 PM	Helium valve closed
10/22/2011	4:47:16 PM	H2 valve closed
10/22/2011	4:47:16 PM	BCl3 valve closed
10/22/2011	4:47:16 PM	PH3 valve closed
10/22/2011	4:47:16 PM	SiCl4 pre valve closed
10/22/2011	4:47:16 PM	SiCl4 post valve closed
10/22/2011	4:47:16 PM	Bypass valve closed
10/22/2011	4:47:16 PM	Bubbler valve closed
10/22/2011	4:47:16 PM	Main Vac valve opened
10/22/2011	4:47:16 PM	Helium MFC set to  0.000000
10/22/2011	4:47:16 PM	H2 MFC set to  0.000000
10/22/2011	4:47:16 PM	BCl3 MFC set to  0.000000
10/22/2011	4:47:16 PM	PHl3 MFC set to  0.000000
10/22/2011	4:47:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:47:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:47:16 PM	Tube furnace set to 150
10/22/2011	4:47:46 PM	H2 valve closed
10/22/2011	4:47:46 PM	BCl3 valve closed
10/22/2011	4:47:46 PM	PH3 valve closed
10/22/2011	4:47:46 PM	SiCl4 pre valve closed
10/22/2011	4:47:46 PM	SiCl4 post valve closed
10/22/2011	4:47:46 PM	Bypass valve closed
10/22/2011	4:47:46 PM	Bubbler valve closed
10/22/2011	4:47:46 PM	Helium valve opened
10/22/2011	4:47:46 PM	Main Vac valve opened
10/22/2011	4:47:46 PM	Helium MFC set to  20.000000
10/22/2011	4:47:46 PM	H2 MFC set to  0.000000
10/22/2011	4:47:46 PM	BCl3 MFC set to  0.000000
10/22/2011	4:47:46 PM	PHl3 MFC set to  0.000000
10/22/2011	4:47:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:47:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:47:46 PM	Tube furnace set to 150
10/22/2011	4:48:16 PM	Helium valve closed
10/22/2011	4:48:16 PM	H2 valve closed
10/22/2011	4:48:16 PM	BCl3 valve closed
10/22/2011	4:48:16 PM	PH3 valve closed
10/22/2011	4:48:16 PM	SiCl4 pre valve closed
10/22/2011	4:48:16 PM	SiCl4 post valve closed
10/22/2011	4:48:16 PM	Bypass valve closed
10/22/2011	4:48:16 PM	Bubbler valve closed
10/22/2011	4:48:16 PM	Main Vac valve opened
10/22/2011	4:48:16 PM	Helium MFC set to  0.000000
10/22/2011	4:48:16 PM	H2 MFC set to  0.000000
10/22/2011	4:48:16 PM	BCl3 MFC set to  0.000000
10/22/2011	4:48:16 PM	PHl3 MFC set to  0.000000
10/22/2011	4:48:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:48:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:48:16 PM	Tube furnace set to 150
10/22/2011	4:48:46 PM	H2 valve closed
10/22/2011	4:48:46 PM	BCl3 valve closed
10/22/2011	4:48:46 PM	PH3 valve closed
10/22/2011	4:48:46 PM	SiCl4 pre valve closed
10/22/2011	4:48:46 PM	SiCl4 post valve closed
10/22/2011	4:48:46 PM	Bypass valve closed
10/22/2011	4:48:46 PM	Bubbler valve closed
10/22/2011	4:48:46 PM	Helium valve opened
10/22/2011	4:48:46 PM	Main Vac valve opened
10/22/2011	4:48:46 PM	Helium MFC set to  20.000000
10/22/2011	4:48:46 PM	H2 MFC set to  0.000000
10/22/2011	4:48:46 PM	BCl3 MFC set to  0.000000
10/22/2011	4:48:46 PM	PHl3 MFC set to  0.000000
10/22/2011	4:48:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:48:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:48:47 PM	Tube furnace set to 150
10/22/2011	4:49:17 PM	Helium valve closed
10/22/2011	4:49:17 PM	H2 valve closed
10/22/2011	4:49:17 PM	BCl3 valve closed
10/22/2011	4:49:17 PM	PH3 valve closed
10/22/2011	4:49:17 PM	SiCl4 pre valve closed
10/22/2011	4:49:17 PM	SiCl4 post valve closed
10/22/2011	4:49:17 PM	Bypass valve closed
10/22/2011	4:49:17 PM	Bubbler valve closed
10/22/2011	4:49:17 PM	Main Vac valve opened
10/22/2011	4:49:17 PM	Helium MFC set to  0.000000
10/22/2011	4:49:17 PM	H2 MFC set to  0.000000
10/22/2011	4:49:17 PM	BCl3 MFC set to  0.000000
10/22/2011	4:49:17 PM	PHl3 MFC set to  0.000000
10/22/2011	4:49:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:49:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:49:17 PM	Tube furnace set to 150
10/22/2011	4:49:47 PM	H2 valve closed
10/22/2011	4:49:47 PM	BCl3 valve closed
10/22/2011	4:49:47 PM	PH3 valve closed
10/22/2011	4:49:47 PM	SiCl4 pre valve closed
10/22/2011	4:49:47 PM	SiCl4 post valve closed
10/22/2011	4:49:47 PM	Bypass valve closed
10/22/2011	4:49:47 PM	Bubbler valve closed
10/22/2011	4:49:47 PM	Helium valve opened
10/22/2011	4:49:47 PM	Main Vac valve opened
10/22/2011	4:49:47 PM	Helium MFC set to  20.000000
10/22/2011	4:49:47 PM	H2 MFC set to  0.000000
10/22/2011	4:49:47 PM	BCl3 MFC set to  0.000000
10/22/2011	4:49:47 PM	PHl3 MFC set to  0.000000
10/22/2011	4:49:47 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:49:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:49:47 PM	Tube furnace set to 150
10/22/2011	4:50:17 PM	Helium valve closed
10/22/2011	4:50:17 PM	H2 valve closed
10/22/2011	4:50:17 PM	BCl3 valve closed
10/22/2011	4:50:17 PM	PH3 valve closed
10/22/2011	4:50:17 PM	SiCl4 pre valve closed
10/22/2011	4:50:17 PM	SiCl4 post valve closed
10/22/2011	4:50:17 PM	Bypass valve closed
10/22/2011	4:50:17 PM	Bubbler valve closed
10/22/2011	4:50:17 PM	Main Vac valve opened
10/22/2011	4:50:17 PM	Helium MFC set to  0.000000
10/22/2011	4:50:17 PM	H2 MFC set to  0.000000
10/22/2011	4:50:17 PM	BCl3 MFC set to  0.000000
10/22/2011	4:50:17 PM	PHl3 MFC set to  0.000000
10/22/2011	4:50:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:50:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:50:17 PM	Tube furnace set to 150
10/22/2011	4:50:47 PM	H2 valve closed
10/22/2011	4:50:47 PM	BCl3 valve closed
10/22/2011	4:50:47 PM	PH3 valve closed
10/22/2011	4:50:47 PM	SiCl4 pre valve closed
10/22/2011	4:50:47 PM	SiCl4 post valve closed
10/22/2011	4:50:47 PM	Bypass valve closed
10/22/2011	4:50:47 PM	Bubbler valve closed
10/22/2011	4:50:47 PM	Helium valve opened
10/22/2011	4:50:47 PM	Main Vac valve opened
10/22/2011	4:50:47 PM	Helium MFC set to  20.000000
10/22/2011	4:50:47 PM	H2 MFC set to  0.000000
10/22/2011	4:50:47 PM	BCl3 MFC set to  0.000000
10/22/2011	4:50:47 PM	PHl3 MFC set to  0.000000
10/22/2011	4:50:47 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:50:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:50:48 PM	Tube furnace set to 150
10/22/2011	4:51:18 PM	Helium valve closed
10/22/2011	4:51:18 PM	H2 valve closed
10/22/2011	4:51:18 PM	BCl3 valve closed
10/22/2011	4:51:18 PM	PH3 valve closed
10/22/2011	4:51:18 PM	SiCl4 pre valve closed
10/22/2011	4:51:18 PM	SiCl4 post valve closed
10/22/2011	4:51:18 PM	Bypass valve closed
10/22/2011	4:51:18 PM	Bubbler valve closed
10/22/2011	4:51:18 PM	Main Vac valve opened
10/22/2011	4:51:18 PM	Helium MFC set to  0.000000
10/22/2011	4:51:18 PM	H2 MFC set to  0.000000
10/22/2011	4:51:18 PM	BCl3 MFC set to  0.000000
10/22/2011	4:51:18 PM	PHl3 MFC set to  0.000000
10/22/2011	4:51:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:51:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:51:18 PM	Tube furnace set to 150
10/22/2011	4:51:48 PM	H2 valve closed
10/22/2011	4:51:48 PM	BCl3 valve closed
10/22/2011	4:51:48 PM	PH3 valve closed
10/22/2011	4:51:48 PM	SiCl4 pre valve closed
10/22/2011	4:51:48 PM	SiCl4 post valve closed
10/22/2011	4:51:48 PM	Bypass valve closed
10/22/2011	4:51:48 PM	Bubbler valve closed
10/22/2011	4:51:48 PM	Helium valve opened
10/22/2011	4:51:48 PM	Main Vac valve opened
10/22/2011	4:51:48 PM	Helium MFC set to  20.000000
10/22/2011	4:51:48 PM	H2 MFC set to  0.000000
10/22/2011	4:51:48 PM	BCl3 MFC set to  0.000000
10/22/2011	4:51:48 PM	PHl3 MFC set to  0.000000
10/22/2011	4:51:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:51:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:51:48 PM	Tube furnace set to 150
10/22/2011	4:52:18 PM	Helium valve closed
10/22/2011	4:52:18 PM	H2 valve closed
10/22/2011	4:52:18 PM	BCl3 valve closed
10/22/2011	4:52:18 PM	PH3 valve closed
10/22/2011	4:52:18 PM	SiCl4 pre valve closed
10/22/2011	4:52:18 PM	SiCl4 post valve closed
10/22/2011	4:52:18 PM	Bypass valve closed
10/22/2011	4:52:18 PM	Bubbler valve closed
10/22/2011	4:52:18 PM	Main Vac valve opened
10/22/2011	4:52:18 PM	Helium MFC set to  0.000000
10/22/2011	4:52:18 PM	H2 MFC set to  0.000000
10/22/2011	4:52:18 PM	BCl3 MFC set to  0.000000
10/22/2011	4:52:18 PM	PHl3 MFC set to  0.000000
10/22/2011	4:52:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:52:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:52:18 PM	Tube furnace set to 150
10/22/2011	4:52:48 PM	H2 valve closed
10/22/2011	4:52:48 PM	BCl3 valve closed
10/22/2011	4:52:48 PM	PH3 valve closed
10/22/2011	4:52:48 PM	SiCl4 pre valve closed
10/22/2011	4:52:48 PM	SiCl4 post valve closed
10/22/2011	4:52:48 PM	Bypass valve closed
10/22/2011	4:52:48 PM	Bubbler valve closed
10/22/2011	4:52:48 PM	Helium valve opened
10/22/2011	4:52:48 PM	Main Vac valve opened
10/22/2011	4:52:48 PM	Helium MFC set to  20.000000
10/22/2011	4:52:48 PM	H2 MFC set to  0.000000
10/22/2011	4:52:48 PM	BCl3 MFC set to  0.000000
10/22/2011	4:52:48 PM	PHl3 MFC set to  0.000000
10/22/2011	4:52:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:52:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:52:48 PM	Tube furnace set to 150
10/22/2011	4:53:18 PM	Helium valve closed
10/22/2011	4:53:18 PM	H2 valve closed
10/22/2011	4:53:18 PM	BCl3 valve closed
10/22/2011	4:53:18 PM	PH3 valve closed
10/22/2011	4:53:18 PM	SiCl4 pre valve closed
10/22/2011	4:53:18 PM	SiCl4 post valve closed
10/22/2011	4:53:18 PM	Bypass valve closed
10/22/2011	4:53:18 PM	Bubbler valve closed
10/22/2011	4:53:18 PM	Main Vac valve opened
10/22/2011	4:53:18 PM	Helium MFC set to  0.000000
10/22/2011	4:53:18 PM	H2 MFC set to  0.000000
10/22/2011	4:53:18 PM	BCl3 MFC set to  0.000000
10/22/2011	4:53:18 PM	PHl3 MFC set to  0.000000
10/22/2011	4:53:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:53:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:53:19 PM	Tube furnace set to 150
10/22/2011	4:53:49 PM	H2 valve closed
10/22/2011	4:53:49 PM	BCl3 valve closed
10/22/2011	4:53:49 PM	PH3 valve closed
10/22/2011	4:53:49 PM	SiCl4 pre valve closed
10/22/2011	4:53:49 PM	SiCl4 post valve closed
10/22/2011	4:53:49 PM	Bypass valve closed
10/22/2011	4:53:49 PM	Bubbler valve closed
10/22/2011	4:53:49 PM	Helium valve opened
10/22/2011	4:53:49 PM	Main Vac valve opened
10/22/2011	4:53:49 PM	Helium MFC set to  20.000000
10/22/2011	4:53:49 PM	H2 MFC set to  0.000000
10/22/2011	4:53:49 PM	BCl3 MFC set to  0.000000
10/22/2011	4:53:49 PM	PHl3 MFC set to  0.000000
10/22/2011	4:53:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:53:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:53:49 PM	Tube furnace set to 150
10/22/2011	4:54:19 PM	Helium valve closed
10/22/2011	4:54:19 PM	H2 valve closed
10/22/2011	4:54:19 PM	BCl3 valve closed
10/22/2011	4:54:19 PM	PH3 valve closed
10/22/2011	4:54:19 PM	SiCl4 pre valve closed
10/22/2011	4:54:19 PM	SiCl4 post valve closed
10/22/2011	4:54:19 PM	Bypass valve closed
10/22/2011	4:54:19 PM	Bubbler valve closed
10/22/2011	4:54:19 PM	Main Vac valve opened
10/22/2011	4:54:19 PM	Helium MFC set to  0.000000
10/22/2011	4:54:19 PM	H2 MFC set to  0.000000
10/22/2011	4:54:19 PM	BCl3 MFC set to  0.000000
10/22/2011	4:54:19 PM	PHl3 MFC set to  0.000000
10/22/2011	4:54:19 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:54:19 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:54:19 PM	Tube furnace set to 150
10/22/2011	4:54:49 PM	H2 valve closed
10/22/2011	4:54:49 PM	BCl3 valve closed
10/22/2011	4:54:49 PM	PH3 valve closed
10/22/2011	4:54:49 PM	SiCl4 pre valve closed
10/22/2011	4:54:49 PM	SiCl4 post valve closed
10/22/2011	4:54:49 PM	Bypass valve closed
10/22/2011	4:54:49 PM	Bubbler valve closed
10/22/2011	4:54:49 PM	Helium valve opened
10/22/2011	4:54:49 PM	Main Vac valve opened
10/22/2011	4:54:49 PM	Helium MFC set to  20.000000
10/22/2011	4:54:49 PM	H2 MFC set to  0.000000
10/22/2011	4:54:49 PM	BCl3 MFC set to  0.000000
10/22/2011	4:54:49 PM	PHl3 MFC set to  0.000000
10/22/2011	4:54:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:54:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:54:49 PM	Tube furnace set to 150
10/22/2011	4:55:19 PM	Helium valve closed
10/22/2011	4:55:19 PM	H2 valve closed
10/22/2011	4:55:19 PM	BCl3 valve closed
10/22/2011	4:55:19 PM	PH3 valve closed
10/22/2011	4:55:19 PM	SiCl4 pre valve closed
10/22/2011	4:55:19 PM	SiCl4 post valve closed
10/22/2011	4:55:19 PM	Bypass valve closed
10/22/2011	4:55:19 PM	Bubbler valve closed
10/22/2011	4:55:19 PM	Main Vac valve opened
10/22/2011	4:55:19 PM	Helium MFC set to  0.000000
10/22/2011	4:55:19 PM	H2 MFC set to  0.000000
10/22/2011	4:55:19 PM	BCl3 MFC set to  0.000000
10/22/2011	4:55:19 PM	PHl3 MFC set to  0.000000
10/22/2011	4:55:19 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:55:19 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:55:19 PM	Tube furnace set to 150
10/22/2011	4:55:49 PM	H2 valve closed
10/22/2011	4:55:49 PM	BCl3 valve closed
10/22/2011	4:55:49 PM	PH3 valve closed
10/22/2011	4:55:49 PM	SiCl4 pre valve closed
10/22/2011	4:55:49 PM	SiCl4 post valve closed
10/22/2011	4:55:49 PM	Bypass valve closed
10/22/2011	4:55:49 PM	Bubbler valve closed
10/22/2011	4:55:49 PM	Helium valve opened
10/22/2011	4:55:49 PM	Main Vac valve opened
10/22/2011	4:55:49 PM	Helium MFC set to  20.000000
10/22/2011	4:55:49 PM	H2 MFC set to  0.000000
10/22/2011	4:55:49 PM	BCl3 MFC set to  0.000000
10/22/2011	4:55:49 PM	PHl3 MFC set to  0.000000
10/22/2011	4:55:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:55:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:55:50 PM	Tube furnace set to 150
10/22/2011	4:56:07 PM	Run aborted at 4:56 PM
10/22/2011	4:56:07 PM	Helium valve closed
10/22/2011	4:56:07 PM	H2 valve closed
10/22/2011	4:56:07 PM	BCl3 valve closed
10/22/2011	4:56:07 PM	PH3 valve closed
10/22/2011	4:56:07 PM	SiCl4 pre valve closed
10/22/2011	4:56:07 PM	SiCl4 post valve closed
10/22/2011	4:56:07 PM	Bypass valve closed
10/22/2011	4:56:07 PM	Main Vac valve closed
10/22/2011	4:56:07 PM	Bubbler valve closed
10/22/2011	4:56:07 PM	Helium MFC set to  0.000000
10/22/2011	4:56:07 PM	H2 MFC set to  0.000000
10/22/2011	4:56:07 PM	BCl3 MFC set to  0.000000
10/22/2011	4:56:07 PM	PHl3 MFC set to  0.000000
10/22/2011	4:56:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:56:07 PM	Tube furnace set to 0
10/22/2011	4:56:10 PM	Main Vac valve opened
10/22/2011	4:57:55 PM	Recipe started at 4:57 PM
10/22/2011	4:57:55 PM	Helium valve closed
10/22/2011	4:57:55 PM	H2 valve closed
10/22/2011	4:57:55 PM	BCl3 valve closed
10/22/2011	4:57:55 PM	PH3 valve closed
10/22/2011	4:57:55 PM	SiCl4 pre valve closed
10/22/2011	4:57:55 PM	SiCl4 post valve closed
10/22/2011	4:57:55 PM	Main Vac valve closed
10/22/2011	4:57:55 PM	Bypass valve closed
10/22/2011	4:57:55 PM	Bubbler valve closed
10/22/2011	4:57:55 PM	Helium MFC set to  0.000000
10/22/2011	4:57:55 PM	H2 MFC set to  0.000000
10/22/2011	4:57:55 PM	BCl3 MFC set to  0.000000
10/22/2011	4:57:55 PM	PHl3 MFC set to  0.000000
10/22/2011	4:57:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:57:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:57:55 PM	Tube furnace set to 0
10/22/2011	4:57:58 PM	Helium valve closed
10/22/2011	4:57:58 PM	BCl3 valve closed
10/22/2011	4:57:58 PM	PH3 valve closed
10/22/2011	4:57:58 PM	SiCl4 pre valve closed
10/22/2011	4:57:58 PM	SiCl4 post valve closed
10/22/2011	4:57:58 PM	Main Vac valve closed
10/22/2011	4:57:58 PM	Bypass valve closed
10/22/2011	4:57:58 PM	Bubbler valve closed
10/22/2011	4:57:58 PM	H2 valve opened
10/22/2011	4:57:58 PM	Helium MFC set to  0.000000
10/22/2011	4:57:58 PM	H2 MFC set to  500.000000
10/22/2011	4:57:58 PM	BCl3 MFC set to  0.000000
10/22/2011	4:57:58 PM	PHl3 MFC set to  0.000000
10/22/2011	4:57:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:57:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:57:58 PM	Tube furnace set to 0
10/22/2011	4:59:02 PM	Helium valve closed
10/22/2011	4:59:02 PM	BCl3 valve closed
10/22/2011	4:59:02 PM	PH3 valve closed
10/22/2011	4:59:02 PM	SiCl4 pre valve closed
10/22/2011	4:59:02 PM	SiCl4 post valve closed
10/22/2011	4:59:02 PM	Main Vac valve closed
10/22/2011	4:59:02 PM	Bypass valve closed
10/22/2011	4:59:02 PM	H2 valve opened
10/22/2011	4:59:02 PM	Bubbler valve opened
10/22/2011	4:59:02 PM	Helium MFC set to  0.000000
10/22/2011	4:59:02 PM	H2 MFC set to  500.000000
10/22/2011	4:59:02 PM	BCl3 MFC set to  0.000000
10/22/2011	4:59:02 PM	PHl3 MFC set to  0.000000
10/22/2011	4:59:02 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:59:02 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:59:02 PM	Tube furnace set to 0
10/22/2011	4:59:03 PM	Helium valve closed
10/22/2011	4:59:03 PM	BCl3 valve closed
10/22/2011	4:59:03 PM	PH3 valve closed
10/22/2011	4:59:03 PM	SiCl4 pre valve closed
10/22/2011	4:59:03 PM	SiCl4 post valve closed
10/22/2011	4:59:03 PM	Main Vac valve closed
10/22/2011	4:59:03 PM	Bypass valve closed
10/22/2011	4:59:03 PM	H2 valve opened
10/22/2011	4:59:03 PM	Bubbler valve opened
10/22/2011	4:59:03 PM	Helium MFC set to  0.000000
10/22/2011	4:59:03 PM	H2 MFC set to  500.000000
10/22/2011	4:59:03 PM	BCl3 MFC set to  0.000000
10/22/2011	4:59:03 PM	PHl3 MFC set to  0.000000
10/22/2011	4:59:03 PM	SiCl4 MFC set to  0.000000
10/22/2011	4:59:03 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	4:59:03 PM	Tube furnace set to 1045
10/22/2011	5:19:03 PM	Helium valve closed
10/22/2011	5:19:03 PM	BCl3 valve closed
10/22/2011	5:19:03 PM	PH3 valve closed
10/22/2011	5:19:03 PM	Main Vac valve closed
10/22/2011	5:19:03 PM	Bypass valve closed
10/22/2011	5:19:03 PM	H2 valve opened
10/22/2011	5:19:03 PM	SiCl4 pre valve opened
10/22/2011	5:19:03 PM	SiCl4 post valve opened
10/22/2011	5:19:03 PM	Bubbler valve opened
10/22/2011	5:19:03 PM	Helium MFC set to  0.000000
10/22/2011	5:19:03 PM	H2 MFC set to  500.000000
10/22/2011	5:19:03 PM	BCl3 MFC set to  0.000000
10/22/2011	5:19:03 PM	PHl3 MFC set to  0.000000
10/22/2011	5:19:03 PM	SiCl4 MFC set to  50.000000
10/22/2011	5:19:03 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:19:03 PM	Tube furnace set to 1045
10/22/2011	5:29:03 PM	Helium valve closed
10/22/2011	5:29:03 PM	BCl3 valve closed
10/22/2011	5:29:03 PM	PH3 valve closed
10/22/2011	5:29:03 PM	SiCl4 pre valve closed
10/22/2011	5:29:03 PM	SiCl4 post valve closed
10/22/2011	5:29:03 PM	Main Vac valve closed
10/22/2011	5:29:03 PM	Bypass valve closed
10/22/2011	5:29:03 PM	H2 valve opened
10/22/2011	5:29:03 PM	Bubbler valve opened
10/22/2011	5:29:03 PM	Helium MFC set to  0.000000
10/22/2011	5:29:03 PM	H2 MFC set to  500.000000
10/22/2011	5:29:03 PM	BCl3 MFC set to  0.000000
10/22/2011	5:29:03 PM	PHl3 MFC set to  0.000000
10/22/2011	5:29:03 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:29:03 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:29:03 PM	Tube furnace set to 750
10/22/2011	5:34:03 PM	H2 valve closed
10/22/2011	5:34:03 PM	BCl3 valve closed
10/22/2011	5:34:03 PM	PH3 valve closed
10/22/2011	5:34:03 PM	SiCl4 pre valve closed
10/22/2011	5:34:03 PM	SiCl4 post valve closed
10/22/2011	5:34:03 PM	Main Vac valve closed
10/22/2011	5:34:03 PM	Bypass valve closed
10/22/2011	5:34:03 PM	Helium valve opened
10/22/2011	5:34:03 PM	Bubbler valve opened
10/22/2011	5:34:03 PM	Helium MFC set to  500.000000
10/22/2011	5:34:03 PM	H2 MFC set to  0.000000
10/22/2011	5:34:03 PM	BCl3 MFC set to  0.000000
10/22/2011	5:34:03 PM	PHl3 MFC set to  0.000000
10/22/2011	5:34:03 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:34:03 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:34:04 PM	Tube furnace set to 0
10/22/2011	5:49:01 PM	Helium valve closed
10/22/2011	5:49:01 PM	H2 valve closed
10/22/2011	5:49:01 PM	BCl3 valve closed
10/22/2011	5:49:01 PM	PH3 valve closed
10/22/2011	5:49:01 PM	SiCl4 pre valve closed
10/22/2011	5:49:01 PM	SiCl4 post valve closed
10/22/2011	5:49:01 PM	Main Vac valve closed
10/22/2011	5:49:01 PM	Bypass valve closed
10/22/2011	5:49:01 PM	Bubbler valve closed
10/22/2011	5:49:01 PM	Helium MFC set to  0.000000
10/22/2011	5:49:01 PM	H2 MFC set to  0.000000
10/22/2011	5:49:01 PM	BCl3 MFC set to  0.000000
10/22/2011	5:49:01 PM	PHl3 MFC set to  0.000000
10/22/2011	5:49:01 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:49:01 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:49:01 PM	Tube furnace set to 0
10/22/2011	5:49:02 PM	Run finished at 5:49 PM
10/22/2011	5:49:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	5:49:07 PM	Recipe started at 5:49 PM
10/22/2011	5:49:07 PM	Helium valve closed
10/22/2011	5:49:07 PM	H2 valve closed
10/22/2011	5:49:07 PM	BCl3 valve closed
10/22/2011	5:49:07 PM	PH3 valve closed
10/22/2011	5:49:07 PM	SiCl4 pre valve closed
10/22/2011	5:49:07 PM	SiCl4 post valve closed
10/22/2011	5:49:07 PM	Main Vac valve closed
10/22/2011	5:49:07 PM	Bypass valve closed
10/22/2011	5:49:07 PM	Bubbler valve closed
10/22/2011	5:49:07 PM	Helium MFC set to  0.000000
10/22/2011	5:49:07 PM	H2 MFC set to  0.000000
10/22/2011	5:49:07 PM	BCl3 MFC set to  0.000000
10/22/2011	5:49:07 PM	PHl3 MFC set to  0.000000
10/22/2011	5:49:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:49:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:49:07 PM	Tube furnace set to 0
10/22/2011	5:49:10 PM	H2 valve closed
10/22/2011	5:49:10 PM	BCl3 valve closed
10/22/2011	5:49:10 PM	PH3 valve closed
10/22/2011	5:49:10 PM	SiCl4 pre valve closed
10/22/2011	5:49:10 PM	SiCl4 post valve closed
10/22/2011	5:49:10 PM	Main Vac valve closed
10/22/2011	5:49:10 PM	Bypass valve closed
10/22/2011	5:49:10 PM	Bubbler valve closed
10/22/2011	5:49:10 PM	Helium valve opened
10/22/2011	5:49:10 PM	Helium MFC set to  500.000000
10/22/2011	5:49:10 PM	H2 MFC set to  0.000000
10/22/2011	5:49:10 PM	BCl3 MFC set to  0.000000
10/22/2011	5:49:10 PM	PHl3 MFC set to  0.000000
10/22/2011	5:49:10 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:49:10 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:49:10 PM	Tube furnace set to 0
10/22/2011	5:49:11 PM	Helium valve closed
10/22/2011	5:49:11 PM	H2 valve closed
10/22/2011	5:49:11 PM	BCl3 valve closed
10/22/2011	5:49:11 PM	PH3 valve closed
10/22/2011	5:49:11 PM	SiCl4 pre valve closed
10/22/2011	5:49:11 PM	SiCl4 post valve closed
10/22/2011	5:49:11 PM	Main Vac valve closed
10/22/2011	5:49:11 PM	Bypass valve closed
10/22/2011	5:49:11 PM	Bubbler valve closed
10/22/2011	5:49:11 PM	Helium MFC set to  0.000000
10/22/2011	5:49:11 PM	H2 MFC set to  0.000000
10/22/2011	5:49:11 PM	BCl3 MFC set to  0.000000
10/22/2011	5:49:11 PM	PHl3 MFC set to  0.000000
10/22/2011	5:49:11 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:49:11 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:49:11 PM	Tube furnace set to 0
10/22/2011	5:49:12 PM	Run finished at 5:49 PM
10/22/2011	5:49:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	5:54:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	5:54:07 PM	Recipe started at 5:54 PM
10/22/2011	5:54:07 PM	Helium valve closed
10/22/2011	5:54:07 PM	H2 valve closed
10/22/2011	5:54:07 PM	BCl3 valve closed
10/22/2011	5:54:07 PM	PH3 valve closed
10/22/2011	5:54:07 PM	SiCl4 pre valve closed
10/22/2011	5:54:07 PM	SiCl4 post valve closed
10/22/2011	5:54:07 PM	Main Vac valve closed
10/22/2011	5:54:07 PM	Bubbler valve closed
10/22/2011	5:54:07 PM	Bypass valve opened
10/22/2011	5:54:07 PM	Helium MFC set to  0.000000
10/22/2011	5:54:07 PM	H2 MFC set to  0.000000
10/22/2011	5:54:07 PM	BCl3 MFC set to  0.000000
10/22/2011	5:54:07 PM	PHl3 MFC set to  0.000000
10/22/2011	5:54:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:54:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:54:07 PM	Tube furnace set to 0
10/22/2011	5:55:06 PM	Helium valve closed
10/22/2011	5:55:06 PM	H2 valve closed
10/22/2011	5:55:06 PM	BCl3 valve closed
10/22/2011	5:55:06 PM	PH3 valve closed
10/22/2011	5:55:06 PM	SiCl4 pre valve closed
10/22/2011	5:55:06 PM	SiCl4 post valve closed
10/22/2011	5:55:06 PM	Main Vac valve closed
10/22/2011	5:55:06 PM	Bubbler valve closed
10/22/2011	5:55:06 PM	Bypass valve opened
10/22/2011	5:55:06 PM	Helium MFC set to  0.000000
10/22/2011	5:55:06 PM	H2 MFC set to  0.000000
10/22/2011	5:55:06 PM	BCl3 MFC set to  0.000000
10/22/2011	5:55:06 PM	PHl3 MFC set to  0.000000
10/22/2011	5:55:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:55:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:55:07 PM	Tube furnace set to 0
10/22/2011	5:55:56 PM	Helium valve closed
10/22/2011	5:55:56 PM	H2 valve closed
10/22/2011	5:55:56 PM	BCl3 valve closed
10/22/2011	5:55:56 PM	PH3 valve closed
10/22/2011	5:55:56 PM	SiCl4 pre valve closed
10/22/2011	5:55:56 PM	SiCl4 post valve closed
10/22/2011	5:55:56 PM	Bypass valve closed
10/22/2011	5:55:56 PM	Bubbler valve closed
10/22/2011	5:55:56 PM	Main Vac valve opened
10/22/2011	5:55:56 PM	Helium MFC set to  0.000000
10/22/2011	5:55:56 PM	H2 MFC set to  0.000000
10/22/2011	5:55:56 PM	BCl3 MFC set to  0.000000
10/22/2011	5:55:56 PM	PHl3 MFC set to  0.000000
10/22/2011	5:55:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:55:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:55:56 PM	Tube furnace set to 0
10/22/2011	5:55:57 PM	Run finished at 5:55 PM
10/22/2011	5:55:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	5:58:25 PM	Recipe started at 5:58 PM
10/22/2011	5:58:25 PM	Helium valve closed
10/22/2011	5:58:25 PM	H2 valve closed
10/22/2011	5:58:25 PM	BCl3 valve closed
10/22/2011	5:58:25 PM	PH3 valve closed
10/22/2011	5:58:25 PM	SiCl4 pre valve closed
10/22/2011	5:58:25 PM	SiCl4 post valve closed
10/22/2011	5:58:25 PM	Main Vac valve closed
10/22/2011	5:58:25 PM	Bubbler valve closed
10/22/2011	5:58:25 PM	Bypass valve opened
10/22/2011	5:58:25 PM	Helium MFC set to  0.000000
10/22/2011	5:58:25 PM	H2 MFC set to  0.000000
10/22/2011	5:58:25 PM	BCl3 MFC set to  0.000000
10/22/2011	5:58:25 PM	PHl3 MFC set to  0.000000
10/22/2011	5:58:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:58:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:58:25 PM	Tube furnace set to 150
10/22/2011	5:58:25 PM	Helium valve closed
10/22/2011	5:58:25 PM	H2 valve closed
10/22/2011	5:58:25 PM	BCl3 valve closed
10/22/2011	5:58:25 PM	PH3 valve closed
10/22/2011	5:58:25 PM	SiCl4 pre valve closed
10/22/2011	5:58:25 PM	SiCl4 post valve closed
10/22/2011	5:58:25 PM	Main Vac valve closed
10/22/2011	5:58:25 PM	Bubbler valve closed
10/22/2011	5:58:25 PM	Bypass valve opened
10/22/2011	5:58:25 PM	Helium MFC set to  0.000000
10/22/2011	5:58:25 PM	H2 MFC set to  0.000000
10/22/2011	5:58:25 PM	BCl3 MFC set to  0.000000
10/22/2011	5:58:25 PM	PHl3 MFC set to  0.000000
10/22/2011	5:58:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:58:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:58:25 PM	Tube furnace set to 150
10/22/2011	5:58:33 PM	Helium valve closed
10/22/2011	5:58:33 PM	H2 valve closed
10/22/2011	5:58:33 PM	BCl3 valve closed
10/22/2011	5:58:33 PM	PH3 valve closed
10/22/2011	5:58:33 PM	SiCl4 pre valve closed
10/22/2011	5:58:33 PM	SiCl4 post valve closed
10/22/2011	5:58:33 PM	Bypass valve closed
10/22/2011	5:58:33 PM	Bubbler valve closed
10/22/2011	5:58:33 PM	Main Vac valve opened
10/22/2011	5:58:33 PM	Helium MFC set to  0.000000
10/22/2011	5:58:33 PM	H2 MFC set to  0.000000
10/22/2011	5:58:33 PM	BCl3 MFC set to  0.000000
10/22/2011	5:58:33 PM	PHl3 MFC set to  0.000000
10/22/2011	5:58:33 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:58:33 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:58:34 PM	Tube furnace set to 150
10/22/2011	5:59:04 PM	H2 valve closed
10/22/2011	5:59:04 PM	BCl3 valve closed
10/22/2011	5:59:04 PM	PH3 valve closed
10/22/2011	5:59:04 PM	SiCl4 pre valve closed
10/22/2011	5:59:04 PM	SiCl4 post valve closed
10/22/2011	5:59:04 PM	Bypass valve closed
10/22/2011	5:59:04 PM	Bubbler valve closed
10/22/2011	5:59:04 PM	Helium valve opened
10/22/2011	5:59:04 PM	Main Vac valve opened
10/22/2011	5:59:04 PM	Helium MFC set to  20.000000
10/22/2011	5:59:04 PM	H2 MFC set to  0.000000
10/22/2011	5:59:04 PM	BCl3 MFC set to  0.000000
10/22/2011	5:59:04 PM	PHl3 MFC set to  0.000000
10/22/2011	5:59:04 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:59:04 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:59:04 PM	Tube furnace set to 150
10/22/2011	5:59:34 PM	Helium valve closed
10/22/2011	5:59:34 PM	H2 valve closed
10/22/2011	5:59:34 PM	BCl3 valve closed
10/22/2011	5:59:34 PM	PH3 valve closed
10/22/2011	5:59:34 PM	SiCl4 pre valve closed
10/22/2011	5:59:34 PM	SiCl4 post valve closed
10/22/2011	5:59:34 PM	Bypass valve closed
10/22/2011	5:59:34 PM	Bubbler valve closed
10/22/2011	5:59:34 PM	Main Vac valve opened
10/22/2011	5:59:34 PM	Helium MFC set to  0.000000
10/22/2011	5:59:34 PM	H2 MFC set to  0.000000
10/22/2011	5:59:34 PM	BCl3 MFC set to  0.000000
10/22/2011	5:59:34 PM	PHl3 MFC set to  0.000000
10/22/2011	5:59:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	5:59:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	5:59:34 PM	Tube furnace set to 150
10/22/2011	6:00:04 PM	H2 valve closed
10/22/2011	6:00:04 PM	BCl3 valve closed
10/22/2011	6:00:04 PM	PH3 valve closed
10/22/2011	6:00:04 PM	SiCl4 pre valve closed
10/22/2011	6:00:04 PM	SiCl4 post valve closed
10/22/2011	6:00:04 PM	Bypass valve closed
10/22/2011	6:00:04 PM	Bubbler valve closed
10/22/2011	6:00:04 PM	Helium valve opened
10/22/2011	6:00:04 PM	Main Vac valve opened
10/22/2011	6:00:04 PM	Helium MFC set to  20.000000
10/22/2011	6:00:04 PM	H2 MFC set to  0.000000
10/22/2011	6:00:04 PM	BCl3 MFC set to  0.000000
10/22/2011	6:00:04 PM	PHl3 MFC set to  0.000000
10/22/2011	6:00:04 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:00:04 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:00:04 PM	Tube furnace set to 150
10/22/2011	6:00:34 PM	Helium valve closed
10/22/2011	6:00:34 PM	H2 valve closed
10/22/2011	6:00:34 PM	BCl3 valve closed
10/22/2011	6:00:34 PM	PH3 valve closed
10/22/2011	6:00:34 PM	SiCl4 pre valve closed
10/22/2011	6:00:34 PM	SiCl4 post valve closed
10/22/2011	6:00:34 PM	Bypass valve closed
10/22/2011	6:00:34 PM	Bubbler valve closed
10/22/2011	6:00:34 PM	Main Vac valve opened
10/22/2011	6:00:34 PM	Helium MFC set to  0.000000
10/22/2011	6:00:34 PM	H2 MFC set to  0.000000
10/22/2011	6:00:34 PM	BCl3 MFC set to  0.000000
10/22/2011	6:00:34 PM	PHl3 MFC set to  0.000000
10/22/2011	6:00:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:00:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:00:34 PM	Tube furnace set to 150
10/22/2011	6:01:04 PM	H2 valve closed
10/22/2011	6:01:04 PM	BCl3 valve closed
10/22/2011	6:01:04 PM	PH3 valve closed
10/22/2011	6:01:04 PM	SiCl4 pre valve closed
10/22/2011	6:01:04 PM	SiCl4 post valve closed
10/22/2011	6:01:04 PM	Bypass valve closed
10/22/2011	6:01:04 PM	Bubbler valve closed
10/22/2011	6:01:04 PM	Helium valve opened
10/22/2011	6:01:04 PM	Main Vac valve opened
10/22/2011	6:01:04 PM	Helium MFC set to  20.000000
10/22/2011	6:01:04 PM	H2 MFC set to  0.000000
10/22/2011	6:01:04 PM	BCl3 MFC set to  0.000000
10/22/2011	6:01:04 PM	PHl3 MFC set to  0.000000
10/22/2011	6:01:04 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:01:04 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:01:04 PM	Tube furnace set to 150
10/22/2011	6:01:35 PM	Helium valve closed
10/22/2011	6:01:35 PM	H2 valve closed
10/22/2011	6:01:35 PM	BCl3 valve closed
10/22/2011	6:01:35 PM	PH3 valve closed
10/22/2011	6:01:35 PM	SiCl4 pre valve closed
10/22/2011	6:01:35 PM	SiCl4 post valve closed
10/22/2011	6:01:35 PM	Bypass valve closed
10/22/2011	6:01:35 PM	Bubbler valve closed
10/22/2011	6:01:35 PM	Main Vac valve opened
10/22/2011	6:01:35 PM	Helium MFC set to  0.000000
10/22/2011	6:01:35 PM	H2 MFC set to  0.000000
10/22/2011	6:01:35 PM	BCl3 MFC set to  0.000000
10/22/2011	6:01:35 PM	PHl3 MFC set to  0.000000
10/22/2011	6:01:35 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:01:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:01:35 PM	Tube furnace set to 150
10/22/2011	6:02:05 PM	H2 valve closed
10/22/2011	6:02:05 PM	BCl3 valve closed
10/22/2011	6:02:05 PM	PH3 valve closed
10/22/2011	6:02:05 PM	SiCl4 pre valve closed
10/22/2011	6:02:05 PM	SiCl4 post valve closed
10/22/2011	6:02:05 PM	Bypass valve closed
10/22/2011	6:02:05 PM	Bubbler valve closed
10/22/2011	6:02:05 PM	Helium valve opened
10/22/2011	6:02:05 PM	Main Vac valve opened
10/22/2011	6:02:05 PM	Helium MFC set to  20.000000
10/22/2011	6:02:05 PM	H2 MFC set to  0.000000
10/22/2011	6:02:05 PM	BCl3 MFC set to  0.000000
10/22/2011	6:02:05 PM	PHl3 MFC set to  0.000000
10/22/2011	6:02:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:02:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:02:05 PM	Tube furnace set to 150
10/22/2011	6:02:35 PM	Helium valve closed
10/22/2011	6:02:35 PM	H2 valve closed
10/22/2011	6:02:35 PM	BCl3 valve closed
10/22/2011	6:02:35 PM	PH3 valve closed
10/22/2011	6:02:35 PM	SiCl4 pre valve closed
10/22/2011	6:02:35 PM	SiCl4 post valve closed
10/22/2011	6:02:35 PM	Bypass valve closed
10/22/2011	6:02:35 PM	Bubbler valve closed
10/22/2011	6:02:35 PM	Main Vac valve opened
10/22/2011	6:02:35 PM	Helium MFC set to  0.000000
10/22/2011	6:02:35 PM	H2 MFC set to  0.000000
10/22/2011	6:02:35 PM	BCl3 MFC set to  0.000000
10/22/2011	6:02:35 PM	PHl3 MFC set to  0.000000
10/22/2011	6:02:35 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:02:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:02:35 PM	Tube furnace set to 150
10/22/2011	6:03:05 PM	H2 valve closed
10/22/2011	6:03:05 PM	BCl3 valve closed
10/22/2011	6:03:05 PM	PH3 valve closed
10/22/2011	6:03:05 PM	SiCl4 pre valve closed
10/22/2011	6:03:05 PM	SiCl4 post valve closed
10/22/2011	6:03:05 PM	Bypass valve closed
10/22/2011	6:03:05 PM	Bubbler valve closed
10/22/2011	6:03:05 PM	Helium valve opened
10/22/2011	6:03:05 PM	Main Vac valve opened
10/22/2011	6:03:05 PM	Helium MFC set to  20.000000
10/22/2011	6:03:05 PM	H2 MFC set to  0.000000
10/22/2011	6:03:05 PM	BCl3 MFC set to  0.000000
10/22/2011	6:03:05 PM	PHl3 MFC set to  0.000000
10/22/2011	6:03:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:03:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:03:05 PM	Tube furnace set to 150
10/22/2011	6:03:35 PM	Helium valve closed
10/22/2011	6:03:35 PM	H2 valve closed
10/22/2011	6:03:35 PM	BCl3 valve closed
10/22/2011	6:03:35 PM	PH3 valve closed
10/22/2011	6:03:35 PM	SiCl4 pre valve closed
10/22/2011	6:03:35 PM	SiCl4 post valve closed
10/22/2011	6:03:35 PM	Bypass valve closed
10/22/2011	6:03:35 PM	Bubbler valve closed
10/22/2011	6:03:35 PM	Main Vac valve opened
10/22/2011	6:03:35 PM	Helium MFC set to  0.000000
10/22/2011	6:03:35 PM	H2 MFC set to  0.000000
10/22/2011	6:03:35 PM	BCl3 MFC set to  0.000000
10/22/2011	6:03:35 PM	PHl3 MFC set to  0.000000
10/22/2011	6:03:35 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:03:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:03:35 PM	Tube furnace set to 150
10/22/2011	6:04:05 PM	H2 valve closed
10/22/2011	6:04:06 PM	BCl3 valve closed
10/22/2011	6:04:06 PM	PH3 valve closed
10/22/2011	6:04:06 PM	SiCl4 pre valve closed
10/22/2011	6:04:06 PM	SiCl4 post valve closed
10/22/2011	6:04:06 PM	Bypass valve closed
10/22/2011	6:04:06 PM	Bubbler valve closed
10/22/2011	6:04:06 PM	Helium valve opened
10/22/2011	6:04:06 PM	Main Vac valve opened
10/22/2011	6:04:06 PM	Helium MFC set to  20.000000
10/22/2011	6:04:06 PM	H2 MFC set to  0.000000
10/22/2011	6:04:06 PM	BCl3 MFC set to  0.000000
10/22/2011	6:04:06 PM	PHl3 MFC set to  0.000000
10/22/2011	6:04:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:04:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:04:06 PM	Tube furnace set to 150
10/22/2011	6:04:36 PM	Helium valve closed
10/22/2011	6:04:36 PM	H2 valve closed
10/22/2011	6:04:36 PM	BCl3 valve closed
10/22/2011	6:04:36 PM	PH3 valve closed
10/22/2011	6:04:36 PM	SiCl4 pre valve closed
10/22/2011	6:04:36 PM	SiCl4 post valve closed
10/22/2011	6:04:36 PM	Bypass valve closed
10/22/2011	6:04:36 PM	Bubbler valve closed
10/22/2011	6:04:36 PM	Main Vac valve opened
10/22/2011	6:04:36 PM	Helium MFC set to  0.000000
10/22/2011	6:04:36 PM	H2 MFC set to  0.000000
10/22/2011	6:04:36 PM	BCl3 MFC set to  0.000000
10/22/2011	6:04:36 PM	PHl3 MFC set to  0.000000
10/22/2011	6:04:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:04:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:04:36 PM	Tube furnace set to 150
10/22/2011	6:05:06 PM	H2 valve closed
10/22/2011	6:05:06 PM	BCl3 valve closed
10/22/2011	6:05:06 PM	PH3 valve closed
10/22/2011	6:05:06 PM	SiCl4 pre valve closed
10/22/2011	6:05:06 PM	SiCl4 post valve closed
10/22/2011	6:05:06 PM	Bypass valve closed
10/22/2011	6:05:06 PM	Bubbler valve closed
10/22/2011	6:05:06 PM	Helium valve opened
10/22/2011	6:05:06 PM	Main Vac valve opened
10/22/2011	6:05:06 PM	Helium MFC set to  20.000000
10/22/2011	6:05:06 PM	H2 MFC set to  0.000000
10/22/2011	6:05:06 PM	BCl3 MFC set to  0.000000
10/22/2011	6:05:06 PM	PHl3 MFC set to  0.000000
10/22/2011	6:05:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:05:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:05:06 PM	Tube furnace set to 150
10/22/2011	6:05:36 PM	Helium valve closed
10/22/2011	6:05:36 PM	H2 valve closed
10/22/2011	6:05:36 PM	BCl3 valve closed
10/22/2011	6:05:36 PM	PH3 valve closed
10/22/2011	6:05:36 PM	SiCl4 pre valve closed
10/22/2011	6:05:36 PM	SiCl4 post valve closed
10/22/2011	6:05:36 PM	Bypass valve closed
10/22/2011	6:05:36 PM	Bubbler valve closed
10/22/2011	6:05:36 PM	Main Vac valve opened
10/22/2011	6:05:36 PM	Helium MFC set to  0.000000
10/22/2011	6:05:36 PM	H2 MFC set to  0.000000
10/22/2011	6:05:36 PM	BCl3 MFC set to  0.000000
10/22/2011	6:05:36 PM	PHl3 MFC set to  0.000000
10/22/2011	6:05:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:05:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:05:36 PM	Tube furnace set to 150
10/22/2011	6:06:06 PM	H2 valve closed
10/22/2011	6:06:06 PM	BCl3 valve closed
10/22/2011	6:06:06 PM	PH3 valve closed
10/22/2011	6:06:06 PM	SiCl4 pre valve closed
10/22/2011	6:06:06 PM	SiCl4 post valve closed
10/22/2011	6:06:06 PM	Bypass valve closed
10/22/2011	6:06:06 PM	Bubbler valve closed
10/22/2011	6:06:06 PM	Helium valve opened
10/22/2011	6:06:06 PM	Main Vac valve opened
10/22/2011	6:06:06 PM	Helium MFC set to  20.000000
10/22/2011	6:06:06 PM	H2 MFC set to  0.000000
10/22/2011	6:06:06 PM	BCl3 MFC set to  0.000000
10/22/2011	6:06:06 PM	PHl3 MFC set to  0.000000
10/22/2011	6:06:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:06:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:06:06 PM	Tube furnace set to 150
10/22/2011	6:06:37 PM	Helium valve closed
10/22/2011	6:06:37 PM	H2 valve closed
10/22/2011	6:06:37 PM	BCl3 valve closed
10/22/2011	6:06:37 PM	PH3 valve closed
10/22/2011	6:06:37 PM	SiCl4 pre valve closed
10/22/2011	6:06:37 PM	SiCl4 post valve closed
10/22/2011	6:06:37 PM	Bypass valve closed
10/22/2011	6:06:37 PM	Bubbler valve closed
10/22/2011	6:06:37 PM	Main Vac valve opened
10/22/2011	6:06:37 PM	Helium MFC set to  0.000000
10/22/2011	6:06:37 PM	H2 MFC set to  0.000000
10/22/2011	6:06:37 PM	BCl3 MFC set to  0.000000
10/22/2011	6:06:37 PM	PHl3 MFC set to  0.000000
10/22/2011	6:06:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:06:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:06:37 PM	Tube furnace set to 150
10/22/2011	6:07:07 PM	H2 valve closed
10/22/2011	6:07:07 PM	BCl3 valve closed
10/22/2011	6:07:07 PM	PH3 valve closed
10/22/2011	6:07:07 PM	SiCl4 pre valve closed
10/22/2011	6:07:07 PM	SiCl4 post valve closed
10/22/2011	6:07:07 PM	Bypass valve closed
10/22/2011	6:07:07 PM	Bubbler valve closed
10/22/2011	6:07:07 PM	Helium valve opened
10/22/2011	6:07:07 PM	Main Vac valve opened
10/22/2011	6:07:07 PM	Helium MFC set to  20.000000
10/22/2011	6:07:07 PM	H2 MFC set to  0.000000
10/22/2011	6:07:07 PM	BCl3 MFC set to  0.000000
10/22/2011	6:07:07 PM	PHl3 MFC set to  0.000000
10/22/2011	6:07:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:07:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:07:07 PM	Tube furnace set to 150
10/22/2011	6:07:37 PM	Helium valve closed
10/22/2011	6:07:37 PM	H2 valve closed
10/22/2011	6:07:37 PM	BCl3 valve closed
10/22/2011	6:07:37 PM	PH3 valve closed
10/22/2011	6:07:37 PM	SiCl4 pre valve closed
10/22/2011	6:07:37 PM	SiCl4 post valve closed
10/22/2011	6:07:37 PM	Bypass valve closed
10/22/2011	6:07:37 PM	Bubbler valve closed
10/22/2011	6:07:37 PM	Main Vac valve opened
10/22/2011	6:07:37 PM	Helium MFC set to  0.000000
10/22/2011	6:07:37 PM	H2 MFC set to  0.000000
10/22/2011	6:07:37 PM	BCl3 MFC set to  0.000000
10/22/2011	6:07:37 PM	PHl3 MFC set to  0.000000
10/22/2011	6:07:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:07:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:07:37 PM	Tube furnace set to 150
10/22/2011	6:08:07 PM	H2 valve closed
10/22/2011	6:08:07 PM	BCl3 valve closed
10/22/2011	6:08:07 PM	PH3 valve closed
10/22/2011	6:08:07 PM	SiCl4 pre valve closed
10/22/2011	6:08:07 PM	SiCl4 post valve closed
10/22/2011	6:08:07 PM	Bypass valve closed
10/22/2011	6:08:07 PM	Bubbler valve closed
10/22/2011	6:08:07 PM	Helium valve opened
10/22/2011	6:08:07 PM	Main Vac valve opened
10/22/2011	6:08:07 PM	Helium MFC set to  20.000000
10/22/2011	6:08:07 PM	H2 MFC set to  0.000000
10/22/2011	6:08:07 PM	BCl3 MFC set to  0.000000
10/22/2011	6:08:07 PM	PHl3 MFC set to  0.000000
10/22/2011	6:08:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:08:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:08:07 PM	Tube furnace set to 150
10/22/2011	6:08:37 PM	Helium valve closed
10/22/2011	6:08:37 PM	H2 valve closed
10/22/2011	6:08:37 PM	BCl3 valve closed
10/22/2011	6:08:37 PM	PH3 valve closed
10/22/2011	6:08:37 PM	SiCl4 pre valve closed
10/22/2011	6:08:37 PM	SiCl4 post valve closed
10/22/2011	6:08:37 PM	Bypass valve closed
10/22/2011	6:08:37 PM	Bubbler valve closed
10/22/2011	6:08:37 PM	Main Vac valve opened
10/22/2011	6:08:37 PM	Helium MFC set to  0.000000
10/22/2011	6:08:37 PM	H2 MFC set to  0.000000
10/22/2011	6:08:37 PM	BCl3 MFC set to  0.000000
10/22/2011	6:08:37 PM	PHl3 MFC set to  0.000000
10/22/2011	6:08:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:08:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:08:38 PM	Tube furnace set to 150
10/22/2011	6:09:03 PM	Run aborted at 6:09 PM
10/22/2011	6:09:03 PM	Helium valve closed
10/22/2011	6:09:03 PM	H2 valve closed
10/22/2011	6:09:03 PM	BCl3 valve closed
10/22/2011	6:09:03 PM	PH3 valve closed
10/22/2011	6:09:03 PM	SiCl4 pre valve closed
10/22/2011	6:09:03 PM	SiCl4 post valve closed
10/22/2011	6:09:03 PM	Bypass valve closed
10/22/2011	6:09:03 PM	Main Vac valve closed
10/22/2011	6:09:03 PM	Bubbler valve closed
10/22/2011	6:09:03 PM	Helium MFC set to  0.000000
10/22/2011	6:09:03 PM	H2 MFC set to  0.000000
10/22/2011	6:09:03 PM	BCl3 MFC set to  0.000000
10/22/2011	6:09:03 PM	PHl3 MFC set to  0.000000
10/22/2011	6:09:03 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:09:03 PM	Tube furnace set to 0
10/22/2011	6:09:06 PM	Main Vac valve opened
10/22/2011	6:09:57 PM	Recipe started at 6:09 PM
10/22/2011	6:09:57 PM	Helium valve closed
10/22/2011	6:09:57 PM	H2 valve closed
10/22/2011	6:09:57 PM	BCl3 valve closed
10/22/2011	6:09:57 PM	PH3 valve closed
10/22/2011	6:09:57 PM	SiCl4 pre valve closed
10/22/2011	6:09:57 PM	SiCl4 post valve closed
10/22/2011	6:09:57 PM	Main Vac valve closed
10/22/2011	6:09:57 PM	Bubbler valve closed
10/22/2011	6:09:57 PM	Bypass valve opened
10/22/2011	6:09:57 PM	Helium MFC set to  0.000000
10/22/2011	6:09:57 PM	H2 MFC set to  0.000000
10/22/2011	6:09:57 PM	BCl3 MFC set to  0.000000
10/22/2011	6:09:57 PM	PHl3 MFC set to  0.000000
10/22/2011	6:09:57 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:09:57 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:09:57 PM	Tube furnace set to 150
10/22/2011	6:09:58 PM	Helium valve closed
10/22/2011	6:09:58 PM	H2 valve closed
10/22/2011	6:09:58 PM	BCl3 valve closed
10/22/2011	6:09:58 PM	PH3 valve closed
10/22/2011	6:09:58 PM	SiCl4 pre valve closed
10/22/2011	6:09:58 PM	SiCl4 post valve closed
10/22/2011	6:09:58 PM	Main Vac valve closed
10/22/2011	6:09:58 PM	Bubbler valve closed
10/22/2011	6:09:58 PM	Bypass valve opened
10/22/2011	6:09:58 PM	Helium MFC set to  0.000000
10/22/2011	6:09:58 PM	H2 MFC set to  0.000000
10/22/2011	6:09:58 PM	BCl3 MFC set to  0.000000
10/22/2011	6:09:58 PM	PHl3 MFC set to  0.000000
10/22/2011	6:09:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:09:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:09:58 PM	Tube furnace set to 150
10/22/2011	6:10:28 PM	Helium valve closed
10/22/2011	6:10:28 PM	H2 valve closed
10/22/2011	6:10:28 PM	BCl3 valve closed
10/22/2011	6:10:28 PM	PH3 valve closed
10/22/2011	6:10:28 PM	SiCl4 pre valve closed
10/22/2011	6:10:28 PM	SiCl4 post valve closed
10/22/2011	6:10:28 PM	Bypass valve closed
10/22/2011	6:10:28 PM	Bubbler valve closed
10/22/2011	6:10:28 PM	Main Vac valve opened
10/22/2011	6:10:28 PM	Helium MFC set to  0.000000
10/22/2011	6:10:28 PM	H2 MFC set to  0.000000
10/22/2011	6:10:28 PM	BCl3 MFC set to  0.000000
10/22/2011	6:10:28 PM	PHl3 MFC set to  0.000000
10/22/2011	6:10:28 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:10:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:10:28 PM	Tube furnace set to 150
10/22/2011	6:10:58 PM	H2 valve closed
10/22/2011	6:10:58 PM	BCl3 valve closed
10/22/2011	6:10:58 PM	PH3 valve closed
10/22/2011	6:10:58 PM	SiCl4 pre valve closed
10/22/2011	6:10:58 PM	SiCl4 post valve closed
10/22/2011	6:10:58 PM	Bypass valve closed
10/22/2011	6:10:58 PM	Bubbler valve closed
10/22/2011	6:10:58 PM	Helium valve opened
10/22/2011	6:10:58 PM	Main Vac valve opened
10/22/2011	6:10:58 PM	Helium MFC set to  20.000000
10/22/2011	6:10:58 PM	H2 MFC set to  0.000000
10/22/2011	6:10:58 PM	BCl3 MFC set to  0.000000
10/22/2011	6:10:58 PM	PHl3 MFC set to  0.000000
10/22/2011	6:10:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:10:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:10:58 PM	Tube furnace set to 150
10/22/2011	6:11:28 PM	Helium valve closed
10/22/2011	6:11:28 PM	H2 valve closed
10/22/2011	6:11:28 PM	BCl3 valve closed
10/22/2011	6:11:28 PM	PH3 valve closed
10/22/2011	6:11:28 PM	SiCl4 pre valve closed
10/22/2011	6:11:28 PM	SiCl4 post valve closed
10/22/2011	6:11:28 PM	Bypass valve closed
10/22/2011	6:11:28 PM	Bubbler valve closed
10/22/2011	6:11:28 PM	Main Vac valve opened
10/22/2011	6:11:28 PM	Helium MFC set to  0.000000
10/22/2011	6:11:28 PM	H2 MFC set to  0.000000
10/22/2011	6:11:28 PM	BCl3 MFC set to  0.000000
10/22/2011	6:11:28 PM	PHl3 MFC set to  0.000000
10/22/2011	6:11:28 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:11:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:11:28 PM	Tube furnace set to 150
10/22/2011	6:11:59 PM	H2 valve closed
10/22/2011	6:11:59 PM	BCl3 valve closed
10/22/2011	6:11:59 PM	PH3 valve closed
10/22/2011	6:11:59 PM	SiCl4 pre valve closed
10/22/2011	6:11:59 PM	SiCl4 post valve closed
10/22/2011	6:11:59 PM	Bypass valve closed
10/22/2011	6:11:59 PM	Bubbler valve closed
10/22/2011	6:11:59 PM	Helium valve opened
10/22/2011	6:11:59 PM	Main Vac valve opened
10/22/2011	6:11:59 PM	Helium MFC set to  20.000000
10/22/2011	6:11:59 PM	H2 MFC set to  0.000000
10/22/2011	6:11:59 PM	BCl3 MFC set to  0.000000
10/22/2011	6:11:59 PM	PHl3 MFC set to  0.000000
10/22/2011	6:11:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:11:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:11:59 PM	Tube furnace set to 150
10/22/2011	6:12:29 PM	Helium valve closed
10/22/2011	6:12:29 PM	H2 valve closed
10/22/2011	6:12:29 PM	BCl3 valve closed
10/22/2011	6:12:29 PM	PH3 valve closed
10/22/2011	6:12:29 PM	SiCl4 pre valve closed
10/22/2011	6:12:29 PM	SiCl4 post valve closed
10/22/2011	6:12:29 PM	Bypass valve closed
10/22/2011	6:12:29 PM	Bubbler valve closed
10/22/2011	6:12:29 PM	Main Vac valve opened
10/22/2011	6:12:29 PM	Helium MFC set to  0.000000
10/22/2011	6:12:29 PM	H2 MFC set to  0.000000
10/22/2011	6:12:29 PM	BCl3 MFC set to  0.000000
10/22/2011	6:12:29 PM	PHl3 MFC set to  0.000000
10/22/2011	6:12:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:12:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:12:29 PM	Tube furnace set to 150
10/22/2011	6:12:59 PM	H2 valve closed
10/22/2011	6:12:59 PM	BCl3 valve closed
10/22/2011	6:12:59 PM	PH3 valve closed
10/22/2011	6:12:59 PM	SiCl4 pre valve closed
10/22/2011	6:12:59 PM	SiCl4 post valve closed
10/22/2011	6:12:59 PM	Bypass valve closed
10/22/2011	6:12:59 PM	Bubbler valve closed
10/22/2011	6:12:59 PM	Helium valve opened
10/22/2011	6:12:59 PM	Main Vac valve opened
10/22/2011	6:12:59 PM	Helium MFC set to  20.000000
10/22/2011	6:12:59 PM	H2 MFC set to  0.000000
10/22/2011	6:12:59 PM	BCl3 MFC set to  0.000000
10/22/2011	6:12:59 PM	PHl3 MFC set to  0.000000
10/22/2011	6:12:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:12:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:12:59 PM	Tube furnace set to 150
10/22/2011	6:13:29 PM	Helium valve closed
10/22/2011	6:13:29 PM	H2 valve closed
10/22/2011	6:13:29 PM	BCl3 valve closed
10/22/2011	6:13:29 PM	PH3 valve closed
10/22/2011	6:13:29 PM	SiCl4 pre valve closed
10/22/2011	6:13:29 PM	SiCl4 post valve closed
10/22/2011	6:13:29 PM	Bypass valve closed
10/22/2011	6:13:29 PM	Bubbler valve closed
10/22/2011	6:13:29 PM	Main Vac valve opened
10/22/2011	6:13:29 PM	Helium MFC set to  0.000000
10/22/2011	6:13:29 PM	H2 MFC set to  0.000000
10/22/2011	6:13:29 PM	BCl3 MFC set to  0.000000
10/22/2011	6:13:29 PM	PHl3 MFC set to  0.000000
10/22/2011	6:13:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:13:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:13:29 PM	Tube furnace set to 150
10/22/2011	6:13:59 PM	H2 valve closed
10/22/2011	6:13:59 PM	BCl3 valve closed
10/22/2011	6:13:59 PM	PH3 valve closed
10/22/2011	6:13:59 PM	SiCl4 pre valve closed
10/22/2011	6:13:59 PM	SiCl4 post valve closed
10/22/2011	6:13:59 PM	Bypass valve closed
10/22/2011	6:13:59 PM	Bubbler valve closed
10/22/2011	6:13:59 PM	Helium valve opened
10/22/2011	6:13:59 PM	Main Vac valve opened
10/22/2011	6:13:59 PM	Helium MFC set to  20.000000
10/22/2011	6:13:59 PM	H2 MFC set to  0.000000
10/22/2011	6:13:59 PM	BCl3 MFC set to  0.000000
10/22/2011	6:13:59 PM	PHl3 MFC set to  0.000000
10/22/2011	6:13:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:13:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:14:00 PM	Tube furnace set to 150
10/22/2011	6:14:30 PM	Helium valve closed
10/22/2011	6:14:30 PM	H2 valve closed
10/22/2011	6:14:30 PM	BCl3 valve closed
10/22/2011	6:14:30 PM	PH3 valve closed
10/22/2011	6:14:30 PM	SiCl4 pre valve closed
10/22/2011	6:14:30 PM	SiCl4 post valve closed
10/22/2011	6:14:30 PM	Bypass valve closed
10/22/2011	6:14:30 PM	Bubbler valve closed
10/22/2011	6:14:30 PM	Main Vac valve opened
10/22/2011	6:14:30 PM	Helium MFC set to  0.000000
10/22/2011	6:14:30 PM	H2 MFC set to  0.000000
10/22/2011	6:14:30 PM	BCl3 MFC set to  0.000000
10/22/2011	6:14:30 PM	PHl3 MFC set to  0.000000
10/22/2011	6:14:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:14:30 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:14:30 PM	Tube furnace set to 150
10/22/2011	6:15:00 PM	H2 valve closed
10/22/2011	6:15:00 PM	BCl3 valve closed
10/22/2011	6:15:00 PM	PH3 valve closed
10/22/2011	6:15:00 PM	SiCl4 pre valve closed
10/22/2011	6:15:00 PM	SiCl4 post valve closed
10/22/2011	6:15:00 PM	Bypass valve closed
10/22/2011	6:15:00 PM	Bubbler valve closed
10/22/2011	6:15:00 PM	Helium valve opened
10/22/2011	6:15:00 PM	Main Vac valve opened
10/22/2011	6:15:00 PM	Helium MFC set to  20.000000
10/22/2011	6:15:00 PM	H2 MFC set to  0.000000
10/22/2011	6:15:00 PM	BCl3 MFC set to  0.000000
10/22/2011	6:15:00 PM	PHl3 MFC set to  0.000000
10/22/2011	6:15:00 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:15:00 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:15:00 PM	Tube furnace set to 150
10/22/2011	6:15:30 PM	Helium valve closed
10/22/2011	6:15:30 PM	H2 valve closed
10/22/2011	6:15:30 PM	BCl3 valve closed
10/22/2011	6:15:30 PM	PH3 valve closed
10/22/2011	6:15:30 PM	SiCl4 pre valve closed
10/22/2011	6:15:30 PM	SiCl4 post valve closed
10/22/2011	6:15:30 PM	Bypass valve closed
10/22/2011	6:15:30 PM	Bubbler valve closed
10/22/2011	6:15:30 PM	Main Vac valve opened
10/22/2011	6:15:30 PM	Helium MFC set to  0.000000
10/22/2011	6:15:30 PM	H2 MFC set to  0.000000
10/22/2011	6:15:30 PM	BCl3 MFC set to  0.000000
10/22/2011	6:15:30 PM	PHl3 MFC set to  0.000000
10/22/2011	6:15:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:15:30 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:15:30 PM	Tube furnace set to 150
10/22/2011	6:16:00 PM	H2 valve closed
10/22/2011	6:16:00 PM	BCl3 valve closed
10/22/2011	6:16:00 PM	PH3 valve closed
10/22/2011	6:16:00 PM	SiCl4 pre valve closed
10/22/2011	6:16:00 PM	SiCl4 post valve closed
10/22/2011	6:16:00 PM	Bypass valve closed
10/22/2011	6:16:00 PM	Bubbler valve closed
10/22/2011	6:16:00 PM	Helium valve opened
10/22/2011	6:16:00 PM	Main Vac valve opened
10/22/2011	6:16:00 PM	Helium MFC set to  20.000000
10/22/2011	6:16:00 PM	H2 MFC set to  0.000000
10/22/2011	6:16:00 PM	BCl3 MFC set to  0.000000
10/22/2011	6:16:00 PM	PHl3 MFC set to  0.000000
10/22/2011	6:16:00 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:16:00 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:16:00 PM	Tube furnace set to 150
10/22/2011	6:16:30 PM	Helium valve closed
10/22/2011	6:16:30 PM	H2 valve closed
10/22/2011	6:16:30 PM	BCl3 valve closed
10/22/2011	6:16:30 PM	PH3 valve closed
10/22/2011	6:16:30 PM	SiCl4 pre valve closed
10/22/2011	6:16:30 PM	SiCl4 post valve closed
10/22/2011	6:16:30 PM	Bypass valve closed
10/22/2011	6:16:30 PM	Bubbler valve closed
10/22/2011	6:16:30 PM	Main Vac valve opened
10/22/2011	6:16:30 PM	Helium MFC set to  0.000000
10/22/2011	6:16:30 PM	H2 MFC set to  0.000000
10/22/2011	6:16:30 PM	BCl3 MFC set to  0.000000
10/22/2011	6:16:30 PM	PHl3 MFC set to  0.000000
10/22/2011	6:16:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:16:30 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:16:31 PM	Tube furnace set to 150
10/22/2011	6:17:01 PM	H2 valve closed
10/22/2011	6:17:01 PM	BCl3 valve closed
10/22/2011	6:17:01 PM	PH3 valve closed
10/22/2011	6:17:01 PM	SiCl4 pre valve closed
10/22/2011	6:17:01 PM	SiCl4 post valve closed
10/22/2011	6:17:01 PM	Bypass valve closed
10/22/2011	6:17:01 PM	Bubbler valve closed
10/22/2011	6:17:01 PM	Helium valve opened
10/22/2011	6:17:01 PM	Main Vac valve opened
10/22/2011	6:17:01 PM	Helium MFC set to  20.000000
10/22/2011	6:17:01 PM	H2 MFC set to  0.000000
10/22/2011	6:17:01 PM	BCl3 MFC set to  0.000000
10/22/2011	6:17:01 PM	PHl3 MFC set to  0.000000
10/22/2011	6:17:01 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:17:01 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:17:01 PM	Tube furnace set to 150
10/22/2011	6:17:31 PM	Helium valve closed
10/22/2011	6:17:31 PM	H2 valve closed
10/22/2011	6:17:31 PM	BCl3 valve closed
10/22/2011	6:17:31 PM	PH3 valve closed
10/22/2011	6:17:31 PM	SiCl4 pre valve closed
10/22/2011	6:17:31 PM	SiCl4 post valve closed
10/22/2011	6:17:31 PM	Bypass valve closed
10/22/2011	6:17:31 PM	Bubbler valve closed
10/22/2011	6:17:31 PM	Main Vac valve opened
10/22/2011	6:17:31 PM	Helium MFC set to  0.000000
10/22/2011	6:17:31 PM	H2 MFC set to  0.000000
10/22/2011	6:17:31 PM	BCl3 MFC set to  0.000000
10/22/2011	6:17:31 PM	PHl3 MFC set to  0.000000
10/22/2011	6:17:31 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:17:31 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:17:31 PM	Tube furnace set to 150
10/22/2011	6:18:01 PM	H2 valve closed
10/22/2011	6:18:01 PM	BCl3 valve closed
10/22/2011	6:18:01 PM	PH3 valve closed
10/22/2011	6:18:01 PM	SiCl4 pre valve closed
10/22/2011	6:18:01 PM	SiCl4 post valve closed
10/22/2011	6:18:01 PM	Bypass valve closed
10/22/2011	6:18:01 PM	Bubbler valve closed
10/22/2011	6:18:01 PM	Helium valve opened
10/22/2011	6:18:01 PM	Main Vac valve opened
10/22/2011	6:18:01 PM	Helium MFC set to  20.000000
10/22/2011	6:18:01 PM	H2 MFC set to  0.000000
10/22/2011	6:18:01 PM	BCl3 MFC set to  0.000000
10/22/2011	6:18:01 PM	PHl3 MFC set to  0.000000
10/22/2011	6:18:01 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:18:01 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:18:01 PM	Tube furnace set to 150
10/22/2011	6:18:31 PM	Helium valve closed
10/22/2011	6:18:31 PM	H2 valve closed
10/22/2011	6:18:31 PM	BCl3 valve closed
10/22/2011	6:18:31 PM	PH3 valve closed
10/22/2011	6:18:31 PM	SiCl4 pre valve closed
10/22/2011	6:18:31 PM	SiCl4 post valve closed
10/22/2011	6:18:31 PM	Bypass valve closed
10/22/2011	6:18:31 PM	Bubbler valve closed
10/22/2011	6:18:31 PM	Main Vac valve opened
10/22/2011	6:18:31 PM	Helium MFC set to  0.000000
10/22/2011	6:18:31 PM	H2 MFC set to  0.000000
10/22/2011	6:18:31 PM	BCl3 MFC set to  0.000000
10/22/2011	6:18:31 PM	PHl3 MFC set to  0.000000
10/22/2011	6:18:31 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:18:31 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:18:31 PM	Tube furnace set to 150
10/22/2011	6:19:01 PM	H2 valve closed
10/22/2011	6:19:01 PM	BCl3 valve closed
10/22/2011	6:19:01 PM	PH3 valve closed
10/22/2011	6:19:01 PM	SiCl4 pre valve closed
10/22/2011	6:19:01 PM	SiCl4 post valve closed
10/22/2011	6:19:01 PM	Bypass valve closed
10/22/2011	6:19:01 PM	Bubbler valve closed
10/22/2011	6:19:02 PM	Helium valve opened
10/22/2011	6:19:02 PM	Main Vac valve opened
10/22/2011	6:19:02 PM	Helium MFC set to  20.000000
10/22/2011	6:19:02 PM	H2 MFC set to  0.000000
10/22/2011	6:19:02 PM	BCl3 MFC set to  0.000000
10/22/2011	6:19:02 PM	PHl3 MFC set to  0.000000
10/22/2011	6:19:02 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:19:02 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:19:02 PM	Tube furnace set to 150
10/22/2011	6:19:32 PM	Helium valve closed
10/22/2011	6:19:32 PM	H2 valve closed
10/22/2011	6:19:32 PM	BCl3 valve closed
10/22/2011	6:19:32 PM	PH3 valve closed
10/22/2011	6:19:32 PM	SiCl4 pre valve closed
10/22/2011	6:19:32 PM	SiCl4 post valve closed
10/22/2011	6:19:32 PM	Bypass valve closed
10/22/2011	6:19:32 PM	Bubbler valve closed
10/22/2011	6:19:32 PM	Main Vac valve opened
10/22/2011	6:19:32 PM	Helium MFC set to  0.000000
10/22/2011	6:19:32 PM	H2 MFC set to  0.000000
10/22/2011	6:19:32 PM	BCl3 MFC set to  0.000000
10/22/2011	6:19:32 PM	PHl3 MFC set to  0.000000
10/22/2011	6:19:32 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:19:32 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:19:32 PM	Tube furnace set to 150
10/22/2011	6:20:02 PM	H2 valve closed
10/22/2011	6:20:02 PM	BCl3 valve closed
10/22/2011	6:20:02 PM	PH3 valve closed
10/22/2011	6:20:02 PM	SiCl4 pre valve closed
10/22/2011	6:20:02 PM	SiCl4 post valve closed
10/22/2011	6:20:02 PM	Bypass valve closed
10/22/2011	6:20:02 PM	Bubbler valve closed
10/22/2011	6:20:02 PM	Helium valve opened
10/22/2011	6:20:02 PM	Main Vac valve opened
10/22/2011	6:20:02 PM	Helium MFC set to  20.000000
10/22/2011	6:20:02 PM	H2 MFC set to  0.000000
10/22/2011	6:20:02 PM	BCl3 MFC set to  0.000000
10/22/2011	6:20:02 PM	PHl3 MFC set to  0.000000
10/22/2011	6:20:02 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:20:02 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:20:02 PM	Tube furnace set to 150
10/22/2011	6:20:32 PM	Helium valve closed
10/22/2011	6:20:32 PM	H2 valve closed
10/22/2011	6:20:32 PM	BCl3 valve closed
10/22/2011	6:20:32 PM	PH3 valve closed
10/22/2011	6:20:32 PM	SiCl4 pre valve closed
10/22/2011	6:20:32 PM	SiCl4 post valve closed
10/22/2011	6:20:32 PM	Bypass valve closed
10/22/2011	6:20:32 PM	Bubbler valve closed
10/22/2011	6:20:32 PM	Main Vac valve opened
10/22/2011	6:20:32 PM	Helium MFC set to  0.000000
10/22/2011	6:20:32 PM	H2 MFC set to  0.000000
10/22/2011	6:20:32 PM	BCl3 MFC set to  0.000000
10/22/2011	6:20:32 PM	PHl3 MFC set to  0.000000
10/22/2011	6:20:32 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:20:32 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:20:32 PM	Tube furnace set to 150
10/22/2011	6:21:02 PM	H2 valve closed
10/22/2011	6:21:02 PM	BCl3 valve closed
10/22/2011	6:21:02 PM	PH3 valve closed
10/22/2011	6:21:02 PM	SiCl4 pre valve closed
10/22/2011	6:21:02 PM	SiCl4 post valve closed
10/22/2011	6:21:02 PM	Bypass valve closed
10/22/2011	6:21:02 PM	Bubbler valve closed
10/22/2011	6:21:02 PM	Helium valve opened
10/22/2011	6:21:02 PM	Main Vac valve opened
10/22/2011	6:21:02 PM	Helium MFC set to  20.000000
10/22/2011	6:21:02 PM	H2 MFC set to  0.000000
10/22/2011	6:21:02 PM	BCl3 MFC set to  0.000000
10/22/2011	6:21:02 PM	PHl3 MFC set to  0.000000
10/22/2011	6:21:02 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:21:02 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:21:03 PM	Tube furnace set to 150
10/22/2011	6:21:33 PM	Helium valve closed
10/22/2011	6:21:33 PM	H2 valve closed
10/22/2011	6:21:33 PM	BCl3 valve closed
10/22/2011	6:21:33 PM	PH3 valve closed
10/22/2011	6:21:33 PM	SiCl4 pre valve closed
10/22/2011	6:21:33 PM	SiCl4 post valve closed
10/22/2011	6:21:33 PM	Bypass valve closed
10/22/2011	6:21:33 PM	Bubbler valve closed
10/22/2011	6:21:33 PM	Main Vac valve opened
10/22/2011	6:21:33 PM	Helium MFC set to  0.000000
10/22/2011	6:21:33 PM	H2 MFC set to  0.000000
10/22/2011	6:21:33 PM	BCl3 MFC set to  0.000000
10/22/2011	6:21:33 PM	PHl3 MFC set to  0.000000
10/22/2011	6:21:33 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:21:33 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:21:33 PM	Tube furnace set to 150
10/22/2011	6:22:03 PM	H2 valve closed
10/22/2011	6:22:03 PM	BCl3 valve closed
10/22/2011	6:22:03 PM	PH3 valve closed
10/22/2011	6:22:03 PM	SiCl4 pre valve closed
10/22/2011	6:22:03 PM	SiCl4 post valve closed
10/22/2011	6:22:03 PM	Bypass valve closed
10/22/2011	6:22:03 PM	Bubbler valve closed
10/22/2011	6:22:03 PM	Helium valve opened
10/22/2011	6:22:03 PM	Main Vac valve opened
10/22/2011	6:22:03 PM	Helium MFC set to  20.000000
10/22/2011	6:22:03 PM	H2 MFC set to  0.000000
10/22/2011	6:22:03 PM	BCl3 MFC set to  0.000000
10/22/2011	6:22:03 PM	PHl3 MFC set to  0.000000
10/22/2011	6:22:03 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:22:03 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:22:03 PM	Tube furnace set to 150
10/22/2011	6:22:33 PM	Helium valve closed
10/22/2011	6:22:33 PM	H2 valve closed
10/22/2011	6:22:33 PM	BCl3 valve closed
10/22/2011	6:22:33 PM	PH3 valve closed
10/22/2011	6:22:33 PM	SiCl4 pre valve closed
10/22/2011	6:22:33 PM	SiCl4 post valve closed
10/22/2011	6:22:33 PM	Bypass valve closed
10/22/2011	6:22:33 PM	Bubbler valve closed
10/22/2011	6:22:33 PM	Main Vac valve opened
10/22/2011	6:22:33 PM	Helium MFC set to  0.000000
10/22/2011	6:22:33 PM	H2 MFC set to  0.000000
10/22/2011	6:22:33 PM	BCl3 MFC set to  0.000000
10/22/2011	6:22:33 PM	PHl3 MFC set to  0.000000
10/22/2011	6:22:33 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:22:33 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:22:33 PM	Tube furnace set to 150
10/22/2011	6:23:03 PM	H2 valve closed
10/22/2011	6:23:03 PM	BCl3 valve closed
10/22/2011	6:23:03 PM	PH3 valve closed
10/22/2011	6:23:03 PM	SiCl4 pre valve closed
10/22/2011	6:23:03 PM	SiCl4 post valve closed
10/22/2011	6:23:03 PM	Bypass valve closed
10/22/2011	6:23:03 PM	Bubbler valve closed
10/22/2011	6:23:03 PM	Helium valve opened
10/22/2011	6:23:03 PM	Main Vac valve opened
10/22/2011	6:23:03 PM	Helium MFC set to  20.000000
10/22/2011	6:23:03 PM	H2 MFC set to  0.000000
10/22/2011	6:23:03 PM	BCl3 MFC set to  0.000000
10/22/2011	6:23:03 PM	PHl3 MFC set to  0.000000
10/22/2011	6:23:03 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:23:03 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:23:03 PM	Tube furnace set to 150
10/22/2011	6:23:33 PM	Helium valve closed
10/22/2011	6:23:33 PM	H2 valve closed
10/22/2011	6:23:33 PM	BCl3 valve closed
10/22/2011	6:23:33 PM	PH3 valve closed
10/22/2011	6:23:33 PM	SiCl4 pre valve closed
10/22/2011	6:23:33 PM	SiCl4 post valve closed
10/22/2011	6:23:33 PM	Bypass valve closed
10/22/2011	6:23:33 PM	Bubbler valve closed
10/22/2011	6:23:33 PM	Main Vac valve opened
10/22/2011	6:23:33 PM	Helium MFC set to  0.000000
10/22/2011	6:23:33 PM	H2 MFC set to  0.000000
10/22/2011	6:23:33 PM	BCl3 MFC set to  0.000000
10/22/2011	6:23:33 PM	PHl3 MFC set to  0.000000
10/22/2011	6:23:33 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:23:33 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:23:34 PM	Tube furnace set to 150
10/22/2011	6:24:04 PM	H2 valve closed
10/22/2011	6:24:04 PM	BCl3 valve closed
10/22/2011	6:24:04 PM	PH3 valve closed
10/22/2011	6:24:04 PM	SiCl4 pre valve closed
10/22/2011	6:24:04 PM	SiCl4 post valve closed
10/22/2011	6:24:04 PM	Bypass valve closed
10/22/2011	6:24:04 PM	Bubbler valve closed
10/22/2011	6:24:04 PM	Helium valve opened
10/22/2011	6:24:04 PM	Main Vac valve opened
10/22/2011	6:24:04 PM	Helium MFC set to  20.000000
10/22/2011	6:24:04 PM	H2 MFC set to  0.000000
10/22/2011	6:24:04 PM	BCl3 MFC set to  0.000000
10/22/2011	6:24:04 PM	PHl3 MFC set to  0.000000
10/22/2011	6:24:04 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:24:04 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:24:04 PM	Tube furnace set to 150
10/22/2011	6:24:34 PM	Helium valve closed
10/22/2011	6:24:34 PM	H2 valve closed
10/22/2011	6:24:34 PM	BCl3 valve closed
10/22/2011	6:24:34 PM	PH3 valve closed
10/22/2011	6:24:34 PM	SiCl4 pre valve closed
10/22/2011	6:24:34 PM	SiCl4 post valve closed
10/22/2011	6:24:34 PM	Bypass valve closed
10/22/2011	6:24:34 PM	Bubbler valve closed
10/22/2011	6:24:34 PM	Main Vac valve opened
10/22/2011	6:24:34 PM	Helium MFC set to  0.000000
10/22/2011	6:24:34 PM	H2 MFC set to  0.000000
10/22/2011	6:24:34 PM	BCl3 MFC set to  0.000000
10/22/2011	6:24:34 PM	PHl3 MFC set to  0.000000
10/22/2011	6:24:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:24:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:24:34 PM	Tube furnace set to 150
10/22/2011	6:25:04 PM	H2 valve closed
10/22/2011	6:25:04 PM	BCl3 valve closed
10/22/2011	6:25:04 PM	PH3 valve closed
10/22/2011	6:25:04 PM	SiCl4 pre valve closed
10/22/2011	6:25:04 PM	SiCl4 post valve closed
10/22/2011	6:25:04 PM	Bypass valve closed
10/22/2011	6:25:04 PM	Bubbler valve closed
10/22/2011	6:25:04 PM	Helium valve opened
10/22/2011	6:25:04 PM	Main Vac valve opened
10/22/2011	6:25:04 PM	Helium MFC set to  20.000000
10/22/2011	6:25:04 PM	H2 MFC set to  0.000000
10/22/2011	6:25:04 PM	BCl3 MFC set to  0.000000
10/22/2011	6:25:04 PM	PHl3 MFC set to  0.000000
10/22/2011	6:25:04 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:25:04 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:25:04 PM	Tube furnace set to 150
10/22/2011	6:25:34 PM	Helium valve closed
10/22/2011	6:25:34 PM	H2 valve closed
10/22/2011	6:25:34 PM	BCl3 valve closed
10/22/2011	6:25:34 PM	PH3 valve closed
10/22/2011	6:25:34 PM	SiCl4 pre valve closed
10/22/2011	6:25:34 PM	SiCl4 post valve closed
10/22/2011	6:25:34 PM	Bypass valve closed
10/22/2011	6:25:34 PM	Bubbler valve closed
10/22/2011	6:25:34 PM	Main Vac valve opened
10/22/2011	6:25:34 PM	Helium MFC set to  0.000000
10/22/2011	6:25:34 PM	H2 MFC set to  0.000000
10/22/2011	6:25:34 PM	BCl3 MFC set to  0.000000
10/22/2011	6:25:34 PM	PHl3 MFC set to  0.000000
10/22/2011	6:25:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:25:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:25:34 PM	Tube furnace set to 150
10/22/2011	6:26:05 PM	H2 valve closed
10/22/2011	6:26:05 PM	BCl3 valve closed
10/22/2011	6:26:05 PM	PH3 valve closed
10/22/2011	6:26:05 PM	SiCl4 pre valve closed
10/22/2011	6:26:05 PM	SiCl4 post valve closed
10/22/2011	6:26:05 PM	Bypass valve closed
10/22/2011	6:26:05 PM	Bubbler valve closed
10/22/2011	6:26:05 PM	Helium valve opened
10/22/2011	6:26:05 PM	Main Vac valve opened
10/22/2011	6:26:05 PM	Helium MFC set to  20.000000
10/22/2011	6:26:05 PM	H2 MFC set to  0.000000
10/22/2011	6:26:05 PM	BCl3 MFC set to  0.000000
10/22/2011	6:26:05 PM	PHl3 MFC set to  0.000000
10/22/2011	6:26:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:26:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:26:05 PM	Tube furnace set to 150
10/22/2011	6:26:35 PM	Helium valve closed
10/22/2011	6:26:35 PM	H2 valve closed
10/22/2011	6:26:35 PM	BCl3 valve closed
10/22/2011	6:26:35 PM	PH3 valve closed
10/22/2011	6:26:35 PM	SiCl4 pre valve closed
10/22/2011	6:26:35 PM	SiCl4 post valve closed
10/22/2011	6:26:35 PM	Bypass valve closed
10/22/2011	6:26:35 PM	Bubbler valve closed
10/22/2011	6:26:35 PM	Main Vac valve opened
10/22/2011	6:26:35 PM	Helium MFC set to  0.000000
10/22/2011	6:26:35 PM	H2 MFC set to  0.000000
10/22/2011	6:26:35 PM	BCl3 MFC set to  0.000000
10/22/2011	6:26:35 PM	PHl3 MFC set to  0.000000
10/22/2011	6:26:35 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:26:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:26:35 PM	Tube furnace set to 150
10/22/2011	6:27:05 PM	H2 valve closed
10/22/2011	6:27:05 PM	BCl3 valve closed
10/22/2011	6:27:05 PM	PH3 valve closed
10/22/2011	6:27:05 PM	SiCl4 pre valve closed
10/22/2011	6:27:05 PM	SiCl4 post valve closed
10/22/2011	6:27:05 PM	Bypass valve closed
10/22/2011	6:27:05 PM	Bubbler valve closed
10/22/2011	6:27:05 PM	Helium valve opened
10/22/2011	6:27:05 PM	Main Vac valve opened
10/22/2011	6:27:05 PM	Helium MFC set to  20.000000
10/22/2011	6:27:05 PM	H2 MFC set to  0.000000
10/22/2011	6:27:05 PM	BCl3 MFC set to  0.000000
10/22/2011	6:27:05 PM	PHl3 MFC set to  0.000000
10/22/2011	6:27:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:27:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:27:05 PM	Tube furnace set to 150
10/22/2011	6:27:35 PM	Helium valve closed
10/22/2011	6:27:35 PM	H2 valve closed
10/22/2011	6:27:35 PM	BCl3 valve closed
10/22/2011	6:27:35 PM	PH3 valve closed
10/22/2011	6:27:35 PM	SiCl4 pre valve closed
10/22/2011	6:27:35 PM	SiCl4 post valve closed
10/22/2011	6:27:35 PM	Bypass valve closed
10/22/2011	6:27:35 PM	Bubbler valve closed
10/22/2011	6:27:35 PM	Main Vac valve opened
10/22/2011	6:27:35 PM	Helium MFC set to  0.000000
10/22/2011	6:27:35 PM	H2 MFC set to  0.000000
10/22/2011	6:27:35 PM	BCl3 MFC set to  0.000000
10/22/2011	6:27:35 PM	PHl3 MFC set to  0.000000
10/22/2011	6:27:35 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:27:35 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:27:35 PM	Tube furnace set to 150
10/22/2011	6:28:05 PM	H2 valve closed
10/22/2011	6:28:05 PM	BCl3 valve closed
10/22/2011	6:28:05 PM	PH3 valve closed
10/22/2011	6:28:05 PM	SiCl4 pre valve closed
10/22/2011	6:28:05 PM	SiCl4 post valve closed
10/22/2011	6:28:05 PM	Bypass valve closed
10/22/2011	6:28:05 PM	Bubbler valve closed
10/22/2011	6:28:05 PM	Helium valve opened
10/22/2011	6:28:05 PM	Main Vac valve opened
10/22/2011	6:28:05 PM	Helium MFC set to  20.000000
10/22/2011	6:28:05 PM	H2 MFC set to  0.000000
10/22/2011	6:28:05 PM	BCl3 MFC set to  0.000000
10/22/2011	6:28:05 PM	PHl3 MFC set to  0.000000
10/22/2011	6:28:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:28:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:28:06 PM	Tube furnace set to 150
10/22/2011	6:28:36 PM	Helium valve closed
10/22/2011	6:28:36 PM	H2 valve closed
10/22/2011	6:28:36 PM	BCl3 valve closed
10/22/2011	6:28:36 PM	PH3 valve closed
10/22/2011	6:28:36 PM	SiCl4 pre valve closed
10/22/2011	6:28:36 PM	SiCl4 post valve closed
10/22/2011	6:28:36 PM	Bypass valve closed
10/22/2011	6:28:36 PM	Bubbler valve closed
10/22/2011	6:28:36 PM	Main Vac valve opened
10/22/2011	6:28:36 PM	Helium MFC set to  0.000000
10/22/2011	6:28:36 PM	H2 MFC set to  0.000000
10/22/2011	6:28:36 PM	BCl3 MFC set to  0.000000
10/22/2011	6:28:36 PM	PHl3 MFC set to  0.000000
10/22/2011	6:28:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:28:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:28:36 PM	Tube furnace set to 150
10/22/2011	6:29:06 PM	H2 valve closed
10/22/2011	6:29:06 PM	BCl3 valve closed
10/22/2011	6:29:06 PM	PH3 valve closed
10/22/2011	6:29:06 PM	SiCl4 pre valve closed
10/22/2011	6:29:06 PM	SiCl4 post valve closed
10/22/2011	6:29:06 PM	Bypass valve closed
10/22/2011	6:29:06 PM	Bubbler valve closed
10/22/2011	6:29:06 PM	Helium valve opened
10/22/2011	6:29:06 PM	Main Vac valve opened
10/22/2011	6:29:06 PM	Helium MFC set to  20.000000
10/22/2011	6:29:06 PM	H2 MFC set to  0.000000
10/22/2011	6:29:06 PM	BCl3 MFC set to  0.000000
10/22/2011	6:29:06 PM	PHl3 MFC set to  0.000000
10/22/2011	6:29:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:29:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:29:06 PM	Tube furnace set to 150
10/22/2011	6:29:36 PM	Helium valve closed
10/22/2011	6:29:36 PM	H2 valve closed
10/22/2011	6:29:36 PM	BCl3 valve closed
10/22/2011	6:29:36 PM	PH3 valve closed
10/22/2011	6:29:36 PM	SiCl4 pre valve closed
10/22/2011	6:29:36 PM	SiCl4 post valve closed
10/22/2011	6:29:36 PM	Bypass valve closed
10/22/2011	6:29:36 PM	Bubbler valve closed
10/22/2011	6:29:36 PM	Main Vac valve opened
10/22/2011	6:29:36 PM	Helium MFC set to  0.000000
10/22/2011	6:29:36 PM	H2 MFC set to  0.000000
10/22/2011	6:29:36 PM	BCl3 MFC set to  0.000000
10/22/2011	6:29:36 PM	PHl3 MFC set to  0.000000
10/22/2011	6:29:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:29:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:29:36 PM	Tube furnace set to 150
10/22/2011	6:30:06 PM	H2 valve closed
10/22/2011	6:30:06 PM	BCl3 valve closed
10/22/2011	6:30:06 PM	PH3 valve closed
10/22/2011	6:30:06 PM	SiCl4 pre valve closed
10/22/2011	6:30:06 PM	SiCl4 post valve closed
10/22/2011	6:30:06 PM	Bypass valve closed
10/22/2011	6:30:06 PM	Bubbler valve closed
10/22/2011	6:30:06 PM	Helium valve opened
10/22/2011	6:30:06 PM	Main Vac valve opened
10/22/2011	6:30:06 PM	Helium MFC set to  20.000000
10/22/2011	6:30:06 PM	H2 MFC set to  0.000000
10/22/2011	6:30:06 PM	BCl3 MFC set to  0.000000
10/22/2011	6:30:06 PM	PHl3 MFC set to  0.000000
10/22/2011	6:30:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:30:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:30:06 PM	Tube furnace set to 150
10/22/2011	6:30:36 PM	Helium valve closed
10/22/2011	6:30:36 PM	H2 valve closed
10/22/2011	6:30:36 PM	BCl3 valve closed
10/22/2011	6:30:36 PM	PH3 valve closed
10/22/2011	6:30:36 PM	SiCl4 pre valve closed
10/22/2011	6:30:36 PM	SiCl4 post valve closed
10/22/2011	6:30:36 PM	Bypass valve closed
10/22/2011	6:30:36 PM	Bubbler valve closed
10/22/2011	6:30:36 PM	Main Vac valve opened
10/22/2011	6:30:36 PM	Helium MFC set to  0.000000
10/22/2011	6:30:36 PM	H2 MFC set to  0.000000
10/22/2011	6:30:36 PM	BCl3 MFC set to  0.000000
10/22/2011	6:30:36 PM	PHl3 MFC set to  0.000000
10/22/2011	6:30:36 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:30:36 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:30:37 PM	Tube furnace set to 180
10/22/2011	6:30:42 PM	Run finished at 6:30 PM
10/22/2011	6:38:19 PM	Main Vac valve closed
10/22/2011	6:38:24 PM	Main Vac valve opened
10/22/2011	6:38:50 PM	Recipe started at 6:38 PM
10/22/2011	6:38:50 PM	Helium valve closed
10/22/2011	6:38:50 PM	H2 valve closed
10/22/2011	6:38:50 PM	BCl3 valve closed
10/22/2011	6:38:50 PM	PH3 valve closed
10/22/2011	6:38:50 PM	SiCl4 pre valve closed
10/22/2011	6:38:50 PM	SiCl4 post valve closed
10/22/2011	6:38:50 PM	Main Vac valve closed
10/22/2011	6:38:50 PM	Bypass valve closed
10/22/2011	6:38:50 PM	Bubbler valve closed
10/22/2011	6:38:50 PM	Helium MFC set to  0.000000
10/22/2011	6:38:50 PM	H2 MFC set to  0.000000
10/22/2011	6:38:50 PM	BCl3 MFC set to  0.000000
10/22/2011	6:38:50 PM	PHl3 MFC set to  0.000000
10/22/2011	6:38:50 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:38:50 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:38:50 PM	Tube furnace set to 0
10/22/2011	6:38:53 PM	Helium valve closed
10/22/2011	6:38:53 PM	BCl3 valve closed
10/22/2011	6:38:53 PM	PH3 valve closed
10/22/2011	6:38:53 PM	SiCl4 pre valve closed
10/22/2011	6:38:53 PM	SiCl4 post valve closed
10/22/2011	6:38:53 PM	Main Vac valve closed
10/22/2011	6:38:53 PM	Bypass valve closed
10/22/2011	6:38:53 PM	Bubbler valve closed
10/22/2011	6:38:53 PM	H2 valve opened
10/22/2011	6:38:53 PM	Helium MFC set to  0.000000
10/22/2011	6:38:53 PM	H2 MFC set to  500.000000
10/22/2011	6:38:53 PM	BCl3 MFC set to  0.000000
10/22/2011	6:38:53 PM	PHl3 MFC set to  0.000000
10/22/2011	6:38:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:38:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:38:53 PM	Tube furnace set to 0
10/22/2011	6:39:56 PM	Helium valve closed
10/22/2011	6:39:56 PM	BCl3 valve closed
10/22/2011	6:39:56 PM	PH3 valve closed
10/22/2011	6:39:56 PM	SiCl4 pre valve closed
10/22/2011	6:39:56 PM	SiCl4 post valve closed
10/22/2011	6:39:56 PM	Main Vac valve closed
10/22/2011	6:39:56 PM	Bypass valve closed
10/22/2011	6:39:56 PM	H2 valve opened
10/22/2011	6:39:56 PM	Bubbler valve opened
10/22/2011	6:39:56 PM	Helium MFC set to  0.000000
10/22/2011	6:39:56 PM	H2 MFC set to  500.000000
10/22/2011	6:39:56 PM	BCl3 MFC set to  0.000000
10/22/2011	6:39:56 PM	PHl3 MFC set to  0.000000
10/22/2011	6:39:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:39:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:39:56 PM	Tube furnace set to 0
10/22/2011	6:39:57 PM	Helium valve closed
10/22/2011	6:39:57 PM	BCl3 valve closed
10/22/2011	6:39:57 PM	PH3 valve closed
10/22/2011	6:39:57 PM	SiCl4 pre valve closed
10/22/2011	6:39:57 PM	SiCl4 post valve closed
10/22/2011	6:39:57 PM	Main Vac valve closed
10/22/2011	6:39:57 PM	Bypass valve closed
10/22/2011	6:39:57 PM	H2 valve opened
10/22/2011	6:39:57 PM	Bubbler valve opened
10/22/2011	6:39:57 PM	Helium MFC set to  0.000000
10/22/2011	6:39:57 PM	H2 MFC set to  500.000000
10/22/2011	6:39:57 PM	BCl3 MFC set to  0.000000
10/22/2011	6:39:57 PM	PHl3 MFC set to  0.000000
10/22/2011	6:39:57 PM	SiCl4 MFC set to  0.000000
10/22/2011	6:39:57 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:39:57 PM	Tube furnace set to 1045
10/22/2011	6:59:57 PM	Helium valve closed
10/22/2011	6:59:57 PM	BCl3 valve closed
10/22/2011	6:59:57 PM	PH3 valve closed
10/22/2011	6:59:57 PM	Main Vac valve closed
10/22/2011	6:59:57 PM	Bypass valve closed
10/22/2011	6:59:57 PM	H2 valve opened
10/22/2011	6:59:57 PM	SiCl4 pre valve opened
10/22/2011	6:59:57 PM	SiCl4 post valve opened
10/22/2011	6:59:57 PM	Bubbler valve opened
10/22/2011	6:59:57 PM	Helium MFC set to  0.000000
10/22/2011	6:59:57 PM	H2 MFC set to  500.000000
10/22/2011	6:59:57 PM	BCl3 MFC set to  0.000000
10/22/2011	6:59:57 PM	PHl3 MFC set to  0.000000
10/22/2011	6:59:57 PM	SiCl4 MFC set to  52.000000
10/22/2011	6:59:57 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	6:59:57 PM	Tube furnace set to 1045
10/22/2011	7:09:57 PM	Helium valve closed
10/22/2011	7:09:57 PM	BCl3 valve closed
10/22/2011	7:09:57 PM	PH3 valve closed
10/22/2011	7:09:57 PM	SiCl4 pre valve closed
10/22/2011	7:09:57 PM	SiCl4 post valve closed
10/22/2011	7:09:57 PM	Main Vac valve closed
10/22/2011	7:09:57 PM	Bypass valve closed
10/22/2011	7:09:57 PM	H2 valve opened
10/22/2011	7:09:57 PM	Bubbler valve opened
10/22/2011	7:09:57 PM	Helium MFC set to  0.000000
10/22/2011	7:09:57 PM	H2 MFC set to  500.000000
10/22/2011	7:09:57 PM	BCl3 MFC set to  0.000000
10/22/2011	7:09:57 PM	PHl3 MFC set to  0.000000
10/22/2011	7:09:57 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:09:57 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:09:57 PM	Tube furnace set to 750
10/22/2011	7:14:57 PM	H2 valve closed
10/22/2011	7:14:57 PM	BCl3 valve closed
10/22/2011	7:14:57 PM	PH3 valve closed
10/22/2011	7:14:57 PM	SiCl4 pre valve closed
10/22/2011	7:14:57 PM	SiCl4 post valve closed
10/22/2011	7:14:57 PM	Main Vac valve closed
10/22/2011	7:14:57 PM	Bypass valve closed
10/22/2011	7:14:57 PM	Helium valve opened
10/22/2011	7:14:57 PM	Bubbler valve opened
10/22/2011	7:14:57 PM	Helium MFC set to  500.000000
10/22/2011	7:14:57 PM	H2 MFC set to  0.000000
10/22/2011	7:14:57 PM	BCl3 MFC set to  0.000000
10/22/2011	7:14:57 PM	PHl3 MFC set to  0.000000
10/22/2011	7:14:57 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:14:57 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:14:57 PM	Tube furnace set to 0
10/22/2011	7:21:41 PM	Run aborted at 7:21 PM
10/22/2011	7:21:41 PM	Helium valve closed
10/22/2011	7:21:41 PM	H2 valve closed
10/22/2011	7:21:41 PM	BCl3 valve closed
10/22/2011	7:21:41 PM	PH3 valve closed
10/22/2011	7:21:41 PM	SiCl4 pre valve closed
10/22/2011	7:21:41 PM	SiCl4 post valve closed
10/22/2011	7:21:41 PM	Bypass valve closed
10/22/2011	7:21:41 PM	Main Vac valve closed
10/22/2011	7:21:41 PM	Bubbler valve closed
10/22/2011	7:21:41 PM	Helium MFC set to  0.000000
10/22/2011	7:21:41 PM	H2 MFC set to  0.000000
10/22/2011	7:21:41 PM	BCl3 MFC set to  0.000000
10/22/2011	7:21:41 PM	PHl3 MFC set to  0.000000
10/22/2011	7:21:41 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:21:41 PM	Tube furnace set to 0
10/22/2011	7:21:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	7:21:45 PM	Recipe started at 7:21 PM
10/22/2011	7:21:45 PM	Helium valve closed
10/22/2011	7:21:45 PM	H2 valve closed
10/22/2011	7:21:45 PM	BCl3 valve closed
10/22/2011	7:21:45 PM	PH3 valve closed
10/22/2011	7:21:45 PM	SiCl4 pre valve closed
10/22/2011	7:21:45 PM	SiCl4 post valve closed
10/22/2011	7:21:45 PM	Main Vac valve closed
10/22/2011	7:21:45 PM	Bypass valve closed
10/22/2011	7:21:45 PM	Bubbler valve closed
10/22/2011	7:21:45 PM	Helium MFC set to  0.000000
10/22/2011	7:21:45 PM	H2 MFC set to  0.000000
10/22/2011	7:21:45 PM	BCl3 MFC set to  0.000000
10/22/2011	7:21:45 PM	PHl3 MFC set to  0.000000
10/22/2011	7:21:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:21:45 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:21:45 PM	Tube furnace set to 0
10/22/2011	7:21:48 PM	H2 valve closed
10/22/2011	7:21:48 PM	BCl3 valve closed
10/22/2011	7:21:48 PM	PH3 valve closed
10/22/2011	7:21:48 PM	SiCl4 pre valve closed
10/22/2011	7:21:48 PM	SiCl4 post valve closed
10/22/2011	7:21:48 PM	Main Vac valve closed
10/22/2011	7:21:48 PM	Bypass valve closed
10/22/2011	7:21:48 PM	Bubbler valve closed
10/22/2011	7:21:48 PM	Helium valve opened
10/22/2011	7:21:48 PM	Helium MFC set to  500.000000
10/22/2011	7:21:48 PM	H2 MFC set to  0.000000
10/22/2011	7:21:48 PM	BCl3 MFC set to  0.000000
10/22/2011	7:21:48 PM	PHl3 MFC set to  0.000000
10/22/2011	7:21:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:21:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:21:49 PM	Tube furnace set to 0
10/22/2011	7:21:49 PM	Helium valve closed
10/22/2011	7:21:49 PM	H2 valve closed
10/22/2011	7:21:49 PM	BCl3 valve closed
10/22/2011	7:21:49 PM	PH3 valve closed
10/22/2011	7:21:49 PM	SiCl4 pre valve closed
10/22/2011	7:21:49 PM	SiCl4 post valve closed
10/22/2011	7:21:49 PM	Main Vac valve closed
10/22/2011	7:21:49 PM	Bypass valve closed
10/22/2011	7:21:49 PM	Bubbler valve closed
10/22/2011	7:21:49 PM	Helium MFC set to  0.000000
10/22/2011	7:21:49 PM	H2 MFC set to  0.000000
10/22/2011	7:21:49 PM	BCl3 MFC set to  0.000000
10/22/2011	7:21:49 PM	PHl3 MFC set to  0.000000
10/22/2011	7:21:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:21:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:21:49 PM	Tube furnace set to 0
10/22/2011	7:21:50 PM	Run finished at 7:21 PM
10/22/2011	7:21:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	7:28:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	7:28:18 PM	Recipe started at 7:28 PM
10/22/2011	7:28:18 PM	Helium valve closed
10/22/2011	7:28:18 PM	H2 valve closed
10/22/2011	7:28:18 PM	BCl3 valve closed
10/22/2011	7:28:18 PM	PH3 valve closed
10/22/2011	7:28:18 PM	SiCl4 pre valve closed
10/22/2011	7:28:18 PM	SiCl4 post valve closed
10/22/2011	7:28:18 PM	Main Vac valve closed
10/22/2011	7:28:18 PM	Bubbler valve closed
10/22/2011	7:28:18 PM	Bypass valve opened
10/22/2011	7:28:18 PM	Helium MFC set to  0.000000
10/22/2011	7:28:18 PM	H2 MFC set to  0.000000
10/22/2011	7:28:18 PM	BCl3 MFC set to  0.000000
10/22/2011	7:28:18 PM	PHl3 MFC set to  0.000000
10/22/2011	7:28:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:28:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:28:18 PM	Tube furnace set to 0
10/22/2011	7:29:23 PM	Helium valve closed
10/22/2011	7:29:23 PM	H2 valve closed
10/22/2011	7:29:23 PM	BCl3 valve closed
10/22/2011	7:29:23 PM	PH3 valve closed
10/22/2011	7:29:23 PM	SiCl4 pre valve closed
10/22/2011	7:29:23 PM	SiCl4 post valve closed
10/22/2011	7:29:23 PM	Main Vac valve closed
10/22/2011	7:29:23 PM	Bubbler valve closed
10/22/2011	7:29:23 PM	Bypass valve opened
10/22/2011	7:29:23 PM	Helium MFC set to  0.000000
10/22/2011	7:29:23 PM	H2 MFC set to  0.000000
10/22/2011	7:29:23 PM	BCl3 MFC set to  0.000000
10/22/2011	7:29:23 PM	PHl3 MFC set to  0.000000
10/22/2011	7:29:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:29:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:29:23 PM	Tube furnace set to 0
10/22/2011	7:29:28 PM	Helium valve closed
10/22/2011	7:29:28 PM	H2 valve closed
10/22/2011	7:29:28 PM	BCl3 valve closed
10/22/2011	7:29:28 PM	PH3 valve closed
10/22/2011	7:29:28 PM	SiCl4 pre valve closed
10/22/2011	7:29:28 PM	SiCl4 post valve closed
10/22/2011	7:29:28 PM	Bypass valve closed
10/22/2011	7:29:28 PM	Bubbler valve closed
10/22/2011	7:29:28 PM	Main Vac valve opened
10/22/2011	7:29:28 PM	Helium MFC set to  0.000000
10/22/2011	7:29:28 PM	H2 MFC set to  0.000000
10/22/2011	7:29:28 PM	BCl3 MFC set to  0.000000
10/22/2011	7:29:28 PM	PHl3 MFC set to  0.000000
10/22/2011	7:29:28 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:29:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:29:28 PM	Tube furnace set to 0
10/22/2011	7:29:29 PM	Run finished at 7:29 PM
10/22/2011	7:29:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	7:30:37 PM	Recipe started at 7:30 PM
10/22/2011	7:30:37 PM	Helium valve closed
10/22/2011	7:30:37 PM	H2 valve closed
10/22/2011	7:30:37 PM	BCl3 valve closed
10/22/2011	7:30:37 PM	PH3 valve closed
10/22/2011	7:30:37 PM	SiCl4 pre valve closed
10/22/2011	7:30:37 PM	SiCl4 post valve closed
10/22/2011	7:30:37 PM	Main Vac valve closed
10/22/2011	7:30:37 PM	Bubbler valve closed
10/22/2011	7:30:37 PM	Bypass valve opened
10/22/2011	7:30:37 PM	Helium MFC set to  0.000000
10/22/2011	7:30:37 PM	H2 MFC set to  0.000000
10/22/2011	7:30:37 PM	BCl3 MFC set to  0.000000
10/22/2011	7:30:37 PM	PHl3 MFC set to  0.000000
10/22/2011	7:30:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:30:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:30:37 PM	Tube furnace set to 150
10/22/2011	7:30:37 PM	Helium valve closed
10/22/2011	7:30:37 PM	H2 valve closed
10/22/2011	7:30:37 PM	BCl3 valve closed
10/22/2011	7:30:37 PM	PH3 valve closed
10/22/2011	7:30:37 PM	SiCl4 pre valve closed
10/22/2011	7:30:37 PM	SiCl4 post valve closed
10/22/2011	7:30:37 PM	Main Vac valve closed
10/22/2011	7:30:37 PM	Bubbler valve closed
10/22/2011	7:30:37 PM	Bypass valve opened
10/22/2011	7:30:37 PM	Helium MFC set to  0.000000
10/22/2011	7:30:37 PM	H2 MFC set to  0.000000
10/22/2011	7:30:37 PM	BCl3 MFC set to  0.000000
10/22/2011	7:30:37 PM	PHl3 MFC set to  0.000000
10/22/2011	7:30:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:30:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:30:38 PM	Tube furnace set to 150
10/22/2011	7:30:45 PM	Helium valve closed
10/22/2011	7:30:45 PM	H2 valve closed
10/22/2011	7:30:45 PM	BCl3 valve closed
10/22/2011	7:30:45 PM	PH3 valve closed
10/22/2011	7:30:45 PM	SiCl4 pre valve closed
10/22/2011	7:30:45 PM	SiCl4 post valve closed
10/22/2011	7:30:45 PM	Bypass valve closed
10/22/2011	7:30:45 PM	Bubbler valve closed
10/22/2011	7:30:45 PM	Main Vac valve opened
10/22/2011	7:30:45 PM	Helium MFC set to  0.000000
10/22/2011	7:30:45 PM	H2 MFC set to  0.000000
10/22/2011	7:30:45 PM	BCl3 MFC set to  0.000000
10/22/2011	7:30:45 PM	PHl3 MFC set to  0.000000
10/22/2011	7:30:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:30:45 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:30:45 PM	Tube furnace set to 150
10/22/2011	7:31:15 PM	H2 valve closed
10/22/2011	7:31:15 PM	BCl3 valve closed
10/22/2011	7:31:15 PM	PH3 valve closed
10/22/2011	7:31:15 PM	SiCl4 pre valve closed
10/22/2011	7:31:15 PM	SiCl4 post valve closed
10/22/2011	7:31:15 PM	Bypass valve closed
10/22/2011	7:31:15 PM	Bubbler valve closed
10/22/2011	7:31:15 PM	Helium valve opened
10/22/2011	7:31:15 PM	Main Vac valve opened
10/22/2011	7:31:15 PM	Helium MFC set to  20.000000
10/22/2011	7:31:15 PM	H2 MFC set to  0.000000
10/22/2011	7:31:15 PM	BCl3 MFC set to  0.000000
10/22/2011	7:31:15 PM	PHl3 MFC set to  0.000000
10/22/2011	7:31:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:31:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:31:15 PM	Tube furnace set to 150
10/22/2011	7:31:45 PM	Helium valve closed
10/22/2011	7:31:45 PM	H2 valve closed
10/22/2011	7:31:45 PM	BCl3 valve closed
10/22/2011	7:31:45 PM	PH3 valve closed
10/22/2011	7:31:45 PM	SiCl4 pre valve closed
10/22/2011	7:31:45 PM	SiCl4 post valve closed
10/22/2011	7:31:45 PM	Bypass valve closed
10/22/2011	7:31:45 PM	Bubbler valve closed
10/22/2011	7:31:45 PM	Main Vac valve opened
10/22/2011	7:31:45 PM	Helium MFC set to  0.000000
10/22/2011	7:31:45 PM	H2 MFC set to  0.000000
10/22/2011	7:31:45 PM	BCl3 MFC set to  0.000000
10/22/2011	7:31:45 PM	PHl3 MFC set to  0.000000
10/22/2011	7:31:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:31:45 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:31:45 PM	Tube furnace set to 150
10/22/2011	7:32:15 PM	H2 valve closed
10/22/2011	7:32:15 PM	BCl3 valve closed
10/22/2011	7:32:15 PM	PH3 valve closed
10/22/2011	7:32:15 PM	SiCl4 pre valve closed
10/22/2011	7:32:15 PM	SiCl4 post valve closed
10/22/2011	7:32:15 PM	Bypass valve closed
10/22/2011	7:32:15 PM	Bubbler valve closed
10/22/2011	7:32:15 PM	Helium valve opened
10/22/2011	7:32:15 PM	Main Vac valve opened
10/22/2011	7:32:15 PM	Helium MFC set to  20.000000
10/22/2011	7:32:15 PM	H2 MFC set to  0.000000
10/22/2011	7:32:15 PM	BCl3 MFC set to  0.000000
10/22/2011	7:32:15 PM	PHl3 MFC set to  0.000000
10/22/2011	7:32:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:32:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:32:15 PM	Tube furnace set to 150
10/22/2011	7:32:45 PM	Helium valve closed
10/22/2011	7:32:45 PM	H2 valve closed
10/22/2011	7:32:45 PM	BCl3 valve closed
10/22/2011	7:32:45 PM	PH3 valve closed
10/22/2011	7:32:45 PM	SiCl4 pre valve closed
10/22/2011	7:32:45 PM	SiCl4 post valve closed
10/22/2011	7:32:45 PM	Bypass valve closed
10/22/2011	7:32:45 PM	Bubbler valve closed
10/22/2011	7:32:45 PM	Main Vac valve opened
10/22/2011	7:32:45 PM	Helium MFC set to  0.000000
10/22/2011	7:32:45 PM	H2 MFC set to  0.000000
10/22/2011	7:32:45 PM	BCl3 MFC set to  0.000000
10/22/2011	7:32:45 PM	PHl3 MFC set to  0.000000
10/22/2011	7:32:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:32:45 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:32:46 PM	Tube furnace set to 150
10/22/2011	7:33:16 PM	H2 valve closed
10/22/2011	7:33:16 PM	BCl3 valve closed
10/22/2011	7:33:16 PM	PH3 valve closed
10/22/2011	7:33:16 PM	SiCl4 pre valve closed
10/22/2011	7:33:16 PM	SiCl4 post valve closed
10/22/2011	7:33:16 PM	Bypass valve closed
10/22/2011	7:33:16 PM	Bubbler valve closed
10/22/2011	7:33:16 PM	Helium valve opened
10/22/2011	7:33:16 PM	Main Vac valve opened
10/22/2011	7:33:16 PM	Helium MFC set to  20.000000
10/22/2011	7:33:16 PM	H2 MFC set to  0.000000
10/22/2011	7:33:16 PM	BCl3 MFC set to  0.000000
10/22/2011	7:33:16 PM	PHl3 MFC set to  0.000000
10/22/2011	7:33:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:33:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:33:16 PM	Tube furnace set to 150
10/22/2011	7:33:46 PM	Helium valve closed
10/22/2011	7:33:46 PM	H2 valve closed
10/22/2011	7:33:46 PM	BCl3 valve closed
10/22/2011	7:33:46 PM	PH3 valve closed
10/22/2011	7:33:46 PM	SiCl4 pre valve closed
10/22/2011	7:33:46 PM	SiCl4 post valve closed
10/22/2011	7:33:46 PM	Bypass valve closed
10/22/2011	7:33:46 PM	Bubbler valve closed
10/22/2011	7:33:46 PM	Main Vac valve opened
10/22/2011	7:33:46 PM	Helium MFC set to  0.000000
10/22/2011	7:33:46 PM	H2 MFC set to  0.000000
10/22/2011	7:33:46 PM	BCl3 MFC set to  0.000000
10/22/2011	7:33:46 PM	PHl3 MFC set to  0.000000
10/22/2011	7:33:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:33:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:33:46 PM	Tube furnace set to 150
10/22/2011	7:34:16 PM	H2 valve closed
10/22/2011	7:34:16 PM	BCl3 valve closed
10/22/2011	7:34:16 PM	PH3 valve closed
10/22/2011	7:34:16 PM	SiCl4 pre valve closed
10/22/2011	7:34:16 PM	SiCl4 post valve closed
10/22/2011	7:34:16 PM	Bypass valve closed
10/22/2011	7:34:16 PM	Bubbler valve closed
10/22/2011	7:34:16 PM	Helium valve opened
10/22/2011	7:34:16 PM	Main Vac valve opened
10/22/2011	7:34:16 PM	Helium MFC set to  20.000000
10/22/2011	7:34:16 PM	H2 MFC set to  0.000000
10/22/2011	7:34:16 PM	BCl3 MFC set to  0.000000
10/22/2011	7:34:16 PM	PHl3 MFC set to  0.000000
10/22/2011	7:34:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:34:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:34:16 PM	Tube furnace set to 150
10/22/2011	7:34:46 PM	Helium valve closed
10/22/2011	7:34:46 PM	H2 valve closed
10/22/2011	7:34:46 PM	BCl3 valve closed
10/22/2011	7:34:46 PM	PH3 valve closed
10/22/2011	7:34:46 PM	SiCl4 pre valve closed
10/22/2011	7:34:46 PM	SiCl4 post valve closed
10/22/2011	7:34:46 PM	Bypass valve closed
10/22/2011	7:34:46 PM	Bubbler valve closed
10/22/2011	7:34:46 PM	Main Vac valve opened
10/22/2011	7:34:46 PM	Helium MFC set to  0.000000
10/22/2011	7:34:46 PM	H2 MFC set to  0.000000
10/22/2011	7:34:46 PM	BCl3 MFC set to  0.000000
10/22/2011	7:34:46 PM	PHl3 MFC set to  0.000000
10/22/2011	7:34:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:34:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:34:46 PM	Tube furnace set to 150
10/22/2011	7:35:16 PM	H2 valve closed
10/22/2011	7:35:16 PM	BCl3 valve closed
10/22/2011	7:35:16 PM	PH3 valve closed
10/22/2011	7:35:16 PM	SiCl4 pre valve closed
10/22/2011	7:35:16 PM	SiCl4 post valve closed
10/22/2011	7:35:16 PM	Bypass valve closed
10/22/2011	7:35:16 PM	Bubbler valve closed
10/22/2011	7:35:16 PM	Helium valve opened
10/22/2011	7:35:16 PM	Main Vac valve opened
10/22/2011	7:35:16 PM	Helium MFC set to  20.000000
10/22/2011	7:35:16 PM	H2 MFC set to  0.000000
10/22/2011	7:35:16 PM	BCl3 MFC set to  0.000000
10/22/2011	7:35:16 PM	PHl3 MFC set to  0.000000
10/22/2011	7:35:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:35:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:35:17 PM	Tube furnace set to 150
10/22/2011	7:35:47 PM	Helium valve closed
10/22/2011	7:35:47 PM	H2 valve closed
10/22/2011	7:35:47 PM	BCl3 valve closed
10/22/2011	7:35:47 PM	PH3 valve closed
10/22/2011	7:35:47 PM	SiCl4 pre valve closed
10/22/2011	7:35:47 PM	SiCl4 post valve closed
10/22/2011	7:35:47 PM	Bypass valve closed
10/22/2011	7:35:47 PM	Bubbler valve closed
10/22/2011	7:35:47 PM	Main Vac valve opened
10/22/2011	7:35:47 PM	Helium MFC set to  0.000000
10/22/2011	7:35:47 PM	H2 MFC set to  0.000000
10/22/2011	7:35:47 PM	BCl3 MFC set to  0.000000
10/22/2011	7:35:47 PM	PHl3 MFC set to  0.000000
10/22/2011	7:35:47 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:35:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:35:47 PM	Tube furnace set to 150
10/22/2011	7:36:17 PM	H2 valve closed
10/22/2011	7:36:17 PM	BCl3 valve closed
10/22/2011	7:36:17 PM	PH3 valve closed
10/22/2011	7:36:17 PM	SiCl4 pre valve closed
10/22/2011	7:36:17 PM	SiCl4 post valve closed
10/22/2011	7:36:17 PM	Bypass valve closed
10/22/2011	7:36:17 PM	Bubbler valve closed
10/22/2011	7:36:17 PM	Helium valve opened
10/22/2011	7:36:17 PM	Main Vac valve opened
10/22/2011	7:36:17 PM	Helium MFC set to  20.000000
10/22/2011	7:36:17 PM	H2 MFC set to  0.000000
10/22/2011	7:36:17 PM	BCl3 MFC set to  0.000000
10/22/2011	7:36:17 PM	PHl3 MFC set to  0.000000
10/22/2011	7:36:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:36:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:36:17 PM	Tube furnace set to 150
10/22/2011	7:36:47 PM	Helium valve closed
10/22/2011	7:36:47 PM	H2 valve closed
10/22/2011	7:36:47 PM	BCl3 valve closed
10/22/2011	7:36:47 PM	PH3 valve closed
10/22/2011	7:36:47 PM	SiCl4 pre valve closed
10/22/2011	7:36:47 PM	SiCl4 post valve closed
10/22/2011	7:36:47 PM	Bypass valve closed
10/22/2011	7:36:47 PM	Bubbler valve closed
10/22/2011	7:36:47 PM	Main Vac valve opened
10/22/2011	7:36:47 PM	Helium MFC set to  0.000000
10/22/2011	7:36:47 PM	H2 MFC set to  0.000000
10/22/2011	7:36:47 PM	BCl3 MFC set to  0.000000
10/22/2011	7:36:47 PM	PHl3 MFC set to  0.000000
10/22/2011	7:36:47 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:36:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:36:47 PM	Tube furnace set to 150
10/22/2011	7:37:17 PM	H2 valve closed
10/22/2011	7:37:17 PM	BCl3 valve closed
10/22/2011	7:37:17 PM	PH3 valve closed
10/22/2011	7:37:17 PM	SiCl4 pre valve closed
10/22/2011	7:37:17 PM	SiCl4 post valve closed
10/22/2011	7:37:17 PM	Bypass valve closed
10/22/2011	7:37:17 PM	Bubbler valve closed
10/22/2011	7:37:17 PM	Helium valve opened
10/22/2011	7:37:17 PM	Main Vac valve opened
10/22/2011	7:37:17 PM	Helium MFC set to  20.000000
10/22/2011	7:37:17 PM	H2 MFC set to  0.000000
10/22/2011	7:37:17 PM	BCl3 MFC set to  0.000000
10/22/2011	7:37:17 PM	PHl3 MFC set to  0.000000
10/22/2011	7:37:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:37:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:37:18 PM	Tube furnace set to 150
10/22/2011	7:37:48 PM	Helium valve closed
10/22/2011	7:37:48 PM	H2 valve closed
10/22/2011	7:37:48 PM	BCl3 valve closed
10/22/2011	7:37:48 PM	PH3 valve closed
10/22/2011	7:37:48 PM	SiCl4 pre valve closed
10/22/2011	7:37:48 PM	SiCl4 post valve closed
10/22/2011	7:37:48 PM	Bypass valve closed
10/22/2011	7:37:48 PM	Bubbler valve closed
10/22/2011	7:37:48 PM	Main Vac valve opened
10/22/2011	7:37:48 PM	Helium MFC set to  0.000000
10/22/2011	7:37:48 PM	H2 MFC set to  0.000000
10/22/2011	7:37:48 PM	BCl3 MFC set to  0.000000
10/22/2011	7:37:48 PM	PHl3 MFC set to  0.000000
10/22/2011	7:37:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:37:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:37:48 PM	Tube furnace set to 150
10/22/2011	7:38:18 PM	H2 valve closed
10/22/2011	7:38:18 PM	BCl3 valve closed
10/22/2011	7:38:18 PM	PH3 valve closed
10/22/2011	7:38:18 PM	SiCl4 pre valve closed
10/22/2011	7:38:18 PM	SiCl4 post valve closed
10/22/2011	7:38:18 PM	Bypass valve closed
10/22/2011	7:38:18 PM	Bubbler valve closed
10/22/2011	7:38:18 PM	Helium valve opened
10/22/2011	7:38:18 PM	Main Vac valve opened
10/22/2011	7:38:18 PM	Helium MFC set to  20.000000
10/22/2011	7:38:18 PM	H2 MFC set to  0.000000
10/22/2011	7:38:18 PM	BCl3 MFC set to  0.000000
10/22/2011	7:38:18 PM	PHl3 MFC set to  0.000000
10/22/2011	7:38:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:38:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:38:18 PM	Tube furnace set to 150
10/22/2011	7:38:48 PM	Helium valve closed
10/22/2011	7:38:48 PM	H2 valve closed
10/22/2011	7:38:48 PM	BCl3 valve closed
10/22/2011	7:38:48 PM	PH3 valve closed
10/22/2011	7:38:48 PM	SiCl4 pre valve closed
10/22/2011	7:38:48 PM	SiCl4 post valve closed
10/22/2011	7:38:48 PM	Bypass valve closed
10/22/2011	7:38:48 PM	Bubbler valve closed
10/22/2011	7:38:48 PM	Main Vac valve opened
10/22/2011	7:38:48 PM	Helium MFC set to  0.000000
10/22/2011	7:38:48 PM	H2 MFC set to  0.000000
10/22/2011	7:38:48 PM	BCl3 MFC set to  0.000000
10/22/2011	7:38:48 PM	PHl3 MFC set to  0.000000
10/22/2011	7:38:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:38:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:38:48 PM	Tube furnace set to 150
10/22/2011	7:39:18 PM	H2 valve closed
10/22/2011	7:39:18 PM	BCl3 valve closed
10/22/2011	7:39:18 PM	PH3 valve closed
10/22/2011	7:39:18 PM	SiCl4 pre valve closed
10/22/2011	7:39:18 PM	SiCl4 post valve closed
10/22/2011	7:39:18 PM	Bypass valve closed
10/22/2011	7:39:18 PM	Bubbler valve closed
10/22/2011	7:39:18 PM	Helium valve opened
10/22/2011	7:39:18 PM	Main Vac valve opened
10/22/2011	7:39:18 PM	Helium MFC set to  20.000000
10/22/2011	7:39:18 PM	H2 MFC set to  0.000000
10/22/2011	7:39:18 PM	BCl3 MFC set to  0.000000
10/22/2011	7:39:18 PM	PHl3 MFC set to  0.000000
10/22/2011	7:39:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:39:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:39:18 PM	Tube furnace set to 150
10/22/2011	7:39:48 PM	Helium valve closed
10/22/2011	7:39:48 PM	H2 valve closed
10/22/2011	7:39:48 PM	BCl3 valve closed
10/22/2011	7:39:48 PM	PH3 valve closed
10/22/2011	7:39:48 PM	SiCl4 pre valve closed
10/22/2011	7:39:48 PM	SiCl4 post valve closed
10/22/2011	7:39:48 PM	Bypass valve closed
10/22/2011	7:39:48 PM	Bubbler valve closed
10/22/2011	7:39:48 PM	Main Vac valve opened
10/22/2011	7:39:48 PM	Helium MFC set to  0.000000
10/22/2011	7:39:48 PM	H2 MFC set to  0.000000
10/22/2011	7:39:48 PM	BCl3 MFC set to  0.000000
10/22/2011	7:39:48 PM	PHl3 MFC set to  0.000000
10/22/2011	7:39:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:39:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:39:49 PM	Tube furnace set to 150
10/22/2011	7:40:19 PM	H2 valve closed
10/22/2011	7:40:19 PM	BCl3 valve closed
10/22/2011	7:40:19 PM	PH3 valve closed
10/22/2011	7:40:19 PM	SiCl4 pre valve closed
10/22/2011	7:40:19 PM	SiCl4 post valve closed
10/22/2011	7:40:19 PM	Bypass valve closed
10/22/2011	7:40:19 PM	Bubbler valve closed
10/22/2011	7:40:19 PM	Helium valve opened
10/22/2011	7:40:19 PM	Main Vac valve opened
10/22/2011	7:40:19 PM	Helium MFC set to  20.000000
10/22/2011	7:40:19 PM	H2 MFC set to  0.000000
10/22/2011	7:40:19 PM	BCl3 MFC set to  0.000000
10/22/2011	7:40:19 PM	PHl3 MFC set to  0.000000
10/22/2011	7:40:19 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:40:19 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:40:19 PM	Tube furnace set to 150
10/22/2011	7:40:49 PM	Helium valve closed
10/22/2011	7:40:49 PM	H2 valve closed
10/22/2011	7:40:49 PM	BCl3 valve closed
10/22/2011	7:40:49 PM	PH3 valve closed
10/22/2011	7:40:49 PM	SiCl4 pre valve closed
10/22/2011	7:40:49 PM	SiCl4 post valve closed
10/22/2011	7:40:49 PM	Bypass valve closed
10/22/2011	7:40:49 PM	Bubbler valve closed
10/22/2011	7:40:49 PM	Main Vac valve opened
10/22/2011	7:40:49 PM	Helium MFC set to  0.000000
10/22/2011	7:40:49 PM	H2 MFC set to  0.000000
10/22/2011	7:40:49 PM	BCl3 MFC set to  0.000000
10/22/2011	7:40:49 PM	PHl3 MFC set to  0.000000
10/22/2011	7:40:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:40:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:40:49 PM	Tube furnace set to 150
10/22/2011	7:41:19 PM	H2 valve closed
10/22/2011	7:41:19 PM	BCl3 valve closed
10/22/2011	7:41:19 PM	PH3 valve closed
10/22/2011	7:41:19 PM	SiCl4 pre valve closed
10/22/2011	7:41:19 PM	SiCl4 post valve closed
10/22/2011	7:41:19 PM	Bypass valve closed
10/22/2011	7:41:19 PM	Bubbler valve closed
10/22/2011	7:41:19 PM	Helium valve opened
10/22/2011	7:41:19 PM	Main Vac valve opened
10/22/2011	7:41:19 PM	Helium MFC set to  20.000000
10/22/2011	7:41:19 PM	H2 MFC set to  0.000000
10/22/2011	7:41:19 PM	BCl3 MFC set to  0.000000
10/22/2011	7:41:19 PM	PHl3 MFC set to  0.000000
10/22/2011	7:41:19 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:41:19 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:41:19 PM	Tube furnace set to 150
10/22/2011	7:41:49 PM	Helium valve closed
10/22/2011	7:41:49 PM	H2 valve closed
10/22/2011	7:41:49 PM	BCl3 valve closed
10/22/2011	7:41:49 PM	PH3 valve closed
10/22/2011	7:41:49 PM	SiCl4 pre valve closed
10/22/2011	7:41:49 PM	SiCl4 post valve closed
10/22/2011	7:41:49 PM	Bypass valve closed
10/22/2011	7:41:49 PM	Bubbler valve closed
10/22/2011	7:41:49 PM	Main Vac valve opened
10/22/2011	7:41:49 PM	Helium MFC set to  0.000000
10/22/2011	7:41:49 PM	H2 MFC set to  0.000000
10/22/2011	7:41:49 PM	BCl3 MFC set to  0.000000
10/22/2011	7:41:49 PM	PHl3 MFC set to  0.000000
10/22/2011	7:41:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:41:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:41:49 PM	Tube furnace set to 150
10/22/2011	7:42:19 PM	H2 valve closed
10/22/2011	7:42:19 PM	BCl3 valve closed
10/22/2011	7:42:19 PM	PH3 valve closed
10/22/2011	7:42:19 PM	SiCl4 pre valve closed
10/22/2011	7:42:19 PM	SiCl4 post valve closed
10/22/2011	7:42:19 PM	Bypass valve closed
10/22/2011	7:42:19 PM	Bubbler valve closed
10/22/2011	7:42:19 PM	Helium valve opened
10/22/2011	7:42:19 PM	Main Vac valve opened
10/22/2011	7:42:19 PM	Helium MFC set to  20.000000
10/22/2011	7:42:19 PM	H2 MFC set to  0.000000
10/22/2011	7:42:19 PM	BCl3 MFC set to  0.000000
10/22/2011	7:42:19 PM	PHl3 MFC set to  0.000000
10/22/2011	7:42:19 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:42:19 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:42:20 PM	Tube furnace set to 150
10/22/2011	7:42:45 PM	Run aborted at 7:42 PM
10/22/2011	7:42:45 PM	Helium valve closed
10/22/2011	7:42:45 PM	H2 valve closed
10/22/2011	7:42:45 PM	BCl3 valve closed
10/22/2011	7:42:45 PM	PH3 valve closed
10/22/2011	7:42:45 PM	SiCl4 pre valve closed
10/22/2011	7:42:45 PM	SiCl4 post valve closed
10/22/2011	7:42:45 PM	Bypass valve closed
10/22/2011	7:42:45 PM	Main Vac valve closed
10/22/2011	7:42:45 PM	Bubbler valve closed
10/22/2011	7:42:45 PM	Helium MFC set to  0.000000
10/22/2011	7:42:45 PM	H2 MFC set to  0.000000
10/22/2011	7:42:45 PM	BCl3 MFC set to  0.000000
10/22/2011	7:42:45 PM	PHl3 MFC set to  0.000000
10/22/2011	7:42:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:42:46 PM	Tube furnace set to 0
10/22/2011	7:42:48 PM	Main Vac valve opened
10/22/2011	7:43:14 PM	Recipe started at 7:43 PM
10/22/2011	7:43:14 PM	Helium valve closed
10/22/2011	7:43:14 PM	H2 valve closed
10/22/2011	7:43:14 PM	BCl3 valve closed
10/22/2011	7:43:14 PM	PH3 valve closed
10/22/2011	7:43:14 PM	SiCl4 pre valve closed
10/22/2011	7:43:14 PM	SiCl4 post valve closed
10/22/2011	7:43:14 PM	Main Vac valve closed
10/22/2011	7:43:14 PM	Bubbler valve closed
10/22/2011	7:43:14 PM	Bypass valve opened
10/22/2011	7:43:14 PM	Helium MFC set to  0.000000
10/22/2011	7:43:14 PM	H2 MFC set to  0.000000
10/22/2011	7:43:14 PM	BCl3 MFC set to  0.000000
10/22/2011	7:43:14 PM	PHl3 MFC set to  0.000000
10/22/2011	7:43:14 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:43:14 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:43:14 PM	Tube furnace set to 150
10/22/2011	7:43:14 PM	Helium valve closed
10/22/2011	7:43:14 PM	H2 valve closed
10/22/2011	7:43:14 PM	BCl3 valve closed
10/22/2011	7:43:15 PM	PH3 valve closed
10/22/2011	7:43:15 PM	SiCl4 pre valve closed
10/22/2011	7:43:15 PM	SiCl4 post valve closed
10/22/2011	7:43:15 PM	Main Vac valve closed
10/22/2011	7:43:15 PM	Bubbler valve closed
10/22/2011	7:43:15 PM	Bypass valve opened
10/22/2011	7:43:15 PM	Helium MFC set to  0.000000
10/22/2011	7:43:15 PM	H2 MFC set to  0.000000
10/22/2011	7:43:15 PM	BCl3 MFC set to  0.000000
10/22/2011	7:43:15 PM	PHl3 MFC set to  0.000000
10/22/2011	7:43:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:43:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:43:15 PM	Tube furnace set to 150
10/22/2011	7:43:45 PM	Helium valve closed
10/22/2011	7:43:45 PM	H2 valve closed
10/22/2011	7:43:45 PM	BCl3 valve closed
10/22/2011	7:43:45 PM	PH3 valve closed
10/22/2011	7:43:45 PM	SiCl4 pre valve closed
10/22/2011	7:43:45 PM	SiCl4 post valve closed
10/22/2011	7:43:45 PM	Bypass valve closed
10/22/2011	7:43:45 PM	Bubbler valve closed
10/22/2011	7:43:45 PM	Main Vac valve opened
10/22/2011	7:43:45 PM	Helium MFC set to  0.000000
10/22/2011	7:43:45 PM	H2 MFC set to  0.000000
10/22/2011	7:43:45 PM	BCl3 MFC set to  0.000000
10/22/2011	7:43:45 PM	PHl3 MFC set to  0.000000
10/22/2011	7:43:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:43:45 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:43:45 PM	Tube furnace set to 150
10/22/2011	7:44:15 PM	H2 valve closed
10/22/2011	7:44:15 PM	BCl3 valve closed
10/22/2011	7:44:15 PM	PH3 valve closed
10/22/2011	7:44:15 PM	SiCl4 pre valve closed
10/22/2011	7:44:15 PM	SiCl4 post valve closed
10/22/2011	7:44:15 PM	Bypass valve closed
10/22/2011	7:44:15 PM	Bubbler valve closed
10/22/2011	7:44:15 PM	Helium valve opened
10/22/2011	7:44:15 PM	Main Vac valve opened
10/22/2011	7:44:15 PM	Helium MFC set to  20.000000
10/22/2011	7:44:15 PM	H2 MFC set to  0.000000
10/22/2011	7:44:15 PM	BCl3 MFC set to  0.000000
10/22/2011	7:44:15 PM	PHl3 MFC set to  0.000000
10/22/2011	7:44:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:44:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:44:15 PM	Tube furnace set to 150
10/22/2011	7:44:45 PM	Helium valve closed
10/22/2011	7:44:45 PM	H2 valve closed
10/22/2011	7:44:45 PM	BCl3 valve closed
10/22/2011	7:44:45 PM	PH3 valve closed
10/22/2011	7:44:45 PM	SiCl4 pre valve closed
10/22/2011	7:44:45 PM	SiCl4 post valve closed
10/22/2011	7:44:45 PM	Bypass valve closed
10/22/2011	7:44:45 PM	Bubbler valve closed
10/22/2011	7:44:45 PM	Main Vac valve opened
10/22/2011	7:44:45 PM	Helium MFC set to  0.000000
10/22/2011	7:44:45 PM	H2 MFC set to  0.000000
10/22/2011	7:44:45 PM	BCl3 MFC set to  0.000000
10/22/2011	7:44:45 PM	PHl3 MFC set to  0.000000
10/22/2011	7:44:45 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:44:45 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:44:45 PM	Tube furnace set to 150
10/22/2011	7:45:15 PM	H2 valve closed
10/22/2011	7:45:15 PM	BCl3 valve closed
10/22/2011	7:45:15 PM	PH3 valve closed
10/22/2011	7:45:15 PM	SiCl4 pre valve closed
10/22/2011	7:45:15 PM	SiCl4 post valve closed
10/22/2011	7:45:15 PM	Bypass valve closed
10/22/2011	7:45:15 PM	Bubbler valve closed
10/22/2011	7:45:15 PM	Helium valve opened
10/22/2011	7:45:15 PM	Main Vac valve opened
10/22/2011	7:45:15 PM	Helium MFC set to  20.000000
10/22/2011	7:45:15 PM	H2 MFC set to  0.000000
10/22/2011	7:45:15 PM	BCl3 MFC set to  0.000000
10/22/2011	7:45:15 PM	PHl3 MFC set to  0.000000
10/22/2011	7:45:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:45:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:45:16 PM	Tube furnace set to 150
10/22/2011	7:45:46 PM	Helium valve closed
10/22/2011	7:45:46 PM	H2 valve closed
10/22/2011	7:45:46 PM	BCl3 valve closed
10/22/2011	7:45:46 PM	PH3 valve closed
10/22/2011	7:45:46 PM	SiCl4 pre valve closed
10/22/2011	7:45:46 PM	SiCl4 post valve closed
10/22/2011	7:45:46 PM	Bypass valve closed
10/22/2011	7:45:46 PM	Bubbler valve closed
10/22/2011	7:45:46 PM	Main Vac valve opened
10/22/2011	7:45:46 PM	Helium MFC set to  0.000000
10/22/2011	7:45:46 PM	H2 MFC set to  0.000000
10/22/2011	7:45:46 PM	BCl3 MFC set to  0.000000
10/22/2011	7:45:46 PM	PHl3 MFC set to  0.000000
10/22/2011	7:45:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:45:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:45:46 PM	Tube furnace set to 150
10/22/2011	7:46:16 PM	H2 valve closed
10/22/2011	7:46:16 PM	BCl3 valve closed
10/22/2011	7:46:16 PM	PH3 valve closed
10/22/2011	7:46:16 PM	SiCl4 pre valve closed
10/22/2011	7:46:16 PM	SiCl4 post valve closed
10/22/2011	7:46:16 PM	Bypass valve closed
10/22/2011	7:46:16 PM	Bubbler valve closed
10/22/2011	7:46:16 PM	Helium valve opened
10/22/2011	7:46:16 PM	Main Vac valve opened
10/22/2011	7:46:16 PM	Helium MFC set to  20.000000
10/22/2011	7:46:16 PM	H2 MFC set to  0.000000
10/22/2011	7:46:16 PM	BCl3 MFC set to  0.000000
10/22/2011	7:46:16 PM	PHl3 MFC set to  0.000000
10/22/2011	7:46:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:46:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:46:16 PM	Tube furnace set to 150
10/22/2011	7:46:46 PM	Helium valve closed
10/22/2011	7:46:46 PM	H2 valve closed
10/22/2011	7:46:46 PM	BCl3 valve closed
10/22/2011	7:46:46 PM	PH3 valve closed
10/22/2011	7:46:46 PM	SiCl4 pre valve closed
10/22/2011	7:46:46 PM	SiCl4 post valve closed
10/22/2011	7:46:46 PM	Bypass valve closed
10/22/2011	7:46:46 PM	Bubbler valve closed
10/22/2011	7:46:46 PM	Main Vac valve opened
10/22/2011	7:46:46 PM	Helium MFC set to  0.000000
10/22/2011	7:46:46 PM	H2 MFC set to  0.000000
10/22/2011	7:46:46 PM	BCl3 MFC set to  0.000000
10/22/2011	7:46:46 PM	PHl3 MFC set to  0.000000
10/22/2011	7:46:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:46:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:46:46 PM	Tube furnace set to 150
10/22/2011	7:47:16 PM	H2 valve closed
10/22/2011	7:47:16 PM	BCl3 valve closed
10/22/2011	7:47:16 PM	PH3 valve closed
10/22/2011	7:47:16 PM	SiCl4 pre valve closed
10/22/2011	7:47:16 PM	SiCl4 post valve closed
10/22/2011	7:47:16 PM	Bypass valve closed
10/22/2011	7:47:16 PM	Bubbler valve closed
10/22/2011	7:47:16 PM	Helium valve opened
10/22/2011	7:47:16 PM	Main Vac valve opened
10/22/2011	7:47:16 PM	Helium MFC set to  20.000000
10/22/2011	7:47:16 PM	H2 MFC set to  0.000000
10/22/2011	7:47:16 PM	BCl3 MFC set to  0.000000
10/22/2011	7:47:16 PM	PHl3 MFC set to  0.000000
10/22/2011	7:47:16 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:47:16 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:47:16 PM	Tube furnace set to 150
10/22/2011	7:47:46 PM	Helium valve closed
10/22/2011	7:47:46 PM	H2 valve closed
10/22/2011	7:47:46 PM	BCl3 valve closed
10/22/2011	7:47:46 PM	PH3 valve closed
10/22/2011	7:47:46 PM	SiCl4 pre valve closed
10/22/2011	7:47:46 PM	SiCl4 post valve closed
10/22/2011	7:47:46 PM	Bypass valve closed
10/22/2011	7:47:46 PM	Bubbler valve closed
10/22/2011	7:47:46 PM	Main Vac valve opened
10/22/2011	7:47:46 PM	Helium MFC set to  0.000000
10/22/2011	7:47:46 PM	H2 MFC set to  0.000000
10/22/2011	7:47:46 PM	BCl3 MFC set to  0.000000
10/22/2011	7:47:46 PM	PHl3 MFC set to  0.000000
10/22/2011	7:47:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:47:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:47:47 PM	Tube furnace set to 150
10/22/2011	7:48:17 PM	H2 valve closed
10/22/2011	7:48:17 PM	BCl3 valve closed
10/22/2011	7:48:17 PM	PH3 valve closed
10/22/2011	7:48:17 PM	SiCl4 pre valve closed
10/22/2011	7:48:17 PM	SiCl4 post valve closed
10/22/2011	7:48:17 PM	Bypass valve closed
10/22/2011	7:48:17 PM	Bubbler valve closed
10/22/2011	7:48:17 PM	Helium valve opened
10/22/2011	7:48:17 PM	Main Vac valve opened
10/22/2011	7:48:17 PM	Helium MFC set to  20.000000
10/22/2011	7:48:17 PM	H2 MFC set to  0.000000
10/22/2011	7:48:17 PM	BCl3 MFC set to  0.000000
10/22/2011	7:48:17 PM	PHl3 MFC set to  0.000000
10/22/2011	7:48:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:48:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:48:17 PM	Tube furnace set to 150
10/22/2011	7:48:47 PM	Helium valve closed
10/22/2011	7:48:47 PM	H2 valve closed
10/22/2011	7:48:47 PM	BCl3 valve closed
10/22/2011	7:48:47 PM	PH3 valve closed
10/22/2011	7:48:47 PM	SiCl4 pre valve closed
10/22/2011	7:48:47 PM	SiCl4 post valve closed
10/22/2011	7:48:47 PM	Bypass valve closed
10/22/2011	7:48:47 PM	Bubbler valve closed
10/22/2011	7:48:47 PM	Main Vac valve opened
10/22/2011	7:48:47 PM	Helium MFC set to  0.000000
10/22/2011	7:48:47 PM	H2 MFC set to  0.000000
10/22/2011	7:48:47 PM	BCl3 MFC set to  0.000000
10/22/2011	7:48:47 PM	PHl3 MFC set to  0.000000
10/22/2011	7:48:47 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:48:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:48:47 PM	Tube furnace set to 150
10/22/2011	7:49:17 PM	H2 valve closed
10/22/2011	7:49:17 PM	BCl3 valve closed
10/22/2011	7:49:17 PM	PH3 valve closed
10/22/2011	7:49:17 PM	SiCl4 pre valve closed
10/22/2011	7:49:17 PM	SiCl4 post valve closed
10/22/2011	7:49:17 PM	Bypass valve closed
10/22/2011	7:49:17 PM	Bubbler valve closed
10/22/2011	7:49:17 PM	Helium valve opened
10/22/2011	7:49:17 PM	Main Vac valve opened
10/22/2011	7:49:17 PM	Helium MFC set to  20.000000
10/22/2011	7:49:17 PM	H2 MFC set to  0.000000
10/22/2011	7:49:17 PM	BCl3 MFC set to  0.000000
10/22/2011	7:49:17 PM	PHl3 MFC set to  0.000000
10/22/2011	7:49:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:49:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:49:17 PM	Tube furnace set to 150
10/22/2011	7:49:47 PM	Helium valve closed
10/22/2011	7:49:47 PM	H2 valve closed
10/22/2011	7:49:47 PM	BCl3 valve closed
10/22/2011	7:49:47 PM	PH3 valve closed
10/22/2011	7:49:47 PM	SiCl4 pre valve closed
10/22/2011	7:49:47 PM	SiCl4 post valve closed
10/22/2011	7:49:47 PM	Bypass valve closed
10/22/2011	7:49:47 PM	Bubbler valve closed
10/22/2011	7:49:47 PM	Main Vac valve opened
10/22/2011	7:49:47 PM	Helium MFC set to  0.000000
10/22/2011	7:49:47 PM	H2 MFC set to  0.000000
10/22/2011	7:49:47 PM	BCl3 MFC set to  0.000000
10/22/2011	7:49:47 PM	PHl3 MFC set to  0.000000
10/22/2011	7:49:47 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:49:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:49:47 PM	Tube furnace set to 150
10/22/2011	7:50:17 PM	H2 valve closed
10/22/2011	7:50:17 PM	BCl3 valve closed
10/22/2011	7:50:17 PM	PH3 valve closed
10/22/2011	7:50:17 PM	SiCl4 pre valve closed
10/22/2011	7:50:17 PM	SiCl4 post valve closed
10/22/2011	7:50:17 PM	Bypass valve closed
10/22/2011	7:50:17 PM	Bubbler valve closed
10/22/2011	7:50:17 PM	Helium valve opened
10/22/2011	7:50:17 PM	Main Vac valve opened
10/22/2011	7:50:17 PM	Helium MFC set to  20.000000
10/22/2011	7:50:17 PM	H2 MFC set to  0.000000
10/22/2011	7:50:17 PM	BCl3 MFC set to  0.000000
10/22/2011	7:50:17 PM	PHl3 MFC set to  0.000000
10/22/2011	7:50:17 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:50:17 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:50:18 PM	Tube furnace set to 150
10/22/2011	7:50:48 PM	Helium valve closed
10/22/2011	7:50:48 PM	H2 valve closed
10/22/2011	7:50:48 PM	BCl3 valve closed
10/22/2011	7:50:48 PM	PH3 valve closed
10/22/2011	7:50:48 PM	SiCl4 pre valve closed
10/22/2011	7:50:48 PM	SiCl4 post valve closed
10/22/2011	7:50:48 PM	Bypass valve closed
10/22/2011	7:50:48 PM	Bubbler valve closed
10/22/2011	7:50:48 PM	Main Vac valve opened
10/22/2011	7:50:48 PM	Helium MFC set to  0.000000
10/22/2011	7:50:48 PM	H2 MFC set to  0.000000
10/22/2011	7:50:48 PM	BCl3 MFC set to  0.000000
10/22/2011	7:50:48 PM	PHl3 MFC set to  0.000000
10/22/2011	7:50:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:50:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:50:48 PM	Tube furnace set to 150
10/22/2011	7:51:18 PM	H2 valve closed
10/22/2011	7:51:18 PM	BCl3 valve closed
10/22/2011	7:51:18 PM	PH3 valve closed
10/22/2011	7:51:18 PM	SiCl4 pre valve closed
10/22/2011	7:51:18 PM	SiCl4 post valve closed
10/22/2011	7:51:18 PM	Bypass valve closed
10/22/2011	7:51:18 PM	Bubbler valve closed
10/22/2011	7:51:18 PM	Helium valve opened
10/22/2011	7:51:18 PM	Main Vac valve opened
10/22/2011	7:51:18 PM	Helium MFC set to  20.000000
10/22/2011	7:51:18 PM	H2 MFC set to  0.000000
10/22/2011	7:51:18 PM	BCl3 MFC set to  0.000000
10/22/2011	7:51:18 PM	PHl3 MFC set to  0.000000
10/22/2011	7:51:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:51:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:51:18 PM	Tube furnace set to 150
10/22/2011	7:51:48 PM	Helium valve closed
10/22/2011	7:51:48 PM	H2 valve closed
10/22/2011	7:51:48 PM	BCl3 valve closed
10/22/2011	7:51:48 PM	PH3 valve closed
10/22/2011	7:51:48 PM	SiCl4 pre valve closed
10/22/2011	7:51:48 PM	SiCl4 post valve closed
10/22/2011	7:51:48 PM	Bypass valve closed
10/22/2011	7:51:48 PM	Bubbler valve closed
10/22/2011	7:51:48 PM	Main Vac valve opened
10/22/2011	7:51:48 PM	Helium MFC set to  0.000000
10/22/2011	7:51:48 PM	H2 MFC set to  0.000000
10/22/2011	7:51:48 PM	BCl3 MFC set to  0.000000
10/22/2011	7:51:48 PM	PHl3 MFC set to  0.000000
10/22/2011	7:51:48 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:51:48 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:51:48 PM	Tube furnace set to 150
10/22/2011	7:52:18 PM	H2 valve closed
10/22/2011	7:52:18 PM	BCl3 valve closed
10/22/2011	7:52:18 PM	PH3 valve closed
10/22/2011	7:52:18 PM	SiCl4 pre valve closed
10/22/2011	7:52:18 PM	SiCl4 post valve closed
10/22/2011	7:52:18 PM	Bypass valve closed
10/22/2011	7:52:18 PM	Bubbler valve closed
10/22/2011	7:52:18 PM	Helium valve opened
10/22/2011	7:52:18 PM	Main Vac valve opened
10/22/2011	7:52:18 PM	Helium MFC set to  20.000000
10/22/2011	7:52:18 PM	H2 MFC set to  0.000000
10/22/2011	7:52:18 PM	BCl3 MFC set to  0.000000
10/22/2011	7:52:18 PM	PHl3 MFC set to  0.000000
10/22/2011	7:52:18 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:52:18 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:52:19 PM	Tube furnace set to 150
10/22/2011	7:52:49 PM	Helium valve closed
10/22/2011	7:52:49 PM	H2 valve closed
10/22/2011	7:52:49 PM	BCl3 valve closed
10/22/2011	7:52:49 PM	PH3 valve closed
10/22/2011	7:52:49 PM	SiCl4 pre valve closed
10/22/2011	7:52:49 PM	SiCl4 post valve closed
10/22/2011	7:52:49 PM	Bypass valve closed
10/22/2011	7:52:49 PM	Bubbler valve closed
10/22/2011	7:52:49 PM	Main Vac valve opened
10/22/2011	7:52:49 PM	Helium MFC set to  0.000000
10/22/2011	7:52:49 PM	H2 MFC set to  0.000000
10/22/2011	7:52:49 PM	BCl3 MFC set to  0.000000
10/22/2011	7:52:49 PM	PHl3 MFC set to  0.000000
10/22/2011	7:52:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:52:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:52:49 PM	Tube furnace set to 150
10/22/2011	7:53:19 PM	H2 valve closed
10/22/2011	7:53:19 PM	BCl3 valve closed
10/22/2011	7:53:19 PM	PH3 valve closed
10/22/2011	7:53:19 PM	SiCl4 pre valve closed
10/22/2011	7:53:19 PM	SiCl4 post valve closed
10/22/2011	7:53:19 PM	Bypass valve closed
10/22/2011	7:53:19 PM	Bubbler valve closed
10/22/2011	7:53:19 PM	Helium valve opened
10/22/2011	7:53:19 PM	Main Vac valve opened
10/22/2011	7:53:19 PM	Helium MFC set to  20.000000
10/22/2011	7:53:19 PM	H2 MFC set to  0.000000
10/22/2011	7:53:19 PM	BCl3 MFC set to  0.000000
10/22/2011	7:53:19 PM	PHl3 MFC set to  0.000000
10/22/2011	7:53:19 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:53:19 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:53:19 PM	Tube furnace set to 150
10/22/2011	7:53:49 PM	Helium valve closed
10/22/2011	7:53:49 PM	H2 valve closed
10/22/2011	7:53:49 PM	BCl3 valve closed
10/22/2011	7:53:49 PM	PH3 valve closed
10/22/2011	7:53:49 PM	SiCl4 pre valve closed
10/22/2011	7:53:49 PM	SiCl4 post valve closed
10/22/2011	7:53:49 PM	Bypass valve closed
10/22/2011	7:53:49 PM	Bubbler valve closed
10/22/2011	7:53:49 PM	Main Vac valve opened
10/22/2011	7:53:49 PM	Helium MFC set to  0.000000
10/22/2011	7:53:49 PM	H2 MFC set to  0.000000
10/22/2011	7:53:49 PM	BCl3 MFC set to  0.000000
10/22/2011	7:53:49 PM	PHl3 MFC set to  0.000000
10/22/2011	7:53:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:53:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:53:49 PM	Tube furnace set to 150
10/22/2011	7:54:19 PM	H2 valve closed
10/22/2011	7:54:19 PM	BCl3 valve closed
10/22/2011	7:54:19 PM	PH3 valve closed
10/22/2011	7:54:19 PM	SiCl4 pre valve closed
10/22/2011	7:54:19 PM	SiCl4 post valve closed
10/22/2011	7:54:19 PM	Bypass valve closed
10/22/2011	7:54:19 PM	Bubbler valve closed
10/22/2011	7:54:19 PM	Helium valve opened
10/22/2011	7:54:19 PM	Main Vac valve opened
10/22/2011	7:54:19 PM	Helium MFC set to  20.000000
10/22/2011	7:54:19 PM	H2 MFC set to  0.000000
10/22/2011	7:54:19 PM	BCl3 MFC set to  0.000000
10/22/2011	7:54:19 PM	PHl3 MFC set to  0.000000
10/22/2011	7:54:19 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:54:19 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:54:19 PM	Tube furnace set to 150
10/22/2011	7:54:49 PM	Helium valve closed
10/22/2011	7:54:49 PM	H2 valve closed
10/22/2011	7:54:49 PM	BCl3 valve closed
10/22/2011	7:54:49 PM	PH3 valve closed
10/22/2011	7:54:49 PM	SiCl4 pre valve closed
10/22/2011	7:54:49 PM	SiCl4 post valve closed
10/22/2011	7:54:49 PM	Bypass valve closed
10/22/2011	7:54:49 PM	Bubbler valve closed
10/22/2011	7:54:49 PM	Main Vac valve opened
10/22/2011	7:54:49 PM	Helium MFC set to  0.000000
10/22/2011	7:54:49 PM	H2 MFC set to  0.000000
10/22/2011	7:54:49 PM	BCl3 MFC set to  0.000000
10/22/2011	7:54:49 PM	PHl3 MFC set to  0.000000
10/22/2011	7:54:49 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:54:49 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:54:50 PM	Tube furnace set to 150
10/22/2011	7:55:20 PM	H2 valve closed
10/22/2011	7:55:20 PM	BCl3 valve closed
10/22/2011	7:55:20 PM	PH3 valve closed
10/22/2011	7:55:20 PM	SiCl4 pre valve closed
10/22/2011	7:55:20 PM	SiCl4 post valve closed
10/22/2011	7:55:20 PM	Bypass valve closed
10/22/2011	7:55:20 PM	Bubbler valve closed
10/22/2011	7:55:20 PM	Helium valve opened
10/22/2011	7:55:20 PM	Main Vac valve opened
10/22/2011	7:55:20 PM	Helium MFC set to  20.000000
10/22/2011	7:55:20 PM	H2 MFC set to  0.000000
10/22/2011	7:55:20 PM	BCl3 MFC set to  0.000000
10/22/2011	7:55:20 PM	PHl3 MFC set to  0.000000
10/22/2011	7:55:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:55:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:55:20 PM	Tube furnace set to 150
10/22/2011	7:55:50 PM	Helium valve closed
10/22/2011	7:55:50 PM	H2 valve closed
10/22/2011	7:55:50 PM	BCl3 valve closed
10/22/2011	7:55:50 PM	PH3 valve closed
10/22/2011	7:55:50 PM	SiCl4 pre valve closed
10/22/2011	7:55:50 PM	SiCl4 post valve closed
10/22/2011	7:55:50 PM	Bypass valve closed
10/22/2011	7:55:50 PM	Bubbler valve closed
10/22/2011	7:55:50 PM	Main Vac valve opened
10/22/2011	7:55:50 PM	Helium MFC set to  0.000000
10/22/2011	7:55:50 PM	H2 MFC set to  0.000000
10/22/2011	7:55:50 PM	BCl3 MFC set to  0.000000
10/22/2011	7:55:50 PM	PHl3 MFC set to  0.000000
10/22/2011	7:55:50 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:55:50 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:55:50 PM	Tube furnace set to 150
10/22/2011	7:56:20 PM	H2 valve closed
10/22/2011	7:56:20 PM	BCl3 valve closed
10/22/2011	7:56:20 PM	PH3 valve closed
10/22/2011	7:56:20 PM	SiCl4 pre valve closed
10/22/2011	7:56:20 PM	SiCl4 post valve closed
10/22/2011	7:56:20 PM	Bypass valve closed
10/22/2011	7:56:20 PM	Bubbler valve closed
10/22/2011	7:56:20 PM	Helium valve opened
10/22/2011	7:56:20 PM	Main Vac valve opened
10/22/2011	7:56:20 PM	Helium MFC set to  20.000000
10/22/2011	7:56:20 PM	H2 MFC set to  0.000000
10/22/2011	7:56:20 PM	BCl3 MFC set to  0.000000
10/22/2011	7:56:20 PM	PHl3 MFC set to  0.000000
10/22/2011	7:56:20 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:56:20 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:56:20 PM	Tube furnace set to 150
10/22/2011	7:56:50 PM	Helium valve closed
10/22/2011	7:56:50 PM	H2 valve closed
10/22/2011	7:56:50 PM	BCl3 valve closed
10/22/2011	7:56:50 PM	PH3 valve closed
10/22/2011	7:56:50 PM	SiCl4 pre valve closed
10/22/2011	7:56:50 PM	SiCl4 post valve closed
10/22/2011	7:56:50 PM	Bypass valve closed
10/22/2011	7:56:50 PM	Bubbler valve closed
10/22/2011	7:56:50 PM	Main Vac valve opened
10/22/2011	7:56:50 PM	Helium MFC set to  0.000000
10/22/2011	7:56:50 PM	H2 MFC set to  0.000000
10/22/2011	7:56:50 PM	BCl3 MFC set to  0.000000
10/22/2011	7:56:50 PM	PHl3 MFC set to  0.000000
10/22/2011	7:56:50 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:56:50 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:56:50 PM	Tube furnace set to 150
10/22/2011	7:57:20 PM	H2 valve closed
10/22/2011	7:57:20 PM	BCl3 valve closed
10/22/2011	7:57:20 PM	PH3 valve closed
10/22/2011	7:57:20 PM	SiCl4 pre valve closed
10/22/2011	7:57:20 PM	SiCl4 post valve closed
10/22/2011	7:57:20 PM	Bypass valve closed
10/22/2011	7:57:21 PM	Bubbler valve closed
10/22/2011	7:57:21 PM	Helium valve opened
10/22/2011	7:57:21 PM	Main Vac valve opened
10/22/2011	7:57:21 PM	Helium MFC set to  20.000000
10/22/2011	7:57:21 PM	H2 MFC set to  0.000000
10/22/2011	7:57:21 PM	BCl3 MFC set to  0.000000
10/22/2011	7:57:21 PM	PHl3 MFC set to  0.000000
10/22/2011	7:57:21 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:57:21 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:57:21 PM	Tube furnace set to 150
10/22/2011	7:57:51 PM	Helium valve closed
10/22/2011	7:57:51 PM	H2 valve closed
10/22/2011	7:57:51 PM	BCl3 valve closed
10/22/2011	7:57:51 PM	PH3 valve closed
10/22/2011	7:57:51 PM	SiCl4 pre valve closed
10/22/2011	7:57:51 PM	SiCl4 post valve closed
10/22/2011	7:57:51 PM	Bypass valve closed
10/22/2011	7:57:51 PM	Bubbler valve closed
10/22/2011	7:57:51 PM	Main Vac valve opened
10/22/2011	7:57:51 PM	Helium MFC set to  0.000000
10/22/2011	7:57:51 PM	H2 MFC set to  0.000000
10/22/2011	7:57:51 PM	BCl3 MFC set to  0.000000
10/22/2011	7:57:51 PM	PHl3 MFC set to  0.000000
10/22/2011	7:57:51 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:57:51 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:57:51 PM	Tube furnace set to 150
10/22/2011	7:58:21 PM	H2 valve closed
10/22/2011	7:58:21 PM	BCl3 valve closed
10/22/2011	7:58:21 PM	PH3 valve closed
10/22/2011	7:58:21 PM	SiCl4 pre valve closed
10/22/2011	7:58:21 PM	SiCl4 post valve closed
10/22/2011	7:58:21 PM	Bypass valve closed
10/22/2011	7:58:21 PM	Bubbler valve closed
10/22/2011	7:58:21 PM	Helium valve opened
10/22/2011	7:58:21 PM	Main Vac valve opened
10/22/2011	7:58:21 PM	Helium MFC set to  20.000000
10/22/2011	7:58:21 PM	H2 MFC set to  0.000000
10/22/2011	7:58:21 PM	BCl3 MFC set to  0.000000
10/22/2011	7:58:21 PM	PHl3 MFC set to  0.000000
10/22/2011	7:58:21 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:58:21 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:58:21 PM	Tube furnace set to 150
10/22/2011	7:58:51 PM	Helium valve closed
10/22/2011	7:58:51 PM	H2 valve closed
10/22/2011	7:58:51 PM	BCl3 valve closed
10/22/2011	7:58:51 PM	PH3 valve closed
10/22/2011	7:58:51 PM	SiCl4 pre valve closed
10/22/2011	7:58:51 PM	SiCl4 post valve closed
10/22/2011	7:58:51 PM	Bypass valve closed
10/22/2011	7:58:51 PM	Bubbler valve closed
10/22/2011	7:58:51 PM	Main Vac valve opened
10/22/2011	7:58:51 PM	Helium MFC set to  0.000000
10/22/2011	7:58:51 PM	H2 MFC set to  0.000000
10/22/2011	7:58:51 PM	BCl3 MFC set to  0.000000
10/22/2011	7:58:51 PM	PHl3 MFC set to  0.000000
10/22/2011	7:58:51 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:58:51 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:58:51 PM	Tube furnace set to 150
10/22/2011	7:59:21 PM	H2 valve closed
10/22/2011	7:59:21 PM	BCl3 valve closed
10/22/2011	7:59:21 PM	PH3 valve closed
10/22/2011	7:59:21 PM	SiCl4 pre valve closed
10/22/2011	7:59:21 PM	SiCl4 post valve closed
10/22/2011	7:59:21 PM	Bypass valve closed
10/22/2011	7:59:21 PM	Bubbler valve closed
10/22/2011	7:59:21 PM	Helium valve opened
10/22/2011	7:59:21 PM	Main Vac valve opened
10/22/2011	7:59:21 PM	Helium MFC set to  20.000000
10/22/2011	7:59:21 PM	H2 MFC set to  0.000000
10/22/2011	7:59:21 PM	BCl3 MFC set to  0.000000
10/22/2011	7:59:21 PM	PHl3 MFC set to  0.000000
10/22/2011	7:59:21 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:59:21 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:59:22 PM	Tube furnace set to 150
10/22/2011	7:59:52 PM	Helium valve closed
10/22/2011	7:59:52 PM	H2 valve closed
10/22/2011	7:59:52 PM	BCl3 valve closed
10/22/2011	7:59:52 PM	PH3 valve closed
10/22/2011	7:59:52 PM	SiCl4 pre valve closed
10/22/2011	7:59:52 PM	SiCl4 post valve closed
10/22/2011	7:59:52 PM	Bypass valve closed
10/22/2011	7:59:52 PM	Bubbler valve closed
10/22/2011	7:59:52 PM	Main Vac valve opened
10/22/2011	7:59:52 PM	Helium MFC set to  0.000000
10/22/2011	7:59:52 PM	H2 MFC set to  0.000000
10/22/2011	7:59:52 PM	BCl3 MFC set to  0.000000
10/22/2011	7:59:52 PM	PHl3 MFC set to  0.000000
10/22/2011	7:59:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	7:59:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	7:59:52 PM	Tube furnace set to 150
10/22/2011	8:00:22 PM	H2 valve closed
10/22/2011	8:00:22 PM	BCl3 valve closed
10/22/2011	8:00:22 PM	PH3 valve closed
10/22/2011	8:00:22 PM	SiCl4 pre valve closed
10/22/2011	8:00:22 PM	SiCl4 post valve closed
10/22/2011	8:00:22 PM	Bypass valve closed
10/22/2011	8:00:22 PM	Bubbler valve closed
10/22/2011	8:00:22 PM	Helium valve opened
10/22/2011	8:00:22 PM	Main Vac valve opened
10/22/2011	8:00:22 PM	Helium MFC set to  20.000000
10/22/2011	8:00:22 PM	H2 MFC set to  0.000000
10/22/2011	8:00:22 PM	BCl3 MFC set to  0.000000
10/22/2011	8:00:22 PM	PHl3 MFC set to  0.000000
10/22/2011	8:00:22 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:00:22 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:00:22 PM	Tube furnace set to 150
10/22/2011	8:00:52 PM	Helium valve closed
10/22/2011	8:00:52 PM	H2 valve closed
10/22/2011	8:00:52 PM	BCl3 valve closed
10/22/2011	8:00:52 PM	PH3 valve closed
10/22/2011	8:00:52 PM	SiCl4 pre valve closed
10/22/2011	8:00:52 PM	SiCl4 post valve closed
10/22/2011	8:00:52 PM	Bypass valve closed
10/22/2011	8:00:52 PM	Bubbler valve closed
10/22/2011	8:00:52 PM	Main Vac valve opened
10/22/2011	8:00:52 PM	Helium MFC set to  0.000000
10/22/2011	8:00:52 PM	H2 MFC set to  0.000000
10/22/2011	8:00:52 PM	BCl3 MFC set to  0.000000
10/22/2011	8:00:52 PM	PHl3 MFC set to  0.000000
10/22/2011	8:00:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:00:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:00:52 PM	Tube furnace set to 150
10/22/2011	8:01:22 PM	H2 valve closed
10/22/2011	8:01:22 PM	BCl3 valve closed
10/22/2011	8:01:22 PM	PH3 valve closed
10/22/2011	8:01:22 PM	SiCl4 pre valve closed
10/22/2011	8:01:22 PM	SiCl4 post valve closed
10/22/2011	8:01:22 PM	Bypass valve closed
10/22/2011	8:01:22 PM	Bubbler valve closed
10/22/2011	8:01:22 PM	Helium valve opened
10/22/2011	8:01:22 PM	Main Vac valve opened
10/22/2011	8:01:22 PM	Helium MFC set to  20.000000
10/22/2011	8:01:22 PM	H2 MFC set to  0.000000
10/22/2011	8:01:22 PM	BCl3 MFC set to  0.000000
10/22/2011	8:01:22 PM	PHl3 MFC set to  0.000000
10/22/2011	8:01:22 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:01:22 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:01:22 PM	Tube furnace set to 150
10/22/2011	8:01:52 PM	Helium valve closed
10/22/2011	8:01:52 PM	H2 valve closed
10/22/2011	8:01:52 PM	BCl3 valve closed
10/22/2011	8:01:52 PM	PH3 valve closed
10/22/2011	8:01:52 PM	SiCl4 pre valve closed
10/22/2011	8:01:52 PM	SiCl4 post valve closed
10/22/2011	8:01:52 PM	Bypass valve closed
10/22/2011	8:01:52 PM	Bubbler valve closed
10/22/2011	8:01:52 PM	Main Vac valve opened
10/22/2011	8:01:52 PM	Helium MFC set to  0.000000
10/22/2011	8:01:52 PM	H2 MFC set to  0.000000
10/22/2011	8:01:52 PM	BCl3 MFC set to  0.000000
10/22/2011	8:01:52 PM	PHl3 MFC set to  0.000000
10/22/2011	8:01:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:01:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:01:53 PM	Tube furnace set to 150
10/22/2011	8:02:23 PM	H2 valve closed
10/22/2011	8:02:23 PM	BCl3 valve closed
10/22/2011	8:02:23 PM	PH3 valve closed
10/22/2011	8:02:23 PM	SiCl4 pre valve closed
10/22/2011	8:02:23 PM	SiCl4 post valve closed
10/22/2011	8:02:23 PM	Bypass valve closed
10/22/2011	8:02:23 PM	Bubbler valve closed
10/22/2011	8:02:23 PM	Helium valve opened
10/22/2011	8:02:23 PM	Main Vac valve opened
10/22/2011	8:02:23 PM	Helium MFC set to  20.000000
10/22/2011	8:02:23 PM	H2 MFC set to  0.000000
10/22/2011	8:02:23 PM	BCl3 MFC set to  0.000000
10/22/2011	8:02:23 PM	PHl3 MFC set to  0.000000
10/22/2011	8:02:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:02:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:02:23 PM	Tube furnace set to 150
10/22/2011	8:02:53 PM	Helium valve closed
10/22/2011	8:02:53 PM	H2 valve closed
10/22/2011	8:02:53 PM	BCl3 valve closed
10/22/2011	8:02:53 PM	PH3 valve closed
10/22/2011	8:02:53 PM	SiCl4 pre valve closed
10/22/2011	8:02:53 PM	SiCl4 post valve closed
10/22/2011	8:02:53 PM	Bypass valve closed
10/22/2011	8:02:53 PM	Bubbler valve closed
10/22/2011	8:02:53 PM	Main Vac valve opened
10/22/2011	8:02:53 PM	Helium MFC set to  0.000000
10/22/2011	8:02:53 PM	H2 MFC set to  0.000000
10/22/2011	8:02:53 PM	BCl3 MFC set to  0.000000
10/22/2011	8:02:53 PM	PHl3 MFC set to  0.000000
10/22/2011	8:02:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:02:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:02:53 PM	Tube furnace set to 150
10/22/2011	8:03:23 PM	H2 valve closed
10/22/2011	8:03:23 PM	BCl3 valve closed
10/22/2011	8:03:23 PM	PH3 valve closed
10/22/2011	8:03:23 PM	SiCl4 pre valve closed
10/22/2011	8:03:23 PM	SiCl4 post valve closed
10/22/2011	8:03:23 PM	Bypass valve closed
10/22/2011	8:03:23 PM	Bubbler valve closed
10/22/2011	8:03:23 PM	Helium valve opened
10/22/2011	8:03:23 PM	Main Vac valve opened
10/22/2011	8:03:23 PM	Helium MFC set to  20.000000
10/22/2011	8:03:23 PM	H2 MFC set to  0.000000
10/22/2011	8:03:23 PM	BCl3 MFC set to  0.000000
10/22/2011	8:03:23 PM	PHl3 MFC set to  0.000000
10/22/2011	8:03:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:03:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:03:23 PM	Tube furnace set to 150
10/22/2011	8:03:53 PM	Helium valve closed
10/22/2011	8:03:53 PM	H2 valve closed
10/22/2011	8:03:53 PM	BCl3 valve closed
10/22/2011	8:03:53 PM	PH3 valve closed
10/22/2011	8:03:53 PM	SiCl4 pre valve closed
10/22/2011	8:03:53 PM	SiCl4 post valve closed
10/22/2011	8:03:53 PM	Bypass valve closed
10/22/2011	8:03:53 PM	Bubbler valve closed
10/22/2011	8:03:53 PM	Main Vac valve opened
10/22/2011	8:03:53 PM	Helium MFC set to  0.000000
10/22/2011	8:03:53 PM	H2 MFC set to  0.000000
10/22/2011	8:03:53 PM	BCl3 MFC set to  0.000000
10/22/2011	8:03:53 PM	PHl3 MFC set to  0.000000
10/22/2011	8:03:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:03:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:03:53 PM	Tube furnace set to 180
10/22/2011	8:03:58 PM	Run finished at 8:03 PM
10/22/2011	8:16:00 PM	Main Vac valve closed
10/22/2011	8:16:05 PM	Main Vac valve opened
10/22/2011	8:16:34 PM	Recipe started at 8:16 PM
10/22/2011	8:16:34 PM	Helium valve closed
10/22/2011	8:16:34 PM	H2 valve closed
10/22/2011	8:16:34 PM	BCl3 valve closed
10/22/2011	8:16:34 PM	PH3 valve closed
10/22/2011	8:16:34 PM	SiCl4 pre valve closed
10/22/2011	8:16:34 PM	SiCl4 post valve closed
10/22/2011	8:16:34 PM	Main Vac valve closed
10/22/2011	8:16:34 PM	Bypass valve closed
10/22/2011	8:16:34 PM	Bubbler valve closed
10/22/2011	8:16:34 PM	Helium MFC set to  0.000000
10/22/2011	8:16:34 PM	H2 MFC set to  0.000000
10/22/2011	8:16:34 PM	BCl3 MFC set to  0.000000
10/22/2011	8:16:34 PM	PHl3 MFC set to  0.000000
10/22/2011	8:16:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:16:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:16:34 PM	Tube furnace set to 0
10/22/2011	8:16:37 PM	Helium valve closed
10/22/2011	8:16:37 PM	BCl3 valve closed
10/22/2011	8:16:37 PM	PH3 valve closed
10/22/2011	8:16:37 PM	SiCl4 pre valve closed
10/22/2011	8:16:37 PM	SiCl4 post valve closed
10/22/2011	8:16:37 PM	Main Vac valve closed
10/22/2011	8:16:37 PM	Bypass valve closed
10/22/2011	8:16:37 PM	Bubbler valve closed
10/22/2011	8:16:37 PM	H2 valve opened
10/22/2011	8:16:37 PM	Helium MFC set to  0.000000
10/22/2011	8:16:37 PM	H2 MFC set to  500.000000
10/22/2011	8:16:37 PM	BCl3 MFC set to  0.000000
10/22/2011	8:16:37 PM	PHl3 MFC set to  0.000000
10/22/2011	8:16:37 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:16:37 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:16:37 PM	Tube furnace set to 0
10/22/2011	8:17:40 PM	Helium valve closed
10/22/2011	8:17:40 PM	BCl3 valve closed
10/22/2011	8:17:40 PM	PH3 valve closed
10/22/2011	8:17:40 PM	SiCl4 pre valve closed
10/22/2011	8:17:40 PM	SiCl4 post valve closed
10/22/2011	8:17:40 PM	Main Vac valve closed
10/22/2011	8:17:40 PM	Bypass valve closed
10/22/2011	8:17:40 PM	H2 valve opened
10/22/2011	8:17:40 PM	Bubbler valve opened
10/22/2011	8:17:40 PM	Helium MFC set to  0.000000
10/22/2011	8:17:40 PM	H2 MFC set to  500.000000
10/22/2011	8:17:40 PM	BCl3 MFC set to  0.000000
10/22/2011	8:17:40 PM	PHl3 MFC set to  0.000000
10/22/2011	8:17:40 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:17:40 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:17:40 PM	Tube furnace set to 0
10/22/2011	8:17:41 PM	Helium valve closed
10/22/2011	8:17:41 PM	BCl3 valve closed
10/22/2011	8:17:41 PM	PH3 valve closed
10/22/2011	8:17:41 PM	SiCl4 pre valve closed
10/22/2011	8:17:41 PM	SiCl4 post valve closed
10/22/2011	8:17:41 PM	Main Vac valve closed
10/22/2011	8:17:41 PM	Bypass valve closed
10/22/2011	8:17:41 PM	H2 valve opened
10/22/2011	8:17:41 PM	Bubbler valve opened
10/22/2011	8:17:41 PM	Helium MFC set to  0.000000
10/22/2011	8:17:41 PM	H2 MFC set to  500.000000
10/22/2011	8:17:41 PM	BCl3 MFC set to  0.000000
10/22/2011	8:17:41 PM	PHl3 MFC set to  0.000000
10/22/2011	8:17:41 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:17:41 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:17:41 PM	Tube furnace set to 1047
10/22/2011	8:37:41 PM	Helium valve closed
10/22/2011	8:37:41 PM	BCl3 valve closed
10/22/2011	8:37:41 PM	PH3 valve closed
10/22/2011	8:37:41 PM	Main Vac valve closed
10/22/2011	8:37:41 PM	Bypass valve closed
10/22/2011	8:37:41 PM	H2 valve opened
10/22/2011	8:37:41 PM	SiCl4 pre valve opened
10/22/2011	8:37:41 PM	SiCl4 post valve opened
10/22/2011	8:37:41 PM	Bubbler valve opened
10/22/2011	8:37:41 PM	Helium MFC set to  0.000000
10/22/2011	8:37:41 PM	H2 MFC set to  500.000000
10/22/2011	8:37:41 PM	BCl3 MFC set to  0.000000
10/22/2011	8:37:41 PM	PHl3 MFC set to  0.000000
10/22/2011	8:37:41 PM	SiCl4 MFC set to  50.000000
10/22/2011	8:37:41 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:37:42 PM	Tube furnace set to 1047
10/22/2011	8:53:41 PM	Helium valve closed
10/22/2011	8:53:41 PM	BCl3 valve closed
10/22/2011	8:53:41 PM	PH3 valve closed
10/22/2011	8:53:41 PM	SiCl4 pre valve closed
10/22/2011	8:53:42 PM	SiCl4 post valve closed
10/22/2011	8:53:42 PM	Main Vac valve closed
10/22/2011	8:53:42 PM	Bypass valve closed
10/22/2011	8:53:42 PM	H2 valve opened
10/22/2011	8:53:42 PM	Bubbler valve opened
10/22/2011	8:53:42 PM	Helium MFC set to  0.000000
10/22/2011	8:53:42 PM	H2 MFC set to  500.000000
10/22/2011	8:53:42 PM	BCl3 MFC set to  0.000000
10/22/2011	8:53:42 PM	PHl3 MFC set to  0.000000
10/22/2011	8:53:42 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:53:42 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:53:42 PM	Tube furnace set to 750
10/22/2011	8:58:42 PM	H2 valve closed
10/22/2011	8:58:42 PM	BCl3 valve closed
10/22/2011	8:58:42 PM	PH3 valve closed
10/22/2011	8:58:42 PM	SiCl4 pre valve closed
10/22/2011	8:58:42 PM	SiCl4 post valve closed
10/22/2011	8:58:42 PM	Main Vac valve closed
10/22/2011	8:58:42 PM	Bypass valve closed
10/22/2011	8:58:42 PM	Helium valve opened
10/22/2011	8:58:42 PM	Bubbler valve opened
10/22/2011	8:58:42 PM	Helium MFC set to  500.000000
10/22/2011	8:58:42 PM	H2 MFC set to  0.000000
10/22/2011	8:58:42 PM	BCl3 MFC set to  0.000000
10/22/2011	8:58:42 PM	PHl3 MFC set to  0.000000
10/22/2011	8:58:42 PM	SiCl4 MFC set to  0.000000
10/22/2011	8:58:42 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	8:58:42 PM	Tube furnace set to 0
10/22/2011	9:05:50 PM	Helium valve closed
10/22/2011	9:05:50 PM	H2 valve closed
10/22/2011	9:05:50 PM	BCl3 valve closed
10/22/2011	9:05:50 PM	PH3 valve closed
10/22/2011	9:05:50 PM	SiCl4 pre valve closed
10/22/2011	9:05:50 PM	SiCl4 post valve closed
10/22/2011	9:05:50 PM	Main Vac valve closed
10/22/2011	9:05:50 PM	Bypass valve closed
10/22/2011	9:05:50 PM	Bubbler valve closed
10/22/2011	9:05:50 PM	Helium MFC set to  0.000000
10/22/2011	9:05:50 PM	H2 MFC set to  0.000000
10/22/2011	9:05:50 PM	BCl3 MFC set to  0.000000
10/22/2011	9:05:50 PM	PHl3 MFC set to  0.000000
10/22/2011	9:05:50 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:05:50 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:05:50 PM	Tube furnace set to 0
10/22/2011	9:05:51 PM	Run finished at 9:05 PM
10/22/2011	9:05:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	9:05:55 PM	Recipe started at 9:05 PM
10/22/2011	9:05:55 PM	Helium valve closed
10/22/2011	9:05:55 PM	H2 valve closed
10/22/2011	9:05:55 PM	BCl3 valve closed
10/22/2011	9:05:55 PM	PH3 valve closed
10/22/2011	9:05:55 PM	SiCl4 pre valve closed
10/22/2011	9:05:55 PM	SiCl4 post valve closed
10/22/2011	9:05:55 PM	Main Vac valve closed
10/22/2011	9:05:55 PM	Bypass valve closed
10/22/2011	9:05:55 PM	Bubbler valve closed
10/22/2011	9:05:55 PM	Helium MFC set to  0.000000
10/22/2011	9:05:55 PM	H2 MFC set to  0.000000
10/22/2011	9:05:55 PM	BCl3 MFC set to  0.000000
10/22/2011	9:05:55 PM	PHl3 MFC set to  0.000000
10/22/2011	9:05:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:05:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:05:55 PM	Tube furnace set to 0
10/22/2011	9:05:58 PM	H2 valve closed
10/22/2011	9:05:58 PM	BCl3 valve closed
10/22/2011	9:05:58 PM	PH3 valve closed
10/22/2011	9:05:58 PM	SiCl4 pre valve closed
10/22/2011	9:05:58 PM	SiCl4 post valve closed
10/22/2011	9:05:58 PM	Main Vac valve closed
10/22/2011	9:05:58 PM	Bypass valve closed
10/22/2011	9:05:58 PM	Bubbler valve closed
10/22/2011	9:05:58 PM	Helium valve opened
10/22/2011	9:05:58 PM	Helium MFC set to  500.000000
10/22/2011	9:05:58 PM	H2 MFC set to  0.000000
10/22/2011	9:05:58 PM	BCl3 MFC set to  0.000000
10/22/2011	9:05:58 PM	PHl3 MFC set to  0.000000
10/22/2011	9:05:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:05:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:05:58 PM	Tube furnace set to 0
10/22/2011	9:05:58 PM	Helium valve closed
10/22/2011	9:05:58 PM	H2 valve closed
10/22/2011	9:05:58 PM	BCl3 valve closed
10/22/2011	9:05:58 PM	PH3 valve closed
10/22/2011	9:05:58 PM	SiCl4 pre valve closed
10/22/2011	9:05:58 PM	SiCl4 post valve closed
10/22/2011	9:05:58 PM	Main Vac valve closed
10/22/2011	9:05:58 PM	Bypass valve closed
10/22/2011	9:05:58 PM	Bubbler valve closed
10/22/2011	9:05:58 PM	Helium MFC set to  0.000000
10/22/2011	9:05:58 PM	H2 MFC set to  0.000000
10/22/2011	9:05:58 PM	BCl3 MFC set to  0.000000
10/22/2011	9:05:58 PM	PHl3 MFC set to  0.000000
10/22/2011	9:05:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:05:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:05:58 PM	Tube furnace set to 0
10/22/2011	9:05:59 PM	Run finished at 9:05 PM
10/22/2011	9:05:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	9:12:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	9:12:27 PM	Recipe started at 9:12 PM
10/22/2011	9:12:28 PM	Helium valve closed
10/22/2011	9:12:28 PM	H2 valve closed
10/22/2011	9:12:28 PM	BCl3 valve closed
10/22/2011	9:12:28 PM	PH3 valve closed
10/22/2011	9:12:28 PM	SiCl4 pre valve closed
10/22/2011	9:12:28 PM	SiCl4 post valve closed
10/22/2011	9:12:28 PM	Main Vac valve closed
10/22/2011	9:12:28 PM	Bubbler valve closed
10/22/2011	9:12:28 PM	Bypass valve opened
10/22/2011	9:12:28 PM	Helium MFC set to  0.000000
10/22/2011	9:12:28 PM	H2 MFC set to  0.000000
10/22/2011	9:12:28 PM	BCl3 MFC set to  0.000000
10/22/2011	9:12:28 PM	PHl3 MFC set to  0.000000
10/22/2011	9:12:28 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:12:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:12:28 PM	Tube furnace set to 0
10/22/2011	9:13:31 PM	Helium valve closed
10/22/2011	9:13:31 PM	H2 valve closed
10/22/2011	9:13:31 PM	BCl3 valve closed
10/22/2011	9:13:31 PM	PH3 valve closed
10/22/2011	9:13:31 PM	SiCl4 pre valve closed
10/22/2011	9:13:31 PM	SiCl4 post valve closed
10/22/2011	9:13:31 PM	Main Vac valve closed
10/22/2011	9:13:31 PM	Bubbler valve closed
10/22/2011	9:13:31 PM	Bypass valve opened
10/22/2011	9:13:31 PM	Helium MFC set to  0.000000
10/22/2011	9:13:31 PM	H2 MFC set to  0.000000
10/22/2011	9:13:31 PM	BCl3 MFC set to  0.000000
10/22/2011	9:13:31 PM	PHl3 MFC set to  0.000000
10/22/2011	9:13:31 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:13:31 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:13:31 PM	Tube furnace set to 0
10/22/2011	9:14:02 PM	Helium valve closed
10/22/2011	9:14:02 PM	H2 valve closed
10/22/2011	9:14:02 PM	BCl3 valve closed
10/22/2011	9:14:02 PM	PH3 valve closed
10/22/2011	9:14:02 PM	SiCl4 pre valve closed
10/22/2011	9:14:02 PM	SiCl4 post valve closed
10/22/2011	9:14:02 PM	Bypass valve closed
10/22/2011	9:14:02 PM	Bubbler valve closed
10/22/2011	9:14:02 PM	Main Vac valve opened
10/22/2011	9:14:02 PM	Helium MFC set to  0.000000
10/22/2011	9:14:02 PM	H2 MFC set to  0.000000
10/22/2011	9:14:02 PM	BCl3 MFC set to  0.000000
10/22/2011	9:14:02 PM	PHl3 MFC set to  0.000000
10/22/2011	9:14:02 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:14:02 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:14:03 PM	Tube furnace set to 0
10/22/2011	9:14:04 PM	Run finished at 9:14 PM
10/22/2011	9:14:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	9:15:34 PM	Recipe started at 9:15 PM
10/22/2011	9:15:34 PM	Helium valve closed
10/22/2011	9:15:34 PM	H2 valve closed
10/22/2011	9:15:34 PM	BCl3 valve closed
10/22/2011	9:15:34 PM	PH3 valve closed
10/22/2011	9:15:34 PM	SiCl4 pre valve closed
10/22/2011	9:15:34 PM	SiCl4 post valve closed
10/22/2011	9:15:34 PM	Main Vac valve closed
10/22/2011	9:15:34 PM	Bubbler valve closed
10/22/2011	9:15:34 PM	Bypass valve opened
10/22/2011	9:15:34 PM	Helium MFC set to  0.000000
10/22/2011	9:15:34 PM	H2 MFC set to  0.000000
10/22/2011	9:15:34 PM	BCl3 MFC set to  0.000000
10/22/2011	9:15:34 PM	PHl3 MFC set to  0.000000
10/22/2011	9:15:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:15:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:15:34 PM	Tube furnace set to 150
10/22/2011	9:15:34 PM	Helium valve closed
10/22/2011	9:15:34 PM	H2 valve closed
10/22/2011	9:15:34 PM	BCl3 valve closed
10/22/2011	9:15:34 PM	PH3 valve closed
10/22/2011	9:15:34 PM	SiCl4 pre valve closed
10/22/2011	9:15:34 PM	SiCl4 post valve closed
10/22/2011	9:15:34 PM	Main Vac valve closed
10/22/2011	9:15:34 PM	Bubbler valve closed
10/22/2011	9:15:34 PM	Bypass valve opened
10/22/2011	9:15:34 PM	Helium MFC set to  0.000000
10/22/2011	9:15:34 PM	H2 MFC set to  0.000000
10/22/2011	9:15:34 PM	BCl3 MFC set to  0.000000
10/22/2011	9:15:34 PM	PHl3 MFC set to  0.000000
10/22/2011	9:15:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:15:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:15:34 PM	Tube furnace set to 150
10/22/2011	9:15:53 PM	Helium valve closed
10/22/2011	9:15:53 PM	H2 valve closed
10/22/2011	9:15:53 PM	BCl3 valve closed
10/22/2011	9:15:53 PM	PH3 valve closed
10/22/2011	9:15:53 PM	SiCl4 pre valve closed
10/22/2011	9:15:53 PM	SiCl4 post valve closed
10/22/2011	9:15:53 PM	Bypass valve closed
10/22/2011	9:15:53 PM	Bubbler valve closed
10/22/2011	9:15:53 PM	Main Vac valve opened
10/22/2011	9:15:53 PM	Helium MFC set to  0.000000
10/22/2011	9:15:53 PM	H2 MFC set to  0.000000
10/22/2011	9:15:53 PM	BCl3 MFC set to  0.000000
10/22/2011	9:15:53 PM	PHl3 MFC set to  0.000000
10/22/2011	9:15:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:15:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:15:53 PM	Tube furnace set to 150
10/22/2011	9:16:23 PM	H2 valve closed
10/22/2011	9:16:23 PM	BCl3 valve closed
10/22/2011	9:16:23 PM	PH3 valve closed
10/22/2011	9:16:23 PM	SiCl4 pre valve closed
10/22/2011	9:16:23 PM	SiCl4 post valve closed
10/22/2011	9:16:23 PM	Bypass valve closed
10/22/2011	9:16:23 PM	Bubbler valve closed
10/22/2011	9:16:23 PM	Helium valve opened
10/22/2011	9:16:23 PM	Main Vac valve opened
10/22/2011	9:16:23 PM	Helium MFC set to  20.000000
10/22/2011	9:16:23 PM	H2 MFC set to  0.000000
10/22/2011	9:16:23 PM	BCl3 MFC set to  0.000000
10/22/2011	9:16:23 PM	PHl3 MFC set to  0.000000
10/22/2011	9:16:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:16:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:16:24 PM	Tube furnace set to 150
10/22/2011	9:16:54 PM	Helium valve closed
10/22/2011	9:16:54 PM	H2 valve closed
10/22/2011	9:16:54 PM	BCl3 valve closed
10/22/2011	9:16:54 PM	PH3 valve closed
10/22/2011	9:16:54 PM	SiCl4 pre valve closed
10/22/2011	9:16:54 PM	SiCl4 post valve closed
10/22/2011	9:16:54 PM	Bypass valve closed
10/22/2011	9:16:54 PM	Bubbler valve closed
10/22/2011	9:16:54 PM	Main Vac valve opened
10/22/2011	9:16:54 PM	Helium MFC set to  0.000000
10/22/2011	9:16:54 PM	H2 MFC set to  0.000000
10/22/2011	9:16:54 PM	BCl3 MFC set to  0.000000
10/22/2011	9:16:54 PM	PHl3 MFC set to  0.000000
10/22/2011	9:16:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:16:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:16:54 PM	Tube furnace set to 150
10/22/2011	9:17:24 PM	H2 valve closed
10/22/2011	9:17:24 PM	BCl3 valve closed
10/22/2011	9:17:24 PM	PH3 valve closed
10/22/2011	9:17:24 PM	SiCl4 pre valve closed
10/22/2011	9:17:24 PM	SiCl4 post valve closed
10/22/2011	9:17:24 PM	Bypass valve closed
10/22/2011	9:17:24 PM	Bubbler valve closed
10/22/2011	9:17:24 PM	Helium valve opened
10/22/2011	9:17:24 PM	Main Vac valve opened
10/22/2011	9:17:24 PM	Helium MFC set to  20.000000
10/22/2011	9:17:24 PM	H2 MFC set to  0.000000
10/22/2011	9:17:24 PM	BCl3 MFC set to  0.000000
10/22/2011	9:17:24 PM	PHl3 MFC set to  0.000000
10/22/2011	9:17:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:17:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:17:24 PM	Tube furnace set to 150
10/22/2011	9:17:54 PM	Helium valve closed
10/22/2011	9:17:54 PM	H2 valve closed
10/22/2011	9:17:54 PM	BCl3 valve closed
10/22/2011	9:17:54 PM	PH3 valve closed
10/22/2011	9:17:54 PM	SiCl4 pre valve closed
10/22/2011	9:17:54 PM	SiCl4 post valve closed
10/22/2011	9:17:54 PM	Bypass valve closed
10/22/2011	9:17:54 PM	Bubbler valve closed
10/22/2011	9:17:54 PM	Main Vac valve opened
10/22/2011	9:17:54 PM	Helium MFC set to  0.000000
10/22/2011	9:17:54 PM	H2 MFC set to  0.000000
10/22/2011	9:17:54 PM	BCl3 MFC set to  0.000000
10/22/2011	9:17:54 PM	PHl3 MFC set to  0.000000
10/22/2011	9:17:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:17:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:17:54 PM	Tube furnace set to 150
10/22/2011	9:18:24 PM	H2 valve closed
10/22/2011	9:18:24 PM	BCl3 valve closed
10/22/2011	9:18:24 PM	PH3 valve closed
10/22/2011	9:18:24 PM	SiCl4 pre valve closed
10/22/2011	9:18:24 PM	SiCl4 post valve closed
10/22/2011	9:18:24 PM	Bypass valve closed
10/22/2011	9:18:24 PM	Bubbler valve closed
10/22/2011	9:18:24 PM	Helium valve opened
10/22/2011	9:18:24 PM	Main Vac valve opened
10/22/2011	9:18:24 PM	Helium MFC set to  20.000000
10/22/2011	9:18:24 PM	H2 MFC set to  0.000000
10/22/2011	9:18:24 PM	BCl3 MFC set to  0.000000
10/22/2011	9:18:24 PM	PHl3 MFC set to  0.000000
10/22/2011	9:18:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:18:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:18:24 PM	Tube furnace set to 150
10/22/2011	9:18:54 PM	Helium valve closed
10/22/2011	9:18:54 PM	H2 valve closed
10/22/2011	9:18:54 PM	BCl3 valve closed
10/22/2011	9:18:54 PM	PH3 valve closed
10/22/2011	9:18:54 PM	SiCl4 pre valve closed
10/22/2011	9:18:54 PM	SiCl4 post valve closed
10/22/2011	9:18:54 PM	Bypass valve closed
10/22/2011	9:18:54 PM	Bubbler valve closed
10/22/2011	9:18:54 PM	Main Vac valve opened
10/22/2011	9:18:54 PM	Helium MFC set to  0.000000
10/22/2011	9:18:54 PM	H2 MFC set to  0.000000
10/22/2011	9:18:54 PM	BCl3 MFC set to  0.000000
10/22/2011	9:18:54 PM	PHl3 MFC set to  0.000000
10/22/2011	9:18:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:18:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:18:55 PM	Tube furnace set to 150
10/22/2011	9:19:25 PM	H2 valve closed
10/22/2011	9:19:25 PM	BCl3 valve closed
10/22/2011	9:19:25 PM	PH3 valve closed
10/22/2011	9:19:25 PM	SiCl4 pre valve closed
10/22/2011	9:19:25 PM	SiCl4 post valve closed
10/22/2011	9:19:25 PM	Bypass valve closed
10/22/2011	9:19:25 PM	Bubbler valve closed
10/22/2011	9:19:25 PM	Helium valve opened
10/22/2011	9:19:25 PM	Main Vac valve opened
10/22/2011	9:19:25 PM	Helium MFC set to  20.000000
10/22/2011	9:19:25 PM	H2 MFC set to  0.000000
10/22/2011	9:19:25 PM	BCl3 MFC set to  0.000000
10/22/2011	9:19:25 PM	PHl3 MFC set to  0.000000
10/22/2011	9:19:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:19:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:19:25 PM	Tube furnace set to 150
10/22/2011	9:19:55 PM	Helium valve closed
10/22/2011	9:19:55 PM	H2 valve closed
10/22/2011	9:19:55 PM	BCl3 valve closed
10/22/2011	9:19:55 PM	PH3 valve closed
10/22/2011	9:19:55 PM	SiCl4 pre valve closed
10/22/2011	9:19:55 PM	SiCl4 post valve closed
10/22/2011	9:19:55 PM	Bypass valve closed
10/22/2011	9:19:55 PM	Bubbler valve closed
10/22/2011	9:19:55 PM	Main Vac valve opened
10/22/2011	9:19:55 PM	Helium MFC set to  0.000000
10/22/2011	9:19:55 PM	H2 MFC set to  0.000000
10/22/2011	9:19:55 PM	BCl3 MFC set to  0.000000
10/22/2011	9:19:55 PM	PHl3 MFC set to  0.000000
10/22/2011	9:19:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:19:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:19:55 PM	Tube furnace set to 150
10/22/2011	9:20:25 PM	H2 valve closed
10/22/2011	9:20:25 PM	BCl3 valve closed
10/22/2011	9:20:25 PM	PH3 valve closed
10/22/2011	9:20:25 PM	SiCl4 pre valve closed
10/22/2011	9:20:25 PM	SiCl4 post valve closed
10/22/2011	9:20:25 PM	Bypass valve closed
10/22/2011	9:20:25 PM	Bubbler valve closed
10/22/2011	9:20:25 PM	Helium valve opened
10/22/2011	9:20:25 PM	Main Vac valve opened
10/22/2011	9:20:25 PM	Helium MFC set to  20.000000
10/22/2011	9:20:25 PM	H2 MFC set to  0.000000
10/22/2011	9:20:25 PM	BCl3 MFC set to  0.000000
10/22/2011	9:20:25 PM	PHl3 MFC set to  0.000000
10/22/2011	9:20:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:20:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:20:25 PM	Tube furnace set to 150
10/22/2011	9:20:55 PM	Helium valve closed
10/22/2011	9:20:55 PM	H2 valve closed
10/22/2011	9:20:55 PM	BCl3 valve closed
10/22/2011	9:20:55 PM	PH3 valve closed
10/22/2011	9:20:55 PM	SiCl4 pre valve closed
10/22/2011	9:20:55 PM	SiCl4 post valve closed
10/22/2011	9:20:55 PM	Bypass valve closed
10/22/2011	9:20:55 PM	Bubbler valve closed
10/22/2011	9:20:55 PM	Main Vac valve opened
10/22/2011	9:20:55 PM	Helium MFC set to  0.000000
10/22/2011	9:20:55 PM	H2 MFC set to  0.000000
10/22/2011	9:20:55 PM	BCl3 MFC set to  0.000000
10/22/2011	9:20:55 PM	PHl3 MFC set to  0.000000
10/22/2011	9:20:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:20:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:20:56 PM	Tube furnace set to 150
10/22/2011	9:21:26 PM	H2 valve closed
10/22/2011	9:21:26 PM	BCl3 valve closed
10/22/2011	9:21:26 PM	PH3 valve closed
10/22/2011	9:21:26 PM	SiCl4 pre valve closed
10/22/2011	9:21:26 PM	SiCl4 post valve closed
10/22/2011	9:21:26 PM	Bypass valve closed
10/22/2011	9:21:26 PM	Bubbler valve closed
10/22/2011	9:21:26 PM	Helium valve opened
10/22/2011	9:21:26 PM	Main Vac valve opened
10/22/2011	9:21:26 PM	Helium MFC set to  20.000000
10/22/2011	9:21:26 PM	H2 MFC set to  0.000000
10/22/2011	9:21:26 PM	BCl3 MFC set to  0.000000
10/22/2011	9:21:26 PM	PHl3 MFC set to  0.000000
10/22/2011	9:21:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:21:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:21:26 PM	Tube furnace set to 150
10/22/2011	9:21:56 PM	Helium valve closed
10/22/2011	9:21:56 PM	H2 valve closed
10/22/2011	9:21:56 PM	BCl3 valve closed
10/22/2011	9:21:56 PM	PH3 valve closed
10/22/2011	9:21:56 PM	SiCl4 pre valve closed
10/22/2011	9:21:56 PM	SiCl4 post valve closed
10/22/2011	9:21:56 PM	Bypass valve closed
10/22/2011	9:21:56 PM	Bubbler valve closed
10/22/2011	9:21:56 PM	Main Vac valve opened
10/22/2011	9:21:56 PM	Helium MFC set to  0.000000
10/22/2011	9:21:56 PM	H2 MFC set to  0.000000
10/22/2011	9:21:56 PM	BCl3 MFC set to  0.000000
10/22/2011	9:21:56 PM	PHl3 MFC set to  0.000000
10/22/2011	9:21:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:21:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:21:56 PM	Tube furnace set to 150
10/22/2011	9:22:26 PM	H2 valve closed
10/22/2011	9:22:26 PM	BCl3 valve closed
10/22/2011	9:22:26 PM	PH3 valve closed
10/22/2011	9:22:26 PM	SiCl4 pre valve closed
10/22/2011	9:22:26 PM	SiCl4 post valve closed
10/22/2011	9:22:26 PM	Bypass valve closed
10/22/2011	9:22:26 PM	Bubbler valve closed
10/22/2011	9:22:26 PM	Helium valve opened
10/22/2011	9:22:26 PM	Main Vac valve opened
10/22/2011	9:22:26 PM	Helium MFC set to  20.000000
10/22/2011	9:22:26 PM	H2 MFC set to  0.000000
10/22/2011	9:22:26 PM	BCl3 MFC set to  0.000000
10/22/2011	9:22:26 PM	PHl3 MFC set to  0.000000
10/22/2011	9:22:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:22:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:22:26 PM	Tube furnace set to 150
10/22/2011	9:22:56 PM	Helium valve closed
10/22/2011	9:22:56 PM	H2 valve closed
10/22/2011	9:22:56 PM	BCl3 valve closed
10/22/2011	9:22:56 PM	PH3 valve closed
10/22/2011	9:22:56 PM	SiCl4 pre valve closed
10/22/2011	9:22:56 PM	SiCl4 post valve closed
10/22/2011	9:22:56 PM	Bypass valve closed
10/22/2011	9:22:56 PM	Bubbler valve closed
10/22/2011	9:22:56 PM	Main Vac valve opened
10/22/2011	9:22:56 PM	Helium MFC set to  0.000000
10/22/2011	9:22:56 PM	H2 MFC set to  0.000000
10/22/2011	9:22:56 PM	BCl3 MFC set to  0.000000
10/22/2011	9:22:56 PM	PHl3 MFC set to  0.000000
10/22/2011	9:22:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:22:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:22:56 PM	Tube furnace set to 150
10/22/2011	9:23:26 PM	H2 valve closed
10/22/2011	9:23:26 PM	BCl3 valve closed
10/22/2011	9:23:26 PM	PH3 valve closed
10/22/2011	9:23:26 PM	SiCl4 pre valve closed
10/22/2011	9:23:26 PM	SiCl4 post valve closed
10/22/2011	9:23:26 PM	Bypass valve closed
10/22/2011	9:23:26 PM	Bubbler valve closed
10/22/2011	9:23:26 PM	Helium valve opened
10/22/2011	9:23:26 PM	Main Vac valve opened
10/22/2011	9:23:26 PM	Helium MFC set to  20.000000
10/22/2011	9:23:26 PM	H2 MFC set to  0.000000
10/22/2011	9:23:26 PM	BCl3 MFC set to  0.000000
10/22/2011	9:23:26 PM	PHl3 MFC set to  0.000000
10/22/2011	9:23:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:23:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:23:27 PM	Tube furnace set to 150
10/22/2011	9:23:57 PM	Helium valve closed
10/22/2011	9:23:57 PM	H2 valve closed
10/22/2011	9:23:57 PM	BCl3 valve closed
10/22/2011	9:23:57 PM	PH3 valve closed
10/22/2011	9:23:57 PM	SiCl4 pre valve closed
10/22/2011	9:23:57 PM	SiCl4 post valve closed
10/22/2011	9:23:57 PM	Bypass valve closed
10/22/2011	9:23:57 PM	Bubbler valve closed
10/22/2011	9:23:57 PM	Main Vac valve opened
10/22/2011	9:23:57 PM	Helium MFC set to  0.000000
10/22/2011	9:23:57 PM	H2 MFC set to  0.000000
10/22/2011	9:23:57 PM	BCl3 MFC set to  0.000000
10/22/2011	9:23:57 PM	PHl3 MFC set to  0.000000
10/22/2011	9:23:57 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:23:57 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:23:57 PM	Tube furnace set to 150
10/22/2011	9:24:27 PM	H2 valve closed
10/22/2011	9:24:27 PM	BCl3 valve closed
10/22/2011	9:24:27 PM	PH3 valve closed
10/22/2011	9:24:27 PM	SiCl4 pre valve closed
10/22/2011	9:24:27 PM	SiCl4 post valve closed
10/22/2011	9:24:27 PM	Bypass valve closed
10/22/2011	9:24:27 PM	Bubbler valve closed
10/22/2011	9:24:27 PM	Helium valve opened
10/22/2011	9:24:27 PM	Main Vac valve opened
10/22/2011	9:24:27 PM	Helium MFC set to  20.000000
10/22/2011	9:24:27 PM	H2 MFC set to  0.000000
10/22/2011	9:24:27 PM	BCl3 MFC set to  0.000000
10/22/2011	9:24:27 PM	PHl3 MFC set to  0.000000
10/22/2011	9:24:27 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:24:27 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:24:27 PM	Tube furnace set to 150
10/22/2011	9:24:57 PM	Helium valve closed
10/22/2011	9:24:57 PM	H2 valve closed
10/22/2011	9:24:57 PM	BCl3 valve closed
10/22/2011	9:24:57 PM	PH3 valve closed
10/22/2011	9:24:57 PM	SiCl4 pre valve closed
10/22/2011	9:24:57 PM	SiCl4 post valve closed
10/22/2011	9:24:57 PM	Bypass valve closed
10/22/2011	9:24:57 PM	Bubbler valve closed
10/22/2011	9:24:57 PM	Main Vac valve opened
10/22/2011	9:24:57 PM	Helium MFC set to  0.000000
10/22/2011	9:24:57 PM	H2 MFC set to  0.000000
10/22/2011	9:24:57 PM	BCl3 MFC set to  0.000000
10/22/2011	9:24:57 PM	PHl3 MFC set to  0.000000
10/22/2011	9:24:57 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:24:57 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:24:57 PM	Tube furnace set to 150
10/22/2011	9:25:27 PM	H2 valve closed
10/22/2011	9:25:27 PM	BCl3 valve closed
10/22/2011	9:25:27 PM	PH3 valve closed
10/22/2011	9:25:27 PM	SiCl4 pre valve closed
10/22/2011	9:25:27 PM	SiCl4 post valve closed
10/22/2011	9:25:27 PM	Bypass valve closed
10/22/2011	9:25:27 PM	Bubbler valve closed
10/22/2011	9:25:27 PM	Helium valve opened
10/22/2011	9:25:27 PM	Main Vac valve opened
10/22/2011	9:25:27 PM	Helium MFC set to  20.000000
10/22/2011	9:25:27 PM	H2 MFC set to  0.000000
10/22/2011	9:25:27 PM	BCl3 MFC set to  0.000000
10/22/2011	9:25:27 PM	PHl3 MFC set to  0.000000
10/22/2011	9:25:27 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:25:27 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:25:27 PM	Tube furnace set to 150
10/22/2011	9:25:57 PM	Helium valve closed
10/22/2011	9:25:57 PM	H2 valve closed
10/22/2011	9:25:57 PM	BCl3 valve closed
10/22/2011	9:25:57 PM	PH3 valve closed
10/22/2011	9:25:57 PM	SiCl4 pre valve closed
10/22/2011	9:25:57 PM	SiCl4 post valve closed
10/22/2011	9:25:57 PM	Bypass valve closed
10/22/2011	9:25:57 PM	Bubbler valve closed
10/22/2011	9:25:57 PM	Main Vac valve opened
10/22/2011	9:25:57 PM	Helium MFC set to  0.000000
10/22/2011	9:25:57 PM	H2 MFC set to  0.000000
10/22/2011	9:25:57 PM	BCl3 MFC set to  0.000000
10/22/2011	9:25:57 PM	PHl3 MFC set to  0.000000
10/22/2011	9:25:57 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:25:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:25:58 PM	Tube furnace set to 150
10/22/2011	9:26:28 PM	H2 valve closed
10/22/2011	9:26:28 PM	BCl3 valve closed
10/22/2011	9:26:28 PM	PH3 valve closed
10/22/2011	9:26:28 PM	SiCl4 pre valve closed
10/22/2011	9:26:28 PM	SiCl4 post valve closed
10/22/2011	9:26:28 PM	Bypass valve closed
10/22/2011	9:26:28 PM	Bubbler valve closed
10/22/2011	9:26:28 PM	Helium valve opened
10/22/2011	9:26:28 PM	Main Vac valve opened
10/22/2011	9:26:28 PM	Helium MFC set to  20.000000
10/22/2011	9:26:28 PM	H2 MFC set to  0.000000
10/22/2011	9:26:28 PM	BCl3 MFC set to  0.000000
10/22/2011	9:26:28 PM	PHl3 MFC set to  0.000000
10/22/2011	9:26:28 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:26:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:26:28 PM	Tube furnace set to 150
10/22/2011	9:26:58 PM	Helium valve closed
10/22/2011	9:26:58 PM	H2 valve closed
10/22/2011	9:26:58 PM	BCl3 valve closed
10/22/2011	9:26:58 PM	PH3 valve closed
10/22/2011	9:26:58 PM	SiCl4 pre valve closed
10/22/2011	9:26:58 PM	SiCl4 post valve closed
10/22/2011	9:26:58 PM	Bypass valve closed
10/22/2011	9:26:58 PM	Bubbler valve closed
10/22/2011	9:26:58 PM	Main Vac valve opened
10/22/2011	9:26:58 PM	Helium MFC set to  0.000000
10/22/2011	9:26:58 PM	H2 MFC set to  0.000000
10/22/2011	9:26:58 PM	BCl3 MFC set to  0.000000
10/22/2011	9:26:58 PM	PHl3 MFC set to  0.000000
10/22/2011	9:26:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:26:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:26:58 PM	Tube furnace set to 150
10/22/2011	9:27:28 PM	H2 valve closed
10/22/2011	9:27:28 PM	BCl3 valve closed
10/22/2011	9:27:28 PM	PH3 valve closed
10/22/2011	9:27:28 PM	SiCl4 pre valve closed
10/22/2011	9:27:28 PM	SiCl4 post valve closed
10/22/2011	9:27:28 PM	Bypass valve closed
10/22/2011	9:27:28 PM	Bubbler valve closed
10/22/2011	9:27:28 PM	Helium valve opened
10/22/2011	9:27:28 PM	Main Vac valve opened
10/22/2011	9:27:28 PM	Helium MFC set to  20.000000
10/22/2011	9:27:28 PM	H2 MFC set to  0.000000
10/22/2011	9:27:28 PM	BCl3 MFC set to  0.000000
10/22/2011	9:27:28 PM	PHl3 MFC set to  0.000000
10/22/2011	9:27:28 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:27:28 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:27:28 PM	Tube furnace set to 150
10/22/2011	9:27:58 PM	Helium valve closed
10/22/2011	9:27:58 PM	H2 valve closed
10/22/2011	9:27:58 PM	BCl3 valve closed
10/22/2011	9:27:58 PM	PH3 valve closed
10/22/2011	9:27:58 PM	SiCl4 pre valve closed
10/22/2011	9:27:58 PM	SiCl4 post valve closed
10/22/2011	9:27:58 PM	Bypass valve closed
10/22/2011	9:27:58 PM	Bubbler valve closed
10/22/2011	9:27:58 PM	Main Vac valve opened
10/22/2011	9:27:58 PM	Helium MFC set to  0.000000
10/22/2011	9:27:58 PM	H2 MFC set to  0.000000
10/22/2011	9:27:58 PM	BCl3 MFC set to  0.000000
10/22/2011	9:27:58 PM	PHl3 MFC set to  0.000000
10/22/2011	9:27:58 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:27:58 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:27:59 PM	Tube furnace set to 150
10/22/2011	9:28:29 PM	H2 valve closed
10/22/2011	9:28:29 PM	BCl3 valve closed
10/22/2011	9:28:29 PM	PH3 valve closed
10/22/2011	9:28:29 PM	SiCl4 pre valve closed
10/22/2011	9:28:29 PM	SiCl4 post valve closed
10/22/2011	9:28:29 PM	Bypass valve closed
10/22/2011	9:28:29 PM	Bubbler valve closed
10/22/2011	9:28:29 PM	Helium valve opened
10/22/2011	9:28:29 PM	Main Vac valve opened
10/22/2011	9:28:29 PM	Helium MFC set to  20.000000
10/22/2011	9:28:29 PM	H2 MFC set to  0.000000
10/22/2011	9:28:29 PM	BCl3 MFC set to  0.000000
10/22/2011	9:28:29 PM	PHl3 MFC set to  0.000000
10/22/2011	9:28:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:28:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:28:29 PM	Tube furnace set to 150
10/22/2011	9:28:59 PM	Helium valve closed
10/22/2011	9:28:59 PM	H2 valve closed
10/22/2011	9:28:59 PM	BCl3 valve closed
10/22/2011	9:28:59 PM	PH3 valve closed
10/22/2011	9:28:59 PM	SiCl4 pre valve closed
10/22/2011	9:28:59 PM	SiCl4 post valve closed
10/22/2011	9:28:59 PM	Bypass valve closed
10/22/2011	9:28:59 PM	Bubbler valve closed
10/22/2011	9:28:59 PM	Main Vac valve opened
10/22/2011	9:28:59 PM	Helium MFC set to  0.000000
10/22/2011	9:28:59 PM	H2 MFC set to  0.000000
10/22/2011	9:28:59 PM	BCl3 MFC set to  0.000000
10/22/2011	9:28:59 PM	PHl3 MFC set to  0.000000
10/22/2011	9:28:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:28:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:28:59 PM	Tube furnace set to 150
10/22/2011	9:29:29 PM	H2 valve closed
10/22/2011	9:29:29 PM	BCl3 valve closed
10/22/2011	9:29:29 PM	PH3 valve closed
10/22/2011	9:29:29 PM	SiCl4 pre valve closed
10/22/2011	9:29:29 PM	SiCl4 post valve closed
10/22/2011	9:29:29 PM	Bypass valve closed
10/22/2011	9:29:29 PM	Bubbler valve closed
10/22/2011	9:29:29 PM	Helium valve opened
10/22/2011	9:29:29 PM	Main Vac valve opened
10/22/2011	9:29:29 PM	Helium MFC set to  20.000000
10/22/2011	9:29:29 PM	H2 MFC set to  0.000000
10/22/2011	9:29:29 PM	BCl3 MFC set to  0.000000
10/22/2011	9:29:29 PM	PHl3 MFC set to  0.000000
10/22/2011	9:29:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:29:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:29:29 PM	Tube furnace set to 150
10/22/2011	9:29:59 PM	Helium valve closed
10/22/2011	9:29:59 PM	H2 valve closed
10/22/2011	9:29:59 PM	BCl3 valve closed
10/22/2011	9:29:59 PM	PH3 valve closed
10/22/2011	9:29:59 PM	SiCl4 pre valve closed
10/22/2011	9:29:59 PM	SiCl4 post valve closed
10/22/2011	9:29:59 PM	Bypass valve closed
10/22/2011	9:29:59 PM	Bubbler valve closed
10/22/2011	9:29:59 PM	Main Vac valve opened
10/22/2011	9:29:59 PM	Helium MFC set to  0.000000
10/22/2011	9:29:59 PM	H2 MFC set to  0.000000
10/22/2011	9:29:59 PM	BCl3 MFC set to  0.000000
10/22/2011	9:29:59 PM	PHl3 MFC set to  0.000000
10/22/2011	9:29:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:29:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:29:59 PM	Tube furnace set to 150
10/22/2011	9:30:29 PM	H2 valve closed
10/22/2011	9:30:29 PM	BCl3 valve closed
10/22/2011	9:30:29 PM	PH3 valve closed
10/22/2011	9:30:29 PM	SiCl4 pre valve closed
10/22/2011	9:30:29 PM	SiCl4 post valve closed
10/22/2011	9:30:29 PM	Bypass valve closed
10/22/2011	9:30:29 PM	Bubbler valve closed
10/22/2011	9:30:29 PM	Helium valve opened
10/22/2011	9:30:29 PM	Main Vac valve opened
10/22/2011	9:30:29 PM	Helium MFC set to  20.000000
10/22/2011	9:30:29 PM	H2 MFC set to  0.000000
10/22/2011	9:30:29 PM	BCl3 MFC set to  0.000000
10/22/2011	9:30:29 PM	PHl3 MFC set to  0.000000
10/22/2011	9:30:29 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:30:29 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:30:30 PM	Tube furnace set to 150
10/22/2011	9:31:00 PM	Helium valve closed
10/22/2011	9:31:00 PM	H2 valve closed
10/22/2011	9:31:00 PM	BCl3 valve closed
10/22/2011	9:31:00 PM	PH3 valve closed
10/22/2011	9:31:00 PM	SiCl4 pre valve closed
10/22/2011	9:31:00 PM	SiCl4 post valve closed
10/22/2011	9:31:00 PM	Bypass valve closed
10/22/2011	9:31:00 PM	Bubbler valve closed
10/22/2011	9:31:00 PM	Main Vac valve opened
10/22/2011	9:31:00 PM	Helium MFC set to  0.000000
10/22/2011	9:31:00 PM	H2 MFC set to  0.000000
10/22/2011	9:31:00 PM	BCl3 MFC set to  0.000000
10/22/2011	9:31:00 PM	PHl3 MFC set to  0.000000
10/22/2011	9:31:00 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:31:00 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:31:00 PM	Tube furnace set to 150
10/22/2011	9:31:30 PM	H2 valve closed
10/22/2011	9:31:30 PM	BCl3 valve closed
10/22/2011	9:31:30 PM	PH3 valve closed
10/22/2011	9:31:30 PM	SiCl4 pre valve closed
10/22/2011	9:31:30 PM	SiCl4 post valve closed
10/22/2011	9:31:30 PM	Bypass valve closed
10/22/2011	9:31:30 PM	Bubbler valve closed
10/22/2011	9:31:30 PM	Helium valve opened
10/22/2011	9:31:30 PM	Main Vac valve opened
10/22/2011	9:31:30 PM	Helium MFC set to  20.000000
10/22/2011	9:31:30 PM	H2 MFC set to  0.000000
10/22/2011	9:31:30 PM	BCl3 MFC set to  0.000000
10/22/2011	9:31:30 PM	PHl3 MFC set to  0.000000
10/22/2011	9:31:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:31:30 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:31:30 PM	Tube furnace set to 150
10/22/2011	9:32:00 PM	Helium valve closed
10/22/2011	9:32:00 PM	H2 valve closed
10/22/2011	9:32:00 PM	BCl3 valve closed
10/22/2011	9:32:00 PM	PH3 valve closed
10/22/2011	9:32:00 PM	SiCl4 pre valve closed
10/22/2011	9:32:00 PM	SiCl4 post valve closed
10/22/2011	9:32:00 PM	Bypass valve closed
10/22/2011	9:32:00 PM	Bubbler valve closed
10/22/2011	9:32:00 PM	Main Vac valve opened
10/22/2011	9:32:00 PM	Helium MFC set to  0.000000
10/22/2011	9:32:00 PM	H2 MFC set to  0.000000
10/22/2011	9:32:00 PM	BCl3 MFC set to  0.000000
10/22/2011	9:32:00 PM	PHl3 MFC set to  0.000000
10/22/2011	9:32:00 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:32:00 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:32:00 PM	Tube furnace set to 150
10/22/2011	9:32:30 PM	H2 valve closed
10/22/2011	9:32:30 PM	BCl3 valve closed
10/22/2011	9:32:30 PM	PH3 valve closed
10/22/2011	9:32:30 PM	SiCl4 pre valve closed
10/22/2011	9:32:30 PM	SiCl4 post valve closed
10/22/2011	9:32:30 PM	Bypass valve closed
10/22/2011	9:32:30 PM	Bubbler valve closed
10/22/2011	9:32:30 PM	Helium valve opened
10/22/2011	9:32:30 PM	Main Vac valve opened
10/22/2011	9:32:30 PM	Helium MFC set to  20.000000
10/22/2011	9:32:30 PM	H2 MFC set to  0.000000
10/22/2011	9:32:30 PM	BCl3 MFC set to  0.000000
10/22/2011	9:32:30 PM	PHl3 MFC set to  0.000000
10/22/2011	9:32:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:32:30 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:32:30 PM	Tube furnace set to 150
10/22/2011	9:33:00 PM	Helium valve closed
10/22/2011	9:33:00 PM	H2 valve closed
10/22/2011	9:33:00 PM	BCl3 valve closed
10/22/2011	9:33:00 PM	PH3 valve closed
10/22/2011	9:33:00 PM	SiCl4 pre valve closed
10/22/2011	9:33:01 PM	SiCl4 post valve closed
10/22/2011	9:33:01 PM	Bypass valve closed
10/22/2011	9:33:01 PM	Bubbler valve closed
10/22/2011	9:33:01 PM	Main Vac valve opened
10/22/2011	9:33:01 PM	Helium MFC set to  0.000000
10/22/2011	9:33:01 PM	H2 MFC set to  0.000000
10/22/2011	9:33:01 PM	BCl3 MFC set to  0.000000
10/22/2011	9:33:01 PM	PHl3 MFC set to  0.000000
10/22/2011	9:33:01 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:33:01 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:33:01 PM	Tube furnace set to 150
10/22/2011	9:33:31 PM	H2 valve closed
10/22/2011	9:33:31 PM	BCl3 valve closed
10/22/2011	9:33:31 PM	PH3 valve closed
10/22/2011	9:33:31 PM	SiCl4 pre valve closed
10/22/2011	9:33:31 PM	SiCl4 post valve closed
10/22/2011	9:33:31 PM	Bypass valve closed
10/22/2011	9:33:31 PM	Bubbler valve closed
10/22/2011	9:33:31 PM	Helium valve opened
10/22/2011	9:33:31 PM	Main Vac valve opened
10/22/2011	9:33:31 PM	Helium MFC set to  20.000000
10/22/2011	9:33:31 PM	H2 MFC set to  0.000000
10/22/2011	9:33:31 PM	BCl3 MFC set to  0.000000
10/22/2011	9:33:31 PM	PHl3 MFC set to  0.000000
10/22/2011	9:33:31 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:33:31 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:33:31 PM	Tube furnace set to 150
10/22/2011	9:34:01 PM	Helium valve closed
10/22/2011	9:34:01 PM	H2 valve closed
10/22/2011	9:34:01 PM	BCl3 valve closed
10/22/2011	9:34:01 PM	PH3 valve closed
10/22/2011	9:34:01 PM	SiCl4 pre valve closed
10/22/2011	9:34:01 PM	SiCl4 post valve closed
10/22/2011	9:34:01 PM	Bypass valve closed
10/22/2011	9:34:01 PM	Bubbler valve closed
10/22/2011	9:34:01 PM	Main Vac valve opened
10/22/2011	9:34:01 PM	Helium MFC set to  0.000000
10/22/2011	9:34:01 PM	H2 MFC set to  0.000000
10/22/2011	9:34:01 PM	BCl3 MFC set to  0.000000
10/22/2011	9:34:01 PM	PHl3 MFC set to  0.000000
10/22/2011	9:34:01 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:34:01 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:34:01 PM	Tube furnace set to 150
10/22/2011	9:34:31 PM	H2 valve closed
10/22/2011	9:34:31 PM	BCl3 valve closed
10/22/2011	9:34:31 PM	PH3 valve closed
10/22/2011	9:34:31 PM	SiCl4 pre valve closed
10/22/2011	9:34:31 PM	SiCl4 post valve closed
10/22/2011	9:34:31 PM	Bypass valve closed
10/22/2011	9:34:31 PM	Bubbler valve closed
10/22/2011	9:34:31 PM	Helium valve opened
10/22/2011	9:34:31 PM	Main Vac valve opened
10/22/2011	9:34:31 PM	Helium MFC set to  20.000000
10/22/2011	9:34:31 PM	H2 MFC set to  0.000000
10/22/2011	9:34:31 PM	BCl3 MFC set to  0.000000
10/22/2011	9:34:31 PM	PHl3 MFC set to  0.000000
10/22/2011	9:34:31 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:34:31 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:34:31 PM	Tube furnace set to 150
10/22/2011	9:35:01 PM	Helium valve closed
10/22/2011	9:35:01 PM	H2 valve closed
10/22/2011	9:35:01 PM	BCl3 valve closed
10/22/2011	9:35:01 PM	PH3 valve closed
10/22/2011	9:35:01 PM	SiCl4 pre valve closed
10/22/2011	9:35:01 PM	SiCl4 post valve closed
10/22/2011	9:35:01 PM	Bypass valve closed
10/22/2011	9:35:01 PM	Bubbler valve closed
10/22/2011	9:35:01 PM	Main Vac valve opened
10/22/2011	9:35:01 PM	Helium MFC set to  0.000000
10/22/2011	9:35:01 PM	H2 MFC set to  0.000000
10/22/2011	9:35:01 PM	BCl3 MFC set to  0.000000
10/22/2011	9:35:01 PM	PHl3 MFC set to  0.000000
10/22/2011	9:35:01 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:35:01 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:35:02 PM	Tube furnace set to 150
10/22/2011	9:35:32 PM	H2 valve closed
10/22/2011	9:35:32 PM	BCl3 valve closed
10/22/2011	9:35:32 PM	PH3 valve closed
10/22/2011	9:35:32 PM	SiCl4 pre valve closed
10/22/2011	9:35:32 PM	SiCl4 post valve closed
10/22/2011	9:35:32 PM	Bypass valve closed
10/22/2011	9:35:32 PM	Bubbler valve closed
10/22/2011	9:35:32 PM	Helium valve opened
10/22/2011	9:35:32 PM	Main Vac valve opened
10/22/2011	9:35:32 PM	Helium MFC set to  20.000000
10/22/2011	9:35:32 PM	H2 MFC set to  0.000000
10/22/2011	9:35:32 PM	BCl3 MFC set to  0.000000
10/22/2011	9:35:32 PM	PHl3 MFC set to  0.000000
10/22/2011	9:35:32 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:35:32 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:35:32 PM	Tube furnace set to 150
10/22/2011	9:36:02 PM	Helium valve closed
10/22/2011	9:36:02 PM	H2 valve closed
10/22/2011	9:36:02 PM	BCl3 valve closed
10/22/2011	9:36:02 PM	PH3 valve closed
10/22/2011	9:36:02 PM	SiCl4 pre valve closed
10/22/2011	9:36:02 PM	SiCl4 post valve closed
10/22/2011	9:36:02 PM	Bypass valve closed
10/22/2011	9:36:02 PM	Bubbler valve closed
10/22/2011	9:36:02 PM	Main Vac valve opened
10/22/2011	9:36:02 PM	Helium MFC set to  0.000000
10/22/2011	9:36:02 PM	H2 MFC set to  0.000000
10/22/2011	9:36:02 PM	BCl3 MFC set to  0.000000
10/22/2011	9:36:02 PM	PHl3 MFC set to  0.000000
10/22/2011	9:36:02 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:36:02 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:36:02 PM	Tube furnace set to 180
10/22/2011	9:36:07 PM	Run finished at 9:36 PM
10/22/2011	9:38:52 PM	Recipe started at 9:38 PM
10/22/2011	9:38:52 PM	Helium valve closed
10/22/2011	9:38:52 PM	H2 valve closed
10/22/2011	9:38:52 PM	BCl3 valve closed
10/22/2011	9:38:52 PM	PH3 valve closed
10/22/2011	9:38:52 PM	SiCl4 pre valve closed
10/22/2011	9:38:52 PM	SiCl4 post valve closed
10/22/2011	9:38:52 PM	Main Vac valve closed
10/22/2011	9:38:52 PM	Bubbler valve closed
10/22/2011	9:38:52 PM	Bypass valve opened
10/22/2011	9:38:52 PM	Helium MFC set to  0.000000
10/22/2011	9:38:52 PM	H2 MFC set to  0.000000
10/22/2011	9:38:52 PM	BCl3 MFC set to  0.000000
10/22/2011	9:38:52 PM	PHl3 MFC set to  0.000000
10/22/2011	9:38:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:38:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:38:52 PM	Tube furnace set to 150
10/22/2011	9:38:52 PM	Helium valve closed
10/22/2011	9:38:52 PM	H2 valve closed
10/22/2011	9:38:52 PM	BCl3 valve closed
10/22/2011	9:38:52 PM	PH3 valve closed
10/22/2011	9:38:52 PM	SiCl4 pre valve closed
10/22/2011	9:38:52 PM	SiCl4 post valve closed
10/22/2011	9:38:52 PM	Main Vac valve closed
10/22/2011	9:38:52 PM	Bubbler valve closed
10/22/2011	9:38:52 PM	Bypass valve opened
10/22/2011	9:38:52 PM	Helium MFC set to  0.000000
10/22/2011	9:38:52 PM	H2 MFC set to  0.000000
10/22/2011	9:38:52 PM	BCl3 MFC set to  0.000000
10/22/2011	9:38:52 PM	PHl3 MFC set to  0.000000
10/22/2011	9:38:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:38:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:38:52 PM	Tube furnace set to 150
10/22/2011	9:39:22 PM	Helium valve closed
10/22/2011	9:39:22 PM	H2 valve closed
10/22/2011	9:39:22 PM	BCl3 valve closed
10/22/2011	9:39:22 PM	PH3 valve closed
10/22/2011	9:39:22 PM	SiCl4 pre valve closed
10/22/2011	9:39:22 PM	SiCl4 post valve closed
10/22/2011	9:39:22 PM	Bypass valve closed
10/22/2011	9:39:22 PM	Bubbler valve closed
10/22/2011	9:39:22 PM	Main Vac valve opened
10/22/2011	9:39:22 PM	Helium MFC set to  0.000000
10/22/2011	9:39:22 PM	H2 MFC set to  0.000000
10/22/2011	9:39:22 PM	BCl3 MFC set to  0.000000
10/22/2011	9:39:22 PM	PHl3 MFC set to  0.000000
10/22/2011	9:39:22 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:39:22 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:39:22 PM	Tube furnace set to 150
10/22/2011	9:39:52 PM	H2 valve closed
10/22/2011	9:39:52 PM	BCl3 valve closed
10/22/2011	9:39:52 PM	PH3 valve closed
10/22/2011	9:39:52 PM	SiCl4 pre valve closed
10/22/2011	9:39:52 PM	SiCl4 post valve closed
10/22/2011	9:39:52 PM	Bypass valve closed
10/22/2011	9:39:52 PM	Bubbler valve closed
10/22/2011	9:39:52 PM	Helium valve opened
10/22/2011	9:39:52 PM	Main Vac valve opened
10/22/2011	9:39:52 PM	Helium MFC set to  20.000000
10/22/2011	9:39:52 PM	H2 MFC set to  0.000000
10/22/2011	9:39:52 PM	BCl3 MFC set to  0.000000
10/22/2011	9:39:52 PM	PHl3 MFC set to  0.000000
10/22/2011	9:39:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:39:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:39:53 PM	Tube furnace set to 150
10/22/2011	9:40:23 PM	Helium valve closed
10/22/2011	9:40:23 PM	H2 valve closed
10/22/2011	9:40:23 PM	BCl3 valve closed
10/22/2011	9:40:23 PM	PH3 valve closed
10/22/2011	9:40:23 PM	SiCl4 pre valve closed
10/22/2011	9:40:23 PM	SiCl4 post valve closed
10/22/2011	9:40:23 PM	Bypass valve closed
10/22/2011	9:40:23 PM	Bubbler valve closed
10/22/2011	9:40:23 PM	Main Vac valve opened
10/22/2011	9:40:23 PM	Helium MFC set to  0.000000
10/22/2011	9:40:23 PM	H2 MFC set to  0.000000
10/22/2011	9:40:23 PM	BCl3 MFC set to  0.000000
10/22/2011	9:40:23 PM	PHl3 MFC set to  0.000000
10/22/2011	9:40:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:40:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:40:23 PM	Tube furnace set to 150
10/22/2011	9:40:53 PM	H2 valve closed
10/22/2011	9:40:53 PM	BCl3 valve closed
10/22/2011	9:40:53 PM	PH3 valve closed
10/22/2011	9:40:53 PM	SiCl4 pre valve closed
10/22/2011	9:40:53 PM	SiCl4 post valve closed
10/22/2011	9:40:53 PM	Bypass valve closed
10/22/2011	9:40:53 PM	Bubbler valve closed
10/22/2011	9:40:53 PM	Helium valve opened
10/22/2011	9:40:53 PM	Main Vac valve opened
10/22/2011	9:40:53 PM	Helium MFC set to  20.000000
10/22/2011	9:40:53 PM	H2 MFC set to  0.000000
10/22/2011	9:40:53 PM	BCl3 MFC set to  0.000000
10/22/2011	9:40:53 PM	PHl3 MFC set to  0.000000
10/22/2011	9:40:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:40:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:40:53 PM	Tube furnace set to 150
10/22/2011	9:41:23 PM	Helium valve closed
10/22/2011	9:41:23 PM	H2 valve closed
10/22/2011	9:41:23 PM	BCl3 valve closed
10/22/2011	9:41:23 PM	PH3 valve closed
10/22/2011	9:41:23 PM	SiCl4 pre valve closed
10/22/2011	9:41:23 PM	SiCl4 post valve closed
10/22/2011	9:41:23 PM	Bypass valve closed
10/22/2011	9:41:23 PM	Bubbler valve closed
10/22/2011	9:41:23 PM	Main Vac valve opened
10/22/2011	9:41:23 PM	Helium MFC set to  0.000000
10/22/2011	9:41:23 PM	H2 MFC set to  0.000000
10/22/2011	9:41:23 PM	BCl3 MFC set to  0.000000
10/22/2011	9:41:23 PM	PHl3 MFC set to  0.000000
10/22/2011	9:41:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:41:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:41:23 PM	Tube furnace set to 150
10/22/2011	9:41:53 PM	H2 valve closed
10/22/2011	9:41:53 PM	BCl3 valve closed
10/22/2011	9:41:53 PM	PH3 valve closed
10/22/2011	9:41:53 PM	SiCl4 pre valve closed
10/22/2011	9:41:53 PM	SiCl4 post valve closed
10/22/2011	9:41:53 PM	Bypass valve closed
10/22/2011	9:41:53 PM	Bubbler valve closed
10/22/2011	9:41:53 PM	Helium valve opened
10/22/2011	9:41:53 PM	Main Vac valve opened
10/22/2011	9:41:53 PM	Helium MFC set to  20.000000
10/22/2011	9:41:53 PM	H2 MFC set to  0.000000
10/22/2011	9:41:53 PM	BCl3 MFC set to  0.000000
10/22/2011	9:41:53 PM	PHl3 MFC set to  0.000000
10/22/2011	9:41:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:41:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:41:53 PM	Tube furnace set to 150
10/22/2011	9:42:23 PM	Helium valve closed
10/22/2011	9:42:23 PM	H2 valve closed
10/22/2011	9:42:23 PM	BCl3 valve closed
10/22/2011	9:42:23 PM	PH3 valve closed
10/22/2011	9:42:23 PM	SiCl4 pre valve closed
10/22/2011	9:42:23 PM	SiCl4 post valve closed
10/22/2011	9:42:23 PM	Bypass valve closed
10/22/2011	9:42:23 PM	Bubbler valve closed
10/22/2011	9:42:23 PM	Main Vac valve opened
10/22/2011	9:42:23 PM	Helium MFC set to  0.000000
10/22/2011	9:42:23 PM	H2 MFC set to  0.000000
10/22/2011	9:42:23 PM	BCl3 MFC set to  0.000000
10/22/2011	9:42:23 PM	PHl3 MFC set to  0.000000
10/22/2011	9:42:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:42:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:42:24 PM	Tube furnace set to 150
10/22/2011	9:42:54 PM	H2 valve closed
10/22/2011	9:42:54 PM	BCl3 valve closed
10/22/2011	9:42:54 PM	PH3 valve closed
10/22/2011	9:42:54 PM	SiCl4 pre valve closed
10/22/2011	9:42:54 PM	SiCl4 post valve closed
10/22/2011	9:42:54 PM	Bypass valve closed
10/22/2011	9:42:54 PM	Bubbler valve closed
10/22/2011	9:42:54 PM	Helium valve opened
10/22/2011	9:42:54 PM	Main Vac valve opened
10/22/2011	9:42:54 PM	Helium MFC set to  20.000000
10/22/2011	9:42:54 PM	H2 MFC set to  0.000000
10/22/2011	9:42:54 PM	BCl3 MFC set to  0.000000
10/22/2011	9:42:54 PM	PHl3 MFC set to  0.000000
10/22/2011	9:42:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:42:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:42:54 PM	Tube furnace set to 150
10/22/2011	9:43:24 PM	Helium valve closed
10/22/2011	9:43:24 PM	H2 valve closed
10/22/2011	9:43:24 PM	BCl3 valve closed
10/22/2011	9:43:24 PM	PH3 valve closed
10/22/2011	9:43:24 PM	SiCl4 pre valve closed
10/22/2011	9:43:24 PM	SiCl4 post valve closed
10/22/2011	9:43:24 PM	Bypass valve closed
10/22/2011	9:43:24 PM	Bubbler valve closed
10/22/2011	9:43:24 PM	Main Vac valve opened
10/22/2011	9:43:24 PM	Helium MFC set to  0.000000
10/22/2011	9:43:24 PM	H2 MFC set to  0.000000
10/22/2011	9:43:24 PM	BCl3 MFC set to  0.000000
10/22/2011	9:43:24 PM	PHl3 MFC set to  0.000000
10/22/2011	9:43:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:43:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:43:24 PM	Tube furnace set to 150
10/22/2011	9:43:54 PM	H2 valve closed
10/22/2011	9:43:54 PM	BCl3 valve closed
10/22/2011	9:43:54 PM	PH3 valve closed
10/22/2011	9:43:54 PM	SiCl4 pre valve closed
10/22/2011	9:43:54 PM	SiCl4 post valve closed
10/22/2011	9:43:54 PM	Bypass valve closed
10/22/2011	9:43:54 PM	Bubbler valve closed
10/22/2011	9:43:54 PM	Helium valve opened
10/22/2011	9:43:54 PM	Main Vac valve opened
10/22/2011	9:43:54 PM	Helium MFC set to  20.000000
10/22/2011	9:43:54 PM	H2 MFC set to  0.000000
10/22/2011	9:43:54 PM	BCl3 MFC set to  0.000000
10/22/2011	9:43:54 PM	PHl3 MFC set to  0.000000
10/22/2011	9:43:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:43:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:43:54 PM	Tube furnace set to 150
10/22/2011	9:44:24 PM	Helium valve closed
10/22/2011	9:44:24 PM	H2 valve closed
10/22/2011	9:44:24 PM	BCl3 valve closed
10/22/2011	9:44:24 PM	PH3 valve closed
10/22/2011	9:44:24 PM	SiCl4 pre valve closed
10/22/2011	9:44:24 PM	SiCl4 post valve closed
10/22/2011	9:44:24 PM	Bypass valve closed
10/22/2011	9:44:24 PM	Bubbler valve closed
10/22/2011	9:44:24 PM	Main Vac valve opened
10/22/2011	9:44:24 PM	Helium MFC set to  0.000000
10/22/2011	9:44:24 PM	H2 MFC set to  0.000000
10/22/2011	9:44:24 PM	BCl3 MFC set to  0.000000
10/22/2011	9:44:24 PM	PHl3 MFC set to  0.000000
10/22/2011	9:44:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:44:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:44:24 PM	Tube furnace set to 150
10/22/2011	9:44:54 PM	H2 valve closed
10/22/2011	9:44:54 PM	BCl3 valve closed
10/22/2011	9:44:54 PM	PH3 valve closed
10/22/2011	9:44:54 PM	SiCl4 pre valve closed
10/22/2011	9:44:54 PM	SiCl4 post valve closed
10/22/2011	9:44:54 PM	Bypass valve closed
10/22/2011	9:44:54 PM	Bubbler valve closed
10/22/2011	9:44:54 PM	Helium valve opened
10/22/2011	9:44:54 PM	Main Vac valve opened
10/22/2011	9:44:54 PM	Helium MFC set to  20.000000
10/22/2011	9:44:54 PM	H2 MFC set to  0.000000
10/22/2011	9:44:54 PM	BCl3 MFC set to  0.000000
10/22/2011	9:44:54 PM	PHl3 MFC set to  0.000000
10/22/2011	9:44:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:44:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:44:55 PM	Tube furnace set to 150
10/22/2011	9:45:25 PM	Helium valve closed
10/22/2011	9:45:25 PM	H2 valve closed
10/22/2011	9:45:25 PM	BCl3 valve closed
10/22/2011	9:45:25 PM	PH3 valve closed
10/22/2011	9:45:25 PM	SiCl4 pre valve closed
10/22/2011	9:45:25 PM	SiCl4 post valve closed
10/22/2011	9:45:25 PM	Bypass valve closed
10/22/2011	9:45:25 PM	Bubbler valve closed
10/22/2011	9:45:25 PM	Main Vac valve opened
10/22/2011	9:45:25 PM	Helium MFC set to  0.000000
10/22/2011	9:45:25 PM	H2 MFC set to  0.000000
10/22/2011	9:45:25 PM	BCl3 MFC set to  0.000000
10/22/2011	9:45:25 PM	PHl3 MFC set to  0.000000
10/22/2011	9:45:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:45:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:45:25 PM	Tube furnace set to 150
10/22/2011	9:45:55 PM	H2 valve closed
10/22/2011	9:45:55 PM	BCl3 valve closed
10/22/2011	9:45:55 PM	PH3 valve closed
10/22/2011	9:45:55 PM	SiCl4 pre valve closed
10/22/2011	9:45:55 PM	SiCl4 post valve closed
10/22/2011	9:45:55 PM	Bypass valve closed
10/22/2011	9:45:55 PM	Bubbler valve closed
10/22/2011	9:45:55 PM	Helium valve opened
10/22/2011	9:45:55 PM	Main Vac valve opened
10/22/2011	9:45:55 PM	Helium MFC set to  20.000000
10/22/2011	9:45:55 PM	H2 MFC set to  0.000000
10/22/2011	9:45:55 PM	BCl3 MFC set to  0.000000
10/22/2011	9:45:55 PM	PHl3 MFC set to  0.000000
10/22/2011	9:45:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:45:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:45:55 PM	Tube furnace set to 150
10/22/2011	9:46:25 PM	Helium valve closed
10/22/2011	9:46:25 PM	H2 valve closed
10/22/2011	9:46:25 PM	BCl3 valve closed
10/22/2011	9:46:25 PM	PH3 valve closed
10/22/2011	9:46:25 PM	SiCl4 pre valve closed
10/22/2011	9:46:25 PM	SiCl4 post valve closed
10/22/2011	9:46:25 PM	Bypass valve closed
10/22/2011	9:46:25 PM	Bubbler valve closed
10/22/2011	9:46:25 PM	Main Vac valve opened
10/22/2011	9:46:25 PM	Helium MFC set to  0.000000
10/22/2011	9:46:25 PM	H2 MFC set to  0.000000
10/22/2011	9:46:25 PM	BCl3 MFC set to  0.000000
10/22/2011	9:46:25 PM	PHl3 MFC set to  0.000000
10/22/2011	9:46:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:46:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:46:25 PM	Tube furnace set to 150
10/22/2011	9:46:55 PM	H2 valve closed
10/22/2011	9:46:55 PM	BCl3 valve closed
10/22/2011	9:46:55 PM	PH3 valve closed
10/22/2011	9:46:55 PM	SiCl4 pre valve closed
10/22/2011	9:46:55 PM	SiCl4 post valve closed
10/22/2011	9:46:55 PM	Bypass valve closed
10/22/2011	9:46:55 PM	Bubbler valve closed
10/22/2011	9:46:55 PM	Helium valve opened
10/22/2011	9:46:55 PM	Main Vac valve opened
10/22/2011	9:46:55 PM	Helium MFC set to  20.000000
10/22/2011	9:46:55 PM	H2 MFC set to  0.000000
10/22/2011	9:46:55 PM	BCl3 MFC set to  0.000000
10/22/2011	9:46:55 PM	PHl3 MFC set to  0.000000
10/22/2011	9:46:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:46:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:46:55 PM	Tube furnace set to 150
10/22/2011	9:47:25 PM	Helium valve closed
10/22/2011	9:47:25 PM	H2 valve closed
10/22/2011	9:47:25 PM	BCl3 valve closed
10/22/2011	9:47:25 PM	PH3 valve closed
10/22/2011	9:47:25 PM	SiCl4 pre valve closed
10/22/2011	9:47:25 PM	SiCl4 post valve closed
10/22/2011	9:47:25 PM	Bypass valve closed
10/22/2011	9:47:25 PM	Bubbler valve closed
10/22/2011	9:47:25 PM	Main Vac valve opened
10/22/2011	9:47:25 PM	Helium MFC set to  0.000000
10/22/2011	9:47:25 PM	H2 MFC set to  0.000000
10/22/2011	9:47:25 PM	BCl3 MFC set to  0.000000
10/22/2011	9:47:25 PM	PHl3 MFC set to  0.000000
10/22/2011	9:47:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:47:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:47:26 PM	Tube furnace set to 150
10/22/2011	9:47:56 PM	H2 valve closed
10/22/2011	9:47:56 PM	BCl3 valve closed
10/22/2011	9:47:56 PM	PH3 valve closed
10/22/2011	9:47:56 PM	SiCl4 pre valve closed
10/22/2011	9:47:56 PM	SiCl4 post valve closed
10/22/2011	9:47:56 PM	Bypass valve closed
10/22/2011	9:47:56 PM	Bubbler valve closed
10/22/2011	9:47:56 PM	Helium valve opened
10/22/2011	9:47:56 PM	Main Vac valve opened
10/22/2011	9:47:56 PM	Helium MFC set to  20.000000
10/22/2011	9:47:56 PM	H2 MFC set to  0.000000
10/22/2011	9:47:56 PM	BCl3 MFC set to  0.000000
10/22/2011	9:47:56 PM	PHl3 MFC set to  0.000000
10/22/2011	9:47:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:47:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:47:56 PM	Tube furnace set to 150
10/22/2011	9:48:26 PM	Helium valve closed
10/22/2011	9:48:26 PM	H2 valve closed
10/22/2011	9:48:26 PM	BCl3 valve closed
10/22/2011	9:48:26 PM	PH3 valve closed
10/22/2011	9:48:26 PM	SiCl4 pre valve closed
10/22/2011	9:48:26 PM	SiCl4 post valve closed
10/22/2011	9:48:26 PM	Bypass valve closed
10/22/2011	9:48:26 PM	Bubbler valve closed
10/22/2011	9:48:26 PM	Main Vac valve opened
10/22/2011	9:48:26 PM	Helium MFC set to  0.000000
10/22/2011	9:48:26 PM	H2 MFC set to  0.000000
10/22/2011	9:48:26 PM	BCl3 MFC set to  0.000000
10/22/2011	9:48:26 PM	PHl3 MFC set to  0.000000
10/22/2011	9:48:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:48:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:48:26 PM	Tube furnace set to 150
10/22/2011	9:48:56 PM	H2 valve closed
10/22/2011	9:48:56 PM	BCl3 valve closed
10/22/2011	9:48:56 PM	PH3 valve closed
10/22/2011	9:48:56 PM	SiCl4 pre valve closed
10/22/2011	9:48:56 PM	SiCl4 post valve closed
10/22/2011	9:48:56 PM	Bypass valve closed
10/22/2011	9:48:56 PM	Bubbler valve closed
10/22/2011	9:48:56 PM	Helium valve opened
10/22/2011	9:48:56 PM	Main Vac valve opened
10/22/2011	9:48:56 PM	Helium MFC set to  20.000000
10/22/2011	9:48:56 PM	H2 MFC set to  0.000000
10/22/2011	9:48:56 PM	BCl3 MFC set to  0.000000
10/22/2011	9:48:56 PM	PHl3 MFC set to  0.000000
10/22/2011	9:48:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:48:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:48:56 PM	Tube furnace set to 150
10/22/2011	9:49:26 PM	Helium valve closed
10/22/2011	9:49:26 PM	H2 valve closed
10/22/2011	9:49:26 PM	BCl3 valve closed
10/22/2011	9:49:26 PM	PH3 valve closed
10/22/2011	9:49:26 PM	SiCl4 pre valve closed
10/22/2011	9:49:26 PM	SiCl4 post valve closed
10/22/2011	9:49:26 PM	Bypass valve closed
10/22/2011	9:49:26 PM	Bubbler valve closed
10/22/2011	9:49:26 PM	Main Vac valve opened
10/22/2011	9:49:26 PM	Helium MFC set to  0.000000
10/22/2011	9:49:26 PM	H2 MFC set to  0.000000
10/22/2011	9:49:26 PM	BCl3 MFC set to  0.000000
10/22/2011	9:49:26 PM	PHl3 MFC set to  0.000000
10/22/2011	9:49:26 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:49:26 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:49:26 PM	Tube furnace set to 150
10/22/2011	9:49:30 PM	Run aborted at 9:49 PM
10/22/2011	9:49:30 PM	Helium valve closed
10/22/2011	9:49:30 PM	H2 valve closed
10/22/2011	9:49:30 PM	BCl3 valve closed
10/22/2011	9:49:30 PM	PH3 valve closed
10/22/2011	9:49:30 PM	SiCl4 pre valve closed
10/22/2011	9:49:30 PM	SiCl4 post valve closed
10/22/2011	9:49:30 PM	Bypass valve closed
10/22/2011	9:49:30 PM	Main Vac valve closed
10/22/2011	9:49:30 PM	Bubbler valve closed
10/22/2011	9:49:30 PM	Helium MFC set to  0.000000
10/22/2011	9:49:30 PM	H2 MFC set to  0.000000
10/22/2011	9:49:30 PM	BCl3 MFC set to  0.000000
10/22/2011	9:49:30 PM	PHl3 MFC set to  0.000000
10/22/2011	9:49:30 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:49:30 PM	Tube furnace set to 0
10/22/2011	9:49:33 PM	Main Vac valve opened
10/22/2011	9:53:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/22/2011	9:53:46 PM	Recipe started at 9:53 PM
10/22/2011	9:53:46 PM	Helium valve closed
10/22/2011	9:53:46 PM	H2 valve closed
10/22/2011	9:53:46 PM	BCl3 valve closed
10/22/2011	9:53:46 PM	PH3 valve closed
10/22/2011	9:53:46 PM	SiCl4 pre valve closed
10/22/2011	9:53:46 PM	SiCl4 post valve closed
10/22/2011	9:53:46 PM	Main Vac valve closed
10/22/2011	9:53:46 PM	Bubbler valve closed
10/22/2011	9:53:46 PM	Bypass valve opened
10/22/2011	9:53:46 PM	Helium MFC set to  0.000000
10/22/2011	9:53:46 PM	H2 MFC set to  0.000000
10/22/2011	9:53:46 PM	BCl3 MFC set to  0.000000
10/22/2011	9:53:46 PM	PHl3 MFC set to  0.000000
10/22/2011	9:53:46 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:53:46 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:53:47 PM	Tube furnace set to 0
10/22/2011	9:53:47 PM	Helium valve closed
10/22/2011	9:53:47 PM	H2 valve closed
10/22/2011	9:53:47 PM	BCl3 valve closed
10/22/2011	9:53:47 PM	PH3 valve closed
10/22/2011	9:53:47 PM	SiCl4 pre valve closed
10/22/2011	9:53:47 PM	SiCl4 post valve closed
10/22/2011	9:53:47 PM	Main Vac valve closed
10/22/2011	9:53:47 PM	Bubbler valve closed
10/22/2011	9:53:47 PM	Bypass valve opened
10/22/2011	9:53:47 PM	Helium MFC set to  0.000000
10/22/2011	9:53:47 PM	H2 MFC set to  0.000000
10/22/2011	9:53:47 PM	BCl3 MFC set to  0.000000
10/22/2011	9:53:47 PM	PHl3 MFC set to  0.000000
10/22/2011	9:53:47 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:53:47 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:53:47 PM	Tube furnace set to 0
10/22/2011	9:53:52 PM	Helium valve closed
10/22/2011	9:53:52 PM	H2 valve closed
10/22/2011	9:53:52 PM	BCl3 valve closed
10/22/2011	9:53:52 PM	PH3 valve closed
10/22/2011	9:53:52 PM	SiCl4 pre valve closed
10/22/2011	9:53:52 PM	SiCl4 post valve closed
10/22/2011	9:53:52 PM	Bypass valve closed
10/22/2011	9:53:52 PM	Bubbler valve closed
10/22/2011	9:53:52 PM	Main Vac valve opened
10/22/2011	9:53:52 PM	Helium MFC set to  0.000000
10/22/2011	9:53:52 PM	H2 MFC set to  0.000000
10/22/2011	9:53:52 PM	BCl3 MFC set to  0.000000
10/22/2011	9:53:52 PM	PHl3 MFC set to  0.000000
10/22/2011	9:53:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:53:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:53:52 PM	Tube furnace set to 0
10/22/2011	9:54:22 PM	H2 valve closed
10/22/2011	9:54:22 PM	BCl3 valve closed
10/22/2011	9:54:22 PM	PH3 valve closed
10/22/2011	9:54:22 PM	SiCl4 pre valve closed
10/22/2011	9:54:22 PM	SiCl4 post valve closed
10/22/2011	9:54:22 PM	Bypass valve closed
10/22/2011	9:54:22 PM	Bubbler valve closed
10/22/2011	9:54:22 PM	Helium valve opened
10/22/2011	9:54:22 PM	Main Vac valve opened
10/22/2011	9:54:22 PM	Helium MFC set to  20.000000
10/22/2011	9:54:22 PM	H2 MFC set to  0.000000
10/22/2011	9:54:22 PM	BCl3 MFC set to  0.000000
10/22/2011	9:54:22 PM	PHl3 MFC set to  0.000000
10/22/2011	9:54:22 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:54:22 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:54:22 PM	Tube furnace set to 0
10/22/2011	9:54:52 PM	Helium valve closed
10/22/2011	9:54:52 PM	H2 valve closed
10/22/2011	9:54:52 PM	BCl3 valve closed
10/22/2011	9:54:52 PM	PH3 valve closed
10/22/2011	9:54:52 PM	SiCl4 pre valve closed
10/22/2011	9:54:52 PM	SiCl4 post valve closed
10/22/2011	9:54:52 PM	Bypass valve closed
10/22/2011	9:54:52 PM	Bubbler valve closed
10/22/2011	9:54:52 PM	Main Vac valve opened
10/22/2011	9:54:52 PM	Helium MFC set to  0.000000
10/22/2011	9:54:52 PM	H2 MFC set to  0.000000
10/22/2011	9:54:52 PM	BCl3 MFC set to  0.000000
10/22/2011	9:54:52 PM	PHl3 MFC set to  0.000000
10/22/2011	9:54:52 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:54:52 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:54:52 PM	Tube furnace set to 0
10/22/2011	9:55:22 PM	H2 valve closed
10/22/2011	9:55:22 PM	BCl3 valve closed
10/22/2011	9:55:22 PM	PH3 valve closed
10/22/2011	9:55:22 PM	SiCl4 pre valve closed
10/22/2011	9:55:22 PM	SiCl4 post valve closed
10/22/2011	9:55:22 PM	Bypass valve closed
10/22/2011	9:55:22 PM	Bubbler valve closed
10/22/2011	9:55:22 PM	Helium valve opened
10/22/2011	9:55:22 PM	Main Vac valve opened
10/22/2011	9:55:22 PM	Helium MFC set to  20.000000
10/22/2011	9:55:22 PM	H2 MFC set to  0.000000
10/22/2011	9:55:22 PM	BCl3 MFC set to  0.000000
10/22/2011	9:55:22 PM	PHl3 MFC set to  0.000000
10/22/2011	9:55:22 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:55:22 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:55:23 PM	Tube furnace set to 0
10/22/2011	9:55:53 PM	Helium valve closed
10/22/2011	9:55:53 PM	H2 valve closed
10/22/2011	9:55:53 PM	BCl3 valve closed
10/22/2011	9:55:53 PM	PH3 valve closed
10/22/2011	9:55:53 PM	SiCl4 pre valve closed
10/22/2011	9:55:53 PM	SiCl4 post valve closed
10/22/2011	9:55:53 PM	Bypass valve closed
10/22/2011	9:55:53 PM	Bubbler valve closed
10/22/2011	9:55:53 PM	Main Vac valve opened
10/22/2011	9:55:53 PM	Helium MFC set to  0.000000
10/22/2011	9:55:53 PM	H2 MFC set to  0.000000
10/22/2011	9:55:53 PM	BCl3 MFC set to  0.000000
10/22/2011	9:55:53 PM	PHl3 MFC set to  0.000000
10/22/2011	9:55:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:55:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:55:53 PM	Tube furnace set to 0
10/22/2011	9:56:23 PM	H2 valve closed
10/22/2011	9:56:23 PM	BCl3 valve closed
10/22/2011	9:56:23 PM	PH3 valve closed
10/22/2011	9:56:23 PM	SiCl4 pre valve closed
10/22/2011	9:56:23 PM	SiCl4 post valve closed
10/22/2011	9:56:23 PM	Bypass valve closed
10/22/2011	9:56:23 PM	Bubbler valve closed
10/22/2011	9:56:23 PM	Helium valve opened
10/22/2011	9:56:23 PM	Main Vac valve opened
10/22/2011	9:56:23 PM	Helium MFC set to  20.000000
10/22/2011	9:56:23 PM	H2 MFC set to  0.000000
10/22/2011	9:56:23 PM	BCl3 MFC set to  0.000000
10/22/2011	9:56:23 PM	PHl3 MFC set to  0.000000
10/22/2011	9:56:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:56:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:56:23 PM	Tube furnace set to 0
10/22/2011	9:56:53 PM	Helium valve closed
10/22/2011	9:56:53 PM	H2 valve closed
10/22/2011	9:56:53 PM	BCl3 valve closed
10/22/2011	9:56:53 PM	PH3 valve closed
10/22/2011	9:56:53 PM	SiCl4 pre valve closed
10/22/2011	9:56:53 PM	SiCl4 post valve closed
10/22/2011	9:56:53 PM	Bypass valve closed
10/22/2011	9:56:53 PM	Bubbler valve closed
10/22/2011	9:56:53 PM	Main Vac valve opened
10/22/2011	9:56:53 PM	Helium MFC set to  0.000000
10/22/2011	9:56:53 PM	H2 MFC set to  0.000000
10/22/2011	9:56:53 PM	BCl3 MFC set to  0.000000
10/22/2011	9:56:53 PM	PHl3 MFC set to  0.000000
10/22/2011	9:56:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:56:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:56:53 PM	Tube furnace set to 0
10/22/2011	9:57:23 PM	H2 valve closed
10/22/2011	9:57:23 PM	BCl3 valve closed
10/22/2011	9:57:23 PM	PH3 valve closed
10/22/2011	9:57:23 PM	SiCl4 pre valve closed
10/22/2011	9:57:23 PM	SiCl4 post valve closed
10/22/2011	9:57:23 PM	Bypass valve closed
10/22/2011	9:57:23 PM	Bubbler valve closed
10/22/2011	9:57:23 PM	Helium valve opened
10/22/2011	9:57:23 PM	Main Vac valve opened
10/22/2011	9:57:23 PM	Helium MFC set to  20.000000
10/22/2011	9:57:23 PM	H2 MFC set to  0.000000
10/22/2011	9:57:23 PM	BCl3 MFC set to  0.000000
10/22/2011	9:57:23 PM	PHl3 MFC set to  0.000000
10/22/2011	9:57:23 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:57:23 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:57:23 PM	Tube furnace set to 0
10/22/2011	9:57:53 PM	Helium valve closed
10/22/2011	9:57:53 PM	H2 valve closed
10/22/2011	9:57:53 PM	BCl3 valve closed
10/22/2011	9:57:53 PM	PH3 valve closed
10/22/2011	9:57:53 PM	SiCl4 pre valve closed
10/22/2011	9:57:53 PM	SiCl4 post valve closed
10/22/2011	9:57:53 PM	Bypass valve closed
10/22/2011	9:57:53 PM	Bubbler valve closed
10/22/2011	9:57:53 PM	Main Vac valve opened
10/22/2011	9:57:53 PM	Helium MFC set to  0.000000
10/22/2011	9:57:53 PM	H2 MFC set to  0.000000
10/22/2011	9:57:53 PM	BCl3 MFC set to  0.000000
10/22/2011	9:57:53 PM	PHl3 MFC set to  0.000000
10/22/2011	9:57:53 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:57:53 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:57:54 PM	Tube furnace set to 0
10/22/2011	9:58:24 PM	H2 valve closed
10/22/2011	9:58:24 PM	BCl3 valve closed
10/22/2011	9:58:24 PM	PH3 valve closed
10/22/2011	9:58:24 PM	SiCl4 pre valve closed
10/22/2011	9:58:24 PM	SiCl4 post valve closed
10/22/2011	9:58:24 PM	Bypass valve closed
10/22/2011	9:58:24 PM	Bubbler valve closed
10/22/2011	9:58:24 PM	Helium valve opened
10/22/2011	9:58:24 PM	Main Vac valve opened
10/22/2011	9:58:24 PM	Helium MFC set to  20.000000
10/22/2011	9:58:24 PM	H2 MFC set to  0.000000
10/22/2011	9:58:24 PM	BCl3 MFC set to  0.000000
10/22/2011	9:58:24 PM	PHl3 MFC set to  0.000000
10/22/2011	9:58:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:58:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:58:24 PM	Tube furnace set to 0
10/22/2011	9:58:54 PM	Helium valve closed
10/22/2011	9:58:54 PM	H2 valve closed
10/22/2011	9:58:54 PM	BCl3 valve closed
10/22/2011	9:58:54 PM	PH3 valve closed
10/22/2011	9:58:54 PM	SiCl4 pre valve closed
10/22/2011	9:58:54 PM	SiCl4 post valve closed
10/22/2011	9:58:54 PM	Bypass valve closed
10/22/2011	9:58:54 PM	Bubbler valve closed
10/22/2011	9:58:54 PM	Main Vac valve opened
10/22/2011	9:58:54 PM	Helium MFC set to  0.000000
10/22/2011	9:58:54 PM	H2 MFC set to  0.000000
10/22/2011	9:58:54 PM	BCl3 MFC set to  0.000000
10/22/2011	9:58:54 PM	PHl3 MFC set to  0.000000
10/22/2011	9:58:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:58:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:58:54 PM	Tube furnace set to 0
10/22/2011	9:59:24 PM	H2 valve closed
10/22/2011	9:59:24 PM	BCl3 valve closed
10/22/2011	9:59:24 PM	PH3 valve closed
10/22/2011	9:59:24 PM	SiCl4 pre valve closed
10/22/2011	9:59:24 PM	SiCl4 post valve closed
10/22/2011	9:59:24 PM	Bypass valve closed
10/22/2011	9:59:24 PM	Bubbler valve closed
10/22/2011	9:59:24 PM	Helium valve opened
10/22/2011	9:59:24 PM	Main Vac valve opened
10/22/2011	9:59:24 PM	Helium MFC set to  20.000000
10/22/2011	9:59:24 PM	H2 MFC set to  0.000000
10/22/2011	9:59:24 PM	BCl3 MFC set to  0.000000
10/22/2011	9:59:24 PM	PHl3 MFC set to  0.000000
10/22/2011	9:59:24 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:59:24 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:59:24 PM	Tube furnace set to 0
10/22/2011	9:59:54 PM	Helium valve closed
10/22/2011	9:59:54 PM	H2 valve closed
10/22/2011	9:59:54 PM	BCl3 valve closed
10/22/2011	9:59:54 PM	PH3 valve closed
10/22/2011	9:59:54 PM	SiCl4 pre valve closed
10/22/2011	9:59:54 PM	SiCl4 post valve closed
10/22/2011	9:59:54 PM	Bypass valve closed
10/22/2011	9:59:54 PM	Bubbler valve closed
10/22/2011	9:59:54 PM	Main Vac valve opened
10/22/2011	9:59:54 PM	Helium MFC set to  0.000000
10/22/2011	9:59:54 PM	H2 MFC set to  0.000000
10/22/2011	9:59:54 PM	BCl3 MFC set to  0.000000
10/22/2011	9:59:54 PM	PHl3 MFC set to  0.000000
10/22/2011	9:59:54 PM	SiCl4 MFC set to  0.000000
10/22/2011	9:59:54 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	9:59:54 PM	Tube furnace set to 0
10/22/2011	10:00:25 PM	H2 valve closed
10/22/2011	10:00:25 PM	BCl3 valve closed
10/22/2011	10:00:25 PM	PH3 valve closed
10/22/2011	10:00:25 PM	SiCl4 pre valve closed
10/22/2011	10:00:25 PM	SiCl4 post valve closed
10/22/2011	10:00:25 PM	Bypass valve closed
10/22/2011	10:00:25 PM	Bubbler valve closed
10/22/2011	10:00:25 PM	Helium valve opened
10/22/2011	10:00:25 PM	Main Vac valve opened
10/22/2011	10:00:25 PM	Helium MFC set to  20.000000
10/22/2011	10:00:25 PM	H2 MFC set to  0.000000
10/22/2011	10:00:25 PM	BCl3 MFC set to  0.000000
10/22/2011	10:00:25 PM	PHl3 MFC set to  0.000000
10/22/2011	10:00:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:00:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:00:25 PM	Tube furnace set to 0
10/22/2011	10:00:55 PM	Helium valve closed
10/22/2011	10:00:55 PM	H2 valve closed
10/22/2011	10:00:55 PM	BCl3 valve closed
10/22/2011	10:00:55 PM	PH3 valve closed
10/22/2011	10:00:55 PM	SiCl4 pre valve closed
10/22/2011	10:00:55 PM	SiCl4 post valve closed
10/22/2011	10:00:55 PM	Bypass valve closed
10/22/2011	10:00:55 PM	Bubbler valve closed
10/22/2011	10:00:55 PM	Main Vac valve opened
10/22/2011	10:00:55 PM	Helium MFC set to  0.000000
10/22/2011	10:00:55 PM	H2 MFC set to  0.000000
10/22/2011	10:00:55 PM	BCl3 MFC set to  0.000000
10/22/2011	10:00:55 PM	PHl3 MFC set to  0.000000
10/22/2011	10:00:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:00:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:00:55 PM	Tube furnace set to 0
10/22/2011	10:01:25 PM	H2 valve closed
10/22/2011	10:01:25 PM	BCl3 valve closed
10/22/2011	10:01:25 PM	PH3 valve closed
10/22/2011	10:01:25 PM	SiCl4 pre valve closed
10/22/2011	10:01:25 PM	SiCl4 post valve closed
10/22/2011	10:01:25 PM	Bypass valve closed
10/22/2011	10:01:25 PM	Bubbler valve closed
10/22/2011	10:01:25 PM	Helium valve opened
10/22/2011	10:01:25 PM	Main Vac valve opened
10/22/2011	10:01:25 PM	Helium MFC set to  20.000000
10/22/2011	10:01:25 PM	H2 MFC set to  0.000000
10/22/2011	10:01:25 PM	BCl3 MFC set to  0.000000
10/22/2011	10:01:25 PM	PHl3 MFC set to  0.000000
10/22/2011	10:01:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:01:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:01:25 PM	Tube furnace set to 0
10/22/2011	10:01:55 PM	Helium valve closed
10/22/2011	10:01:55 PM	H2 valve closed
10/22/2011	10:01:55 PM	BCl3 valve closed
10/22/2011	10:01:55 PM	PH3 valve closed
10/22/2011	10:01:55 PM	SiCl4 pre valve closed
10/22/2011	10:01:55 PM	SiCl4 post valve closed
10/22/2011	10:01:55 PM	Bypass valve closed
10/22/2011	10:01:55 PM	Bubbler valve closed
10/22/2011	10:01:55 PM	Main Vac valve opened
10/22/2011	10:01:55 PM	Helium MFC set to  0.000000
10/22/2011	10:01:55 PM	H2 MFC set to  0.000000
10/22/2011	10:01:55 PM	BCl3 MFC set to  0.000000
10/22/2011	10:01:55 PM	PHl3 MFC set to  0.000000
10/22/2011	10:01:55 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:01:55 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:01:55 PM	Tube furnace set to 0
10/22/2011	10:02:25 PM	H2 valve closed
10/22/2011	10:02:25 PM	BCl3 valve closed
10/22/2011	10:02:25 PM	PH3 valve closed
10/22/2011	10:02:25 PM	SiCl4 pre valve closed
10/22/2011	10:02:25 PM	SiCl4 post valve closed
10/22/2011	10:02:25 PM	Bypass valve closed
10/22/2011	10:02:25 PM	Bubbler valve closed
10/22/2011	10:02:25 PM	Helium valve opened
10/22/2011	10:02:25 PM	Main Vac valve opened
10/22/2011	10:02:25 PM	Helium MFC set to  20.000000
10/22/2011	10:02:25 PM	H2 MFC set to  0.000000
10/22/2011	10:02:25 PM	BCl3 MFC set to  0.000000
10/22/2011	10:02:25 PM	PHl3 MFC set to  0.000000
10/22/2011	10:02:25 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:02:25 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:02:26 PM	Tube furnace set to 0
10/22/2011	10:02:56 PM	Helium valve closed
10/22/2011	10:02:56 PM	H2 valve closed
10/22/2011	10:02:56 PM	BCl3 valve closed
10/22/2011	10:02:56 PM	PH3 valve closed
10/22/2011	10:02:56 PM	SiCl4 pre valve closed
10/22/2011	10:02:56 PM	SiCl4 post valve closed
10/22/2011	10:02:56 PM	Bypass valve closed
10/22/2011	10:02:56 PM	Bubbler valve closed
10/22/2011	10:02:56 PM	Main Vac valve opened
10/22/2011	10:02:56 PM	Helium MFC set to  0.000000
10/22/2011	10:02:56 PM	H2 MFC set to  0.000000
10/22/2011	10:02:56 PM	BCl3 MFC set to  0.000000
10/22/2011	10:02:56 PM	PHl3 MFC set to  0.000000
10/22/2011	10:02:56 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:02:56 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:02:56 PM	Tube furnace set to 0
10/22/2011	10:03:13 PM	Run aborted at 10:03 PM
10/22/2011	10:03:13 PM	Helium valve closed
10/22/2011	10:03:13 PM	H2 valve closed
10/22/2011	10:03:13 PM	BCl3 valve closed
10/22/2011	10:03:13 PM	PH3 valve closed
10/22/2011	10:03:13 PM	SiCl4 pre valve closed
10/22/2011	10:03:13 PM	SiCl4 post valve closed
10/22/2011	10:03:13 PM	Bypass valve closed
10/22/2011	10:03:13 PM	Main Vac valve closed
10/22/2011	10:03:13 PM	Bubbler valve closed
10/22/2011	10:03:13 PM	Helium MFC set to  0.000000
10/22/2011	10:03:13 PM	H2 MFC set to  0.000000
10/22/2011	10:03:13 PM	BCl3 MFC set to  0.000000
10/22/2011	10:03:13 PM	PHl3 MFC set to  0.000000
10/22/2011	10:03:13 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:03:13 PM	Tube furnace set to 0
10/22/2011	10:03:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/22/2011	10:03:19 PM	Main Vac valve opened
10/22/2011	10:03:32 PM	Main Vac valve closed
10/22/2011	10:03:36 PM	Main Vac valve opened
10/22/2011	10:03:59 PM	Recipe started at 10:03 PM
10/22/2011	10:03:59 PM	Helium valve closed
10/22/2011	10:03:59 PM	H2 valve closed
10/22/2011	10:03:59 PM	BCl3 valve closed
10/22/2011	10:03:59 PM	PH3 valve closed
10/22/2011	10:03:59 PM	SiCl4 pre valve closed
10/22/2011	10:03:59 PM	SiCl4 post valve closed
10/22/2011	10:03:59 PM	Main Vac valve closed
10/22/2011	10:03:59 PM	Bypass valve closed
10/22/2011	10:03:59 PM	Bubbler valve closed
10/22/2011	10:03:59 PM	Helium MFC set to  0.000000
10/22/2011	10:03:59 PM	H2 MFC set to  0.000000
10/22/2011	10:03:59 PM	BCl3 MFC set to  0.000000
10/22/2011	10:03:59 PM	PHl3 MFC set to  0.000000
10/22/2011	10:03:59 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:03:59 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:03:59 PM	Tube furnace set to 0
10/22/2011	10:04:02 PM	Helium valve closed
10/22/2011	10:04:02 PM	BCl3 valve closed
10/22/2011	10:04:02 PM	PH3 valve closed
10/22/2011	10:04:02 PM	SiCl4 pre valve closed
10/22/2011	10:04:02 PM	SiCl4 post valve closed
10/22/2011	10:04:02 PM	Main Vac valve closed
10/22/2011	10:04:02 PM	Bypass valve closed
10/22/2011	10:04:02 PM	Bubbler valve closed
10/22/2011	10:04:02 PM	H2 valve opened
10/22/2011	10:04:02 PM	Helium MFC set to  0.000000
10/22/2011	10:04:02 PM	H2 MFC set to  500.000000
10/22/2011	10:04:02 PM	BCl3 MFC set to  0.000000
10/22/2011	10:04:02 PM	PHl3 MFC set to  0.000000
10/22/2011	10:04:02 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:04:02 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:04:02 PM	Tube furnace set to 0
10/22/2011	10:05:05 PM	Helium valve closed
10/22/2011	10:05:05 PM	BCl3 valve closed
10/22/2011	10:05:05 PM	PH3 valve closed
10/22/2011	10:05:05 PM	SiCl4 pre valve closed
10/22/2011	10:05:05 PM	SiCl4 post valve closed
10/22/2011	10:05:05 PM	Main Vac valve closed
10/22/2011	10:05:05 PM	Bypass valve closed
10/22/2011	10:05:05 PM	H2 valve opened
10/22/2011	10:05:05 PM	Bubbler valve opened
10/22/2011	10:05:05 PM	Helium MFC set to  0.000000
10/22/2011	10:05:05 PM	H2 MFC set to  500.000000
10/22/2011	10:05:05 PM	BCl3 MFC set to  0.000000
10/22/2011	10:05:05 PM	PHl3 MFC set to  0.000000
10/22/2011	10:05:05 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:05:05 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:05:05 PM	Tube furnace set to 0
10/22/2011	10:05:06 PM	Helium valve closed
10/22/2011	10:05:06 PM	BCl3 valve closed
10/22/2011	10:05:06 PM	PH3 valve closed
10/22/2011	10:05:06 PM	SiCl4 pre valve closed
10/22/2011	10:05:06 PM	SiCl4 post valve closed
10/22/2011	10:05:06 PM	Main Vac valve closed
10/22/2011	10:05:06 PM	Bypass valve closed
10/22/2011	10:05:06 PM	H2 valve opened
10/22/2011	10:05:06 PM	Bubbler valve opened
10/22/2011	10:05:06 PM	Helium MFC set to  0.000000
10/22/2011	10:05:06 PM	H2 MFC set to  500.000000
10/22/2011	10:05:06 PM	BCl3 MFC set to  0.000000
10/22/2011	10:05:06 PM	PHl3 MFC set to  0.000000
10/22/2011	10:05:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:05:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:05:06 PM	Tube furnace set to 1048
10/22/2011	10:25:06 PM	Helium valve closed
10/22/2011	10:25:06 PM	PH3 valve closed
10/22/2011	10:25:06 PM	Main Vac valve closed
10/22/2011	10:25:06 PM	Bypass valve closed
10/22/2011	10:25:06 PM	H2 valve opened
10/22/2011	10:25:06 PM	BCl3 valve opened
10/22/2011	10:25:06 PM	SiCl4 pre valve opened
10/22/2011	10:25:06 PM	SiCl4 post valve opened
10/22/2011	10:25:06 PM	Bubbler valve opened
10/22/2011	10:25:06 PM	Helium MFC set to  0.000000
10/22/2011	10:25:06 PM	H2 MFC set to  500.000000
10/22/2011	10:25:06 PM	BCl3 MFC set to  2.000000
10/22/2011	10:25:06 PM	PHl3 MFC set to  0.000000
10/22/2011	10:25:06 PM	SiCl4 MFC set to  50.000000
10/22/2011	10:25:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:25:07 PM	Tube furnace set to 1048
10/22/2011	10:41:06 PM	Helium valve closed
10/22/2011	10:41:07 PM	BCl3 valve closed
10/22/2011	10:41:07 PM	PH3 valve closed
10/22/2011	10:41:07 PM	SiCl4 pre valve closed
10/22/2011	10:41:07 PM	SiCl4 post valve closed
10/22/2011	10:41:07 PM	Main Vac valve closed
10/22/2011	10:41:07 PM	Bypass valve closed
10/22/2011	10:41:07 PM	H2 valve opened
10/22/2011	10:41:07 PM	Bubbler valve opened
10/22/2011	10:41:07 PM	Helium MFC set to  0.000000
10/22/2011	10:41:07 PM	H2 MFC set to  500.000000
10/22/2011	10:41:07 PM	BCl3 MFC set to  0.000000
10/22/2011	10:41:07 PM	PHl3 MFC set to  0.000000
10/22/2011	10:41:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:41:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:41:07 PM	Tube furnace set to 750
10/22/2011	10:46:07 PM	H2 valve closed
10/22/2011	10:46:07 PM	BCl3 valve closed
10/22/2011	10:46:07 PM	PH3 valve closed
10/22/2011	10:46:07 PM	SiCl4 pre valve closed
10/22/2011	10:46:07 PM	SiCl4 post valve closed
10/22/2011	10:46:07 PM	Main Vac valve closed
10/22/2011	10:46:07 PM	Bypass valve closed
10/22/2011	10:46:07 PM	Helium valve opened
10/22/2011	10:46:07 PM	Bubbler valve opened
10/22/2011	10:46:07 PM	Helium MFC set to  500.000000
10/22/2011	10:46:07 PM	H2 MFC set to  0.000000
10/22/2011	10:46:07 PM	BCl3 MFC set to  0.000000
10/22/2011	10:46:07 PM	PHl3 MFC set to  0.000000
10/22/2011	10:46:07 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:46:07 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:46:07 PM	Tube furnace set to 0
10/22/2011	10:51:15 PM	Helium valve closed
10/22/2011	10:51:15 PM	H2 valve closed
10/22/2011	10:51:15 PM	BCl3 valve closed
10/22/2011	10:51:15 PM	PH3 valve closed
10/22/2011	10:51:15 PM	SiCl4 pre valve closed
10/22/2011	10:51:15 PM	SiCl4 post valve closed
10/22/2011	10:51:15 PM	Main Vac valve closed
10/22/2011	10:51:15 PM	Bypass valve closed
10/22/2011	10:51:15 PM	Bubbler valve closed
10/22/2011	10:51:15 PM	Helium MFC set to  0.000000
10/22/2011	10:51:15 PM	H2 MFC set to  0.000000
10/22/2011	10:51:15 PM	BCl3 MFC set to  0.000000
10/22/2011	10:51:15 PM	PHl3 MFC set to  0.000000
10/22/2011	10:51:15 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:51:15 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:51:15 PM	Tube furnace set to 0
10/22/2011	10:51:16 PM	Run finished at 10:51 PM
10/22/2011	10:57:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	10:57:31 PM	Recipe started at 10:57 PM
10/22/2011	10:57:31 PM	Helium valve closed
10/22/2011	10:57:31 PM	H2 valve closed
10/22/2011	10:57:31 PM	BCl3 valve closed
10/22/2011	10:57:31 PM	PH3 valve closed
10/22/2011	10:57:31 PM	SiCl4 pre valve closed
10/22/2011	10:57:31 PM	SiCl4 post valve closed
10/22/2011	10:57:31 PM	Main Vac valve closed
10/22/2011	10:57:31 PM	Bypass valve closed
10/22/2011	10:57:31 PM	Bubbler valve closed
10/22/2011	10:57:31 PM	Helium MFC set to  0.000000
10/22/2011	10:57:31 PM	H2 MFC set to  0.000000
10/22/2011	10:57:31 PM	BCl3 MFC set to  0.000000
10/22/2011	10:57:31 PM	PHl3 MFC set to  0.000000
10/22/2011	10:57:31 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:57:31 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:57:31 PM	Tube furnace set to 0
10/22/2011	10:57:34 PM	H2 valve closed
10/22/2011	10:57:34 PM	BCl3 valve closed
10/22/2011	10:57:34 PM	PH3 valve closed
10/22/2011	10:57:34 PM	SiCl4 pre valve closed
10/22/2011	10:57:34 PM	SiCl4 post valve closed
10/22/2011	10:57:34 PM	Main Vac valve closed
10/22/2011	10:57:34 PM	Bypass valve closed
10/22/2011	10:57:34 PM	Bubbler valve closed
10/22/2011	10:57:34 PM	Helium valve opened
10/22/2011	10:57:34 PM	Helium MFC set to  500.000000
10/22/2011	10:57:34 PM	H2 MFC set to  0.000000
10/22/2011	10:57:34 PM	BCl3 MFC set to  0.000000
10/22/2011	10:57:34 PM	PHl3 MFC set to  0.000000
10/22/2011	10:57:34 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:57:34 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:57:34 PM	Tube furnace set to 0
10/22/2011	10:57:38 PM	Helium valve closed
10/22/2011	10:57:38 PM	H2 valve closed
10/22/2011	10:57:38 PM	BCl3 valve closed
10/22/2011	10:57:38 PM	PH3 valve closed
10/22/2011	10:57:38 PM	SiCl4 pre valve closed
10/22/2011	10:57:38 PM	SiCl4 post valve closed
10/22/2011	10:57:38 PM	Main Vac valve closed
10/22/2011	10:57:38 PM	Bypass valve closed
10/22/2011	10:57:38 PM	Bubbler valve closed
10/22/2011	10:57:38 PM	Helium MFC set to  0.000000
10/22/2011	10:57:38 PM	H2 MFC set to  0.000000
10/22/2011	10:57:38 PM	BCl3 MFC set to  0.000000
10/22/2011	10:57:38 PM	PHl3 MFC set to  0.000000
10/22/2011	10:57:38 PM	SiCl4 MFC set to  0.000000
10/22/2011	10:57:38 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	10:57:39 PM	Tube furnace set to 0
10/22/2011	10:57:40 PM	Run finished at 10:57 PM
10/22/2011	10:57:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/22/2011	11:01:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/22/2011	11:01:06 PM	Recipe started at 11:01 PM
10/22/2011	11:01:06 PM	Helium valve closed
10/22/2011	11:01:06 PM	H2 valve closed
10/22/2011	11:01:06 PM	BCl3 valve closed
10/22/2011	11:01:06 PM	PH3 valve closed
10/22/2011	11:01:06 PM	SiCl4 pre valve closed
10/22/2011	11:01:06 PM	SiCl4 post valve closed
10/22/2011	11:01:06 PM	Main Vac valve closed
10/22/2011	11:01:06 PM	Bubbler valve closed
10/22/2011	11:01:06 PM	Bypass valve opened
10/22/2011	11:01:06 PM	Helium MFC set to  0.000000
10/22/2011	11:01:06 PM	H2 MFC set to  0.000000
10/22/2011	11:01:06 PM	BCl3 MFC set to  0.000000
10/22/2011	11:01:06 PM	PHl3 MFC set to  0.000000
10/22/2011	11:01:06 PM	SiCl4 MFC set to  0.000000
10/22/2011	11:01:06 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:01:07 PM	Tube furnace set to 0
10/22/2011	11:02:08 PM	Helium valve closed
10/22/2011	11:02:08 PM	H2 valve closed
10/22/2011	11:02:08 PM	BCl3 valve closed
10/22/2011	11:02:08 PM	PH3 valve closed
10/22/2011	11:02:08 PM	SiCl4 pre valve closed
10/22/2011	11:02:08 PM	SiCl4 post valve closed
10/22/2011	11:02:08 PM	Main Vac valve closed
10/22/2011	11:02:08 PM	Bubbler valve closed
10/22/2011	11:02:08 PM	Bypass valve opened
10/22/2011	11:02:08 PM	Helium MFC set to  0.000000
10/22/2011	11:02:08 PM	H2 MFC set to  0.000000
10/22/2011	11:02:08 PM	BCl3 MFC set to  0.000000
10/22/2011	11:02:08 PM	PHl3 MFC set to  0.000000
10/22/2011	11:02:08 PM	SiCl4 MFC set to  0.000000
10/22/2011	11:02:08 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:02:08 PM	Tube furnace set to 0
10/22/2011	11:03:08 PM	Helium valve closed
10/22/2011	11:03:08 PM	H2 valve closed
10/22/2011	11:03:08 PM	BCl3 valve closed
10/22/2011	11:03:08 PM	PH3 valve closed
10/22/2011	11:03:08 PM	SiCl4 pre valve closed
10/22/2011	11:03:08 PM	SiCl4 post valve closed
10/22/2011	11:03:08 PM	Bypass valve closed
10/22/2011	11:03:08 PM	Bubbler valve closed
10/22/2011	11:03:08 PM	Main Vac valve opened
10/22/2011	11:03:08 PM	Helium MFC set to  0.000000
10/22/2011	11:03:08 PM	H2 MFC set to  0.000000
10/22/2011	11:03:08 PM	BCl3 MFC set to  0.000000
10/22/2011	11:03:08 PM	PHl3 MFC set to  0.000000
10/22/2011	11:03:08 PM	SiCl4 MFC set to  0.000000
10/22/2011	11:03:08 PM	Bypass solenoid MFC set to  0.000000
10/22/2011	11:03:08 PM	Tube furnace set to 0
10/22/2011	11:03:09 PM	Run finished at 11:03 PM
10/22/2011	11:03:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
